Thermal insulation device of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnace heat preservation, in particular to a heat preservation device of a single crystal furnace, which comprises a heat preservation chamber and two air chambers, the two air chambers are fixedly connected to the outer surface of the heat preservation chamber, two heat preservation components are arranged in the heat preservation chamber, and each heat preservation component comprises a pressure chamber, a push plate, a push rod, a sealing ring and an air inlet plug. The gas chamber is communicated with the heat preservation chamber through the pressure chamber, and the push plate is connected in the pressure chamber in a sliding mode. Argon in the heat preservation chamber is always at a high temperature and pressure through the matching effect of the push plate, the gas chamber, the communicating pipe and other parts; argon in the heat preservation chamber can effectively block the thermal radiation effect of the single crystal furnace body, the thermal conductivity is reduced, and the heat of the single crystal furnace body is prevented from being greatly lost, so that the heat preservation effect of the heat preservation chamber is improved, no extra energy loss exists in the whole process, the heat preservation material consumption and the electric energy consumption are reduced, and the cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace insulation technology, and in particular to an insulation device for a single crystal furnace. Background Technology

[0002] The single crystal furnace is an important piece of equipment for producing single crystal silicon. Its technological level directly affects the quality and yield of single crystal silicon. In recent years, with the rapid development of my country's semiconductor industry, the demand for single crystal silicon has been increasing, which has promoted the breakthrough and development of single crystal furnace technology to meet the requirements of the semiconductor industry for high-quality single crystal silicon.

[0003] Existing single crystal furnaces operate in a high-temperature environment, requiring a large amount of energy to maintain the high temperature inside the furnace. If the insulation effect is not good, a lot of heat will be lost. In order to maintain the temperature inside the furnace, energy needs to be continuously replenished, which will lead to a significant increase in energy consumption. Utility Model Content

[0004] The purpose of this invention is to address the following shortcomings in the existing technology: existing single crystal furnaces operate in a high-temperature environment and require a large amount of energy to maintain the high temperature inside the furnace. If the heat preservation effect is not good, a large amount of heat will be lost. In order to maintain the temperature inside the furnace, energy needs to be continuously replenished, which will lead to a significant increase in energy consumption. Therefore, a heat preservation device for single crystal furnaces is proposed.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A heat preservation device for a single crystal furnace includes a heat preservation chamber and an air chamber, both of which are fixedly connected to the outer surface of the heat preservation chamber.

[0007] The insulation chamber is equipped with two insulation components, each including a pressure chamber, a push plate, a push rod, a sealing ring, and an air inlet plug. The air chamber is connected to the insulation chamber through the pressure chamber. The push plate is slidably connected to the pressure chamber, and a pressure spring is fixedly connected between the push plate and the inner wall of the pressure chamber. The push rod passes through the pressure chamber and is slidably connected to it. The push rod is fixedly connected to the push plate. A connecting pipe is fixedly connected between the pressure chamber and the air chamber. The sealing ring is fixedly connected inside the connecting pipe, and the air inlet plug is slidably connected inside the sealing ring. The outer surface of the air inlet plug has multiple air inlets arranged in a ring array.

[0008] Preferably, the heat insulation component further includes a connecting rod, one end of which is fixedly connected to the push rod, and the other end of which is fixedly connected to the air inlet plug.

[0009] Preferably, a single crystal furnace body is fixedly connected inside the insulation chamber, a graphite sleeve is fitted onto the outer surface of the single crystal furnace body, and a carbon felt is fitted onto the outer surface of the graphite sleeve.

[0010] Preferably, an annular guide rail is fixedly connected to the inner wall of the insulation chamber, and the annular guide rail has a limiting groove. The limiting groove is arranged in an annular shape, and an air baffle is fixedly connected between the insulation chamber and the carbon felt.

[0011] Preferably, a cleaning plate is slidably connected to the bottom wall of the insulation chamber, one end of the cleaning plate is slidably connected to the limiting groove, and an exhaust port is provided on the bottom wall of the insulation chamber, with a control valve fixedly connected inside the exhaust port.

[0012] Preferably, two brackets are fixedly connected to the outer surface of the insulation chamber. The brackets are square in shape, and a collection box is fixedly connected between the two brackets.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. Through the coordinated action of components such as push plates, gas chambers, and connecting pipes, the argon gas inside the insulation chamber is always kept at a high temperature and pressure. This ensures that the argon gas inside the insulation chamber can effectively block the heat radiation from the single crystal furnace body, reduce thermal conductivity, and prevent a large amount of heat loss from the single crystal furnace body, thereby improving the insulation effect of the insulation chamber. The entire process has no additional energy consumption, reduces the amount of insulation material used and electricity consumption, and lowers costs.

[0015] 2. The combination of carbon felt and graphite sleeve can effectively reduce the thermal conductivity of the single crystal furnace body. At the same time, graphite and argon will not react at high temperatures, ensuring the stability of the insulation components.

[0016] 3. Through the combined action of components such as the cleaning plate, guide rail, and baffle plate, the cleaning plate sweeps the felt debris on the bottom wall through the vent into the collection box, ensuring the cleanliness of the insulation chamber and preventing the long-term accumulation of felt debris, which could affect the internal performance of the insulation chamber and block the vent, thus further improving the stability of the entire insulation component. Attached Figure Description

[0017] Figure 1 This is a front structural diagram of a heat preservation device for a single crystal furnace proposed in this utility model.

[0018] Figure 2 This is a schematic diagram of the gas chamber structure of a heat preservation device for a single crystal furnace proposed in this utility model;

[0019] Figure 3 This is a schematic diagram of the pressure chamber structure of a heat preservation device for a single crystal furnace proposed in this utility model.

[0020] Figure 4This is a schematic diagram of the cleaning plate structure of the heat preservation device for a single crystal furnace proposed in this utility model.

[0021] In the diagram: 1 Insulation chamber, 2 Support frame, 3 Collection box, 4 Gas chamber, 5 Single crystal furnace body, 6 Graphite sleeve, 7 Carbon felt, 8 Pressure chamber, 9 Push plate, 10 Push rod, 11 Pressure spring, 12 Connecting pipe, 13 Sealing ring, 14 Air inlet plug, 15 Connecting rod, 16 Circular guide rail, 17 Cleaning plate, 18 Air baffle plate, 19 Control valve. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0023] The terms used in this utility model, such as "upper", "lower", "left", "right", "middle" and "one", are only for clarity of description and are not intended to limit the scope of implementation of this utility model. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered as within the scope of implementation of this utility model.

[0024] Reference Figures 1-4 A heat preservation device for a single crystal furnace includes a heat preservation chamber 1 and two gas chambers 4. Both gas chambers 4 are fixedly connected to the outer surface of the heat preservation chamber 1. The single crystal furnace body 5 is fixedly connected inside the heat preservation chamber 1. A graphite sleeve 6 is fitted onto the outer surface of the single crystal furnace body 5. A carbon felt 7 is fitted onto the outer surface of the graphite sleeve 6. The graphite sleeve 6 is a rigid structure. Graphite has good stability and good heat preservation properties. The carbon felt 7 is a flexible material that can extend the service life of the graphite sleeve 6. The heat preservation chamber 1 and the gas chambers 4 are filled with a certain amount of argon gas, which heats up as the single crystal furnace body 5 heats up. Replacing air with argon gas can reduce the thermal conductivity inside the heat preservation chamber 1 and ensure that the graphite sleeve 6 will not react at high temperatures.

[0025] The insulation chamber 1 is equipped with two insulation components, including a pressure chamber 8, a push plate 9, a push rod 10, a sealing ring 13, and an air inlet plug 14. The air chamber 4 is connected to the insulation chamber 1 via the pressure chamber 8. The push plate 9 is slidably connected within the pressure chamber 8, and the push plate 9 and pressure chamber 8 are sealed. A pressure spring 11 is fixedly connected between the push plate 9 and the inner wall of the pressure chamber 8. The pressure spring 11 ensures that when the pressure between the air chamber 4 and the insulation chamber 1 is consistent, it drives the push plate 9 to reset. The push rod 10 passes through the pressure chamber 8, and the push rod 10 and pressure chamber 8 are leak-proof. The pressure chamber 8 is slidably connected to the push rod 10 and the push plate 9 are fixedly connected. The pressure chamber 8 and the air chamber 4 are fixedly connected by a connecting pipe 12. The sealing ring 13 is fixedly connected in the connecting pipe 12. The air inlet plug 14 is slidably connected in the sealing ring 13. When the air inlet plug 14 is not pushed, it is in the sealing ring 13. The air inlet on the air inlet plug 14 is located at the front end of the sealing ring 13. At this time, the connecting pipe 12 is kept closed under the action of the air inlet plug 14 and the sealing ring 13. The outer surface of the air inlet plug 14 has multiple air inlets in a ring array. The air inlets are arranged in a square shape.

[0026] The insulation component also includes a connecting rod 15, one end of which is fixedly connected to a push rod 10, which is L-shaped. The other end of the connecting rod 15 is fixedly connected to an air inlet plug 14. An annular guide rail 16 is fixedly connected to the inner wall of the insulation chamber 1. The annular guide rail 16 has a limiting groove, which is annular. An air baffle 18 is fixedly connected between the insulation chamber 1 and the carbon felt 7, dividing the insulation chamber 1 into left and right areas. A cleaning plate 17 is slidably connected to the bottom wall of the insulation chamber 1 for cleaning. Plate 17 is made of high-temperature resistant material. Its lower end is in contact with the bottom wall of the insulation chamber 1. The friction between the cleaning plate 17 and the annular guide rail 16 is small. One end of the cleaning plate 17 is slidably connected in the limiting groove. An exhaust port is opened on the bottom wall of the insulation chamber 1. A control valve 19 is fixedly connected in the exhaust port. The control valve 19 is existing technology. Two brackets 2 are fixedly connected to the outer surface of the insulation chamber 1. The left and right sides of the brackets 2 support the insulation chamber 1. The brackets 2 are square in shape. A collection box 3 is fixedly connected between the two brackets 2.

[0027] In this invention, a certain amount of argon gas is first introduced between the insulation chamber 1 and the carbon felt 7. The gas chamber 4 is filled with argon gas at a certain pressure to maintain a certain pressure, thereby effectively blocking heat radiation, reducing heat conduction, and minimizing heat loss from the single crystal furnace body 5. As the insulation time progresses, when the temperature of the argon gas in the insulation chamber 1 begins to decrease, leading to a reduction in internal pressure, due to the pressure difference between the gas chamber 4 and the insulation chamber 1, the push plate 9 in the pressure chamber 8 moves towards the insulation chamber 1 under the action of this pressure difference. The push plate 9 drives the push rod 10 to move, and the movement of the push rod 10, through the connecting rod 15, drives the air inlet plug 14 towards the insulation chamber. As the air inlet plug 14 moves in the direction of 1, the air inlet on the air inlet plug 14 passes through the sealing ring 13. At this time, the high-temperature argon gas in the gas chamber 4 will enter the insulation chamber 1 through the air inlet plug 14 and the connecting pipe 12, thereby replenishing and heating the argon gas in the insulation chamber 1, maintaining the temperature and pressure of the argon gas in the insulation chamber 1, thus ensuring that the insulation chamber 1 can effectively block the heat radiation of the single crystal furnace body 5, avoid a large amount of heat loss from the single crystal furnace body 5, reduce the thermal conductivity of the single crystal furnace body 5, thereby improving the heat preservation effect of the insulation chamber 1. The whole process has no additional energy loss, reduces the amount of insulation material and power consumption, and reduces costs.

[0028] The graphite sleeve 6 and carbon felt 7 work together to directly insulate the single crystal furnace body 5. Both the graphite sleeve 6 and the carbon felt 7 are insulation materials, which can effectively reduce the thermal conductivity of the single crystal furnace body 5. At the same time, graphite and argon do not react at high temperatures, ensuring the stability of the insulation structure. However, the carbon felt 7 will dry out on the surface due to prolonged exposure to high temperatures, causing some felt dust to fall into the insulation chamber 1, thus effectively maintaining the cleanliness of the chamber 1. After the single crystal furnace body 5 has finished working, the insulation chamber 1 needs to be depressurized by opening the control valve 19. The exhaust port opens, allowing the gas inside the insulation chamber 1 to flow out rapidly, forming a pressure flow. Due to the action of the baffle plate 18, the insulation chamber 1 is divided into left and right areas. Under this pressure, the cleaning plate 17 begins to move. Due to the action of the annular guide rail 16, the cleaning plate 17 makes a circular motion on the bottom wall of the insulation chamber 1, thereby sweeping the felt dust on the bottom wall into the collection box 3 through the exhaust port, ensuring the cleanliness of the inside of the insulation chamber 1, avoiding the accumulation of felt dust for a long time, which would affect the internal performance of the insulation chamber 1 and block the exhaust port, thus improving the stability of the entire insulation component.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "connection", "linking", "fixing", etc., should be interpreted broadly.

[0030] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A heat preservation device for a single crystal furnace, comprising a heat preservation chamber (1) and a gas chamber (4), characterized in that, Both air chambers (4) are fixedly connected to the outer surface of the insulation chamber (1); The insulation chamber (1) is equipped with two insulation components. The insulation components include a pressure chamber (8), a push plate (9), a push rod (10), a sealing ring (13), and an air inlet plug (14). The air chamber (4) is connected to the insulation chamber (1) through the pressure chamber (8). The push plate (9) is slidably connected in the pressure chamber (8). A pressure spring (11) is fixedly connected between the push plate (9) and the inner wall of the pressure chamber (8). The push rod (10) passes through the pressure chamber (8) and is slidably connected to the pressure chamber (8). The push rod (10) is fixedly connected to the push plate (9). A connecting pipe (12) is fixedly connected between the pressure chamber (8) and the air chamber (4). The sealing ring (13) is fixedly connected in the connecting pipe (12). The air inlet plug (14) is slidably connected in the sealing ring (13). The outer surface of the air inlet plug (14) has multiple air inlets arranged in a ring array.

2. The heat preservation device for a single crystal furnace according to claim 1, characterized in that, The heat insulation component also includes a connecting rod (15), one end of which is fixedly connected to the push rod (10), and the other end of which is fixedly connected to the air inlet plug (14).

3. The heat preservation device for a single crystal furnace according to claim 1, characterized in that, The single crystal furnace body (5) is fixedly connected inside the insulation chamber (1). A graphite sleeve (6) is fitted on the outer surface of the single crystal furnace body (5). A carbon felt (7) is fitted on the outer surface of the graphite sleeve (6).

4. The heat preservation device for a single crystal furnace according to claim 3, characterized in that, An annular guide rail (16) is fixedly connected to the inner wall of the insulation chamber (1). The annular guide rail (16) has a limiting groove, which is arranged in an annular shape. An air baffle (18) is fixedly connected between the insulation chamber (1) and the carbon felt (7).

5. The heat preservation device for a single crystal furnace according to claim 4, characterized in that, A cleaning plate (17) is slidably connected to the bottom wall of the insulation chamber (1). One end of the cleaning plate (17) is slidably connected to the limiting groove. An exhaust port is provided on the bottom wall of the insulation chamber (1). A control valve (19) is fixedly connected inside the exhaust port.

6. The heat preservation device for a single crystal furnace according to claim 1, characterized in that, Two supports (2) are fixedly connected to the outer surface of the insulated chamber (1). The supports (2) are square in shape, and a collection box (3) is fixedly connected between the two supports (2).

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