Silicon wafer basket adaptive to silicon wafers with different sizes

Abstract

The utility model relates to a silicon wafer flower basket adaptive to silicon wafers with different sizes. The silicon wafer flower basket comprises a main body, a sliding piece adjustably sliding on the main body, a first supporting rod for supporting the silicon wafers, a second supporting rod for supporting the silicon wafers, a guiding piece for guiding the sliding piece, a limiting piece for rapidly limiting the position of the sliding piece, and a locking piece for preventing the sliding piece from returning, the main body and the sliding piece are concave; clamping plates are arranged on the first supporting rod and the second supporting rod; a plurality of clamping plate arrays are arranged; a silicon wafer is clamped between two groups of adjacent clamping plates; the guide piece is arranged at the bottom of the sliding piece; a first groove corresponding to the sliding piece is formed in the main body; the sliding piece slides along the first groove; the guide piece is arranged on one side of the sliding piece; the locking piece is arranged on the other side of the sliding piece. The problem that in the using process of the silicon wafer basket, the silicon wafer basket cannot adapt to silicon wafers of different sizes, silicon wafer baskets of various specifications need to adapt to the silicon wafers of different sizes, and cost is increased is solved.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer flower baskets, and more particularly to a silicon wafer flower basket that is adapted to silicon wafers of different sizes. Background Technology

[0002] In the prior art, application number CN201920132417.1 discloses a silicon wafer flower basket, including an end plate and a toothed rod. A guide fluid is provided at the lower part of the toothed rod. The length of the guide fluid extending outward relative to the toothed rod gradually increases from one end to the other. The width of the guide fluid gradually increases with the length of the guide fluid. The toothed rod is cylindrical. The guide fluid also includes two intersecting side surfaces. The longest edge of the side surface is tangent to the outer circle of the toothed rod. The intersection of the two side surfaces is an arc with a radius less than 0.2 mm. The angle between the intersection line of the two side surfaces of the guide fluid and the toothed rod is 2°, and the angle between the two side surfaces of the guide fluid is 60°. The toothed rod is perpendicular to the end plate. Compared with the prior art, the silicon wafer flower basket of this invention significantly reduces residual liquid after texturing, thereby extending the efficacy period and shortening the drying time, thus improving production efficiency.

[0003] However, this silicon wafer basket cannot be adapted to silicon wafers of different sizes during use, requiring silicon wafer baskets of various specifications to adapt to different sizes of silicon wafers, which increases costs. Utility Model Content

[0004] This application provides a silicon wafer basket that can adapt to silicon wafers of different sizes, solving the problem that in the prior art, silicon wafer baskets cannot adapt to silicon wafers of different sizes during use, requiring multiple specifications of silicon wafer baskets to adapt to silicon wafers of different sizes, which leads to increased costs.

[0005] The technical solutions adopted in the embodiments of this application are as follows.

[0006] A silicon wafer basket adaptable to different sizes of silicon wafers includes a main body, an adjustable slider that slides on the main body, a first support rod supporting the silicon wafer, a second support rod supporting the silicon wafer, a guide for guiding the slider, a limiting member for quickly limiting the position of the slider, and a locking member to prevent the slider from retracting. Both the main body and the slider are concave. A locking plate is provided on both the first and second support rods. A plurality of locking plates are arranged in an array. The silicon wafer is inserted between two adjacent sets of locking plates. The guide is located at the bottom of the slider. A first groove corresponding to the slider is formed on the main body. The slider slides along the first groove. The guide is located on one side of the slider. The locking member is located on the other side of the slider.

[0007] As a further improvement to the above technical solution: a second groove is provided on one side of the main body; a third groove is provided on the other side of the main body; the limiting member corresponds to the second groove; the locking member corresponds to the third groove; and several sets of the second groove and the third groove are provided along the moving direction of the sliding member.

[0008] As a further improvement to the above technical solution: the first support rod is provided in two sets, and the two sets of the first support rod are arranged vertically; the second support rod is located at the bottom, and the clamping plates on the second support rod are all inclined upward; the two sets of the first support rod can be adapted to silicon wafers of different sizes and ensure that the silicon wafers are stable.

[0009] As a further improvement to the above technical solution: the guide is T-shaped; the first groove corresponds to the guide.

[0010] As a further improvement to the above technical solution: a fourth groove is provided on both sides of the sliding member; the limiting member includes a first elastic member and a limiting block for limiting; the first elastic member is an elastic sheet; the limiting block is square and has a chamfer on it for easy movement.

[0011] As a further improvement to the above technical solution: the locking member includes a second elastic member and a limiting plate for limiting; the second elastic member is an elastic sheet; the limiting plate is inclined at an angle; when the sliding member is pushed to move inward, the surface of the limiting plate abuts against the third groove, causing the second elastic member to be compressed until the limiting plate is engaged in the next set of the third grooves.

[0012] As a further improvement to the above technical solution: a scale is provided on the side wall of the main body; the slider corresponds to the scale; the scale indicates the silicon wafer of the current size when the slider moves to a certain position.

[0013] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages:

[0014] 1. By employing a concave main body and a T-shaped guide for the sliding component, the sliding component moves linearly through the first groove. Combined with real-time feedback of the adjustment amount via a scale indicator, stepless continuous adjustment of the silicon wafer size is achieved, adapting to the needs of various wafer specifications in semiconductor manufacturing and reducing the variety of special baskets required. Two sets of vertically positioned first support rods and a bottom-angled second support rod form a three-dimensional constraint. The card array, through its upward-angled design, fits snugly against the edge of the silicon wafer. Combined with the spacing changes after adjustment of the sliding component, it ensures stable positioning of silicon wafers of different sizes with zero gap, preventing misalignment during transportation or processing. Misalignment or collision damage; the elastic plate of the limiting component drives the square limiting block to embed into the second groove, and the chamfered design achieves light resistance adjustment for unidirectional movement of the sliding component; the elastic plate of the locking component cooperates with the inclined limiting plate, compressing the locking component when the sliding component is pushed inward, until the limiting plate is stuck into the third groove to form a hard stop. The dual locking mechanism completely eliminates the accidental retraction of the sliding component and ensures positioning reliability in high vibration environments; the scale on the side wall of the main body is linked to the position of the sliding component, allowing operators to intuitively match the target silicon wafer size without measuring tools, significantly improving changeover efficiency and reducing the risk of human error. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the first embodiment of the present invention;

[0016] Figure 2 This is a schematic diagram illustrating the guide component in this utility model;

[0017] Figure 3 This is a schematic diagram illustrating the locking component in this utility model;

[0018] Figure 4 This is a schematic diagram illustrating the limiting component in this utility model.

[0019] In the diagram: 1. Main body; 11. First groove; 12. Second groove; 13. Third groove; 14. Scale; 2. Sliding component; 21. Fourth groove; 3. First support rod; 4. Second support rod; 5. Guide component; 6. Limiting component; 61. First elastic component; 62. Limiting block; 7. Locking component; 71. Second elastic component; 72. Limiting plate; 8. Locking plate. Detailed Implementation

[0020] This application provides a silicon wafer basket that can adapt to silicon wafers of different sizes, solving the problem that in the prior art, silicon wafer baskets cannot adapt to silicon wafers of different sizes during use, requiring multiple specifications of silicon wafer baskets to adapt to silicon wafers of different sizes, which leads to increased costs.

[0021] The technical solution in this application embodiment is to solve the above problems, and the overall idea is as follows:

[0022] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0023] A silicon wafer basket adaptable to silicon wafers of different sizes includes a main body 1, an adjustable sliding member 2 on the main body 1, a first support rod 3 supporting the silicon wafer, a second support rod 4 supporting the silicon wafer, a guide member 5 guiding the sliding member 2, a limiting member 6 for quickly limiting the position of the sliding member 2, and a locking member 7 to prevent the sliding member 2 from retracting; both the main body 1 and the sliding member 2 are concave; both the first support rod 3 and the second support rod 4 are provided with a retaining plate 8; several retaining plates 8 are arranged in an array; the silicon wafer is inserted between two sets of adjacent retaining plates 8; the guide member 5 is located at the bottom of the sliding member 2; a first groove 11 corresponding to the sliding member 2 is opened on the main body 1; the sliding member 2 slides along the first groove 11; the guide member 5 is located on one side of the sliding member 2; and the locking member 7 is located on the other side of the sliding member 2.

[0024] A second groove 12 is provided on one side of the main body 1; a third groove 13 is provided on the other side of the main body 1; the limiting member 6 corresponds to the second groove 12; the locking member 7 corresponds to the third groove 13; both the second groove 12 and the third groove 13 are provided in several groups along the moving direction of the sliding member 2.

[0025] The first support rod 3 is provided in two sets, and the two sets of first support rod 3 are set vertically. The second support rod 4 is set at the bottom, and the clamping plates 8 on the second support rod 4 are all angled upward. The two sets of first support rods 3 can be adapted to silicon wafers of different sizes and ensure that the silicon wafers are stable.

[0026] The guide member 5 is T-shaped; the first groove 11 corresponds to the guide member 5.

[0027] The sliding member 2 has a fourth groove 21 on both sides; the limiting member 6 includes a first elastic member 61 and a limiting block 62; the first elastic member 61 is an elastic sheet; the limiting block 62 is square and has a chamfer for easy movement.

[0028] The locking member 7 includes a second elastic member 71 and a limiting plate 72 for limiting; the second elastic member 71 is an elastic sheet; the limiting plate 72 is inclined at an angle; when the sliding member 2 is pushed to move inward, the surface of the limiting plate 72 abuts against the third groove 13, causing the second elastic member 71 to be compressed until the limiting plate 72 is inserted into the next set of third grooves 13.

[0029] The main body 1 has a scale 14 on its side wall; the slider 2 corresponds to the scale 14; the scale 14 indicates the silicon wafer of the current size when the slider 2 moves to a certain position.

[0030] The concave body 1 cooperates with the T-shaped guide 5 of the slider 2, guiding the slider 2 to move linearly through the first groove 11. Combined with the scale 14 indicating the real-time feedback of the adjustment amount, it realizes stepless continuous adjustment of the silicon wafer size, adapting to the needs of various wafer specifications in semiconductor manufacturing and reducing the types of special baskets to be purchased. The two sets of first support rods 3 set vertically at the top and bottom and the second support rod 4 at the bottom form a three-dimensional constraint. The array of clamping plates 8 is designed to fit the edge of the silicon wafer at an upward angle. Combined with the change in spacing after the adjustment of the slider 2, it ensures stable positioning of silicon wafers of different sizes with zero gap, preventing displacement or collision damage during transportation or process handling. The elastic sheet of the positioning component 6 drives the square limiting block 62 to embed into the second groove 12. The chamfered design enables the one-way movement of the sliding component 2 with light resistance adjustment. The elastic sheet of the locking component 7 cooperates with the inclined limiting plate 72. When the sliding component 2 is pushed inward, the locking component 7 is compressed until the limiting plate 72 is stuck into the third groove 13 to form a hard stop. The double locking mechanism completely eliminates the accidental retraction of the sliding component 2 and ensures the positioning reliability in high vibration environment. The scale 14 on the side wall of the main body 1 is linked to the position of the sliding component 2. The operator can intuitively match the target silicon wafer size without measuring tools, which significantly improves the changeover efficiency and reduces the risk of human error.

[0031] By employing a concave main body 1 and a T-shaped guide 5 for the sliding member 2, the sliding member 2 is guided to move linearly through the first groove 11. Combined with the real-time feedback of the adjustment amount indicated by the scale 14, stepless continuous adjustment of the silicon wafer size is achieved, adapting to the needs of various wafer specifications in semiconductor manufacturing and reducing the types of special baskets to be purchased. The two sets of vertically arranged first support rods 3 and the bottom inclined second support rod 4 form a three-dimensional constraint. The array of clamping plates 8 is designed to fit the edge of the silicon wafer at an angle upwards. Combined with the spacing changes after the adjustment of the sliding member 2, it ensures stable positioning of silicon wafers of different sizes with zero gap, preventing displacement or collision damage during transportation or processing. The elastic sheet of the limiting member 6 drives the square limiting block 62 to embed into the second groove 12. The chamfered design enables the one-way movement of the sliding member 2 with light resistance adjustment. The elastic sheet of the locking member 7 cooperates with the inclined limiting plate 72. When the sliding member 2 is pushed inward, the locking member 7 is compressed until the limiting plate 72 is stuck into the third groove 13 to form a hard stop. The double locking mechanism completely eliminates the accidental retraction of the sliding member 2 and ensures the positioning reliability in high vibration environment. The scale 14 on the side wall of the main body 1 is linked to the position of the sliding member 2. The operator can intuitively match the target silicon wafer size without measuring tools, which significantly improves the changeover efficiency and reduces the risk of human error.

[0032] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0033] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A silicon wafer basket adapted to silicon wafers of different sizes, characterized in that, The device includes a main body (1), an adjustable sliding member (2) that slides on the main body (1), a first support rod (3) supporting a silicon wafer, a second support rod (4) supporting a silicon wafer, a guide member (5) guiding the sliding member (2), a limiting member (6) for quickly limiting the position of the sliding member (2), and a locking member (7) preventing the sliding member (2) from retracting; both the main body (1) and the sliding member (2) are concave; both the first support rod (3) and the second support rod (4) are provided with a retaining plate (8); several retaining plates (8) are arranged in an array; the silicon wafer is inserted between two sets of adjacent retaining plates (8); the guide member (5) is located at the bottom of the sliding member (2); the main body (1) has a first groove (11) corresponding to the sliding member (2); the sliding member (2) slides along the first groove (11); the guide member (5) is located on one side of the sliding member (2); and the locking member (7) is located on the other side of the sliding member (2).

2. The silicon wafer basket adapted to different sizes of silicon wafers as described in claim 1, characterized in that, A second groove (12) is provided on one side of the main body (1); a third groove (13) is provided on the other side of the main body (1); the limiting member (6) corresponds to the second groove (12); the locking member (7) corresponds to the third groove (13); both the second groove (12) and the third groove (13) are provided in several groups along the moving direction of the sliding member (2).

3. The silicon wafer basket adapted to different sizes of silicon wafers as described in claim 1, characterized in that, The first support rod (3) is provided in two sets and the two sets of the first support rod (3) are vertically arranged up and down; the second support rod (4) is provided at the bottom and the clamping plate (8) on the second support rod (4) is inclined upward; the two sets of the first support rod (3) can be adapted to silicon wafers of different sizes and ensure that the silicon wafers are stable.

4. The silicon wafer basket adapted to different sizes of silicon wafers as described in claim 1, characterized in that, The guide member (5) is T-shaped; the first groove (11) corresponds to the guide member (5).

5. The silicon wafer basket adapted to different sizes of silicon wafers as described in claim 2, characterized in that, The sliding member (2) has a fourth groove (21) on both sides; the limiting member (6) includes a first elastic member (61) and a limiting block (62); the first elastic member (61) is an elastic sheet; the limiting block (62) is square and has a chamfer for easy movement.

6. The silicon wafer basket adapted to different sizes of silicon wafers as described in claim 5, characterized in that, The locking member (7) includes a second elastic member (71) and a limiting plate (72) for limiting; the second elastic member (71) is an elastic sheet; the limiting plate (72) is inclined at an angle; when the sliding member (2) is pushed to move inward, the surface of the limiting plate (72) abuts against the third groove (13) so that the second elastic member (71) is compressed until the limiting plate (72) is inserted into the next set of the third grooves (13).

7. The silicon wafer basket adapted to different sizes of silicon wafers as described in claim 1, characterized in that, The main body (1) has a scale (14) on its side wall; the slider (2) corresponds to the scale (14); the scale (14) indicates the silicon wafer of the current size when the slider (2) moves to a certain position.

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