Probe card locking device and test system

Abstract

The utility model provides a probe card locking device and a test system, and the device comprises a supporting ring which comprises an outer limiting ring and an inner supporting ring, the outer limiting ring and the inner supporting ring form a stepped structure, and a probe card is disposed on the inner supporting ring; a plurality of groups of limiting blocks for limiting the probe card are arranged on the inner supporting ring, deflection grooves are formed in the limiting blocks, deflection blocks are arranged in the deflection grooves, driving mechanisms are arranged in the limiting blocks, and the driving mechanisms drive the deflection blocks to deflect and abut against the probe card after the probe card is placed on the inner supporting ring. According to the utility model, in the limiting process, the deflection block acts to apply pressure on the probe card in a rotating mode, extra jacking force does not need to be applied to the probe card, and damage to the probe card caused by improper application of the jacking force is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of probe card locking equipment, and in particular relates to a probe card locking device and testing system. Background Technology

[0002] Probe cards primarily utilize probes on the card to directly contact the solder pads or bumps on the chip, extracting chip signals. This, combined with peripheral testing instruments and software control, achieves automated measurement. Probe cards are used before IC packaging to perform functional testing on bare dies, screening out defective products before proceeding with the subsequent packaging process.

[0003] In practical applications, the probe card is placed on a ring-shaped fixed support mechanism. The chip moves and continuously contacts the probe card. The fixed support mechanism for fixing the probe card is equipped with a device to lock the probe card, so as to prevent the chip from generating impact force that would cause the probe card to shift during each contact. In the prior art, the probe card fixing mechanism uses a limiting device that requires the probe card to be pushed to a designated area before it is limited and locked. During the locking process, the probe card needs to be pushed. Improper use of pushing force during the pushing operation can easily damage the probe card. Utility Model Content

[0004] This utility model provides a probe card locking device, which aims to solve the problem that the current probe card fixing mechanism uses a limiting device that requires the probe card to be pushed to a designated area before it is locked. During the locking process, the probe card needs to be pushed, and improper use of the pushing force during the pushing operation can easily damage the probe card.

[0005] This utility model is implemented as follows: a probe card locking device, comprising:

[0006] A support ring, comprising an outer limiting ring and an inner support ring, wherein the outer limiting ring and the inner support ring form a stepped structure, and a probe card is placed on the inner support ring;

[0007] The inner support ring is provided with several sets of limiting blocks that restrict the probe card. Each limiting block is provided with a deflection groove, and each deflection groove is provided with a deflection block. The limiting block is provided with a driving mechanism. After the probe card is placed on the inner support ring, the driving mechanism drives the deflection block to deflect and abut against the probe card.

[0008] Preferably, the limiting block has a transmission chamber and an adjustment chamber inside, the transmission chamber and the adjustment chamber are connected, one side of the transmission chamber is connected to the deflection groove, the transmission chamber has a transmission rod inside, and the adjustment chamber has an adjustment rod inside; the transmission rod extends from the transmission chamber to the deflection groove, the deflection block is assembled on the part of the transmission rod located in the deflection groove, and the adjustment rod is engaged with the transmission rod.

[0009] The transmission rod includes a shaft and a worm gear. The shaft extends from the transmission chamber to the deflection groove. The worm gear is mounted on the portion of the shaft located in the transmission chamber. The deflection block is mounted on the portion of the shaft located in the deflection groove.

[0010] The adjusting rod includes a worm and an adjusting hole at the end of the worm, the worm being meshed with a worm wheel. The surface of the limiting block has an adjusting port, one end of the adjusting chamber is connected to the outside through the adjusting port, and the end of the worm with the adjusting hole extends through the adjusting port to the surface of the limiting block; the adjusting hole is an internal hexagonal socket.

[0011] Preferably, the number of limiting blocks is the same as the number of notches on the probe ring side. The probe ring notches are placed on the inner support ring corresponding to the positions of the limiting blocks, and then the limiting blocks complete the limiting engagement.

[0012] Preferably, the deflection block includes a contact pad and a rotating plate. The contact pad is disposed in a groove on the rotating plate. The contact pad is made of soft rubber material and is in direct contact with the probe card during the limiting and locking process. A thin film pressure sensor is provided on the contact end face of the contact pad and the probe card.

[0013] A testing system for wafer performance testing, wherein the testing system employs the probe card locking device described above.

[0014] Compared with the prior art, the embodiments of this application have the following main advantages:

[0015] The deflection block in the probe card locking device provided by this utility model serves as the main limiting component. During the limiting process, the deflection block applies pressure to the probe card by rotating. Unlike the horizontal locking mechanism, which requires the probe card to descend to a certain area to complete the limiting and locking, the deflection block synchronously completes the pushing and limiting operations after the probe card is placed. There is no need to apply additional pushing force to the probe card, thus avoiding damage to the probe card caused by improper application of pushing force and improving the safety of the assembly process. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a probe card locking device provided by this utility model.

[0017] Figure 2 This is a schematic diagram of the limiting block distribution structure of a probe card locking device provided by this utility model.

[0018] Figure 3 This is a schematic diagram of the deflection groove, transmission chamber, and adjustment chamber in a probe card locking device provided by this utility model.

[0019] Figure 4This is a schematic diagram of the transmission rod and adjusting rod structure of a probe card locking device provided by this utility model.

[0020] Figure 5 This is a schematic diagram of the limiting block and probe card structure of a probe card locking device provided by this utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 100. Support ring; 110. Outer limiting ring; 120. Inner support ring; 200. Limiting block; 201. Deflection groove; 202. Transmission chamber; 203. Adjusting chamber; 210. Deflection block; 211. Contact pad; 212. Rotating plate; 220. Transmission rod; 221. Shaft; 222. Worm gear; 230. Adjusting rod; 231. Worm; 232. Adjusting hole; 233. Limiting bearing; 300. Probe clip. Detailed Implementation

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0024] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0025] This utility model embodiment provides a probe card locking device, such as Figures 1-5 As shown, the probe card locking device, assembled on a probe stage during wafer testing, includes:

[0026] A support ring 100 includes an outer limiting ring 110 and an inner support ring 120. The outer limiting ring 110 and the inner support ring 120 form a stepped structure. The probe card 300 is placed on the inner support ring 120. The inner support ring 120 is provided with a plurality of limiting blocks 200 that restrict the probe card. The number of limiting blocks 200 is the same as the number of notches on the ring side of the probe card 300. The notches of the probe card 300 are respectively placed on the inner support ring 120 corresponding to the positions of the limiting blocks 200, and then the limiting blocks 200 complete the limiting engagement.

[0027] The limiting block 200 is provided with a deflection groove 201, the deflection groove 201 is provided with a deflection block 210, and the limiting block 200 is provided with a driving mechanism. After the probe card 300 is placed on the inner support ring 120, the driving mechanism drives the deflection block 210 to deflect and abut against the probe card 300.

[0028] In this embodiment, the deflection block 210 serves as the main limiting component. During the limiting process, the deflection block 210 applies pressure to the probe card 300 by rotating. Unlike the horizontal locking mechanism, which requires the probe card to descend to a certain area to complete the limiting and locking, the deflection block 210 completes the pushing and limiting operations after the probe card 300 is placed. There is no need to apply additional thrust to the probe card 300, reducing the pressure required on the probe card 300 and thus improving the safety of the assembly process.

[0029] In a preferred embodiment of this invention, the limiting block 200 is provided with a transmission chamber 202 and an adjustment chamber 203 inside, the transmission chamber 202 and the adjustment chamber 203 are connected, and one side of the transmission chamber 202 is connected to the deflection groove 201.

[0030] The transmission chamber 202 is provided with a transmission rod 220, which includes a shaft 221 and a worm gear 222. The shaft 221 extends from the transmission chamber 202 to the deflection groove 201. The worm gear 222 is assembled on the portion of the shaft 221 located in the transmission chamber 202. The deflection block 210 is assembled on the portion of the shaft 221 located in the deflection groove 201. Bearings are provided at both ends of the shaft 221, and the shaft 221 is respectively assembled to the deflection groove 201 and the side wall of the transmission chamber 202 through the bearings.

[0031] The adjusting chamber 203 is provided with an adjusting rod 230, which includes a worm 231 and an adjusting hole 232 at the end of the worm 231. The worm 231 is meshed with a worm wheel 222. The surface of the limiting block 200 is provided with an adjusting port. One end of the adjusting chamber 203 is connected to the outside through the adjusting port. The end of the worm 231 with the adjusting hole 232 extends to the surface of the limiting block 200 through the adjusting port. The adjusting port is provided with a limiting bearing 233 to limit the worm 231. The bottom of the adjusting chamber 203 is also provided with a limiting bearing 233 to help the worm 231 rotate.

[0032] In a preferred embodiment of this invention, the deflection block 210 includes a contact pad 211 and a rotating plate 212. The contact pad 211 is disposed in a groove on the rotating plate 212, and the rotating plate 212 is in contact with the probe card 300 through the contact pad 211. The contact pad 211 is made of soft rubber to avoid rigid contact from causing damage to the probe card 300.

[0033] In this embodiment, a thin-film pressure sensor is provided on the contact end face of the contact pad 211 and the probe card 300; the adjusting rod 230 can be rotated mechanically or manually, while the thin-film pressure sensor helps the operator judge the pressure level and avoid excessive pressure causing equipment damage. The pressure data of the thin-film pressure sensor is observed through the chip testing system.

[0034] This utility model embodiment provides a testing system for wafer performance testing, wherein the testing system employs the probe card locking device described above;

[0035] It should be noted that, for the sake of simplicity, the foregoing embodiments are all described as a series of actions. However, those skilled in the art should understand that the present invention is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to the present invention. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to the present invention.

[0036] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Although this utility model has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of this utility model according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of this utility model. These technical solutions are also within the scope of protection of this utility model.

Claims

1. A probe card lock apparatus, characterized by, include: A support ring (100) includes an outer limiting ring (110) and an inner support ring (120), the outer limiting ring (110) and the inner support ring (120) forming a stepped structure, and a probe card (300) is placed on the inner support ring (120); The inner support ring (120) is provided with a plurality of limiting blocks (200) for limiting the probe card (300). The limiting block (200) is provided with a deflection groove (201). The deflection groove (201) is provided with a deflection block (210). The limiting block (200) is provided with a driving mechanism. After the probe card (300) is placed on the inner support ring (120), the driving mechanism drives the deflection block (210) to deflect away from the deflection groove (201) and abut against the probe card (300).

2. A probe card lock apparatus as claimed in claim 1, wherein The limiting block (200) is provided with a transmission chamber (202) and an adjustment chamber (203) inside. The transmission chamber (202) and the adjustment chamber (203) are connected. The transmission chamber (202) is provided with a transmission rod (220). The transmission rod (220) extends from the transmission chamber (202) to the deflection groove (201). The deflection block (210) is assembled on the part of the transmission rod (220) located in the deflection groove (201). The adjustment chamber (203) is provided with an adjustment rod (230). The adjustment rod (230) is engaged with the transmission rod (220).

3. A probe card lock apparatus as claimed in claim 2, wherein The transmission rod (220) includes a shaft (221) and a worm gear (222). The shaft (221) extends from the transmission chamber (202) to the deflection groove (201). The worm gear (222) is mounted on the portion of the shaft (221) located in the transmission chamber (202). The deflection block (210) is mounted on the portion of the shaft (221) located in the deflection groove (201).

4. A probe card lock apparatus as claimed in claim 3, wherein The adjusting rod (230) includes a worm (231) and an adjusting hole (232) at the end of the worm (231). The end of the worm (231) with the adjusting hole (232) extends to the surface of the limiting block (200). The worm (231) is meshed with the worm wheel (222).

5. A probe card lock apparatus as claimed in claim 4, wherein The number of limiting blocks (200) is the same as the number of notches on the probe clasp side.

6. The probe card locking device as described in claim 5, characterized in that, The deflection block (210) includes a contact pad (211) and a rotating plate (212). The contact pad (211) is disposed in a groove on the rotating plate (212). The rotating plate (212) is in contact with the probe card (300) through the contact pad (211).

7. A probe card lock apparatus as claimed in claim 6, wherein A thin-film pressure sensor is provided on the contact end face of the contact pad (211) and the probe card (300).

8. A test system for wafer performance testing, comprising: The testing system employs the probe card locking device as described in claim 7.

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