XY-axis fine adjustment table
By introducing a photoelectric position detection system and cross roller guides into the XY-axis fine-tuning stage, the problems of insufficient accuracy and large structural space occupation of existing fine-tuning stages are solved, achieving high-precision and low-cost position sensing and response.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- GUANGDONG KAIFU ELECTRONIC TECH CO LTD
- Filing Date
- 2025-05-30
- Publication Date
- 2026-05-12
AI Technical Summary
Existing XY axis fine-tuning stages have poor accuracy, occupy a lot of space, and are costly.
A position detection system based on photoelectric principles is introduced. By setting up optical couplers and light-shielding plates inside the fixed seat and slide, intermittent light blocking is achieved to monitor the displacement status. Combined with the arrangement of cross roller guides and vertical cross motors, the position sensing accuracy and response speed are improved.
It achieves high-precision position feedback and closed-loop control, with good sensitivity and response speed, and has a simple structure and low cost.
Smart Images
Figure CN224223834U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of fine-tuning stage technology, and specifically to an XY-axis fine-tuning stage. Background Technology
[0002] A fine-tuning stage is a mechanical device used to achieve precise displacement adjustment, commonly found in high-precision fields such as optical experiments, precision measurement, and laser processing. It achieves sub-millimeter or even micrometer-level translation through methods such as screw propulsion, gear transmission, or electric control.
[0003] The current XY axis fine-tuning stages on the market have the following problems: their accuracy is poor, they occupy a lot of space in terms of structure, and their cost is not low. Therefore, they urgently need to be improved.
[0004] The technical problem to be solved by this utility model is to provide a high-precision XY-axis fine-tuning stage. Utility Model Content
[0005] The technical problem this invention addresses is: providing a high-precision XY-axis fine-tuning stage; to achieve high-precision position feedback and closed-loop control, this fine-tuning stage introduces a position detection system based on photoelectric principles. Several first optical couplers are spaced apart inside the fixed base, while a first light-blocking plate and a second light-blocking plate are installed inside the X-axis slide. The first light-blocking plate intermittently blocks the light from the first optical couplers during slide movement, thereby generating a clear blocking signal during X-axis movement. Similarly, the second light-blocking plate intermittently blocks several second optical couplers inside the Y-axis slide to monitor the displacement state of the Y-axis. Compared to traditional limit switches, this design is not only simpler in structure but also achieves high-precision position sensing at a lower cost, exhibiting good sensitivity and response speed.
[0006] An XY-axis fine-tuning stage includes a fixed base; an X-axis slide block that slides and engages with the fixed base; a Y-axis slide block that slides and engages with the X-axis slide block; a plurality of first optical couplers spaced apart inside the fixed base; a first light-shielding plate and a second light-shielding plate inside the X-axis slide block; a plurality of second optical couplers spaced apart inside the Y-axis slide block; the first light-shielding plates intermittently block the light from the first optical couplers; the second light-shielding plates intermittently block the light from the second optical couplers; an X-axis drive motor is fixedly mounted on one side of the fixed base; a first lead screw is connected to the shaft of the X-axis drive motor; the first lead screw is threadedly connected to the X-axis slide block; and the X-axis slide block achieves linear reciprocating motion via the X-axis drive motor; a Y-axis drive motor is fixedly mounted on one side of the Y-axis slide block; a second lead screw is connected to the shaft of the Y-axis drive motor; the second lead screw is threadedly connected to the X-axis slide block; and the Y-axis slide block achieves linear reciprocating motion via the Y-axis drive motor.
[0007] Preferably, the mounting direction of the X-axis drive motor is perpendicular to the mounting direction of the Y-axis drive motor.
[0008] Preferably, the top of the fixed base is provided with two first slide rails spaced apart; and the two ends of the first slide rails are respectively connected to the fixed base and the X-axis slide; and the top of the X-axis slide is provided with two second slide rails spaced apart; and the two ends of the second slide rails are respectively connected to the X-axis slide and the Y-axis slide; and both the first slide rails and the second slide rails are cross roller guides.
[0009] Preferably, the cross-sections of both the first and second light-shielding sheets are serrated; and the number of serrations in the first light-shielding sheet corresponds to the number of first optical couplers; the number of serrations in the second light-shielding sheet corresponds to the number of second optical couplers.
[0010] Preferably, a cable is also provided to connect to the first optocoupler and the second optocoupler; and the cable is in the shape of a spring wire.
[0011] Preferably, the length and width of the X-axis slide are both less than 80 mm; the length and width of the Y-axis slide are both less than 80 mm.
[0012] Compared with existing technologies, the advantages of this invention are as follows: To achieve high-precision position feedback and closed-loop control, the XY-axis fine-tuning stage of this invention introduces a position detection system based on photoelectric principles. Several first optical couplers are spaced apart inside the fixed base, while a first light-blocking plate and a second light-blocking plate are installed inside the X-axis slide. The first light-blocking plate intermittently blocks the light from the first optical couplers during slide movement, thereby generating a clear blocking signal during X-axis movement. Similarly, the second light-blocking plate intermittently blocks several second optical couplers inside the Y-axis slide to monitor the displacement state of the Y-axis. Compared with traditional limit switches, this invention not only has a simpler structure but also achieves high-precision position sensing at a lower cost, exhibiting good sensitivity and response speed.
[0013] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model.
[0016] Figure 2 This is a utility model Figure 1 Another structural diagram from another angle.
[0017] Figure 3 This is a utility model Figure 1 A schematic diagram of its decomposed structure.
[0018] Figure 4 This is a utility model Figure 3 A magnified structural diagram at point A.
[0019] Figure 5 This is a utility model Figure 2 A schematic diagram of its decomposed structure.
[0020] Figure 6 This is a utility model Figure 5 A magnified structural diagram at point B.
[0021] In the diagram: 1. Fixed base; 2. X-axis slide; 3. Y-axis slide; 4. First optocoupler; 5. First light shield; 6. Second light shield; 7. Second optocoupler; 8. X-axis drive motor; 9. First lead screw; 10. Y-axis drive motor; 11. Second lead screw; 12. First slide rail; 13. Second slide rail; 14. Cable. Detailed Implementation
[0022] The technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0023] It should be noted that the terms "first," "second," etc., used in this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this disclosure described herein can be implemented in orders other than those illustrated or described herein. The implementation methods described in the following exemplary embodiments do not represent all implementation methods consistent with this disclosure.
[0024] Please see Figures 1-6In this embodiment of the present invention, an XY-axis fine-tuning stage includes a fixed base 1; an X-axis slide 2 that slides and engages with the fixed base 1; a Y-axis slide 3 that slides and engages with the X-axis slide 2; a plurality of first optical couplers 4 spaced apart inside the fixed base 1; a first light-shielding plate 5 and a second light-shielding plate 6 inside the X-axis slide 2; a plurality of second optical couplers 7 spaced apart inside the Y-axis slide 3; and the first light-shielding plate 5 intermittently blocks the light from the first optical couplers 4; and the second light-shielding plate 6 intermittently blocks the light from the second optical couplers 7. The light-blocking mechanism is as follows: an X-axis drive motor 8 is fixedly mounted on one side of the fixed base 1; a first lead screw 9 is connected to the rotating shaft of the X-axis drive motor 8; the first lead screw 9 is threadedly connected to the X-axis slide 2; and the X-axis slide 2 achieves linear reciprocating motion through the X-axis drive motor 8; a Y-axis drive motor 10 is fixedly mounted on one side of the Y-axis slide 3; a second lead screw 11 is connected to the rotating shaft of the Y-axis drive motor 10; the second lead screw 11 is threadedly connected to the X-axis slide 2; and the Y-axis slide 3 achieves linear reciprocating motion through the Y-axis drive motor 10.
[0025] Specifically, the device consists of a fixed base 1, an X-axis slide 2, and a Y-axis slide 3. These three components are stacked layer by layer through sliding cooperation to construct a composite platform capable of achieving minute displacement adjustments in the XY plane. The device's structure fully utilizes the screw-nut transmission principle: an X-axis drive motor 8 is mounted on one side of the fixed base 1, its shaft connected to a first lead screw 9. The first lead screw 9 is threadedly connected to the X-axis slide 2, converting the motor's rotational motion into the reciprocating linear motion of the X-axis slide 2 in the horizontal direction. A Y-axis drive motor 10 is mounted on one side of the Y-axis slide 3, threadedly connected to the Y-axis slide 3 via a second lead screw 11, enabling precise vertical movement. This ensures that the two axes do not interfere with each other and can be independently controlled, making it suitable for applications requiring precise position adjustments, such as microscopic imaging, laser alignment, and precision machining. Furthermore, to achieve high-precision position feedback and closed-loop control, this fine-tuning stage incorporates a position detection system based on photoelectric principles. Several first optical couplers 4 are spaced apart inside the fixed base 1, while a first light-blocking plate 5 and a second light-blocking plate 6 are installed inside the X-axis slide 2. The first light-blocking plate 5 intermittently blocks the light from the first optical couplers 4 during the movement of the slide, thereby generating a clear blocking signal during the X-axis movement. Similarly, the second light-blocking plate 6 intermittently blocks several second optical couplers 7 inside the Y-axis slide 3 to monitor the displacement state of the Y-axis. This intermittent light blocking combined with the detection method of multiple optical couplers is not only simpler in structure than traditional limit switches, but also achieves high-precision position sensing at a lower cost, and has good sensitivity and response speed.
[0026] Furthermore, the mounting direction of the X-axis drive motor 8 is perpendicular to the mounting direction of the Y-axis drive motor 10.
[0027] Specifically, the XY-axis fine-tuning stage features a rationally optimized spatial design in its structural layout. The installation direction of the X-axis drive motor 8 is perpendicular to that of the Y-axis drive motor 10. This arrangement not only reflects the compactness of the mechanical structure but also significantly improves the stability and maintainability of the entire platform in actual use. Specifically, the X-axis drive motor 8 is typically installed horizontally, with its shaft coaxially connected to the first lead screw 9, achieving linear reciprocating motion of the X-axis slide 2 through threaded transmission. The Y-axis drive motor 10, on the other hand, is installed vertically, with its shaft connected to the second lead screw 11, forming a threaded engagement with the Y-axis slide 3, thereby driving the Y-axis slide 3 to move vertically. This vertically intersecting motor arrangement not only meets the requirement of orthogonal X and Y axis motion directions but also effectively avoids direct spatial interference between the two motors, reducing the overall size of the equipment and facilitating the integrated installation of the fine-tuning stage. Furthermore, the vertical mounting design helps improve the system's heat dissipation efficiency and the rationality of cable routing. Motors do not obstruct each other, providing ample wiring space and reducing the risk of system performance degradation due to heat buildup or cable interference. More importantly, in high-precision applications, the orthogonality of the motor mounting directions reduces dynamic response differences caused by structural asymmetry, thereby improving the synchronization accuracy and response consistency of the entire platform during dual-axis linkage. The X-axis drive motor and Y-axis drive motor, in conjunction with the encoder, provide position feedback.
[0028] Furthermore, the top of the fixed base 1 is provided with two first slide rails 12 spaced apart; and the two ends of the first slide rails 12 are respectively connected to the fixed base 1 and the X-axis slide 2; and the top of the X-axis slide 2 is provided with two second slide rails 13 spaced apart; and the two ends of the second slide rails 13 are respectively connected to the X-axis slide 2 and the Y-axis slide 3; and both the first slide rails 12 and the second slide rails 13 are cross roller guides.
[0029] Specifically, to improve the motion accuracy and structural stability of the fine-tuning stage, the XY-axis fine-tuning stage adopts a high-precision crossed roller guide system in its sliding structure. Specifically, the top of the fixed base 1 is provided with two first slide rails 12 spaced apart, and the top of the X-axis slide 2 is provided with two second slide rails 13 spaced apart. Both the first slide rails 12 and the second slide rails 13 are of the crossed roller guide type. This significantly enhances the guiding accuracy and load-bearing capacity of each slide during the sliding process.
[0030] Crossed roller guides are a widely used structural form in high-precision linear motion platforms. Their internal rollers are arranged in a 90° cross pattern. Compared to traditional linear or sliding guides, they have a lower coefficient of friction, stronger torsional rigidity, and higher positioning accuracy, exhibiting superior performance, especially under multi-directional loads. By placing this guide form on the top of the fixed base 1 and the X-axis slide 2, it not only ensures high-precision linear movement between the X-axis slide 2 and the fixed base 1, and between the Y-axis slide 3 and the X-axis slide 2, but also effectively suppresses minor vibrations and structural sway during operation, thereby improving the overall platform's operational stability under micron-level precision requirements.
[0031] Furthermore, the cross-sections of the first light-shielding plate 5 and the second light-shielding plate 6 are both serrated; and the number of serrations of the first light-shielding plate 5 corresponds to the number of the first optical couplers 4; the number of serrations of the second light-shielding plate 6 corresponds to the number of the second optical couplers 7.
[0032] Specifically, to achieve high-resolution detection and accurate feedback of the sliding seat displacement, the XY-axis fine-tuning stage employs a rake-tooth-shaped light-shielding plate design in its photoelectric detection structure. Specifically, the cross-sections of both the first light-shielding plate 5 and the second light-shielding plate 6 are rake-tooth shaped, with the number of rake teeth on the first light-shielding plate 5 corresponding one-to-one with the number of first optical couplers 4, and the number of rake teeth on the second light-shielding plate 6 corresponding to the number of second optical couplers 7. This not only improves the resolution accuracy of the light-shielding process but also provides a solid foundation for the system to achieve more refined displacement signal acquisition and motion feedback.
[0033] The rake-shaped light-shielding plate is typically composed of several equally spaced tooth-shaped protrusions and slits. During the movement of the slide, as the light-shielding plate moves, the teeth and slits alternately block or allow the corresponding optical coupler sensors to pass through, thereby generating a series of feedback signals. Encoders are located behind the X-axis drive motor and the Y-axis drive motor to provide real-time feedback. When the light-shielding plate is blocked, no signal is received; when the light-shielding plate is not blocked, a signal can be received. When the light-shielding plate is blocked, the signal is fed back to the control host, which then knows the position of the movement.
[0034] When the fine-tuning stage starts, it will automatically return to zero. After starting, the motor will rotate clockwise by default, the lead screw will push forward, and the slider will also push forward. Then, the rake teeth at the end of the light-shielding plate will block the farthest photocoupler, and the control host will know that it has moved to the farthest end, and then execute the return program. When the rake teeth move to the middle, they will block the middle photocoupler, and the control host will know that it has moved to the middle, that is, it has been aligned in the middle, thus achieving zero return.
[0035] Furthermore, compared to planar or single-piece light-shielding plates, the rake-like structure offers better repeatability and anti-interference capabilities. During sliding, even with slight mechanical errors or vibrations, the alternating light-shielding signals maintain good detection regularity, contributing to more stable displacement recognition by the system.
[0036] Furthermore, a cable 14 is provided to connect to the first optocoupler 4 and the second optocoupler 7; and the cable 14 is in the shape of a spring wire.
[0037] Specifically, to ensure stable transmission of photoelectric signals and flexible cooperation of the cable 14 during the movement of the slide, the XY-axis fine-tuning stage is also equipped with a cable 14 connected to the first optocoupler 4 and the second optocoupler 7, and the cable 14 adopts a spring-like structure. Spring-like cables, also known as spiral cables, are essentially stretchable and resilient spiral cables with good ductility and bending resistance. In the application scenario where the cable 14 connects the first optocoupler 4 and the second optocoupler 7, the cable 14 will periodically expand and contract with the reciprocating motion of the X-axis slide 2 and the Y-axis slide 3. Traditional straight cables are prone to fatigue, tangling, or even breakage due to repeated pulling, while spring-like cables can automatically adapt to the movement stroke of the slide while maintaining a stable connection, preventing the cable 14 from interfering with the mechanical movement path or causing cable 14 to accumulate. The spring-like cable 14 effectively disperses the bending fatigue concentration points of the original dynamic and static cables 14; increases the lifespan of the cable 14 to withstand millions of bends without failure; in addition, the spiral structure can effectively improve the system's anti-interference capability. Its cables 14 are more compactly distributed and have stronger mechanical resilience, which improves the ability to resist mechanical damage from a physical structure perspective.
[0038] Furthermore, the length and width of the X-axis slide 2 are both less than 80 mm; the length and width of the Y-axis slide 3 are both less than 80 mm.
[0039] Specifically, to meet the requirements of precise displacement adjustment within a compact space, this XY-axis fine-tuning stage features a highly compact structural design. The length and width of both the X-axis slide 2 and the Y-axis slide 3 are less than 80 mm, giving the entire platform advantages in miniaturization and lightweight design, facilitating integration into high-precision applications with limited space constraints. This compact design not only enhances the device's versatility and flexibility but also makes it more suitable for modular integration with various high-precision sensors, microscope stages, precision optical systems, and automated detection mechanisms. While maintaining the complete functional structure of the fine-tuning platform (such as drive, guide rails, and feedback), controlling the slide size to within 80 mm effectively reduces the overall space occupied by the platform, giving it excellent embedded adaptability.
[0040] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention.
Claims
1. An XY-axis fine-tuning stage, comprising a fixed base (1); characterized in that, The fixed base (1) is provided with an X-axis slide (2) that slides with it; and the X-axis slide (2) is provided with a Y-axis slide (3) that slides with it; and the fixed base (1) is provided with a plurality of first optical couplers (4) at intervals inside; and the X-axis slide (2) is provided with a first light-shielding plate (5) and a second light-shielding plate (6) inside; and the Y-axis slide (3) is provided with a plurality of second optical couplers (7) at intervals inside; and the first light-shielding plate (5) intermittently blocks the light from the first optical coupler (4); and the second light-shielding plate (6) intermittently blocks the light from the second optical coupler (7); and one side of the fixed base (1) is fixed An X-axis drive motor (8) is fixedly provided; and the shaft of the X-axis drive motor (8) is connected to a first lead screw (9); and the first lead screw (9) is threadedly connected to the X-axis slide (2); and the X-axis slide (2) is made to reciprocate linearly through the X-axis drive motor (8); and a Y-axis drive motor (10) is fixedly provided on one side of the Y-axis slide (3); and the shaft of the Y-axis drive motor (10) is connected to a second lead screw (11); and the second lead screw (11) is threadedly connected to the X-axis slide (2); and the Y-axis slide (3) is made to reciprocate linearly through the Y-axis drive motor (10).
2. The XY-axis fine-tuning stage according to claim 1, characterized in that, The mounting direction of the X-axis drive motor (8) is perpendicular to the mounting direction of the Y-axis drive motor (10).
3. The XY-axis fine-tuning stage according to claim 1, characterized in that, The top of the fixed base (1) is provided with two first slide rails (12) spaced apart; and the two ends of the first slide rails (12) are respectively connected to the fixed base (1) and the X-axis slide (2); and the top of the X-axis slide (2) is provided with two second slide rails (13) spaced apart; and the two ends of the second slide rails (13) are respectively connected to the X-axis slide (2) and the Y-axis slide (3); and both the first slide rails (12) and the second slide rails (13) are cross roller guides.
4. The XY-axis fine-tuning stage according to claim 1, characterized in that, The cross-sections of the first light-shielding plate (5) and the second light-shielding plate (6) are both serrated; and the number of serrations of the first light-shielding plate (5) corresponds to the number of the first optical coupler (4); the number of serrations of the second light-shielding plate (6) corresponds to the number of the second optical coupler (7).
5. The XY-axis fine-tuning stage according to claim 1, characterized in that, It is also provided with a cable (14) connected to the first optocoupler (4) and the second optocoupler (7); and the cable (14) is in the shape of a spring wire.
6. The XY-axis fine-tuning stage according to claim 1, characterized in that, The length and width of the X-axis slide (2) are both less than 80 mm; the length and width of the Y-axis slide (3) are both less than 80 mm.