Sealed gas test cabin for probe station

Abstract

The utility model discloses a closed gas testing cabin for a probe station, which comprises a testing cabin, a chip base, a sealing pressing mechanism and a probe, the testing cabin comprises a transparent observation plate and a cabin body, the cabin body is square and hollow, the top of the cabin body is connected with the transparent observation plate in a sealing manner, the bottom of the cabin body is detachably connected with the chip base in a sealing manner, and the chip base is connected with the probe. A probe interface is arranged in the center of each of the four side surfaces of the cabin body, the test end of the probe inwards extends into the cabin body through the probe interface, a test groove for accommodating a chip is formed in the center of the chip base, the chip to be detected is embedded into the test groove, and the test end of the probe is in contact with a chip pin to test the chip; four corners of the cabin body are respectively provided with a mounting plane, a group of opposite mounting planes are provided with sealing and pressing mechanisms, and the sealing and pressing mechanisms press and seal the cabin body and the chip base at the bottom; the test cabin is small in size, wide in use, good in leakproofness and observability, and suitable for probe stations of various specifications.

Description

Technical Field

[0001] This utility model belongs to the technical field of chip testing equipment, specifically relating to a sealed gas testing chamber for a probe station. Background Technology

[0002] Gas test chambers used in chip hermetical testing are devices employed during semiconductor manufacturing to test the performance and reliability of chips in specific gas environments. These chambers require precise control of parameters such as gas concentration, temperature, and humidity to simulate different environmental conditions. Existing gas test chambers suffer from several drawbacks: first, poor chamber sealing allows external air to enter and internal test gas to leak, affecting test results and potentially causing safety issues; second, it is difficult to observe the chip's state during testing, resulting in insufficient real-time monitoring; and third, high-precision chamber equipment can be expensive, bulky, and difficult to integrate with probe stations of various sizes, while also presenting maintenance difficulties and high costs. Therefore, improvements to existing gas test chambers are urgently needed. Utility Model Content

[0003] To address the aforementioned problems and technical requirements, this utility model provides a sealed gas testing chamber for probe stations. This testing chamber is compact, widely applicable, and has excellent sealing and observability, making it suitable for probe stations of various specifications.

[0004] The technical solution of this utility model is as follows: A sealed gas testing chamber for a probe station includes a testing chamber, a chip base, a sealing and pressing mechanism, and probes. The testing chamber includes a transparent observation plate and a chamber body. The chamber body is square and hollow. The transparent observation plate is sealed to the top of the chamber body, and the bottom of the chamber body is detachably and sealed to the chip base. A probe interface is provided at the center of each of the four sides of the chamber body. The test end of the probe extends into the chamber body through the probe interface. A test slot for accommodating a chip is provided at the center of the chip base. The chip to be tested is embedded in the test slot, and the test end of the probe contacts the chip pins to test the chip. A mounting plane is provided at each of the four corners of the chamber body, and a sealing and pressing mechanism is provided on a set of opposing mounting planes. The sealing and pressing mechanism presses and seals the chamber body and the chip base at the bottom. In the above solution, the testing chamber and the chip base are pressed together to form a sealed testing area. The chip inside can be tested through probes extending from the four sides. The testing chamber is compact, has a good sealing effect, and is suitable for operation with various probe stations.

[0005] Furthermore, both the top and bottom surfaces of the chamber are equipped with TPU rubber sealing rings, and the TPU rubber sealing rings are coated with sealing oil. The use of TPU rubber sealing rings and sealing oil coating enhances the sealing effect at the top and bottom of the chamber, preventing internal gas leakage and insufficient vacuum.

[0006] Furthermore, a connection hole is provided in the center of each of the four sides of the cabin. The probe interface covers the connection hole from the outside, and the probe interface is sealed to the cabin with screws. The probe interface includes a flange base, a connecting cylinder, and a flexible sealing plug. The flange base is connected to the side of the cabin, one end of the connecting cylinder is connected to the flange base, and the other end of the connecting cylinder tapers towards the center to form a small hole. The flexible sealing plug is embedded in the small hole, and the center of the flexible sealing plug has an insertion hole corresponding to the diameter of the probe. The probe extends inward through the insertion hole. The flexible sealing plug can be replaced according to the diameter of the probe, fixing the probe during the inward extension process and improving the docking accuracy between the probe and the chip.

[0007] Furthermore, a gas inlet / outlet is provided on a mounting plane at one corner of the cabin. The inner end of the gas inlet / outlet extends into the cabin, and the gas inlet / outlet can evacuate the cabin or input gas into the cabin.

[0008] Furthermore, the cabin is made of stainless steel, and the transparent observation panel is made of tempered glass. Tempered glass has high strength and good visibility, ensuring structural strength while facilitating observation of the contact between the internal probes and the chip.

[0009] Furthermore, the sealing and clamping mechanism includes a handle, a U-shaped locking arm, and a pressure plate. A connector is provided on each of the two opposite mounting planes. The bottom of the handle is hinged to the connector. A movable shaft passing through the handle is provided above the hinge of the handle. The two ends of the U-shaped locking arm are vertically fixed to the two ends of the movable shaft. When the handle is turned from the top, the handle can drive the U-shaped locking arm to move up and down. The pressure plate is pressed against the bottom of the chip base. The two ends of the pressure plate extend into the U-shaped locking arms on both sides. When the handle is rotated, it drives the two U-shaped locking arms to move up and lock, pressing and fixing the chip base to the bottom surface of the chamber.

[0010] Furthermore, an observation microscope is installed above the transparent observation panel, which can monitor the assembly and testing inside the cabin in real time.

[0011] The beneficial effects of this utility model are as follows: 1) The transparent observation plate and the chip base are respectively connected to the chamber by a TPU rubber sealing ring coated with sealing oil, which makes the test area inside the chamber have a better sealing effect, maintains the accuracy and stability of temperature and humidity control, and the uniformity of gas concentration, avoids test gas leakage, and improves test accuracy; 2) The sealing and pressing mechanism enables a detachable sealed connection between the chamber and the chip base, which facilitates chip loading and unloading operations on the chip base, allowing the test chamber to be used with different chip bases for testing, thus improving the flexibility of testing; 3) The tempered glass transparent observation plate can be used with the observation microscope above it to observe the contact between the probe pins and the chip inside the chamber, making the entire testing process controllable; 4) Gas inlet and outlet pipes are set on the side of the chamber, which makes it easier to perform vacuuming or injection of specific test gases into the sealed test chamber, improving testing efficiency; 5) The overall volume of this test chamber is small, it can be used with probe stations of various sizes, it has wide application and is easy to maintain and repair, which greatly saves testing costs. Attached Figure Description

[0012] Figure 1 This is an overall structural diagram of the sealed gas testing chamber for the probe station of this utility model.

[0013] Figure 2 This is a structural diagram of the observation microscope and the test chamber in this utility model;

[0014] Figure 3 This is a structural diagram of the test chamber in this utility model;

[0015] Figure 4 This is a diagram showing the internal structure of the test chamber in this utility model;

[0016] Figure 5 This is a structural diagram of the sealing and pressing mechanism in this utility model;

[0017] The components in the diagram are labeled as follows: Test chamber 1, transparent observation plate 2, chamber body 3, TPU rubber sealing ring 31, probe interface 32, flange base 321, connecting cylinder 322, small hole 3221, flexible sealing plug 323, insertion hole 3231, mounting plane 33, gas inlet / outlet pipe 331, chip base 4, test groove 41, sealing and clamping mechanism 5, handle 51, U-shaped locking arm 52, pressure plate 53, connector 54, movable shaft 55, probe 6, observation microscope 7, probe stage 8. Detailed Implementation

[0018] The present invention will now be further described with reference to the accompanying drawings and embodiments.

[0019] like Figure 1-5The diagram shows a sealed gas testing chamber for a probe station according to the present invention, comprising a testing chamber 1, a chip base 4, a sealing and clamping mechanism 5, and a probe 6. The testing chamber 1 includes a transparent observation plate 2 and a chamber body 3. The chamber body 3 is square and hollow. The top of the chamber body 3 is sealed with the transparent observation plate 2, and the bottom of the chamber body is detachably sealed to the chip base 4. A probe interface 32 is provided in the center of each of the four sides of the chamber body 3. The test end of the probe 6 extends into the chamber body through the probe interface 32. The center of the chip base 4 is provided with a test slot 41 for accommodating the chip. The chip to be tested is embedded in the test slot 41, and the test end of the probe 6 contacts the chip pin to test the chip.

[0020] At each of the four corners of the chamber 3, there is a mounting surface 33. A sealing and clamping mechanism 5 is provided on a set of opposing mounting surfaces 33, which presses and seals the chamber 3 and the chip base 4 at the bottom. A gas inlet / outlet pipe 331 is provided on one of the mounting surfaces 33 at the corner of the chamber 3. The inner end of the gas inlet / outlet pipe 331 extends into the chamber 3, and the gas inlet / outlet pipe 331 can evacuate the chamber 3 or introduce gas into the chamber 3. The gas inlet / outlet pipe 331 is provided on the side of the chamber 3, which makes it easier to evacuate the sealed test chamber 1 or inject specific test gases, thereby improving the testing efficiency.

[0021] The chamber 3 is made of stainless steel, and the transparent observation plate 2 is made of tempered glass. Tempered glass offers high strength and excellent visibility, ensuring structural strength while facilitating observation of the contact between internal probes and chips. An observation microscope 7 is mounted above the transparent observation plate 2, enabling real-time monitoring of the assembly and testing within the chamber 3.

[0022] Both the top and bottom surfaces of the chamber 3 are equipped with TPU rubber sealing rings 31, and the TPU rubber sealing rings 31 are coated with sealing oil. The use of TPU rubber sealing rings 31 and sealing oil coating can enhance the sealing effect of the top and bottom of the chamber 3, and prevent internal gas leakage and insufficient vacuum.

[0023] Each of the four sides of the chamber 3 has a connection hole at its center. A probe interface 32 covers the connection hole from the outside. The probe interface 32 is sealed to the chamber 3 with screws. The probe interface 32 includes a flange base 321, a connecting cylinder 322, and a flexible sealing plug 323. The flange base 321 is connected to the side of the chamber 3. One end of the connecting cylinder 322 is connected to the flange base 321, and the other end of the connecting cylinder 322 converges towards the center to form a small hole 3221. The flexible sealing plug 323 is embedded in the small hole 3221. The center of the flexible sealing plug 323 has an insertion hole 3231 corresponding to the diameter of the probe 6. The probe 6 extends inward through the insertion hole 3231. The flexible sealing plug 323 can be replaced according to the diameter of the probe 6, fixing the probe 6 during its inward insertion and improving the docking accuracy between the probe 6 and the chip.

[0024] The sealing and pressing mechanism 5 includes a handle 51, a U-shaped locking arm 52, and a pressure plate 53. A connector 54 is provided on each of the two opposite mounting planes 33. The bottom of the handle 51 is hinged to the connector 54. A movable shaft 55 is provided above the hinge of the handle 51, passing through the handle. The two ends of the U-shaped locking arm 52 are vertically fixed to the two ends of the movable shaft 55. When the handle 51 is turned from the top, the handle 51 can drive the U-shaped locking arm 52 to move up and down. The pressure plate 53 is pressed against the bottom of the chip base 4. The two ends of the pressure plate 53 extend into the U-shaped locking arms 52 on both sides. When the handle 51 is rotated, it drives the two U-shaped locking arms 52 to move up and lock, pressing and fixing the chip base 4 to the bottom surface of the chamber 3.

[0025] The working process of this utility model is as follows: The chip base 4 is placed on the probe station 8 for testing. First, the chip is clamped on the chip base 4 and embedded in the test slot 41. The bottom of the chamber 3 is pressed against the surface of the chip base 4, and the chip is located at the center of the bottom of the chamber 3. The two ends of the pressure plate 53 are inserted into the U-shaped locking arms 52 hanging down on both sides. The handles 51 on both sides are turned upward, so that the U-shaped locking arms 52 drive the pressure plate 53 to lock upward. The pressure plate 53 presses against the bottom surface of the chip base 4 and is tightened. The handles 51 are rotated upward to lock, and the bottom of the chamber 3 and the chip base 4 are pressed and sealed. The transparent observation plate 2 is pre-sealed to the top of the chamber 3 by screws. The chamber is kept sealed. The chamber is evacuated or injected with test gas through the gas inlet and outlet pipes 331. Then, the probes around the chamber extend inward and the test ends of the probes contact the chip pins. The process of bonding and testing can be observed in real time through the observation microscope 7 on the top to ensure the accuracy of the operation. After the test is completed, the sealing and pressing mechanism 41 is loosened and the chip is taken out.

[0026] The above descriptions are merely several preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any variations and substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the scope of protection of this utility model. Therefore, the scope of protection of this utility model should be determined by the scope of the claims.

Claims

1. A sealed gas testing chamber for a probe station, characterized in that: The device includes a test chamber, a chip base, a sealing and clamping mechanism, and probes. The test chamber comprises a transparent observation plate and a hollow, square chamber body. The transparent observation plate is sealed to the top of the chamber body, and the bottom of the chamber body is detachably and sealed to the chip base. A probe interface is located at the center of each of the four sides of the chamber body. The test tip of the probe extends into the chamber body through the probe interface. The chip base has a test slot at its center to accommodate the chip. The chip to be tested is embedded in the test slot, and the test tip of the probe contacts the chip pins to perform testing. A mounting plane is located at each of the four corners of the chamber body, and a sealing and clamping mechanism is located on a set of opposing mounting planes. The sealing and clamping mechanism presses and seals the chamber body and the chip base at the bottom.

2. A sealed gas testing chamber for a probe station according to claim 1, characterized in that: The top and bottom surfaces of the cabin are equipped with TPU rubber sealing rings, and the TPU rubber sealing rings are coated with sealing oil.

3. A sealed gas testing chamber for a probe station according to claim 2, characterized in that: A connection hole is opened in the center of each of the four sides of the cabin. The probe interface covers the connection hole from the outside. The probe interface is sealed to the cabin by screws. The probe interface includes a flange base, a connecting cylinder and a flexible sealing plug. The flange base is connected to the side of the cabin. One end of the connecting cylinder is connected to the flange base. The other end of the connecting cylinder is tapered towards the center to form a small hole. The flexible sealing plug is embedded in the small hole. The center of the flexible sealing plug has an insertion hole corresponding to the diameter of the probe. The probe extends inward through the insertion hole.

4. A sealed gas testing chamber for a probe station according to claim 3, characterized in that: A gas inlet / outlet is provided on a mounting plane at one corner of the cabin. The inner end of the gas inlet / outlet extends into the cabin. The gas inlet / outlet can evacuate the cabin or input gas into the cabin.

5. A sealed gas testing chamber for a probe station according to claim 4, characterized in that: The cabin is made of stainless steel, and the transparent observation panel is made of tempered glass.

6. A sealed gas testing chamber for a probe station according to claim 5, characterized in that: The sealing and clamping mechanism includes a handle, a U-shaped locking arm, and a pressure plate. A connector is provided on each of the two opposite mounting planes. The bottom of the handle is hinged to the connector. A movable shaft passing through the handle is provided above the hinge of the handle. The two ends of the U-shaped locking arm are vertically fixed to the two ends of the movable shaft. When the handle is turned from the top, the handle can drive the U-shaped locking arm to move up and down. The pressure plate is pressed against the bottom of the chip base. The two ends of the pressure plate extend into the U-shaped locking arms on both sides. When the handle is rotated, it causes the two U-shaped locking arms to move up and lock, pressing and fixing the chip base to the bottom surface of the chamber.

7. A sealed gas testing chamber for a probe station according to claim 6, characterized in that: An observation microscope is installed above the transparent observation panel, which can monitor the assembly and testing of the cabin in real time.

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