Five-dimensional coupling precision adjusting table for optical device

Abstract

The utility model discloses an optical device five-dimensional coupling precision adjusting bench, and relates to the five-dimensional coupling precision adjusting bench technology field, the optical device five-dimensional coupling precision adjusting bench comprises an adjusting platform and a line accommodating mechanism, the adjusting platform is internally provided with the line accommodating mechanism, and the line accommodating mechanism comprises an accommodating drawer slidably connected to the inner position of the adjusting platform. The inner wall of the storage drawer is fixedly connected with an insulating layer, the interior of the storage drawer is fixedly connected with a wire arrangement frame, the inner surface of the adjusting platform is provided with a wire outlet hole, the storage drawer is installed in the adjusting platform and can be pulled out, the wire arrangement frame separates lines, and the wire outlet hole corresponds to different types of lines. Compared with an existing common precision adjusting table, the five-dimensional coupling precision adjusting table for the optical device has the advantages that the drawer type circuit storage mechanism can arrange multiple groups of circuits, the wire arrangement frame is adaptive to different specifications, the device is prevented from being wound and damaged, and the situation that the position of the optical device is deviated due to shaking caused by external force interference or self-structure influence in the adjusting process is avoided.

Description

Technical Field

[0001] This utility model relates to the field of five-dimensional coupling precision adjustment stage technology, specifically a five-dimensional coupling precision adjustment stage for optical devices. Background Technology

[0002] The five-dimensional coupled precision stage is a high-end device used for precision positioning and adjustment. Through the coordinated movement between various dimensions, it meets the precision positioning requirements in complex scenarios. It has a wide range of applications. In the field of optics, it can be used for laser optical path calibration and optical component installation and debugging. In semiconductor manufacturing, it is suitable for chip packaging and precision positioning of photolithography equipment. In the scientific research field, it is often used for sample stage adjustment of precision instruments such as scanning electron microscopes and atomic force microscopes. With its high precision and multi-dimensional coordinated adjustment characteristics, the five-dimensional coupled precision stage provides key support for high-end manufacturing and cutting-edge scientific research. However, the existing five-dimensional coupled precision stage has certain defects.

[0003] A precision adjusting slide, as described in application number CN202322292548.5, includes two adjusting plates and a transition plate, with the transition plate positioned between the two adjusting plates. The transition plate has slide rails on both its upper and lower sides, with the slide rails perpendicular to each other. Each adjusting plate has a groove on its adjacent side corresponding to the slide rail. Adjusting mechanisms are connected to the corresponding adjusting plates on the two slide rails. Each adjusting mechanism includes an adjusting seat fixedly mounted on one end of the slide rail. Each adjusting plate has an adjusting ear integrally formed on one side corresponding to the adjusting seat. A differential screw is threaded into the adjusting ear, and the other end of the differential screw passes through the adjusting seat and is fitted with a locking nut. A compression spring connects the adjusting ear and the adjusting seat. This invention features a reasonable design and compact structure, effectively ensuring the adjustment accuracy of micro-feed, guaranteeing the stable and smooth sliding of the adjusting plates during adjustment, and ensuring stable locking of the adjusting plates after adjustment, thus guaranteeing the adjustment accuracy of the adjusting slide. However, the precision adjustment stage is easily affected by external interference or its own structure during the adjustment process, which can cause the optical device to shift position. In addition, the circuits are messy and easily entangled during the debugging of the optical device, affecting the adjustment and even pulling and damaging the device.

[0004] Therefore, in view of this, we have studied and improved the existing structure to address its shortcomings, and proposed a five-dimensional coupling precision adjustment stage for optical devices. Utility Model Content

[0005] The purpose of this invention is to provide a five-dimensional coupling precision adjustment stage for optical devices to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a five-dimensional coupling precision adjustment stage for optical devices, comprising an adjustment platform and a line storage mechanism. The adjustment platform is provided with a line storage mechanism, which includes a storage drawer slidably connected to the inside of the adjustment platform. An insulating layer is fixedly connected to the inner wall of the storage drawer, and a cable management rack is fixedly connected to the inside of the storage drawer. A cable outlet hole is provided on the inner surface of the adjustment platform.

[0007] Preferably, an adjusting rod is fixedly connected inside the adjusting platform, and a clamping plate is fixedly connected to one end of the adjusting rod.

[0008] Preferably, a rubber pad is fixedly connected to one side of the clamping plate, and a lateral adjustment component is provided at the bottom of the adjustment platform.

[0009] Preferably, the bottom of the lateral adjustment component is fixedly connected to a stable support mechanism, and the stable support mechanism includes a support column fixedly connected to the bottom position of the lateral adjustment component, the bottom of the support column is fixedly connected to a support plate, and the top of the support plate is fixedly connected to a counterweight groove.

[0010] Preferably, the bottom of the lateral adjustment component is fixedly connected to a nut seat, and the inner surface of the nut seat is threaded with a lead screw.

[0011] Preferably, a guide rail is provided on one side of the lead screw, and a slider is slidably connected to the outer surface of the guide rail.

[0012] Preferably, a base plate is fixedly connected to the bottom of the guide rail, and an adjusting shock-absorbing rod is threadedly connected to the bottom of the base plate.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model, through the design of a cable storage mechanism, facilitates the storage, retrieval, and maintenance of cables by operators. The insulating layer covering the inner wall of the drawer not only effectively isolates current and prevents leakage accidents, but also has wear-resistant properties, avoiding wear on the cable sheath. This not only improves the efficiency of cable management, but more importantly, it avoids the impact of messy cables on the adjustment platform. The cables will not generate pulling force when the adjustment platform moves, interfering with the adjustment accuracy and preventing cable breakage due to excessive pulling. The cable storage mechanism keeps the cables neat and orderly, ensuring that the adjustment platform is not obstructed by cables when adjusting horizontally and vertically, ensuring a smooth and accurate adjustment process, and extending the service life of the equipment.

[0015] 2. This utility model, through the setting of a stable support mechanism, utilizes the lever principle to lower the overall center of gravity, which greatly improves the stability of the adjustment platform and effectively reduces the swaying caused by the shift of the center of gravity. When external vibrations are transmitted to the adjustment platform, the kinetic energy can be quickly converted into heat energy, and the vibration energy is consumed through the friction between molecules. The deformation and recovery process of the damping material accurately offsets vibrations of different frequencies, ensuring that the counterweight groove and even the entire adjustment platform remain stable. This provides a solid and reliable foundation for the precise adjustment of optical devices and avoids the impact of vibration on the adjustment accuracy and the performance of optical devices. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall disassembled structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0018] Figure 3 This is a schematic diagram of the circuit storage mechanism 2 of this utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the stabilizing support mechanism 7 of this utility model.

[0020] In the diagram: 1. Adjustment platform; 2. Cable management mechanism; 201. Storage drawer; 202. Insulation layer; 203. Cable management rack; 204. Cable outlet hole; 3. Adjustment rod; 4. Clamping plate; 5. Rubber pad; 6. Lateral adjustment assembly; 7. Stable support mechanism; 701. Support column; 702. Support plate; 703. Counterweight groove; 8. Nut seat; 9. Lead screw; 10. Guide rail; 11. Slider; 12. Base plate; 13. Adjustable shock absorber rod. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] like Figures 1-3As shown, a five-dimensional coupling precision adjustment stage for optical devices includes an adjustment platform 1 and a circuit storage mechanism 2. The circuit storage mechanism 2 is installed inside the adjustment platform 1, and includes a storage drawer 201 slidably connected to the inside of the adjustment platform 1. An insulating layer 202 is fixedly connected to the inner wall of the storage drawer 201, and a cable management rack 203 is fixedly connected inside the storage drawer 201. A cable outlet hole 204 is opened on the inner surface of the adjustment platform 1. The storage drawer 201 is installed inside the adjustment platform 1 and can be pulled out. The cable management rack 203 separates the circuits, and the cable outlet hole 204 corresponds to different types of circuits. The optical device circuits are introduced through the cable outlet hole 204, and after being sorted and organized by the cable management rack 203, they are stored in the drawer to avoid tangling.

[0023] like Figure 1 As shown, an adjusting rod 3 is fixedly connected inside the adjusting platform 1, and a clamping plate 4 is fixedly connected to one end of the adjusting rod 3. A rubber pad 5 is fixedly connected to one side of the clamping plate 4. A horizontal adjusting component 6 is provided at the bottom of the adjusting platform 1. The cross-shaped symmetrical adjusting groove of the adjusting platform 1 provides a flexible basis for fixing optical devices. Four sets of pull-out adjusting rods 3 are embedded in the groove. The adjusting rods 3 are pull-out and fixed by fastening bolts. By pulling the adjusting rods 3 in different directions simultaneously or separately, the spacing of the clamping plate 4 can be flexibly adjusted to adapt to optical devices of different sizes and achieve tight clamping. The rubber pad 5 avoids scratches caused by rigid contact.

[0024] Furthermore, a stabilizing support mechanism 7 is fixedly connected to the bottom of the lateral adjustment component 6. The stabilizing support mechanism 7 includes a support column 701 fixedly connected to the bottom of the lateral adjustment component 6. A support plate 702 is fixedly connected to the bottom of the support column 701, and a counterweight groove 703 is fixedly connected to the top of the support plate 702. According to the weight of the optical device on the adjustment platform 1, the number and position of the counterweight blocks inside the counterweight groove 703 are adjusted to lower the center of gravity of the entire adjustment platform 1. The shock absorption damping inside the support column 701 absorbs external vibrations and maintains the stability of the counterweight groove 703.

[0025] Furthermore, a nut seat 8 is fixedly connected to the bottom of the horizontal adjustment component 6, and a lead screw 9 is threadedly connected to the inner surface of the nut seat 8. A guide rail 10 is provided on one side of the lead screw 9, and a slider 11 is slidably connected to the outer surface of the guide rail 10. A motor is provided at one end of the drive lead screw 9. The motor serves as a power source to drive the lead screw 9 and cause the nut seat 8 to move linearly along the axis of the lead screw 9. The slider 11 is fixed to the bottom of the horizontal adjustment component 6. The linear movement of the nut seat 8 drives the slider 11, thereby realizing the precise adjustment of the adjustment platform 1 in both the horizontal and vertical directions, meeting the high-precision adjustment requirements under different working conditions.

[0026] Furthermore, a base plate 12 is fixedly connected to the bottom of the guide rail 10, and an adjusting damping rod 13 is threadedly connected to the bottom of the base plate 12. The adjusting damping rod 13 consists of a threaded adjusting rod 3 and a damping pad. By rotating the threaded adjusting rod 3, the adjusting platform 1 is adjusted to be horizontal, and the damping pad helps to maintain the stability of the device.

[0027] Working Principle: When using the five-dimensional coupling precision adjustment stage for optical devices, first rotate the adjustment damping rod 13 at the bottom of the base plate 12 to adjust the adjustment platform 1 to a horizontal state. Place the optical device on the surface of the adjustment platform 1, pull out the adjustment rod 3, and drive the clamping plate 4 to move along the adjustment groove. The rubber pad 5 on the inner side of the clamping plate 4 tightly fits the device of different sizes through elastic deformation. The motor drives the lead screw 9 to rotate. The nut seat 8 and the lead screw 9 are connected by a thread to convert the rotational motion of the lead screw 9 into linear motion, which drives the connected slider 11 to slide along the guide rail 10. The horizontal adjustment component 6 operates in the same way, thereby realizing the precise horizontal and vertical displacement of the adjustment platform 1. Then, add counterweights as needed inside the counterweight groove 703 of the stabilizing support mechanism 7 to enhance the stability of the platform by lowering the center of gravity. Finally, pull the storage drawer 201 of the cable storage mechanism 2. The insulating layer 202 on the inner wall isolates the current and prevents the risk of leakage. Pass the excess cable through the cable outlet hole 204 and use the cable management rack 203. The working principle of this five-dimensional coupling precision adjustment stage for optical devices is to perform layered sorting and winding to avoid tangling of the circuits.

Claims

1. A five-dimensional coupling precision adjustment stage for optical devices, comprising an adjustment platform (1) and a circuit storage mechanism (2), characterized in that, The adjustment platform (1) is provided with a cable storage mechanism (2) inside, and the cable storage mechanism (2) includes a storage drawer (201) slidably connected to the inside of the adjustment platform (1). An insulating layer (202) is fixedly connected to the inner wall of the storage drawer (201), and a cable rack (203) is fixedly connected inside the storage drawer (201). A cable outlet hole (204) is opened on the inner surface of the adjustment platform (1).

2. The five-dimensional coupling precision adjustment stage for optical devices according to claim 1, characterized in that, An adjustment rod (3) is fixedly connected inside the adjustment platform (1), and a clamp (4) is fixedly connected to one end of the adjustment rod (3).

3. The five-dimensional coupling precision adjustment stage for optical devices according to claim 2, characterized in that, A rubber pad (5) is fixedly connected to one side of the clamp (4), and a horizontal adjustment component (6) is provided at the bottom of the adjustment platform (1).

4. The five-dimensional coupling precision adjustment stage for optical devices according to claim 3, characterized in that, The bottom of the lateral adjustment component (6) is fixedly connected to a stable support mechanism (7), and the stable support mechanism (7) includes a support column (701) fixedly connected to the bottom position of the lateral adjustment component (6). The bottom of the support column (701) is fixedly connected to a support plate (702), and the top of the support plate (702) is fixedly connected to a counterweight groove (703).

5. A five-dimensional coupling precision adjustment stage for optical devices according to claim 4, characterized in that, The bottom of the lateral adjustment component (6) is fixedly connected to a nut seat (8), and the inner surface of the nut seat (8) is threaded with a lead screw (9).

6. The five-dimensional coupling precision adjustment stage for optical devices according to claim 5, characterized in that, A guide rail (10) is provided on one side of the lead screw (9), and a slider (11) is slidably connected to the outer surface of the guide rail (10).

7. A five-dimensional coupling precision adjustment stage for optical devices according to claim 6, characterized in that, The bottom of the guide rail (10) is fixedly connected to a base plate (12), and the bottom of the base plate (12) is threadedly connected to an adjusting damping rod (13).

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