Warping automatic calibration mechanism in glass packaging and baking process
An automatic glass substrate warpage calibration mechanism, which combines a support base and a moving component with a drive cylinder, solves the problem of glass substrate warpage after encapsulation and improves the mechanical performance of larger-sized packages.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI M-FINE ELECTONIC TECH CO LTD
- Filing Date
- 2025-05-20
- Publication Date
- 2026-05-05
AI Technical Summary
In existing technologies, it is difficult to effectively calibrate the warping problem of glass substrates after encapsulation, which affects mechanical properties and the expansion of encapsulation size.
The device employs components such as a support base, a first moving component, a drive cylinder, a drive linkage, and a calibration bracket. It achieves deformation control of the glass substrate through synchronous movement and air pressure conversion. By using parallel-spaced pushing base plates and connecting base plates in conjunction with the drive cylinder, it realizes automatic warping calibration of the glass substrate.
It effectively controls the warpage of the glass substrate, improves mechanical properties, and meets the needs of larger-sized packaging.
Smart Images
Figure CN224205584U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of glass substrate packaging technology, and in particular refers to an automatic warpage calibration mechanism during the glass packaging baking process. Background Technology
[0002] Currently, advanced packaging technologies for glass substrates still face several challenges due to factors such as structural stacking and increased chip computing power. One such challenge is glass substrate warpage. Since the degree and direction of warpage vary after packaging, finding more suitable materials, adopting new processes, and developing more precise and advanced equipment are key to overcoming these challenges. Warpage calibration after glass substrate packaging is a crucial process in advanced packaging. Glass substrates can significantly improve mechanical properties, meet the needs of larger-size packaging, and represent an important direction for the future development of advanced packaging. Utility Model Content
[0003] This invention provides an automatic warpage calibration mechanism during the glass encapsulation baking process, which mainly solves the problem of warpage after basic glass encapsulation, thereby improving its mechanical properties and meeting the encapsulation requirements of larger glass substrates.
[0004] To achieve the above objectives, the present invention adopts the following technical solution:
[0005] An automatic warpage calibration mechanism for glass encapsulation baking process includes:
[0006] The support base provides initial installation space;
[0007] A first movable component is movably disposed within a first installation space of the support base. The first movable component includes a connecting base plate and a pushing base plate arranged in parallel and spaced apart. The connecting base plate and the pushing base plate can move synchronously in the same direction, and the connecting base plate and the pushing base plate can move relatively far apart.
[0008] A drive cylinder is disposed between the connecting base plate and the pushing base plate. The drive cylinder has a fixed end and a retractable free end. The free end of the drive cylinder is in the same direction as the movement of the first moving component.
[0009] A drive link is movably mounted on the support base, one end of the drive link is connected to the push base plate, and the drive link can reciprocate along its own axis.
[0010] A calibration bracket is provided with a first pressing plate, which is fixedly disposed relative to the bracket;
[0011] A first sliding bracket is movably mounted on the calibration bracket. A second pressing plate is provided on the first sliding bracket. The first sliding bracket is connected to the drive linkage. The moving direction of the first sliding bracket is consistent with the axial direction of the drive linkage. The second pressing plate is arranged parallel to the first pressing plate.
[0012] In some embodiments, the system further includes a first drive motor, a first lead screw, and a first nut. The first drive motor is fixedly disposed relative to the support base. The first lead screw is rotatably disposed on the support base and connected to the output shaft of the first drive motor. The first nut is sleeved on the first lead screw and is fixedly connected to the connecting base plate.
[0013] In some embodiments, there are two first sliding supports, symmetrically arranged on the calibration support, each of the first sliding supports being connected to at least one of the drive linkages, and the two ends of the second pressing plate being respectively connected to the two first sliding supports.
[0014] In some embodiments, the support base is provided with a plurality of first guide bearings, and the drive linkage is movably passed through the first guide bearings.
[0015] In some embodiments, a first limiting structure is provided between the first sliding bracket and the calibration bracket. The first limiting structure includes a first groove disposed on the calibration bracket and a first slider disposed on the first sliding bracket, or the first groove is disposed on the first sliding bracket, the first slider is disposed on the calibration bracket, and the first slider is disposed on the first groove.
[0016] In some embodiments, the relative sliding distance between the first groove and the first slider is not less than the relative moving distance between the first pressing plate and the second pressing plate.
[0017] In some embodiments, the calibration bracket is provided with a plurality of first pressing plates evenly spaced apart, and the first sliding bracket is provided with a plurality of second pressing plates evenly spaced apart. The number of the first pressing plates and the number of the second pressing plates are the same, and the first pressing plates are disposed below the second pressing plates.
[0018] In some embodiments, a plurality of first pressing plates are provided with first relief grooves, and the first relief grooves on the plurality of first pressing plates are oriented in the same direction.
[0019] In some embodiments, the drive cylinder is fixed to the connecting base plate, the free end of the drive cylinder is connected to the push base plate, and the number of drive cylinders is the same as the number of drive connecting rods.
[0020] Compared with the prior art, the beneficial effects of this utility model are:
[0021] This invention uses parallel, spaced-apart push base plates and connecting base plates, with a drive cylinder positioned between them. The drive cylinder connects the push base plates and the connecting base plates, and the push base plates move the second pressing plate toward the first pressing plate to adjust the gap between them. The drive cylinder then converts the pressure, thereby controlling and calibrating the deformation of the glass substrate.
[0022] Additional aspects and advantages of this application will be set forth in part in the description which follows, and will become apparent from the description or may be learned by practice of this application. Attached Figure Description
[0023] Figure 1 This is a perspective view of an automatic warpage calibration mechanism for glass encapsulation baking process according to the present invention;
[0024] Figure 2 This is an exploded view of an automatic warpage calibration mechanism for glass encapsulation baking process according to the present invention.
[0025] Figure 3 for Figure 2 A stereoscopic view from another perspective;
[0026] Figure 4 This is an exploded view of the first moving component of this utility model;
[0027] Figure 5 This is a schematic diagram of the pressing mechanism for an automatic warpage calibration mechanism during the glass encapsulation baking process according to the present invention.
[0028] Figure 6 This is a perspective view of the second pressing plate of this utility model;
[0029] Figure 7 This is a perspective view of the first pressing plate of this utility model. Detailed Implementation
[0030] The present application will be further described in detail below with reference to the accompanying drawings. In the description of the embodiments, unless otherwise stated, the terms "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and are not intended to indicate or imply that the present application must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present application.
[0031] like Figure 1 and Figure 2As shown, this utility model provides an automatic warpage calibration mechanism for glass encapsulation baking process, which mainly includes a support base 100 with a first installation space. In this embodiment, an isolation panel is provided on the outside of the calibration bracket 300 to avoid affecting the glass substrate 400 during the pressing process.
[0032] The first movable component is movably disposed within the first installation space of the support base 100. In this embodiment, the support base 100 is a rectangular frame structure composed of four side plates connected vertically in one step. The first translation component includes a connecting base plate 101 and a pushing base plate 102, which are parallel and spaced apart.
[0033] A drive cylinder 103 is provided between the connecting base plate 101 and the pushing base plate 102. The drive cylinder 103 includes a fixed end and a free end. In this embodiment, the fixed end of the drive cylinder 103 is connected to the connecting base plate 101, and the free end of the drive cylinder 103 is connected to the pushing base plate 102. The free end of the drive cylinder 103 and the moving direction of the first moving component are consistent. The connecting base plate 101 and the pushing base plate 102 are connected by the drive cylinder 103. The connecting base plate 101 and the pushing base plate 102 can move synchronously, and the connecting base plate 101 and the pushing base plate 102 can move relative to each other.
[0034] The drive link 104 is movably mounted on the support base 100. One end of the drive link 104 is connected to the push base plate 102. The drive link 104 can follow the first moving component to reciprocate linearly along its own axis.
[0035] The calibration bracket 300 can be fixed in place; it can be connected and fixed together with the support base 100, or it can be fixed separately. Figure 2 and Figure 3 As shown, a first pressing plate 301 is provided on the calibration bracket 300, and the first pressing plate 301 is fixedly disposed relative to the calibration bracket 300. Specifically, a first mounting slot 303 is provided on the calibration bracket 300, such as... Figure 5 As shown, the first pressing plate 301 is snapped into the first mounting slot 303;
[0036] A first sliding bracket 105 is movably mounted on a calibration bracket 300. A second pressing plate 1052 is mounted on the first sliding bracket 105, and the second pressing plate 1052 is parallel to the first pressing plate 301. The first sliding bracket 105 is fixedly connected to the other end of a drive linkage 104. The moving direction of the first sliding bracket 105 is consistent with the axial direction of the drive linkage 104. Through the reciprocating movement of the first sliding bracket 105, the second pressing plate 1052 can be driven to detach from the first pressing plate 301 or pressed onto the surface of the first pressing plate 301. In this embodiment, the second pressing plate 105 is positioned above the first pressing plate 1052, and the coverage area of the second pressing plate 1052 is similar to the area of the first pressing plate 301, thereby enabling the pressing and anti-warping of the encapsulation structure of a larger glass substrate 400. Figure 6 As shown, the second pressing plate 1052 includes a pressing frame 10522 and a pressing panel 10521. By replacing the pressing panel 10521, the pressing of glass substrates 400 of different sizes can be achieved.
[0037] In this embodiment, by connecting the base plate 101 and pushing the base plate 102 to move synchronously, the second pressing plate 1052 can be pressed against or moved away from the first pressing plate 301. Simultaneously, as... Figure 5 As shown, when a glass substrate 400 is placed on the first pressing plate 301, the second pressing plate 1052 moves closer to the first pressing plate 301 and presses the glass substrate 400. At this time, the position of the pushing base plate 102 is fixed, and the connecting base plate 101 continues to move away from the pushing base plate 102. The pressure is converted by the air pressure of the driving cylinder 103, thereby realizing the pressing of the glass substrate 400, controlling and calibrating the amount of warping deformation of the glass substrate 400, and avoiding warping of the glass substrate 400.
[0038] Alternatively, as another variation of this embodiment, the drive cylinder 103 can also be configured as a hydraulic cylinder structure, which can also achieve the above purpose.
[0039] Alternatively, the fixed end of the drive cylinder 103 can be set on the push base plate 102, and the free end of the drive cylinder 103 can be connected to the connecting base plate 101, which can also achieve the same technical effect between the connecting base plate 101 and the push base plate 102.
[0040] In one embodiment, to control the reciprocating movement of the first moving component, a first drive motor 106, a first lead screw 1061, and a first nut 1062 are also included. The first drive motor 1061 is fixedly mounted relative to the support base 100. The first lead screw 1061 is rotatably mounted on the support base 100 via a bearing. The first lead screw 1061 is connected to the output shaft of the first drive motor 106 via a coupling. The first nut 1062 is movably sleeved on the first lead screw 1061 via a threaded engagement, and the first nut 1062 is fixedly mounted relative to the connecting base plate 101. By controlling the forward and reverse rotation of the first drive motor 106, the reciprocating linear movement of the first moving component is achieved. In this embodiment, the first drive motor 106 is a servo motor, capable of receiving commands for automated operation. For example, when the second pressing plate 1052 presses against the first pressing plate 301, the first drive motor 106 receives a command and continues to drive the connecting base plate 101 to move as follows. Figure 1 As the device continues to move downwards in the indicated direction, the push base plate 102 is connected to the drive linkage 104, which in turn is connected to the first sliding bracket 105. The second pressing plate 1052 is also connected to the first sliding bracket 105. At this point, the push base plate 102 cannot move further downwards. By setting an electronic proportional valve to control the air pressure of the drive cylinder 103, and since the free end of the drive cylinder 103 is connected to the push base plate 102, the air pressure of the drive cylinder 103 is converted into the pressing force of the second pressing plate 1052, thereby achieving precise control of the pressing force.
[0041] In this embodiment, the first lead screw 1061 is located at the geometric center of the connecting base plate 101 and the pushing base plate 102, thereby ensuring that the driving force delivered by the first drive motor 106 to the connecting base plate 101 is evenly distributed. Then, through four symmetrically arranged drive connecting rods 104, the force balance of the first sliding bracket 105 during movement is ensured.
[0042] In one embodiment, in order to ensure that the pressing force of the second pressing plate 1052 is evenly distributed, two first sliding brackets 105 are provided on the calibration bracket 300. The two first sliding brackets 105 are symmetrically arranged about the calibration bracket 300. The two ends of the second pressing plate 1052 are fixed and horizontally arranged on the two first sliding brackets 105, thereby ensuring the balance of force of the second pressing plate 1052 during the pressing process.
[0043] Furthermore, each of the first sliding brackets 105 is connected to at least one of the driving links 104. In this embodiment, there are four driving links 104, symmetrically arranged on the support base 100. The four driving links 104 are parallel and of the same length. Combined with the horizontally arranged push base plate 102, this ensures that the two first sliding brackets 105 move synchronously, and that the second pressing plate 1052 is always parallel to the first pressing plate 301. In this embodiment, the driving links 104 are detachably connected to the first sliding brackets 105 through the connecting block 1042.
[0044] In one embodiment, in order to reduce the frictional resistance of the drive link 104 during reciprocating linear movement, a first guide bearing 1041 is provided on the support base 100, and the drive link 104 passes through the first guide bearing 1041, thereby reducing the frictional resistance between the drive link 1041 and the support base 100.
[0045] In one embodiment, to ensure that the first sliding bracket 105 reciprocates linearly relative to the calibration bracket 300, a first limiting structure is provided between the first sliding bracket 105 and the calibration bracket 300. Specifically, in this embodiment, a first sliding groove 302 is provided on the calibration bracket 300, and a first slider 1051 is provided on the first sliding bracket 105. The first sliding groove 302 is movably engaged with the first slider 1051, and the distribution direction of the first sliding groove 302 is parallel to the axial direction of the driving connecting rod 104, thereby ensuring that the first sliding bracket 105 is always in a linear movement state.
[0046] Alternatively, the first slide groove 302 can be disposed on the first sliding bracket 105, and the first slider 1051 can be disposed on the calibration bracket 300, which can also achieve the above purpose.
[0047] Furthermore, the relative movement distance between the first slide groove 105 and the first slider 1051 is not less than the relative movement distance between the first pressing plate 301 and the second pressing plate 1052, thereby ensuring that the first sliding bracket 105 will not detach from the calibration bracket 300.
[0048] In one embodiment, the calibration bracket 300 is provided with a certain length to achieve the pressing process of multiple glass substrates 400. Specifically, the calibration bracket 300 is provided with a plurality of evenly spaced first pressing plates 301, and the first sliding bracket 105 is provided with a plurality of evenly spaced second pressing plates 1052. The number of first pressing plates 301 and second pressing plates 1052 is the same, and the first pressing plates 301 are disposed below the second pressing plates 1052.
[0049] Furthermore, such as Figure 7As shown, multiple first pressing plates 301 are provided with first clearance grooves 3011, and the first clearance grooves 3011 located on different first pressing plates 301 face the same direction. By providing the first clearance grooves 3011, it is convenient to pick up and place the glass substrate 400.
[0050] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model. These improvements and modifications should also be considered within the scope of protection of this utility model.
Claims
1. An automatic warpage calibration mechanism during glass encapsulation baking process, characterized in that, include: The support base provides initial installation space; A first movable component is movably disposed within a first installation space of the support base. The first movable component includes a connecting base plate and a pushing base plate arranged in parallel and spaced apart. The connecting base plate and the pushing base plate can move synchronously in the same direction, and the connecting base plate and the pushing base plate can move relatively far apart. A drive cylinder is disposed between the connecting base plate and the pushing base plate. The drive cylinder has a fixed end and a retractable free end. The free end of the drive cylinder is in the same direction as the movement of the first moving component. A drive link is movably mounted on the support base, one end of the drive link is connected to the push base plate, and the drive link can reciprocate along its own axis. A calibration bracket is provided with a first pressing plate, which is fixedly disposed relative to the bracket; A first sliding bracket is movably mounted on the calibration bracket. A second pressing plate is provided on the first sliding bracket. The first sliding bracket is connected to the drive linkage. The moving direction of the first sliding bracket is consistent with the axial direction of the drive linkage. The second pressing plate is arranged parallel to the first pressing plate.
2. The automatic warpage calibration mechanism during glass encapsulation baking process according to claim 1, characterized in that, It also includes a first drive motor, a first lead screw, and a first nut. The first drive motor is fixedly mounted relative to the support base. The first lead screw is rotatably mounted on the support base and connected to the output shaft of the first drive motor. The first nut is sleeved on the first lead screw and is fixedly connected to the connecting base plate.
3. The automatic warpage calibration mechanism during glass encapsulation baking process according to claim 1, characterized in that, There are two first sliding brackets, symmetrically arranged on the calibration bracket. Each first sliding bracket is connected to at least one of the drive linkages. The two ends of the second pressing plate are respectively connected to the two first sliding brackets.
4. The automatic warpage calibration mechanism during glass encapsulation baking according to claim 3, characterized in that, The support base is provided with a plurality of first guide bearings, and the drive connecting rod is movably passed through the first guide bearings.
5. The automatic warpage calibration mechanism during glass encapsulation baking according to claim 1, characterized in that, A first limiting structure is provided between the first sliding bracket and the calibration bracket. The first limiting structure includes a first sliding groove disposed on the calibration bracket and a first slider disposed on the first sliding bracket, or the first sliding groove is disposed on the first sliding bracket, the first slider is disposed on the calibration bracket, and the first slider is disposed on the first sliding groove.
6. The automatic warpage calibration mechanism during glass encapsulation baking process according to claim 5, characterized in that, The relative sliding distance between the first groove and the first slider is not less than the relative moving distance between the first pressing plate and the second pressing plate.
7. The automatic warpage calibration mechanism during glass encapsulation baking according to claim 3, characterized in that, The calibration bracket is provided with a plurality of first pressing plates evenly spaced apart, and the first sliding bracket is provided with a plurality of second pressing plates evenly spaced apart. The number of the first pressing plates and the number of the second pressing plates are the same, and the first pressing plates are disposed below the second pressing plates.
8. The automatic warpage calibration mechanism during glass encapsulation baking according to claim 7, characterized in that, A first clearance groove is provided on a plurality of first pressing plates, and the first clearance grooves on the plurality of first pressing plates are oriented in the same direction.
9. The automatic warpage calibration mechanism during glass encapsulation baking process according to claim 3, characterized in that, The drive cylinder is fixed to the connecting base plate, and the free end of the drive cylinder is connected to the push base plate. The number of drive cylinders is the same as the number of drive connecting rods.