Electrostatic chuck capable of rotating multiple objects

Abstract

The utility model discloses an electrostatic chuck capable of rotating multiple objects. The electrostatic chuck comprises a base plate, a partition plate installed in the base plate, a fluted disc installed above the partition plate, a connecting frame installed between the partition plate and the fluted disc, and a cover plate arranged above the connecting frame and connected with the fluted disc. The partition plate is provided with at least six adsorption cabins and a conductive groove, and a driven gear and a ball are arranged between every two adsorption cabins; at least one driven tooth in the partition plate is provided with a driving motor, and a plurality of conducting strips are arranged on the inner wall of the conducting groove. Through the design of the multiple adsorption cabins in the partition plate, multiple objects can be adsorbed and released at the same time, and the problem that a traditional electrostatic chuck can only treat a single object is solved; the fluted disc is meshed with the driven teeth, the rotating function of the suction cup is achieved, the rotating angle is adjusted through the driving motor, and the problem that a traditional electrostatic suction cup cannot rotate and cannot adjust the angle is solved.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck technology, specifically an electrostatic chuck capable of rotating multiple objects. Background Technology

[0002] Electrostatic chucks, as a common adsorption device, are widely used in semiconductor manufacturing, precision machining, automated production lines, and other fields. Their working principle is to fix objects to the chuck surface through electrostatic adsorption, offering advantages such as no mechanical contact, no pollution, and ease of operation.

[0003] However, traditional electrostatic chucks can usually only attract and release a single object, and cannot handle multiple objects at the same time. This is inefficient in application scenarios that require the simultaneous operation of multiple objects, such as multi-workpiece processing and multi-object handling.

[0004] Traditional electrostatic chucks cannot rotate or adjust the rotation angle after adsorbing an object. This makes it difficult to meet high-precision requirements in applications that require precise adjustment of the object's position or angle, such as precision assembly and optical component adjustment.

[0005] Due to the lack of rotation and angle adjustment functions, traditional electrostatic chucks often fail to accurately position objects at the right angle during adsorption and release, affecting the precision of subsequent processing or assembly.

[0006] To solve the above problems, there is an urgent need for an electrostatic chuck that can simultaneously attract multiple objects, has rotation and angle adjustment functions, and can precisely control the position and angle of the objects. Utility Model Content

[0007] Purpose of the utility model: To provide an electrostatic chuck that can rotate multiple objects, so as to solve the above-mentioned problems existing in the prior art.

[0008] Technical solution: A rotatable electrostatic chuck for multiple objects, comprising:

[0009] A substrate, a partition installed inside the substrate, a toothed disc installed above the partition, a connecting frame installed between the partition and the toothed disc, and a cover plate disposed above the connecting frame and connected to the toothed disc;

[0010] The partition is provided with at least six adsorption chambers and a conductive groove, and a driven tooth and a ball are provided between two adsorption chambers; at least one driven tooth in the partition is provided with a drive motor, and multiple conductive plates are provided on the inner wall of the conductive groove.

[0011] The conductive groove is provided with a power supply compartment that penetrates the toothed disc, and the outer wall of the power supply compartment is provided with multiple metal contacts that correspond to and contact the conductive sheet.

[0012] The toothed disc has a groove for rolling engagement with the balls, and the connecting frame also has balls for rolling engagement with the groove.

[0013] In a further embodiment, the connecting frame has a threaded hole for connecting with the partition, and the cover plate also has a threaded hole for connecting with the gear plate.

[0014] In a further embodiment, the gear plate meshes with the driven gear, and the drive motor is installed in a groove in the partition plate, wherein a heat dissipation hole is provided in the groove, penetrating the partition plate and the substrate.

[0015] In a further embodiment, an electrode layer, a dielectric layer, and a heating element are sequentially installed inside the adsorption chamber, and the electrode layer, dielectric layer, and heating element are all connected to a conductive sheet.

[0016] In a further embodiment, the connecting frame is threadedly connected to the partition and rolls with the gear disc, and the cover plate is threadedly connected to the gear disc.

[0017] In a further embodiment, multiple conductive sheets are individually electrically connected to the electrode layer, dielectric layer, and heating element within the adsorption chamber.

[0018] Beneficial effects: This utility model discloses a rotatable electrostatic chuck for multiple objects. Through the design of multiple adsorption chambers in the partition, this utility model achieves simultaneous adsorption and release of multiple objects, solving the problem that traditional electrostatic chucks can only handle single objects. The meshing of the toothed disc and the driven teeth enables the chuck's rotation function, and the rotation angle is adjusted by a drive motor, solving the problem that traditional electrostatic chucks cannot rotate or adjust the angle. The cooperative design of the roller groove and the ball bearings ensures the smoothness and precision of the rotation process, improving the accuracy of the object's position and angle.

[0019] The independent conductive sheet design enables independent power supply and control for each adsorption chamber, improving the flexibility and precision of the suction cup. The drive motor rotates the driven teeth along the toothed disc, realizing the rotation function of the suction cup. By controlling the motor to adjust the rotation angle, the problem of traditional electrostatic suction cups being unable to rotate is solved. Attached Figure Description

[0020] Figure 1 This is a perspective view of the present invention.

[0021] Figure 2 This is a three-dimensional half-sectional schematic diagram of the present invention.

[0022] Figure 3 This is the front view of this utility model.

[0023] Figure 4 This is a bottom view of the present invention.

[0024] Figure 5This is a schematic diagram of the substrate structure of this utility model.

[0025] The attached figures are labeled as follows: 1. Substrate; 2. Gear disk; 3. Power supply compartment; 4. Connecting frame; 5. Cover plate; 11. Partition plate; 12. Ball bearing; 13. Heat dissipation hole; 14. Driven tooth; 15. Adsorption compartment; 16. Conductive groove; 21. Roll groove; 31. Metal contact; 51. Threaded hole; 161. Conductive sheet. Detailed Implementation

[0026] This invention utilizes a rotatable electrostatic chuck capable of handling multiple objects. Through the design of multiple adsorption chambers within a partition, it achieves simultaneous adsorption and release of multiple objects, solving the problem that traditional electrostatic chucks can only handle single objects. The meshing of the toothed disc and driven teeth enables the chuck's rotation, and the rotation angle is adjusted via a drive motor, overcoming the inability of traditional electrostatic chucks to rotate or adjust angles. The cooperative design of the roller groove and ball bearings ensures the smoothness and precision of the rotation process, improving the accuracy of object position and angle. The specific embodiments are described in detail below.

[0027] Reference Figures 1-5 As shown, a rotatable electrostatic chuck for multiple objects includes:

[0028] The substrate 1, the partition 11 installed in the substrate 1, the toothed disc 2 installed above the partition 11, the connecting frame 4 installed between the partition 11 and the toothed disc 2, and the cover plate 5 disposed above the connecting frame 4 and connected to the toothed disc 2; the connecting frame 4 has a threaded hole 51 connected to the partition 11, and the cover plate 5 also has a threaded hole 51 connected to the toothed disc 2.

[0029] The gear disc 2 meshes with the driven tooth 14, the connecting frame 4 is threadedly connected to the partition plate 11 and rolls with the gear disc 2, and the cover plate 5 is threadedly connected to the gear disc 2.

[0030] The partition 11 is provided with at least six adsorption chambers 15 and a conductive groove 16. A driven tooth 14 and a ball bearing 12 are provided between two adsorption chambers 15. At least one driven tooth 14 in the partition 11 is provided with a drive motor. Multiple conductive sheets 161 are provided on the inner wall of the conductive groove 16. The drive motor is installed in a groove in the partition 11. A heat dissipation hole 13 is provided in the groove, penetrating the partition 11 and the substrate 1. An electrode layer, a dielectric layer and a heating element are sequentially installed in the adsorption chamber 15. The electrode layer, dielectric layer and heating element are all connected to the conductive sheets 161.

[0031] The conductive groove 16 is provided with a power supply chamber 3 that penetrates the toothed disc 2. The outer wall of the power supply chamber 3 is provided with a plurality of metal contacts 31 that correspond to and contact the conductive sheet 161. The plurality of conductive sheets 161 are individually electrically connected to the electrode layer, dielectric layer and heating element in the adsorption chamber 15.

[0032] The toothed disc 2 has a groove 21 that rolls with the ball 12, and the connecting frame 4 also has a ball 12 that rolls with the groove 21.

[0033] Working principle: When an object needs to be adsorbed, the conductive sheet 161 in the conductive groove 16 provides power to the electrode layer, dielectric layer and heating element. At this time, the toothed disk 2 remains stationary to ensure that the position of the adsorption chamber 15 is fixed. The connecting frame 4 is fixed to the partition plate 11 through the threaded hole 51 to ensure the stability of the adsorption chamber 15. The cover plate 5 is connected to the toothed disk 2 through the threaded hole 51 to further fix the position of the toothed disk 2. After the electrode layer is energized, it generates electrostatic adsorption force, which then adsorbs the object onto the surface of the suction cup.

[0034] When an object needs to be heated, the heating element starts working and is powered through the conductive sheet 161;

[0035] When rotation is required, the toothed disk 2 starts to rotate under the drive of the drive motor. The groove 21 on the toothed disk 2 cooperates with the ball 12 to ensure smooth rotation. The cover plate 5 is connected to the toothed disk 2 through the threaded hole 51, thereby causing the substrate 1 to rotate. In addition, the electrode layer, dielectric layer and heating element in the adsorption chamber 15 continue to work to ensure that the object remains in an adsorbed state during rotation.

[0036] When release is required, the conductive sheet 161 and heating element in the conductive groove 16 stop supplying power, the electrostatic adsorption force disappears, and the object is released; the toothed disc 2 stops rotating and remains stationary, and the drive motor stops working and remains stationary.

[0037] The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations can be made to the technical solutions of the present invention, and all such equivalent transformations fall within the protection scope of the present invention.

Claims

1. A rotatable electrostatic chuck for multiple objects, characterized in that, include: A substrate, a partition installed inside the substrate, a toothed disc installed above the partition, a connecting frame installed between the partition and the toothed disc, and a cover plate disposed above the connecting frame and connected to the toothed disc; The partition is provided with at least six adsorption chambers and a conductive groove, and a driven tooth and a ball are provided between two adsorption chambers; at least one driven tooth in the partition is provided with a drive motor, and multiple conductive plates are provided on the inner wall of the conductive groove. The conductive groove is provided with a power supply compartment that penetrates the toothed disc, and the outer wall of the power supply compartment is provided with multiple metal contacts that correspond to and contact the conductive sheet. The toothed disc has a groove for rolling engagement with the balls, and the connecting frame also has balls for rolling engagement with the groove.

2. The rotatable multi-object electrostatic chuck according to claim 1, characterized in that: The connecting frame has a threaded hole for connecting with the partition plate, and the cover plate also has a threaded hole for connecting with the gear plate.

3. The rotatable multi-object electrostatic chuck according to claim 1, characterized in that: The gear plate meshes with the driven gear, and the drive motor is installed in a groove in the partition plate. The groove has heat dissipation holes that penetrate the partition plate and the substrate.

4. The rotatable multi-object electrostatic chuck according to claim 1, characterized in that: The adsorption chamber is equipped with an electrode layer, a dielectric layer, and a heating element in sequence, all of which are connected to a conductive sheet.

5. A rotatable electrostatic chuck for multiple objects according to claim 1, characterized in that: The connecting frame is threadedly connected to the partition and rolls with the gear disc, and the cover plate is threadedly connected to the gear disc.

6. The rotatable multi-object electrostatic chuck according to claim 1, characterized in that: Multiple conductive sheets are individually electrically connected to the electrode layer, dielectric layer, and heating element within the adsorption chamber.

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