Multi-nozzle large-size plasma generator

Abstract

The utility model discloses a multi-nozzle large-size plasma generator. The multi-nozzle large-size plasma generator comprises a hollow shaft brushless motor, a ground electrode seat, a ground electrode sealing cover and a ground electrode nozzle assembly, according to the multi-nozzle large-size plasma generator, a ground electrode base and the shaft end of a hollow shaft brushless motor are sealed in an inserted mode, a connecting end cover is arranged at the top of the ground electrode base, a metal circular ring piece matched with the connecting end cover is arranged on the inner side of the connecting end cover, and the metal circular ring piece is connected to the output shaft end of the hollow shaft brushless motor through a clamping spring; a ground electrode sealing cover is fixedly installed at the bottom of the ground electrode base through bolts, a plurality of ground electrode nozzle assemblies are installed on the circumference of the bottom of the ground electrode sealing cover, a conductive sliding ring is installed in the ground electrode base, and high-voltage electrodes corresponding to the ground electrode nozzle assemblies are installed in the ground electrode sealing cover. The hollow shaft brushless motor drives the ground electrode base and the ground electrode sealing cover to rotate, so that the ground electrode nozzle assembly is driven to rotate, and a large normal-pressure non-thermal arc plasma jet covering area is formed.

Description

A large-size plasma generator with multiple nozzles Technical Field

[0001] This utility model relates to the field of plasma technology, specifically a large-size plasma generator with multiple nozzles. Background Technology

[0002] In low-pressure discharges, due to the lower gas density, the collision frequency between electrons and neutral particles is also relatively low, making it easier for electrons to gain higher energy under the influence of an electric field. This facilitates ionization, resulting in higher-density plasmas at low pressure, with a relatively high concentration of active particles, while maintaining a lower gas temperature. This makes low-pressure nonequilibrium plasmas widely applicable in industry, such as plasma etching, material surface modification and cleaning, improving material biocompatibility, and generating nanomaterials. Furthermore, the easier generation of uniform plasmas at low pressures is crucial for many applications, such as surface modification and etching.

[0003] To overcome the aforementioned drawbacks, researchers have recently developed atmospheric pressure non-equilibrium plasma jets. Because atmospheric pressure non-equilibrium plasma jets can generate atmospheric pressure non-equilibrium plasma in open spaces, rather than within gaps, this makes many applications possible. While atmospheric pressure plasma has wide applications, existing atmospheric pressure plasmas suffer from small size limitations. Therefore, a multi-nozzle, large-size plasma generator is proposed to address this issue. Summary of the Invention

[0004] The purpose of this invention is to provide a large-size plasma generator with multiple nozzles to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A large-size plasma generator with multiple nozzles includes a stationary component and a rotating component. The rotating component is mounted on the rotating head of the stationary component. The stationary component includes a hollow shaft brushless motor, and the rotating component includes a ground electrode base. The ground electrode base is inserted and sealed to the shaft end of the hollow shaft brushless motor. The top of the ground electrode base is provided with a connecting end cover, and the inner side of the connecting end cover is provided with a metal ring plate adapted to it. The metal ring plate is connected to the output shaft end of the hollow shaft brushless motor by a snap ring. The output shaft end of the hollow shaft brushless motor has an annular groove adapted to the snap ring. The metal ring plate is fixedly installed to the connecting end cover by bolts. The metal ring plate, the connecting end cover and the snap ring cooperate to form a clamping and fixing effect. The bottom of the ground electrode base is fixedly installed with a ground electrode cover by bolts. Multiple ground electrode nozzle assemblies are installed on the bottom circumference of the ground electrode cover. A conductive slip ring is installed inside the ground electrode base, and a high-voltage electrode is installed inside the ground electrode cover corresponding to each ground electrode nozzle assembly.

[0007] As a further embodiment of this utility model: the top cover of the hollow shaft brushless motor housing has an extended fixing cylinder adapted to it, the top cover of the extended fixing cylinder has a rear end cover adapted to it, the rear end cover is fixedly connected to the top of the hollow shaft brushless motor by bolts, and an intermediate electrical channel is provided on the rear end cover. A gas cavity is formed at the tail end of the hollow shaft brushless motor through the rear end cover and the extended fixing cylinder, which facilitates the connection with the air passage hole.

[0008] As a further embodiment of this utility model: an electrical conduit adapted to the hollow shaft of the hollow shaft brushless motor is movably passed through it. The tail end of the electrical conduit is fixedly installed to the housing of the hollow shaft brushless motor by bolts. A high-voltage wire hole is opened at the center of the tail end of the electrical conduit, and an air passage hole is opened at the eccentric part of the tail end of the electrical conduit. The tail end of the electrical conduit is provided with a blind flange.

[0009] As a further embodiment of this utility model: the bottom end of the electrical conduit is fixedly connected with a first insulating ring, the inner side of the ground electrode base is embedded with a second insulating ring that matches it, and the inner side of the ground electrode cover is embedded with a non-circular insulating ring that matches it.

[0010] As a further embodiment of this utility model: the bottom end of the first insulating ring is provided with a plug, and a vent hole is provided on the inner side of the plug. The stator end of the conductive slip ring is fixedly connected to the plug, the rotor end of the conductive slip ring is fixedly connected to the first cyclone ring, the first cyclone ring is fixedly connected to the second insulating ring, the high voltage electrode is fixedly connected to the second cyclone ring, and the ground electrode cover and the irregular insulating ring are provided with gas channels corresponding to each ground electrode nozzle assembly. The second cyclone ring is fixedly connected to the gas channel on the irregular insulating ring, and vent holes are provided on both the first cyclone ring and the second cyclone ring.

[0011] As a further improvement of this utility model: the stator end of the conductive slip ring is connected to a high-voltage line, the rotor end of the conductive slip ring is connected in parallel with multiple high-voltage electrodes, and a constant voltage module can be connected in series on the connection line of the high-voltage electrodes.

[0012] As a further improvement of this utility model: a ground wire is connected to the rear end face of the hollow shaft brushless motor, and the hollow shaft brushless motor, ground electrode base, ground electrode cover and ground electrode nozzle assembly are all made of metal conductive material.

[0013] As a further embodiment of this utility model: the ground electrode nozzle assembly includes a double-ended threaded connector, a threaded cap, and a nozzle head. The double-ended threaded connector is threadedly connected to the ground electrode cap, and the threaded cap is threadedly connected to the double-ended threaded connector. The double-ended threaded connector and the threaded cap are both provided with a spherical cavity. The tail end of the nozzle head is threadedly connected to a spherical head, which is pressed and installed in the spherical cavity. The nozzle head extends out of the threaded cap.

[0014] As a further improvement of this utility model: the outer wall of the hollow shaft brushless motor is provided with a mounting platform, and the hollow shaft brushless motor is fixedly installed to the main unit of the equipment through the mounting platform.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. This utility model uses a hollow shaft brushless motor to drive the ground electrode base and ground electrode cover to rotate, thereby driving the ground electrode nozzle assembly to rotate and forming a large atmospheric pressure non-thermal arc plasma jet coverage area.

[0017] 2. In this utility model, the nozzle head is connected to the spherical cavity between the threaded gland and the double-ended threaded connecting seat via a spherical head, so that the nozzle head angle can be adjusted and can be misaligned, thereby forming a multi-ring atmospheric pressure non-thermal arc plasma jet. Attached Figure Description

[0018] Figure 1 is a schematic diagram of a large-size plasma generator with multiple nozzles.

[0019] Figure 2 is a cross-sectional view of a large-size plasma generator with multiple nozzles.

[0020] Figure 3 is an enlarged view of A in a multi-nozzle large-size plasma generator.

[0021] Figure 4 shows the electrical piping in a large-size plasma generator with multiple nozzles.

[0022] Figure 5 is a top-view perspective view of a large-size plasma generator with multiple nozzles.

[0023] In the diagram: 1. Stationary component; 2. Rotating component; 3. Hollow shaft brushless motor; 4. Extended fixed cylinder; 5. Rear end cover; 6. Intermediate electrical channel; 7. Ground electrode base; 8. Connecting end cover; 9. Metal ring plate; 10. Snap ring; 11. Ground electrode cover; 12. Ground electrode nozzle assembly; 13. Conductive slip ring; 14. Electrical conduit; 15. High-voltage line hole; 16. Air passage hole; 17. First insulating ring; 18. Second insulating ring; 19. Irregularly shaped insulating ring; 20. High-voltage electrode; 21. Vent hole; 22. First cyclone ring; 23. Second cyclone ring; 24. Double-ended threaded connector; 25. Threaded cap; 26. Nozzle head; 27. Spherical cavity; 28. Spherical head; 29. ​​Mounting platform. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please refer to Figures 1-5. In this embodiment of the present invention, a large-size plasma generator with multiple nozzles includes a stationary component 1 and a rotating component 2. The rotating component 2 is mounted on the rotating head of the stationary component 1. The stationary component 1 includes a hollow shaft brushless motor 3. The rotating component 2 includes a ground electrode base 7. The ground electrode base 7 is inserted and sealed to the shaft end of the hollow shaft brushless motor 3. The top of the ground electrode base 7 is provided with a connecting end cover 8. The inner side of the connecting end cover 8 is provided with a metal ring plate 9 adapted to it. The metal ring plate 9 is connected to the output of the hollow shaft brushless motor 3 by a retaining ring 10. On the output shaft end, the hollow shaft brushless motor 3 has an annular groove that matches the retaining ring 10. The metal ring 9 is fixedly installed to the connecting end cover 8 by bolts. The metal ring 9 and the connecting end cover 8 cooperate with the retaining ring 10 to form a clamping and fixing effect. The bottom of the ground electrode base 7 is fixedly installed with a ground electrode cover 11 by bolts. Multiple ground electrode nozzle assemblies 12 are installed on the bottom circumference of the ground electrode cover 11. A conductive slip ring 13 is installed inside the ground electrode base 7. A high voltage electrode 20 is installed inside the ground electrode cover 11 corresponding to each ground electrode nozzle assembly 12.

[0026] The top cover of the hollow shaft brushless motor 3 has an extended fixing cylinder 4 that is compatible with it. The top cover of the extended fixing cylinder 4 has a rear end cover 5 that is compatible with it. The rear end cover 5 is fixedly connected to the top of the hollow shaft brushless motor 3 by bolts. An intermediate electrical channel 6 is provided on the rear end cover 5. A gas cavity is formed at the tail end of the hollow shaft brushless motor 3 through the rear end cover 5 and the extended fixing cylinder 4, which facilitates the connection with the air passage 16.

[0027] An electrical conduit 14 adapted to the hollow shaft of the hollow shaft brushless motor 3 is movably passed through it. The tail end of the electrical conduit 14 is fixedly installed to the housing of the hollow shaft brushless motor 3 by bolts. A high-voltage line hole 15 is opened at the center of the tail end of the electrical conduit 14, and an air passage hole 16 is opened at the eccentric part of the tail end of the electrical conduit 14. The tail end of the electrical conduit 14 is equipped with a blind flange.

[0028] The bottom end of the electrical conduit 14 is fixedly connected with a first insulating ring 17. The inner side of the ground electrode base 7 is fitted with a second insulating ring 18 that matches it. The inner side of the ground electrode cover 11 is fitted with a shaped insulating ring 19 that matches it. The first insulating ring 17, the second insulating ring 18 and the shaped insulating ring 19 can be made of insulating materials such as polytetrafluoroethylene and insulating ceramics.

[0029] The bottom end of the first insulating ring 17 is provided with a plug, and a vent hole 21 is provided on the inner side of the plug. The stator end of the conductive slip ring 13 is fixedly connected to the plug, and the rotor end of the conductive slip ring 13 is fixedly connected to the first cyclone ring 22. The first cyclone ring 22 is fixedly connected to the second insulating ring 18. The high voltage electrode 20 is fixedly connected to the second cyclone ring 23. The ground electrode cover 11 and the irregular insulating ring 19 are provided with gas channels corresponding to each ground electrode nozzle assembly 12. The second cyclone ring 23 is fixedly connected to the gas channel on the irregular insulating ring 19. Vent holes are provided on both the first cyclone ring 22 and the second cyclone ring 23.

[0030] The stator end of the conductive slip ring 13 is connected to a high-voltage line, and the rotor end of the conductive slip ring 13 is connected in parallel with multiple high-voltage electrodes 20. A constant voltage module can be connected in series on the connection line of the high-voltage electrodes 20.

[0031] A ground wire is connected to the rear end face of the hollow shaft brushless motor 3. The hollow shaft brushless motor 3, the ground electrode base 7, the ground electrode cover 11, and the ground electrode nozzle assembly 12 are all made of conductive metal.

[0032] The ground electrode nozzle assembly 12 includes a double-ended threaded connector 24, a threaded cap 25, and a nozzle head 26. The double-ended threaded connector 24 is threadedly connected to the ground electrode cover 11, and the threaded cap 25 is threadedly connected to the double-ended threaded connector 24. The double-ended threaded connector 24 and the threaded cap 25 are both provided with a spherical cavity 27. The tail end of the nozzle head 26 is threadedly connected to a spherical head 28, which is pressed and installed in the spherical cavity 27. The nozzle head 26 protrudes from the threaded cap 25.

[0033] The hollow shaft brushless motor 3 has a mounting platform 29 on its outer wall, and the hollow shaft brushless motor 3 is fixedly installed to the main unit of the equipment through the mounting platform 29.

[0034] Gas path: The gas pipe is connected to the intermediate electrical channel 6 on the rear end cover 5. It enters the gas cavity formed between the extended fixed cylinder 4, the rear end cover 5 and the hollow shaft brushless motor 3 through the intermediate electrical channel 6. It further enters the electrical pipe 14 through the gas path hole 16, enters the second insulating ring 18 through the vent hole 21 on the first insulating ring 17, enters the irregular insulating ring 19 in the ground electrode cover 11 through the vent hole on the first cyclone ring 22, passes through the vent hole on the second cyclone ring 23, and then flows to the ground electrode nozzle assembly 12 through the gas flow channel, flows to the tip of the high voltage electrode 20, breaks down between the high voltage electrode 20 and the ground electrode nozzle assembly 12 to form plasma, and the plasma jet flows out along multiple nozzles.

[0035] High voltage: The high voltage line enters through the middle electrical channel 6 of the generator rear end cover 5, and further enters the electrical conduit 14 through the high voltage line hole 15, connecting to the stator end of the conductive slip ring 13 (a rotating module capable of conducting high voltage). Multiple identical branches are connected to the rotor end of the conductive slip ring 13, and each branch is sequentially connected to the voltage constant module and the high voltage electrode 20 by a high voltage wire. The high voltage transmission section must be electrically isolated from surrounding components. From top to bottom, a first insulating ring 17, a second insulating ring 18, and a shaped insulating ring 19 are used to isolate it from the external conductive ground electrode base 7 and ground electrode cover 11.

[0036] Ground wire: The ground wire enters along the middle electrical channel 6 of the rear end cover 5 and is fixed to the rear end face of the hollow shaft brushless motor 3. The brushless electrode, ground electrode seat 7, ground electrode cover 11, and ground electrode nozzle assembly 12 are metal ground electrodes connected to the power supply. A certain part of the inner wall of the ground electrode nozzle assembly 12 undergoes high-voltage breakdown with the tip of the high-voltage electrode 20, generating plasma.

[0037] The brushless motor has a hollow structure with an air passage and high-voltage wire in the core. The high-voltage wire connects to the conductive slip ring 13, which is the stationary part of the whole machine. The other end of the conductive slip ring 13 is connected to the high-voltage output, which is divided into two parts. This part rotates with the motor. The PTFE component isolates the high voltage and the ground electrode. The outside is the ground electrode, and the inside is the high-voltage electrode 20. The high-voltage electrode 20 and the ground electrode nozzle assembly 12 discharge to generate plasma. The distance between the two nozzle heads 26 is adjustable, and the generated plasma jet can cover an area with a diameter of more than 200 mm.

[0038] Furthermore, the number of ground electrode nozzles can be three or more, and the ground electrodes can be arranged asymmetrically to generate multi-layer plasma jet rings.

[0039] The working principle of this utility model is as follows:

[0040] In use, the hollow shaft brushless motor 3 drives the ground electrode base 7 to rotate, which in turn drives the ground electrode nozzle assembly 12 to rotate through the ground electrode cover 11. At this time, air is introduced into the high-voltage line through the intermediate electrical channel 6 on the rear end cover 5, and the power ground electrode line is also introduced through the intermediate electrical channel 6. The gas enters the electrical pipe 14 through the gas passage hole 16, and the high-voltage line enters the electrical pipe 14 through the high-voltage line hole 15. At this time, the gas further passes through the vent hole 21, the first cyclone ring 22 and the second cyclone ring 23 to carry the end of the high-voltage electrode 20. The high voltage is connected and diverted to the high-voltage electrode through the conductive slip ring 13. 20. The ground electrode line passes through the brushless electrode, ground electrode base 7 and ground electrode cover 11 to reach the gas flow channel of the ground electrode nozzle assembly 12 and the high voltage electrode 20. The high voltage electrode 20 and the ground electrode nozzle assembly 12 channel discharge to generate plasma. At this time, the nozzle head 26 rotates, so that the plasma jet can cover an area with a diameter of more than 200 mm. Furthermore, by turning the threaded cover 25, the angle of the nozzle head 26 can be adjusted with the cooperation of the spherical cavity 27 and the spherical head 28 to form an asymmetrical setting, thereby forming a multi-ring atmospheric pressure non-thermal arc plasma jet.

[0041] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A large-size plasma generator with multiple nozzles, comprising a stationary component (1) and a rotating component (2), characterized in that: The rotating component (2) is mounted on the rotating head of the stationary component (1). The stationary component (1) includes a hollow shaft brushless motor (3), and the rotating component (2) includes a ground electrode base (7). The ground electrode base (7) is inserted and sealed to the shaft end of the hollow shaft brushless motor (3). The top of the ground electrode base (7) is provided with a connecting end cover (8). The inner side of the connecting end cover (8) is provided with a metal ring plate (9) that is adapted to it. The metal ring plate (9) is connected to the output shaft end of the hollow shaft brushless motor (3) by a snap ring (10). The ground electrode base (7) is fixedly installed with bolts and connecting end cap (8). The bottom of the ground electrode base (7) is fixedly installed with a ground electrode cover (11) by bolts. Multiple ground electrode nozzle assemblies (12) are installed on the bottom circumference of the ground electrode cover (11). A conductive slip ring (13) is installed inside the ground electrode base (7). A high voltage electrode (20) is installed inside the ground electrode cover (11) corresponding to each ground electrode nozzle assembly (12). An electrical conduit (14) adapted to the hollow shaft of the hollow shaft brushless motor (3) is movably passed through it. The tail end of the electrical conduit (14) is connected to the ground electrode base (7). The electrical conduit (14) is fixedly installed to the housing of the hollow shaft brushless motor (3) by bolts. A high-voltage line hole (15) is opened at the center of the tail end of the electrical conduit (14). An air passage hole (16) is opened at the eccentric end of the tail end of the electrical conduit (14). A first insulating ring (17) is inserted and fixedly connected to the bottom end of the electrical conduit (14). A second insulating ring (18) that matches it is embedded in the inner side of the ground electrode base (7). A special-shaped insulating ring (19) that matches it is embedded in the inner side of the ground electrode cover (11). A plug is provided at the bottom end of the first insulating ring (17). The inner side of the plug is... A vent hole (21) is provided. The stator end of the conductive slip ring (13) is fixedly connected to the plug. The rotor end of the conductive slip ring (13) is fixedly connected to the first swirling ring (22). The first swirling ring (22) is fixedly connected to the second insulating ring (18). The high voltage electrode (20) is fixedly connected to the second swirling ring (23). The ground electrode cover (11) and the irregular insulating ring (19) are provided with gas channels corresponding to each ground electrode nozzle assembly (12). The second swirling ring (23) is fixedly connected to the gas channel on the irregular insulating ring (19).

2. The multi-nozzle large-size plasma generator according to claim 1, characterized in that: The hollow shaft brushless motor (3) has an extended fixed cylinder (4) on the top cover of its housing, and a rear end cover (5) on the top cover of the extended fixed cylinder (4). The rear end cover (5) is fixedly connected to the top of the hollow shaft brushless motor (3) by bolts, and an intermediate electrical channel (6) is provided on the rear end cover (5).

3. A large-size plasma generator with multiple nozzles according to claim 1, characterized in that: The stator end of the conductive slip ring (13) is connected to a high-voltage line, and the rotor end of the conductive slip ring (13) is connected in parallel with multiple high-voltage electrodes (20).

4. A large-size plasma generator with multiple nozzles according to claim 1, characterized in that: The hollow shaft brushless motor (3) has a ground wire connected to its rear end face. The hollow shaft brushless motor (3), ground electrode seat (7), ground electrode cover (11) and ground electrode nozzle assembly (12) are all made of conductive metal.

5. A large-size plasma generator with multiple nozzles according to claim 1, characterized in that: The ground electrode nozzle assembly (12) includes a double-ended threaded connector (24), a threaded cap (25), and a nozzle head (26). The double-ended threaded connector (24) is threaded onto the ground electrode cover (11), and the threaded cap (25) is threaded onto the double-ended threaded connector (24). The double-ended threaded connector (24) and the threaded cap (25) are both provided with a spherical cavity (27). The tail end of the nozzle head (26) is threaded onto a spherical head (28), which is pressed and installed in the spherical cavity (27). The nozzle head (26) protrudes from the threaded cap (25).

6. A large-size plasma generator with multiple nozzles according to claim 1, characterized in that: The hollow shaft brushless motor (3) has a mounting platform (29) on its outer wall.

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