Pressure sensor

Abstract

The utility model relates to the technical field of pressure sensors, in particular to a pressure sensor, which comprises a shell, one end of the shell is open, the other end of the shell is provided with a metal diaphragm, and a support ring, a mounting substrate, a hold-down ring, a first taper sleeve, a second taper sleeve and a sealing cover are sequentially arranged in the shell from inside to outside. Compared with the prior art, the MEMS chip has the advantages that the shell and the metal diaphragm are arranged, so that the shell can be conveniently mounted on external equipment, the supporting ring, the mounting substrate, the pressing ring, the first taper sleeve, the second taper sleeve and the sealing cover are arranged, so that a quick dismounting structure can be conveniently formed, when the MEMS chip fails, the sealing cover is dismounted, then the easy-to-pull rope is hooked, and the MEMS chip can be quickly dismounted. The first taper sleeve and the second taper sleeve can be conveniently taken down as a whole, then a tool is used for being connected with the notch in a clamped mode, then the pressing ring is driven to rotate out, the installation base plate is replaced, the overall structure is simple, design is reasonable, and therefore the problems existing in the prior art are effectively solved.

Description

Technical Field

[0001] This utility model relates to the field of pressure sensor technology, and in particular to a pressure sensor. Background Technology

[0002] MEMS pressure sensors are miniature sensors manufactured based on microelectromechanical systems (MEMS) technology. They sense pressure through the deformation of a sensitive thin film and convert the physical signal into an electrical signal output. Their core features include miniaturization, low power consumption, high integration, and mass production advantages. They work by detecting the deformation of a pressure-bearing element, which is then processed and amplified by related circuitry to convert the physical signal into an electrical signal output.

[0003] Traditional pressure sensors have an external housing and are typically installed directly in pipes or pressure vessels. The housing has a pressure channel to transmit the pressure of external gas or liquid to the MEMS pressure sensor. However, the connection between the traditional pressure sensor and the housing is relatively complex. When the sensor's sensing module malfunctions, the pressure sensor is rendered unusable. Therefore, this paper proposes a pressure sensor that allows for the replacement of the internal sensing module, thus solving the aforementioned problems. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a pressure sensor that effectively solves the deficiencies of the prior art.

[0005] To achieve the above objectives, one embodiment of the present invention provides a pressure sensor, including a housing with an opening at one end and a metal diaphragm mounted at the other end. Inside the housing, from the inside out, are arranged a support ring, a mounting base, a clamping ring, a first conical sleeve, a second conical sleeve, and a sealing cap. The clamping ring and the sealing cap are threadedly connected to the housing. A limiting ring is provided inside the support ring. The mounting base is pushed into the support ring by the clamping ring and abuts against one side of the limiting ring. The sealing cap pushes against the second and first conical sleeves. A MEMS chip is mounted on the side of the mounting base. A connecting line is provided in the middle of the first and second conical sleeves, and the connecting line passes through the mounting base and is electrically connected to the MEMS chip.

[0006] Preferably, in any of the above embodiments, an octagonal boss is installed on the side of the outer shell away from the center of the metal diaphragm. The octagonal boss has a groove at its edge near the side of the metal diaphragm, and a sealing ring is installed inside it. In this embodiment, the outer shell is mainly used to form a specific structure. Threads are provided on both its outer and inner sides to facilitate the installation of the clamping ring and the sealing cap. The material of the outer shell should preferably be a corrosion-resistant alloy or a high-reliability metal to isolate the fluid being measured from the internal chip circuit. When the outer shell is threadedly connected to the external device, the octagonal boss presses against the sealing ring to improve the sealing performance of the connection and prevent leakage.

[0007] Preferably, in any of the above solutions, the outer wall of the outer shell away from the sealing cover and the middle of its inner wall are both provided with threads, and the inner wall of the outer shell is stepped. This solution facilitates the provision of installation positions for the clamping ring and the sealing cover. At the same time, the stepped structure facilitates the use of tools to process the internal threads, thereby reducing the amount of material used and ensuring the structural strength of the outer shell.

[0008] Preferably, in any of the above embodiments, the outer wall of the clamping ring is stepped, and the end of the clamping ring away from the mounting base has four notches for external tools to engage. This design facilitates the threading of the protrusions of the clamping ring, which can engage with the threads inside the housing. At the same time, the end of the clamping ring pushes against the mounting base and cooperates with the limiting ring to fix the position of the mounting base. The notches at the end of the clamping ring provide a engagement position for tools, facilitate the rotation of the clamping ring, and facilitate the initial installation and subsequent disassembly.

[0009] Preferably, in any of the above embodiments, the ends of the first and second conical sleeves furthest from the mounting base are provided with multiple through slots. An easy-pull rope is installed on the edge of the first conical sleeve near the side of the second conical sleeve. The easy-pull rope is coiled and placed in the gap between the second conical sleeve and the inner wall of the outer shell. In this embodiment, both ends of the easy-pull rope enter the interior of the first conical sleeve. Then, the middle part of the easy-pull rope is folded and coiled, and wrapped around the outer wall of the second conical sleeve. This facilitates placement between the second conical sleeve and the inner wall of the outer shell later, avoiding any impact on later removal. Multiple through slots are provided at the conical ends of the first and second conical sleeves. This allows the second and first conical sleeves to be pressed and deformed separately after the sealing cap is tightened, thereby locking the connecting wire.

[0010] Preferably, as described in any of the above solutions, a sealing gasket is provided between the sealing cover and the end of the outer shell. This solution facilitates the tightening of the sealing gasket after the sealing cover and the end of the outer shell are tightened, while increasing the friction between the sealing cover and the sealing gasket to ensure the stability of the sealing cover. Multiple raised strips are installed on the edge of the sealing cover to increase the friction between the sealing cover and the operator's hand, making it convenient to tighten or disassemble the sealing cover.

[0011] This utility model has the following advantages:

[0012] 1. This pressure sensor, by comprising a housing and a metal diaphragm, facilitates installation of the housing onto external devices. The inclusion of a support ring, mounting substrate, clamping ring, first conical sleeve, second conical sleeve, and sealing cap facilitates a quick-disassembly structure. When the MEMS chip fails, the sealing cap is removed, and then the pull cord is hooked to allow for the removal of the first and second conical sleeves as a whole. A tool is then used to engage with the notch, causing the clamping ring to rotate out, thus enabling replacement of the mounting substrate. The overall structure is simple and rationally designed, effectively solving the problems existing in the prior art.

[0013] 2. This pressure sensor, by setting a first conical sleeve and a second conical sleeve, allows pressure to be applied to the ends of the first and second conical sleeves after the sealing cover is tightened with the outer shell, causing elastic deformation at the slotted ends of both sleeves, which facilitates locking of the connecting wire and prevents loosening later. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall design of this utility model;

[0015] Figure 2 This is a cross-sectional view of the overall structure of this utility model;

[0016] Figure 3 This is a schematic diagram of the clamping ring structure of this utility model;

[0017] Figure 4 This is a schematic diagram of the support ring structure of this utility model;

[0018] Figure 5 This is an exploded structural diagram of the first and second conical sleeves of this utility model;

[0019] Figure 6 This is a schematic diagram of the mounting base structure of this utility model.

[0020] In the diagram: 1-outer shell, 2-octagonal boss, 3-sealing cap, 4-connecting wire, 5-sealing gasket, 6-sealing ring, 7-first conical sleeve, 8-mounting substrate, 9-metal diaphragm, 10-MEMS chip, 11-second conical sleeve, 12-support ring, 13-pressure ring, 14-notch, 15-easy pull cord, 16-limiting ring. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings, but the scope of protection of the present invention is not limited to the following description.

[0022] like Figures 1 to 6 As shown, a pressure sensor includes a housing 1 with an opening at one end and a metal diaphragm 9 mounted at the other end. Inside the housing 1, from the inside out, are arranged a support ring 12, a mounting substrate 8, a clamping ring 13, a first conical sleeve 7, a second conical sleeve 11, and a sealing cap 3. The clamping ring 13 and the sealing cap 3 are threaded to the housing 1. A limit ring 16 is provided inside the support ring 12. The mounting substrate 8 is pushed into the support ring 12 by the clamping ring 13 and abuts against one side of the limit ring 16. The sealing cap 3 pushes against the second conical sleeve 11 and the first conical sleeve 7. A MEMS chip is mounted on the side of the mounting substrate 8. 10. A connecting line 4 is provided in the middle of the first conical sleeve 7 and the second conical sleeve 11. The connecting line 4 passes through the mounting substrate 8 and is electrically connected to the MEMS chip 10. The MEMS chip 10 adopts a combination of metal sheet and non-metallic materials, and a square or circular thin film (about tens of micrometers thick) is made on the non-metallic material as a pressure-sensitive area. Four varistors (usually diffused silicon or polycrystalline silicon material) are integrated on the surface of the thin film to form a Wheatstone bridge circuit. The metal wire is used to connect to the connecting line 4. A connecting post (silver-plated copper core) is provided on the mounting substrate 8. The connecting post passes through the side wall of the mounting substrate 8, and a fluororubber sealing ring is provided at the wire hole.

[0023] The back cavity (vacuum or reference pressure cavity) is formed by double-sided photolithography. At the same time, a temperature compensation circuit is also inherited on the non-metallic material to counteract the drift of the varistor caused by temperature changes and improve the measurement accuracy.

[0024] An octagonal boss 2 is installed on the side of the outer shell 1 away from the center of the metal diaphragm 9. The edge of the octagonal boss 2 near the side of the metal diaphragm 9 has a groove, and a sealing ring 6 is installed inside it. As an optional technical solution of this utility model, the outer shell 1 is mainly used to form a specific structure. Threads are provided on both the outer side and the inner wall side of the outer shell 1, which facilitates the installation position of the clamping ring 13 and the sealing cover 3. The material of the outer shell 1 should preferably be a corrosion-resistant alloy or a high-reliability metal, which is used to isolate the fluid to be measured from the internal chip circuit. When the outer shell 1 is threadedly connected to the external equipment, the octagonal boss 2 presses the sealing ring 6 to improve the sealing performance of the connection position and prevent leakage.

[0025] The outer wall of the outer shell 1 away from the sealing cover 3 and the middle of its inner wall are both threaded. The inner wall of the outer shell 1 is stepped. As an optional technical solution of this utility model, this facilitates the provision of installation positions for the clamping ring 13 and the sealing cover 3. At the same time, the stepped structure facilitates the use of tools to process the internal threads, and correspondingly reduces the amount of material used, while ensuring the structural strength of the outer shell 1.

[0026] The outer wall of the clamping ring 13 is stepped. The end of the clamping ring 13 away from the mounting base plate 8 has four notches 14 for external tools to engage. As an optional technical solution of this utility model, this facilitates the threading of the protrusion of the clamping ring 13 and allows it to engage with the internal threads of the outer shell 1. At the same time, the end of the clamping ring 13 pushes against the mounting base plate 8 and cooperates with the limiting ring 16 to facilitate the positioning of the mounting base plate 8. The notches 14 at the end of the clamping ring 13 provide a engagement position for tools, facilitate the rotation of the clamping ring 13, and facilitate the initial installation and subsequent disassembly.

[0027] Multiple through slots are provided at the ends of the first conical sleeve 7 and the second conical sleeve 11 away from the mounting base plate 8. An easy-pull rope 15 is installed on the edge of the first conical sleeve 7 near the side of the second conical sleeve 11. The easy-pull rope 15 is coiled and placed in the gap between the second conical sleeve 11 and the inner wall of the outer shell 1. As an optional technical solution of this utility model, both ends of the easy-pull rope 15 enter the interior of the first conical sleeve 7. Then, the middle part of the easy-pull rope 15 is folded and coiled, and wrapped around the outer wall of the second conical sleeve 11. This makes it convenient to place between the second conical sleeve 11 and the inner wall of the outer shell 1 later, avoiding affecting the later removal. Multiple through slots are opened at the conical ends of the first conical sleeve 7 and the second conical sleeve 11. Then, after tightening the sealing cap 3, it is convenient to press the second conical sleeve 11 and the first conical sleeve 7 respectively, and deform them to lock the connecting line 4.

[0028] A sealing gasket 5 is provided between the sealing cap 3 and the end of the outer shell 1. As an optional technical solution of this utility model, this facilitates the sealing gasket 5 to be pressed after the sealing cap 3 and the end of the outer shell 1 are tightened. At the same time, it increases the friction between the sealing cap 3 and the sealing gasket 5, ensuring the stability of the sealing cap 3. Multiple raised strips are installed on the edge of the sealing cap 3, which facilitates the increase of friction between the sealing cap 3 and the operator's hand, making it convenient to tighten or disassemble the sealing cap 3.

[0029] This pressure sensor requires the following steps to be used:

[0030] 1) When disassembling, loosen the sealing cover 3 and remove it, while using a tool to pull out the easy-pull rope 15;

[0031] 2) Hold the connecting line 4, and then pull the pull rope 15 to make the first cone sleeve 7 slide outward along the outer wall of the connecting line 4;

[0032] 3) Use a tool to engage with the notch 14 at the symmetrical position, rotate the clamping ring 13, and rotate the clamping ring 13 out;

[0033] 4) Pull the connecting wire 4 to remove the mounting substrate 8 and MEMS chip 10 as a whole, so that they can be replaced later.

[0034] In summary, when used by the user, the outer shell 1 and metal diaphragm 9 facilitate the installation of the outer shell 1 on external devices. The support ring 12, mounting substrate 8, clamping ring 13, first conical sleeve 7, second conical sleeve 11, and sealing cover 3 facilitate a quick disassembly structure. When the MEMS chip 10 fails, the sealing cover 3 is removed, and then the pull cord 15 is hooked to facilitate the removal of the first conical sleeve 7 and the second conical sleeve 11 as a whole. Then, a tool is used to engage with the notch 14, which drives the clamping ring 13 to rotate out, thereby enabling the replacement of the mounting substrate 8. The overall structure is simple and reasonably designed, effectively solving the problems existing in the prior art. Furthermore, by setting the first conical sleeve 7 and the second conical sleeve 11, after the sealing cover 3 is tightened with the outer shell 1, pressure is applied to the ends of the first conical sleeve 7 and the second conical sleeve 11, causing elastic deformation at the slotted ends, which facilitates locking of the connecting wire 4 and prevents loosening later.

[0035] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A pressure sensor, characterized in that: The device includes an outer casing, one end of which is open and the other end is fitted with a metal diaphragm. Inside the outer casing, from the inside out, are arranged a support ring, a mounting substrate, a clamping ring, a first conical sleeve, a second conical sleeve, and a sealing cap. The clamping ring and the sealing cap are threaded to the outer casing. A limit ring is provided inside the support ring. The mounting substrate is pushed into the support ring by the clamping ring and abuts against one side of the limit ring. The sealing cap pushes against the second and first conical sleeves. A MEMS chip is mounted on the side of the mounting substrate. A connecting line is provided in the middle of the first and second conical sleeves. The connecting line passes through the mounting substrate and is electrically connected to the MEMS chip.

2. A pressure sensor according to claim 1, characterized in that: An octagonal boss is installed on the side of the outer shell away from the center of the metal diaphragm. A groove is formed on the edge of the octagonal boss near the side of the metal diaphragm, and a sealing ring is installed inside it.

3. A pressure sensor according to claim 2, characterized in that: The outer wall of the outer casing away from the sealing cover and the middle of its inner wall are both threaded, and the inner wall of the outer casing has a stepped shape.

4. A pressure sensor according to claim 3, characterized in that: The outer wall of the clamping ring is stepped, and the end of the clamping ring away from the mounting base plate has four notches for external tools to engage.

5. A pressure sensor according to claim 4, characterized in that: The first and second conical sleeves each have multiple through slots at the ends away from the mounting base plate. An easy-pull rope is installed on the edge of the first conical sleeve near the side of the second conical sleeve, and the easy-pull rope is coiled and placed in the gap between the second conical sleeve and the inner wall of the outer shell.

6. A pressure sensor according to claim 5, characterized in that: A sealing gasket is provided between the sealing cap and the end of the outer shell.

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