Hot pressing head device

Abstract

The utility model relates to the technical field of semiconductor production technology and equipment, and provides a hot pressing head device which comprises a plane base, a protruding base, a tool bit assembly and a plurality of metal vertical plates, the plane base is provided with a fixing hole, the protruding base is arranged on the plane base, the tool bit assembly is arranged on the protruding base, and the metal vertical plates are arranged on the tool bit assembly. The tool bit assembly is provided with a polishing face, a first vacuum suction hole is formed in the position, on the polishing face, of the tool bit assembly, the first vacuum suction hole is used for sucking a chip, the multiple metal vertical plates are arranged around the protruding base and the tool bit assembly in a screw locking mode, and the metal vertical plates are connected with the protruding base and the tool bit assembly. By means of the arrangement, the hot pressing head device can use the same tool bit assembly to be used for production processes at different temperatures, and the protruding base and the tool bit assembly are prevented from being separated and falling off.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing process and equipment technology, and in particular to a thermoforming assembly device for semiconductor flip chip packaging process. Background Technology

[0002] Currently, COF hot bonding tools mainly suffer from the following problems: Due to the different coefficients of thermal expansion between diamond or cBN materials and the metal substrate, the two materials expand differently during heating. The material with a higher coefficient of thermal expansion will expand and deform towards the material with a lower coefficient of thermal expansion. Therefore, in the production of COF hot bonding tools, diamond or cBN layers must first be embedded and soldered onto the metal substrate, and the entire hot bonding tool must be heated to a specified high temperature before grinding and polishing. Different sizes of COF manufacturing processes have different specified operating temperatures to avoid overheating deformation of the flexible circuit board or poor bonding. Therefore, hot bonding tools manufactured in this way will not achieve the required surface flatness at other temperatures due to insufficient or excessive thermal expansion, rendering them unusable. If the production schedule needs to accommodate flexible film circuit boards produced by different manufacturers or made of different materials, and multiple temperatures need to be adjusted and changed alternately during production, it is impossible to use a single hot press head to cover all the temperature requirements of the production process. Multiple hot press heads of the same size but applicable to different temperatures must be prepared in order to carry out production.

[0003] It should be noted that the information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model, and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0004] The present invention provides a hot-pressing head assembly device, which includes a flat base, a raised base, a cutter head assembly and multiple metal vertical plates.

[0005] A raised base is disposed on the flat base, and the flat base has fixing holes located on the upper surface of the flat base not covered by the raised base. A cutting head assembly is disposed on the raised base, and the cutting head assembly has a polished surface. A first vacuum suction hole is provided on the polished surface of the cutting head assembly, the first vacuum suction hole being used to hold the chip. Multiple metal uprights are disposed around the raised base and the cutting head assembly by screws, and each metal upright connects the raised base and the cutting head assembly.

[0006] Furthermore, a first through hole is provided around the blade assembly, a second through hole is provided around the raised base, and a third and a fourth through hole are provided on the metal plate. The third through hole corresponds to the first through hole, and the fourth through hole corresponds to the second through hole. A first screw passes through the third through hole and the first through hole, and a second screw passes through the fourth through hole and the second through hole, so that the metal plate connects the raised base and the blade assembly simultaneously.

[0007] Furthermore, the upper surface of the raised base is provided with a first through hole, and the lower surface of the cutter head assembly is provided with a second through hole. Screws are used to pass through the first through hole and the second through hole to fix the raised base and the cutter head assembly.

[0008] Furthermore, the surface of the raised base is provided with a second vacuum suction hole, which is connected to the first vacuum suction hole to form a vacuum channel.

[0009] Furthermore, the materials of the planar base and the raised base include steel or tungsten carbide steel.

[0010] Furthermore, the raised base is provided with a temperature sensing hole for placing the temperature sensing rod.

[0011] Furthermore, the material of the cutter head assembly includes aluminum nitride or silicon carbide.

[0012] Furthermore, the material of the metal upright includes steel or tungsten carbide steel.

[0013] Furthermore, the planar base is provided with a plurality of heating holes for placing heaters to heat the cutter head assembly.

[0014] Furthermore, the hot-pressing head assembly also includes a liner located between the cutter head assembly and the raised base.

[0015] Based on the above, the present invention provides a hot pressing head assembly device, which, through the combination of a raised base, a cutter head assembly and multiple metal uprights, allows the same cutter head assembly to be used in production processes at different temperatures, and avoids the raised base and the cutter head assembly from separating and falling off.

[0016] Other features and beneficial effects of this invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other beneficial effects of this invention can be realized and obtained through the structures particularly pointed out in the description, claims, etc. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Unless otherwise specified, the positional relationships shown in the drawings in the following description are based on the direction in which the components are drawn in the figure.

[0018] Figure 1 This is an exploded structural diagram of a thermocompression fitting device provided in an embodiment of the present invention.

[0019] Figure label:

[0020] 10-Cutter head assembly; 11-Polished surface; 13-First vacuum suction hole; 15-First through hole; 20-Flat base; 21-Raised base; 22-Temperature sensing hole; 23-First through hole; 24-Second vacuum suction hole; 26-Second through hole; 28-Fixing hole; 30-Metal upright plate; 31-Third through hole; 32-Fourth through hole; 40-Gasket; 50-Heating hole; 51-First screw; 52-Second screw; 60-Chip. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The technical features designed in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the protection scope of this utility model.

[0022] In the description of this utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof mean "at least comprising."

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integrally formed connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments. Unless the context clearly indicates otherwise, the singular forms “a” and “an” as used herein are also intended to include the plural. It should also be understood that the terms “comprising” and / or “including” as used herein specify the presence of the stated features, integers, steps, operations, units, and / or components, without excluding the presence or addition of one or more other features, integers, steps, operations, units, components, and / or combinations thereof.

[0025] Please see Figure 1 , Figure 1 This is an exploded structural diagram of a hot-pressing fitting device according to an embodiment of the present invention. To achieve at least one or more of the aforementioned advantages, an embodiment of the present invention provides a hot-pressing fitting device, which includes a planar base 20, a raised base 21, a cutter head assembly 10, and a plurality of metal uprights 30.

[0026] The raised base 21 is disposed on the flat base 20. The flat base 20 and the raised base 21 can be made of metal.

[0027] The cutting head assembly 10 is disposed on the raised base 21. The cutting head assembly 10 has a polished surface 11. The cutting head assembly 10 has a first vacuum suction hole 13 at the polished surface 11. The first vacuum suction hole 13 is used to hold the chip 60.

[0028] Multiple metal plates 30 are screwed together and mounted around the raised base 21 and the cutter head assembly 10. Each metal plate 30 connects the raised base 21 and the cutter head assembly 10, thus assisting in fixing the raised base 21 and the cutter head assembly 10. By using multiple metal plates 30 as auxiliary fixation on all four sides, the mechanical rigidity and fixing strength of the assembled thermoforming joint device can be effectively increased.

[0029] Regarding the screw fastening method, taking one side of the raised base 21 and the cutter head assembly 10 as an example, as shown in the figure, the cutter head assembly 10 has a first through hole 15 around its perimeter, the raised base 21 has a second through hole 26 around its perimeter, and the metal upright plate 30 has a third through hole 31 and a fourth through hole 32. The third through hole 31 corresponds to the first through hole 15, and the fourth through hole 32 corresponds to the second through hole 26. The first screw 51 passes through the third through hole 31 and the first through hole 15, and the second screw 52 passes through the fourth through hole 32 and the second through hole 26, so that the metal upright plate 30 simultaneously connects the raised base 21 and the cutter head assembly 10, thereby fixing the raised base 21 and the cutter head assembly 10. Similarly, the other three sides can also use the same through holes and screws.

[0030] Because the expansion amounts of the cutter head assembly 10 and the raised base 21 are different after heating, they are prone to detachment. Compared with the traditional method of using screws to help fix the glued cutter head assembly 10 and the raised base 21, this embodiment uses multiple metal plates 30 to connect the four sides of the cutter head assembly 10 and the raised base 21 simultaneously, which can prevent the raised base 21 and the cutter head assembly 10 from separating and falling off, and can effectively increase the mechanical rigidity and fixing strength of the assembled hot-pressed joint device.

[0031] In some embodiments, the upper surface of the raised base 21 is provided with a first through hole 23, and the lower surface of the cutter head assembly 10 is provided with a second through hole (not shown in the figure). The raised base 21 and the cutter head assembly 10 are fixed by screws passing through the first through hole 23 and the second through hole.

[0032] In some embodiments, the surface of the raised base 21 is provided with a second vacuum suction hole 24, which is connected to the first vacuum suction hole 13 to form a vacuum channel for easy vacuum adsorption.

[0033] In some embodiments, the raised base 21 is provided with a temperature sensing hole 22 for placing a temperature sensing rod to monitor the temperature of the hot-pressed joint.

[0034] In some embodiments, the material of the cutting head assembly 10 includes aluminum nitride or silicon carbide. Cutting head assemblies 10 made of aluminum nitride or silicon carbide ceramic sintered bodies have high hardness (approaching that of diamond), can withstand long-term wear, impact, and pressure, and are not easily deformed. Aluminum nitride or silicon carbide ceramics have stable chemical and physical properties, do not generate static electricity due to friction, and are excellent electrical insulators, thus solving the problem of static electricity accumulation and its effects. Cutting head assemblies 10 made of aluminum nitride or silicon carbide ceramic sintered bodies can be mirror-polished using their polishable properties, and have excellent wear resistance. The polished surface 11 can maintain a mirror-like state for a long time, and impurities or residual adhesive from the production process are not easily adhered to the cutting head assembly 10. If the polished surface 11 of the cutting head assembly 10 made of aluminum nitride or silicon carbide ceramic sintered bodies is scratched or worn, it can be quickly removed from the raised base 21 and can be repolished multiple times. The service life after repolishing is the same as that of a new product, which can effectively reduce production costs. The cutter head assembly 10 can be processed from a single material, so there will be no uneven expansion during heating. After assembly, the polished surface 11 can maintain the same flatness and smoothness at a range of temperatures (such as room temperature to 800℃). Therefore, the same hot pressing support can be used for production processes at different temperatures.

[0035] In some embodiments, the planar base 20 and the raised base 21 are made of steel or tungsten carbide steel. Using ultra-hard mold steel or tungsten carbide steel to produce the planar base 20 and the raised base 21 allows for rapid machining processes typically used with metals, such as electrical discharge machining (EDM) and wire cutting. This effectively reduces the machining difficulty and time required for complex details such as deep hole drilling, threading, and micro-hole fabrication on the ceramic sintered body. The all-ceramic hot-pressing support platform has multiple threaded holes for locking and fixing with the equipment base. These holes often crack due to over-tightening or thermal expansion. By replacing the easily cracked parts with metal, and placing the threaded holes on the metal base, the problem of the fragile holes made of ceramic material is solved.

[0036] In some embodiments, the metal plate 30 is made of steel or tungsten carbide steel and is manufactured by machining.

[0037] In some embodiments, the thermoforming assembly further includes a gasket 40. The gasket 40 is located between the cutter head assembly 10 and the raised base 21. The gasket 40 may be a vacuum leak-proof gasket 40 made of a metal film through processing. By using a soft metal film as the sealing material for the contact surfaces of the raised base 21 and the cutter head assembly 10, the contact surfaces between the raised base 21 and the cutter head assembly 10 can be kept airtight and leak-proof, while also maintaining the overall accuracy of the two components after assembly.

[0038] As shown in the figure, a fixing hole 28 is also provided on the planar base 20. The fixing hole 28 is located on the upper surface of the planar base 20 that is not covered by the protruding base 21, and is used to fix the assembled hot press fitting device to the fixing base of the packaging equipment, thereby improving the overall structural stability.

[0039] In some embodiments, the planar base 20 is provided with a plurality of heating holes 50 for placing heaters to heat the cutter head assembly 10.

[0040] In summary, the thermoforming head assembly device provided by this utility model, through the combination of the raised base 21, the cutter head assembly 10, and multiple metal uprights 30, effectively solves the problem of easy breakage at the screw holes in the thermoforming head assembly device, and prevents the raised base 21 and the cutter head assembly 10 from separating and falling off. Furthermore, this utility model does not use traditional adhesive bonding to fix the raised base 21 and the cutter head assembly 10; instead, it uses screws for locking and fixing the two together. This allows for quick removal of damaged cutter head assemblies 10 or replacement of cutter head assemblies 10 of a different size without the need for adhesive, and facilitates rapid replacement with new cutter head assemblies 10.

[0041] Those skilled in the art should understand that, despite the many problems existing in the prior art, each embodiment or technical solution of this utility model can be improved in only one or a few aspects, without necessarily solving all the technical problems listed in the prior art or the background art simultaneously. Those skilled in the art should understand that any content not mentioned in a claim should not be construed as a limitation on that claim.

[0042] Furthermore, the range of values ​​for "~" in the above-mentioned terminology includes the values ​​at both endpoints themselves, all of which fall within the protection scope of this utility model. Although terms such as chip tray, chip placement slot, chip, pressing plate, and cutout slot are frequently used herein, the possibility of using other terms is not excluded. The use of these terms is merely for the convenience of describing and explaining the essence of this utility model; interpreting them as any additional limitation would contradict the spirit of this utility model.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A hot-pressing coupling device, characterized in that: The hot-press fitting device includes: A planar base, wherein a fixing hole is provided on the planar base; A raised base is disposed on the flat base, and the fixing hole is located on the upper surface of the flat base that is not covered by the raised base; A cutting head assembly is disposed on the protruding base. The cutting head assembly has a polished surface and a first vacuum suction hole is provided on the polished surface. The first vacuum suction hole is used to hold the chip. Multiple metal plates are arranged around the raised base and the cutter head assembly by means of screws, and each metal plate connects the raised base and the cutter head assembly.

2. The hot-pressing coupling device according to claim 1, characterized in that: The cutter head assembly is provided with a first through hole around its perimeter, the raised base is provided with a second through hole around its perimeter, and the metal upright plate has a third through hole and a fourth through hole. The third through hole corresponds to the first through hole, and the fourth through hole corresponds to the second through hole. A first screw passes through the third through hole and the first through hole, and a second screw passes through the fourth through hole and the second through hole, so that the metal upright plate simultaneously connects the raised base and the cutter head assembly.

3. The hot-pressing coupling device according to claim 1, characterized in that: The upper surface of the raised base is provided with a first through hole, and the lower surface of the cutter head assembly is provided with a second through hole. The raised base and the cutter head assembly are fixed by screws passing through the first through hole and the second through hole.

4. The hot-pressing coupling device according to claim 1, characterized in that: The surface of the raised base is provided with a second vacuum suction hole, which is connected to the first vacuum suction hole to form a vacuum channel.

5. The hot-pressing coupling device according to claim 1, characterized in that: The materials of the planar base and the raised base include steel or tungsten carbide steel.

6. The hot-pressing coupling device according to claim 1, characterized in that: The raised base is provided with a temperature sensing hole for placing a temperature sensing rod.

7. The hot-pressing coupling device according to claim 1, characterized in that: The material of the cutter head assembly includes aluminum nitride or silicon carbide.

8. The hot-pressing coupling device according to claim 1, characterized in that: The metal uprights are made of steel or tungsten carbide steel.

9. The hot-pressing coupling device according to claim 1, characterized in that: The planar base is provided with multiple heating holes for placing heaters to heat the cutter head assembly.

10. The hot-pressing coupling device according to claim 1, characterized in that: The hot-pressing head assembly also includes a liner located between the cutter head assembly and the raised base.

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