A humidity sensing device and system
By introducing a two-dimensional material layer and a tungsten carbide layer as a sensitivity-enhancing layer into the humidity sensing device, and using a bi-peak ratio calibration method for the sensing layer, the problems of low measurement accuracy and easy damage of existing humidity sensing devices are solved, achieving high-precision and reliable humidity detection.
CN117110245BActive Publication Date: 2026-07-07UNIV OF SHANGHAI FOR SCI & TECH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- UNIV OF SHANGHAI FOR SCI & TECH
- Filing Date
- 2023-07-11
- Publication Date
- 2026-07-07
Smart Images
Figure CN117110245B_ABST
Abstract
The embodiment of the present application discloses a humidity sensing device and system, which comprises a prism, a metal film, a sensitizing layer and a sensing layer. Wherein, the light enters the prism to excite the surface of the metal film to generate surface plasmon resonance phenomenon, which can change with the amount of water absorbed by the sensing layer. The sensitizing layer improves the sensitivity of the humidity sensing device. The sensing layer captures water in the air while having strong coupling effect with the metal film, which converts the original single SPR resonance peak into coherent double peaks. The user uses the above effect to design a proportional SPR humidity sensing device, eliminates the error in humidity detection, facilitates calculation and enhances the reliability of data. In addition, the sensing layer protects other structures by using its own structural characteristics. The present application provides a humidity detection device with high measurement accuracy and reliability, and the overall structure is not easy to be damaged.
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