Cage frame driving mechanism and vacuum coating equipment
The combined design of the guide frame and the anti-rotation frame solves the problem of damage to the cylinder output shaft when the cage rotates, realizing cylinder protection and accurate sensing of the cage position, thereby improving the service life and working efficiency of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DONGGUAN ELEMENT VACUUM TECHNOLOGY CO LTD
- Filing Date
- 2025-05-26
- Publication Date
- 2026-05-08
AI Technical Summary
In existing vacuum coating equipment, the cage is lifted by the cylinder output shaft when it rotates, which can easily cause the bearings to jam. The rotational force is then transmitted to the cylinder output shaft, which may damage the cylinder.
The cage-driven mechanism includes a drive module and a driven module. By cooperating with the guide frame and the anti-rotation frame, the anti-rotation frame moves back and forth on the guide frame to ensure that the guide shaft can only move up and down and cannot rotate, thus preventing the cylinder output shaft from rotating.
It effectively protects the cylinder from damage, ensures that the cage does not tilt at any height, and the sensor accurately senses the position, thereby improving the service life and working efficiency of the equipment.
Smart Images

Figure CN224212752U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating equipment technology, and in particular to a cage drive mechanism and a vacuum coating equipment. Background Technology
[0002] Some vacuum coating equipment on the market uses cages on which products are placed for coating. During coating, the cage rotates within the coating chamber, and each product on the cage is coated one by one. For the cage to rotate within the coating chamber, it needs to be lifted first, and then driven to rotate by a motor. However, if the bearings are jammed, lifting the cage via the output shaft of a cylinder and then rotating it can transmit rotational force to the cylinder's output shaft, potentially damaging the cylinder.
[0003] For example, the multi-chamber sputtering coating equipment disclosed in Chinese patent application number CN202411482016.0 specifically discloses that "a third drive cylinder can drive the second rotating seat to move upward, so that the first rotating seat and the second rotating seat abut against the upper and lower ends of the annular cylinder seat respectively." This design directly lifts the cage frame through the output shaft of the cylinder. When the cage frame rotates, if the bearings jam, the rotational force will be transmitted to the output shaft of the cylinder, which may damage the cylinder. Utility Model Content
[0004] In view of this, the present invention addresses the deficiencies of the existing technology and its main purpose is to provide a cage drive mechanism that can ensure that the cylinder output shaft does not rotate, prevent cylinder damage, and thus overcome the shortcomings of the existing technology.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] This application provides a cage drive mechanism, characterized in that: it includes a drive module and a driven module disposed on one side of the drive module; the driven module includes a drive source, a guide frame, a guide shaft, a support plate, and an anti-rotation frame; the output shaft of the drive source is connected to a first end of the guide shaft; the support plate is rotatably disposed at a second end of the guide shaft;
[0007] The anti-rotation frame is mounted on the guide shaft and can move back and forth on the guide frame.
[0008] Preferably, the drive module includes a servo motor and a drive disk connected to the output shaft of the servo motor; the cage is placed on a support disk; the support disk pushes the cage against the drive disk, and the drive disk drives the cage to rotate.
[0009] Preferably, the driven module further includes a first sensor; the main body of the first sensor is mounted on a guide frame; the sensing element of the first sensor is mounted on a guide shaft; the sensing element can trigger the first sensor.
[0010] Preferably, the guide frame includes a first plate, a second plate, and a guide rod connecting the first plate and the second plate together; a protective sleeve is provided on the guide rod; the first end of the anti-rotation frame is provided on the guide shaft; the second end of the anti-rotation frame is provided with a latch; the latch is engaged with the protective sleeve.
[0011] Preferably, the sheath is a nylon sheath; the two ends of the nylon sheath are provided with limiting parts, which can block the bayonet.
[0012] Preferably, the guide frame is provided with a first bushing; the guide shaft passes through the first bushing and is connected to a bearing on the support plate.
[0013] Preferably, the driving source is a cylinder, and the cylinder's exhaust port is equipped with a quick exhaust valve.
[0014] Preferably, the main shaft of the cage is provided with second bushings at both ends; the support plate and the drive plate are truncated cone-shaped; the support plate and the drive plate can be embedded in the second bushings.
[0015] This application provides a vacuum coating equipment, including a cage drive mechanism; a drive module and a driven module are mounted on a cabinet, and a coating chamber is provided inside the cabinet; the cage is placed on a conveying device; and a second sensor for sensing the cage is provided on the cabinet.
[0016] Compared with the prior art, this utility model has obvious advantages and beneficial effects. Specifically, as can be seen from the above technical solution, the cage frame is placed on the driven module, and the driving module drives the cage frame to rotate in the driven module.
[0017] During operation, the cage is placed on the support plate; the output shaft of the drive source lifts the support plate via the guide shaft. Because the anti-rotation frame is mounted on the guide shaft and can move flexibly up and down, it can move synchronously up and down with the guide shaft. Simultaneously, the anti-rotation frame, in conjunction with the guide shaft, ensures that the guide shaft can only move up and down, not rotate, thus preventing the cylinder output shaft from rotating and eliminating the possibility of cylinder damage.
[0018] At the same time, the guide shaft works in conjunction with the guide frame, ensuring that the cage will not tilt at any height. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the driven module of Embodiment 1 of this utility model.
[0020] Figure 2 This is a schematic diagram of the driven module of Embodiment 1 of this utility model.
[0021] Figure 3 This is a cross-sectional schematic diagram of the driven module according to Embodiment 1 of this utility model.
[0022] Figure 4 This is a schematic diagram of the cooperation between the driven module and the driving module in Embodiment 1 of this utility model.
[0023] Figure 5 This is a schematic diagram of the drive module and cage frame in Embodiment 1 of this utility model.
[0024] Figure 6 This is a schematic diagram of the driven module and cage frame in Embodiment 1 of this utility model.
[0025] Figure 7 This is a schematic diagram of the overall embodiment two of this utility model.
[0026] Explanation of reference numerals in the attached diagram:
[0027] 10. Drive module; 11. Servo motor; 12. Drive disk; 13. Third plate; 20. Slave module; 210. Drive source; 211. Quick exhaust valve; 212. Guide shaft; 213. Anti-rotation frame; 214. Bayonet; 215. Support plate; 216. Bearing; 217. Adapter; 220. Guide frame; 221. First plate; 222. Second plate; 223. Guide rod; 224. Sheath; 225. Limiting part; 226. Dustproof bushing; 227. First bushing; 228. First sensor; 229. Sensing plate; 30. Cabinet; 31. Conveying device; 32. Second sensor; 33. Cage; 34. Second bushing; 35. Main shaft. Detailed Implementation
[0028] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.
[0029] Example 1
[0030] Please refer to Figures 1 to 6 As shown, it illustrates the specific structure of a preferred embodiment of the present invention, which is a cage frame 33 drive mechanism.
[0031] The drive source 210 lifts the support plate 215 via the guide shaft 212. When the support plate 215 rotates with the cage 33, the anti-rotation frame 213 cooperates with the guide frame 220 to ensure that the guide shaft 212 does not rotate. Therefore, the output shaft of the cylinder also does not rotate, which can effectively protect the cylinder.
[0032] This application provides a cage frame 33 driving mechanism, characterized in that it includes a driving module 10 and a driven module 20 disposed on one side of the driving module 10; the driven module 20 includes a driving source 210, a guide frame 220, a guide shaft 212, and an anti-rotation frame 213; the output shaft of the driving source 210 is connected to the first end of the guide shaft 212; a support plate 215 is rotatably disposed at the second end of the guide shaft 212; the anti-rotation frame 213 is disposed on the guide shaft 212 and can move back and forth on the guide frame 220. In this embodiment, the driving source 210 is a cylinder, but it can also be a hydraulic cylinder. The driving module 10 provides power to the cage frame 33, enabling the cage frame 33 to rotate on the driven module 20. The output shaft of the driving source 210 is connected to the guide shaft 212 via an adapter 217. When the driving source 210 drives the support plate 215 to move up and down through the guide shaft 212, the anti-rotation frame 213 moves up and down synchronously. With the cooperation of the anti-rotation bracket 213 and the guide bracket 220, the guide shaft 212 can only move up and down, and cannot rotate. Similarly, the output shaft of the cylinder cannot rotate, thus effectively protecting the output shaft of the drive source 210. Simultaneously, thanks to the guide bracket 220, the guide shaft 212 remains skewed, ensuring that the cage 33 will not tilt at any height. The anti-rotation bracket 213 can be installed on the guide shaft 212 using screws or pins.
[0033] Preferably, the drive module 10 includes a servo motor 11 and a drive disk 12 connected to the output shaft of the servo motor 11; the cage 33 is placed on a support disk 215; the support disk 215 pushes the cage 33 against the drive disk 12, and the drive disk 12 drives the cage 33 to rotate. The power of the servo motor 11 is directly transmitted to the drive disk 12 through a coupling, and the drive disk 12 drives the cage 33 to rotate. This structure is simpler and has fewer components.
[0034] Preferably, the driven module 20 further includes a first sensor 228; the main body of the first sensor 228 is mounted on the guide frame 220; the sensing element 228 of the first sensor 228 is mounted on the guide shaft 212; the sensing element 228 can trigger the first sensor 228. The first sensor 228 can be an electrical sensor. The first sensor 228 is mounted on the guide rod 223. Two or more first sensors 228 are mounted on the guide frame 220. The sensing element 228 and the guide shaft 212 move up and down synchronously, and the sensing element 228 can be triggered by different main bodies. This design can accurately sense the movement position of the cage 33 with better precision.
[0035] Preferably, the guide frame 220 includes a first plate 221, a second plate 222, and a guide rod 223 connecting the first plate 221 and the second plate 222 together; a protective sleeve 224 is provided on the guide rod 223; the first end of the anti-rotation frame 213 is provided on the guide shaft 212; the second end of the anti-rotation frame 213 is provided with a latch 214; the latch 214 is engaged with the protective sleeve 224. The first plate 221 is provided on the housing of the drive source 210. The output shaft of the drive source 210 passes through the first plate 221 and is connected to the guide shaft 212. The protective sleeve 224 has a certain degree of flexibility, which can reduce the impact force of the anti-rotation frame 213 on the guide rod 223, and is beneficial to protect the guide frame 220. The anti-rotation bracket 213 is mounted on the guide shaft 212; the slot 214 of the anti-rotation bracket 213 is engaged with the protective sleeve 224, and the anti-rotation bracket 213 can move up and down in the protective sleeve 224. Therefore, the guide shaft 212 can only move up and down and cannot rotate, which can ensure that the drive source 210 is not damaged.
[0036] Preferably, the sheath 224 is a nylon sheath; the two ends of the nylon sheath are provided with limiting portions 225, which can block the latch 214. The nylon sheath has a certain degree of flexibility and high wear resistance, and has a long service life. The limiting portions 225 at both ends of the nylon sheath can control the movement position of the anti-rotation frame 213 in the sheath 224, and can prevent the latch 214 from loosening from the nylon sheath, thus ensuring high reliability. The limiting portions 225 can be columnar or block-shaped.
[0037] Preferably, the guide frame 220 is provided with a first bushing 227; the guide shaft 212 passes through the first bushing 227 and is connected to the bearing 216 on the support plate 215. The support plate 215 can rotate on the bearing 216. The guide shaft 212 passes through the first bushing 227 and then connects to the bearing 216. Under the action of the first bushing 227, the guide shaft 212 can be prevented from deviating, ensuring that the cage 33 is always in a horizontal state. Specifically, the guide shaft 212 passes through the dustproof bushing 226, the first bushing 227, and the second plate 222 from bottom to top, which helps to ensure the accuracy of the movement of the guide shaft 212. At the same time, the second plate 222 can seal the coating chamber, resulting in better sealing.
[0038] Preferably, the drive source 210 is a cylinder, and the cylinder's exhaust port is equipped with a quick exhaust valve 211. The cylinder's exhaust port can be controlled by the quick exhaust valve 211. This design makes the drive source 210 respond more promptly, and its working efficiency and accuracy are higher. The quick exhaust valve 211 is an important component in pneumatic control, a one-way directional control element. It is usually configured between the cylinder and the reversing valve, allowing the gas in the cylinder to be discharged directly through this valve without passing through the reversing valve. During the cylinder's operation, the quick exhaust valve 211 serves as the exhaust port, eliminating the need for a long air path back to the solenoid valve for exhaust; instead, it directly discharges into the atmosphere from the quick exhaust valve port, reducing the problem of slow cylinder operation caused by poor exhaust.
[0039] Preferably, the main shaft 35 of the cage frame 33 is provided with second bushings 34 at both ends; the support plate 215 and the drive plate 12 are frustum-shaped; the support plate 215 and the drive plate 12 can be embedded in the second bushings 34. The cage frame 33 is placed on the support plate 215, the support plate 215 lifts the cage frame 33 onto the drive plate 12, and the drive plate 12 drives the cage frame 33 to rotate on the support plate 215. The servo motor 11 is mounted on the cabinet 30 via a third plate 13. The third plate 13 serves to install and seal the coating chamber.
[0040] Example 2
[0041] This application provides a vacuum coating equipment, including a cage frame 33 drive mechanism; a drive module 10 and a driven module 20 are mounted on a cabinet 30, and a coating chamber is provided inside the cabinet 30; the cage frame 33 is placed on a conveying device 31; a second sensor 32 for sensing the cage frame 33 is provided on the cabinet 30. With the cage frame 33 drive mechanism, this vacuum coating equipment will not tilt when the cage frame 33 is lifted; the output shaft of the drive source 210 will not be damaged when the cage frame 33 rotates, resulting in a longer service life and lower maintenance costs. The conveying device 31 can be a conveyor belt, a conveyor chain, or a conveyor trolley.
[0042] In summary, the key design feature of this invention lies in the cooperation between the anti-rotation frame 213 and the guide frame 220, which ensures that the guide shaft 212 can only move up and down and cannot rotate, thus preventing the cylinder output shaft from rotating and avoiding damage to the cylinder. Simultaneously, the cooperation between the guide shaft 212 and the guide frame 220 ensures that the cage 33 will not tilt at any height, and the sensor can accurately detect the position of the cage 33.
[0043] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.
Claims
1. A cage drive mechanism, characterized in that: It includes a drive module and a driven module disposed on one side of the drive module; the driven module includes a drive source, a guide frame, a guide shaft, a support plate, and an anti-rotation frame; the output shaft of the drive source is connected to a first end of the guide shaft; the support plate is rotatably disposed at a second end of the guide shaft; The anti-rotation frame is mounted on the guide shaft and can move back and forth on the guide frame.
2. The cage drive mechanism according to claim 1, characterized in that: The drive module includes a servo motor and a drive disk connected to the output shaft of the servo motor; the cage is placed on a support disk; the support disk pushes the cage towards the drive disk, and the drive disk drives the cage to rotate.
3. The cage drive mechanism according to claim 1, characterized in that: The driven module further includes a first sensor; the main body of the first sensor is mounted on a guide frame; the sensing element of the first sensor is mounted on a guide shaft; the sensing element can trigger the first sensor.
4. A cage drive mechanism according to claim 1 or 3, characterized in that: The guide frame includes a first plate, a second plate, and a guide rod connecting the first plate and the second plate together; a protective sleeve is provided on the guide rod; the first end of the anti-rotation frame is provided on the guide shaft; the second end of the anti-rotation frame is provided with a bayonet; the bayonet is engaged with the protective sleeve.
5. The cage drive mechanism according to claim 4, characterized in that: The sheath is a nylon sheath; the two ends of the nylon sheath are provided with limiting parts, which can block the bayonet.
6. The cage drive mechanism according to claim 1, characterized in that: The guide frame is provided with a first bushing; the guide shaft passes through the first bushing and is connected to the bearing on the support plate.
7. The cage drive mechanism according to claim 1, characterized in that: The driving source is a cylinder, and the cylinder's exhaust port is equipped with a quick exhaust valve.
8. A cage drive mechanism according to claim 2, characterized in that: The main shaft of the cage is provided with second bushings at both ends; the support plate and the drive plate are truncated cone-shaped; the support plate and the drive plate can be embedded in the second bushings.
9. A vacuum coating apparatus, characterized in that: The invention includes a cage drive mechanism according to any one of claims 1-8; a drive module and a driven module are mounted on a cabinet, and a coating chamber is provided inside the cabinet; the cage is placed on a conveying device; and a second sensor for sensing the cage is provided on the cabinet.
Citation Information
Patent Citations
Multi-chamber sputter coating equipment
CN119332222A