Automatic coating workpiece hanging and taking device
By combining robotic arms and fixtures, the automated hanging and picking of workpieces in sputtering coating machines is realized, solving the problems of low hanging efficiency and reliability in existing technologies and improving the operating efficiency and stability of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- NANYANG SHIMIZU CO LTD
- Filing Date
- 2025-05-30
- Publication Date
- 2026-05-12
AI Technical Summary
The existing sputtering coating machine has low efficiency and reliability in picking up coated workpieces. Especially under the requirements of high efficiency and high load capacity, manual operation is labor-intensive and time-consuming, which affects the efficiency of the equipment.
The system employs robotic arms and fixtures, using clamping and limiting cylinders to ensure accurate positioning and stability of the jig plate. Sliding structures and guide wheels enable precise movement and hooking of the jig plate. Combined with the operation of a six-axis robotic arm, automated hooking is achieved.
It improves the efficiency and reliability of hanging and picking up coated workpieces, reduces the labor intensity of manual operation, and enhances the overall efficiency and reliability of the equipment.
Smart Images

Figure CN224227188U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sputtering coating technology, specifically to an automated hanging and picking device for coated workpieces. Background Technology
[0002] Common coating processes mainly include vapor deposition and sputtering, with the appropriate process selected based on the material and process requirements. In sputtering coating machines, the target material is located in the center of the coating chamber, while the workpiece to be coated is placed on a cylindrical frame within the chamber. During the sputtering process, the cylindrical frame rotates at high speed to ensure a uniform coating. Because the cylindrical frame rotates at high speed within the chamber, the workpiece needs to remain stable. In sputtering coating machines, the workpiece is mounted on a rectangular fixture plate, which is then manually hung onto the cylindrical frame. After coating, the fixture plates are removed. However, the cylindrical frame is bulky, and as customers demand higher efficiency, the load capacity of the equipment increases, leading to greater fixture height and weight. Manual hanging and removal is both laborious and time-consuming, severely limiting coating efficiency. Therefore, improving hanging efficiency and reliability has become an urgent industry need. Utility Model Content
[0003] To address the aforementioned problems, this utility model provides an automated workpiece hanging and picking device, aiming to improve the efficiency and reliability of workpiece hanging and picking.
[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0005] An automated workpiece loading and unloading device includes a robotic arm, a fixture, and a jig plate for placing the coated workpiece; the fixture includes a clamping plate with a fixed clamping groove and a sliding clamping groove at both ends, and a clamping cylinder at the bottom of the sliding clamping groove; the clamping plate is connected to the robotic arm.
[0006] Furthermore, the card plate is a U-shaped metal plate, and two limiting cylinders are symmetrically arranged in the longitudinal direction of the card plate.
[0007] The fixture plate is rectangular, with through holes for hanging at both the top and bottom.
[0008] The contact position between the sliding slot and the card plate facade is provided with a sliding structure.
[0009] Compared with existing technologies, the advantages of this invention are as follows: Before the robotic arm grasps the workpiece, the fixture plate is precisely transported to a fixed workstation. Then, the robotic arm accurately moves to the position of the fixture plate to be grasped, the clamping cylinder actuates, and the upper and lower slots of the fixture clamp the upper and lower end faces of the fixture plate. Then, two positioning cylinders limit the movement, ensuring that the relative position of the fixture plate does not shift during the movement, thus guaranteeing the accuracy and reliability of the hanging position. This invention automates the operation, improving the efficiency and reliability of hanging coated workpieces. Attached Figure Description
[0010] Figure 1 This is a schematic diagram of the structure of an automated hanging and picking device for coated workpieces according to this utility model;
[0011] Figure 2 This is a schematic diagram of the fixture described in this utility model;
[0012] Figure 3 yes Figure 2 Enlarged view of point A in the middle;
[0013] Figure 4 This is a top view of the sliding slot described in this utility model;
[0014] Figure 5 This is a front view of the fixture plate described in this utility model. Detailed Implementation
[0015] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings and specific embodiments.
[0016] See Figure 1-2 An automated workpiece loading and unloading device includes a robotic arm 10, a fixture 20, and a jig plate 30 for placing the coated workpiece. The fixture includes a clamping plate 21, with a fixed clamping groove 22 and a sliding clamping groove 23 at both ends of the clamping plate, and a clamping cylinder 24 at the bottom of the sliding clamping groove. The clamping plate is connected to the robotic arm.
[0017] The pallet is a U-shaped metal plate, and two limit cylinders 25 are symmetrically arranged in the longitudinal direction of the pallet.
[0018] See Figure 5 The fixture plate is rectangular, and both its top and bottom ends are provided with through holes 31 for hanging.
[0019] See Figure 3-4 A sliding structure is provided at the contact position between the sliding slot 23 and the card plate facade. In a preferred embodiment, the sliding structure consists of two guide wheels 230 arranged in the width direction of the sliding slot, which serve as a limit while making the sliding smoother.
[0020] In the preferred embodiment, a six-axis robot is used. When the workpiece is mounted on the fixture plate, the fixture plate is first precisely transported to a fixed position. Then, the robot accurately moves to the position to grip the fixture plate, and the clamping cylinders activate, clamping the upper and lower end faces of the fixture plate with two slots in the fixture. Two positioning cylinders then limit the movement to ensure that the relative position of the fixture plate does not shift during the movement, guaranteeing the accuracy and reliability of the mounting position. The fixture plate is then hung onto the cylindrical frame using through holes in the fixture plate. Similarly, after coating is completed, the robot, in conjunction with the fixture, completes the unloading action.
Claims
1. An automated workpiece hanging and picking device for coated workpieces, characterized in that: It includes a robotic arm, a fixture, and a jig plate for placing coated workpieces; the fixture includes a clamping plate with a fixed clamping groove and a sliding clamping groove at both ends, and a clamping cylinder at the bottom of the sliding clamping groove; the clamping plate is connected to the robotic arm.
2. The automated workpiece hanging and picking device according to claim 1, characterized in that: The card plate is a U-shaped metal plate, and two limit cylinders are symmetrically arranged in the longitudinal direction of the card plate.
3. The automated workpiece hanging and picking device according to claim 1, characterized in that: The fixture plate is rectangular, with through holes for hanging at both the top and bottom.
4. The automated workpiece hanging and picking device according to claim 2, characterized in that: The contact position between the sliding slot and the card plate facade is provided with a sliding structure.