Adsorption type cold trap

Abstract

The utility model relates to an adsorption type cold trap which comprises a shell, a cooling inner container and a first net plate, an air inlet is formed in the lower portion of the shell, an air outlet is formed in the upper portion of the shell, the cooling inner container is located in the shell and fixedly connected with the shell, a cooling cavity is formed in the cooling inner container and communicated with a liquid inlet and a liquid outlet respectively, and the first net plate is arranged in the cooling inner container. The first screen plate is located in the shell and fixed to the shell in position, and the first screen plate is located above the cooling inner container. Waste gas is subjected to low-temperature adsorption and adsorption particle adsorption twice, so that the dust content in the waste gas is greatly reduced, dust deposited on the inner wall of a pipeline is reduced, and the pipeline between a dry pump and waste gas treatment equipment is prevented from being blocked; the detection medicament in the net cylinder is observed through the transparent lens to judge whether the adsorption particles need to be replaced, and the operation is simple and convenient; and the mounting cylinder sleeves the outer side of the cooling liner, and the mounting cylinder can be integrally taken out of the shell to be cleaned, so that the cleaning is more convenient, and meanwhile, the cleaning effect is improved.

Description

Technical Field

[0001] This utility model relates to the field of cold traps, and in particular to an adsorption-type cold trap. Background Technology

[0002] In the semiconductor manufacturing industry, semiconductor waste gas needs to be treated. Long pipelines exist between the dry pumps used to transport the waste gas and the waste gas treatment equipment. Because semiconductor waste gas contains dust, this dust accumulates in the pipelines during its movement, causing blockages. To avoid these blockages, the pipelines need to be disassembled and cleaned periodically by hand, increasing costs and workload. Utility Model Content

[0003] The present invention aims to solve the above problems by providing an adsorption-type cold trap.

[0004] An adsorption-type cold trap includes: a shell, a cooling liner, and a first mesh plate. An air inlet is formed at the bottom of the shell, and an air outlet is formed at the top of the shell. The cooling liner is located inside the shell and is fixedly connected to the shell. A cooling cavity is formed inside the cooling liner, and the cooling cavity is connected to a liquid inlet and a liquid outlet respectively. The first mesh plate is located inside the shell and is fixed in position to the shell. The first mesh plate is located above the cooling liner.

[0005] Preferably, it further includes a second mesh plate, which is located inside the housing and above the first mesh plate, and the position of the second mesh plate is fixed to that of the housing.

[0006] More preferably, adsorption particles are disposed between the first mesh plate and the second mesh plate.

[0007] Preferably, the device further includes a transparent lens, a mesh tube, and a fixing shell. The mesh tube is located between the first mesh plate and the second mesh plate. The fixing shell is fixedly connected to the housing. The open end of the mesh tube is fixedly and detachably connected to the fixing shell. The fixing shell is fixedly connected to the transparent lens.

[0008] More preferably, the mesh tube contains a detection reagent.

[0009] Preferably, it further includes an installation cylinder and an adsorption plate, wherein the installation cylinder is fitted onto the outside of the cooling inner liner and contacts the cooling inner liner, and the outside of the installation cylinder is fixedly connected to the adsorption plate.

[0010] Preferably, the inner and outer sides of the adsorption plate are respectively attached to the outer side of the mounting cylinder and the inner wall of the shell, and the adsorption plate forms a vent that runs through the vertical direction. Multiple adsorption plates are arranged in a straight line along the vertical direction, and the vents of two adjacent adsorption plates do not overlap.

[0011] Preferably, the housing includes a lower housing, an upper housing, a bottom plate, and a top plate. The upper housing is located above the lower housing and is fixed to and detachably connected to the lower housing. The top plate is located above the upper housing and is fixed to and detachably connected to the upper housing. The bottom plate is located below the lower housing and is fixed to and detachably connected to the lower housing. The first mesh plate is located inside the upper housing, and the cooling liner is located inside the lower housing and is fixedly connected to the bottom plate.

[0012] Preferably, it further includes a separator located inside the cooling chamber. The top of the separator forms a channel with the inner wall of the cooling liner, and the bottom of the separator is fixedly connected to the base plate. The liquid inlet and liquid outlet are respectively formed on the base plate and are located on the left and right sides of the separator.

[0013] Preferably, it further includes a first tray and a second tray, the first tray and the second tray being fixedly connected to the inner wall of the upper housing, the first mesh plate being placed above the first tray, and the second mesh plate being placed above the second tray.

[0014] Preferably, it also includes casters, with multiple casters located below the base plate and fixedly connected to the base plate.

[0015] Preferably, it also includes a handle, which is located above the top plate and fixedly connected to the top plate.

[0016] Preferably, the air inlet is integrally formed with the lower housing, and the air outlet is integrally formed with the top plate.

[0017] This invention has the following advantages: the exhaust gas undergoes two adsorption processes—low-temperature adsorption and adsorption of adsorbent particles—significantly reducing the dust content in the exhaust gas, minimizing dust deposition on the inner wall of the pipe, and preventing blockage of the pipe between the dry pump and the exhaust gas treatment equipment; the detection reagent in the mesh cylinder can be observed through a transparent lens to determine whether the adsorbent particles need to be replaced, making the operation simple and convenient; the installation cylinder is fitted onto the outside of the cooling inner liner, and the entire installation cylinder can be removed from the shell for cleaning, making cleaning more convenient and improving the cleaning effect. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0019] Figure 1 : A top view of the structure of this utility model;

[0020] Figure 2 :exist Figure 1 Schematic diagram of the cross-sectional structure at point AA;

[0021] Figure 3 :exist Figure 1 Schematic diagram of the cross-sectional structure at point BB;

[0022] Figure 4 : A three-dimensional structural diagram of this utility model after removing the shell;

[0023] Figure 5 : A three-dimensional structural diagram of this utility model. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and examples:

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] like Figures 1 to 5 As shown, an adsorption-type cold trap includes: a shell 1, a cooling inner liner 2, and a first mesh plate 4. An air inlet 13 is formed at the bottom of the shell 1, and an air outlet 14 is formed at the top of the shell 1. The cooling inner liner 2 is located inside the shell 1 and is fixedly connected to the shell 1. A cooling cavity is formed inside the cooling inner liner 2, and the cooling cavity is connected to a liquid inlet 17 and a liquid outlet 18 respectively. The first mesh plate 4 is located inside the shell 1 and is fixedly positioned to the shell 1. The first mesh plate 4 is located above the cooling inner liner 2.

[0029] Preferably, it also includes a second mesh plate 5, which is located inside the housing 1 and above the first mesh plate 4. The second mesh plate 5 is fixed in position to the housing 1.

[0030] More preferably, adsorption particles are disposed between the first mesh plate 4 and the second mesh plate 5. The mesh openings of the first mesh plate 4 and the second mesh plate 5 are smaller than the diameter of the adsorption particles, thereby limiting the adsorption particles (not shown in the figure) and preventing them from leaving the space between the first mesh plate 4 and the second mesh plate 5.

[0031] Preferably, the device further includes a transparent lens 6, a mesh tube 61, and a fixing shell 62. The mesh tube 61 is located between the first mesh plate 4 and the second mesh plate 5. The fixing shell 62 is fixedly connected to the shell 1. The open end of the mesh tube 61 is fixedly and detachably connected to the fixing shell 62. The fixing shell 62 is fixedly connected to the transparent lens 6.

[0032] More preferably, the mesh cylinder 61 contains a detection reagent. In use, the mesh cylinder 61 is surrounded by adsorbed particles. A person visually observes the color of the solid granular detection reagent inside the mesh cylinder 61 through the transparent lens 6 to determine if the adsorbed particles are saturated. If the color of the detection reagent changes to the color indicated by saturated adsorbed particles, the adsorbed particles are replaced. When replacing the adsorbed particles, a new detection reagent must also be used.

[0033] Preferably, the system further includes an installation cylinder 3 and an adsorption plate 31. The installation cylinder 3 is fitted onto the outside of the cooling inner liner 2 and contacts the cooling inner liner 2. The outside of the installation cylinder 3 is fixedly connected to the adsorption plate 31. The installation cylinder 3 and the cooling inner liner 2 are detachable, making it easy to remove the installation cylinder 3 and the adsorption plate 31 from the housing 1 for cleaning. The adsorption plate 31 is used to increase the adsorption area.

[0034] Preferably, the inner and outer sides of the adsorption plate 31 are respectively attached to the outer side of the mounting cylinder 3 and the inner wall of the shell 1. The adsorption plate 31 forms a vent 30 that runs through the vertical direction. Multiple adsorption plates 31 are arranged in a straight line along the vertical direction, so that the exhaust gas moves along the air duct set by the adsorption plate 31.

[0035] More preferably, the air inlets 30 of two adjacent adsorption plates 31 do not overlap, so that the gas must go through a circular motion on a horizontal plane before it can move vertically upward, thereby increasing the length of the gas flow through the adsorption plate 31 and increasing the amount of dust adsorbed and pollutants condensed in the gas.

[0036] Preferably, the housing 1 includes a lower housing 11, an upper housing 12, a bottom plate 15, and a top plate 16. The upper housing 12 is located above the lower housing 11 and is fixed to and detachably connected to the lower housing 11. The top plate 16 is located above the upper housing 12 and is fixed to and detachably connected to the upper housing 12. The bottom plate 15 is located below the lower housing 11 and is fixed to and detachably connected to the lower housing 11. The first mesh plate 4 is located inside the upper housing 12, and the cooling inner liner 2 is located inside the lower housing 11 and is fixedly connected to the bottom plate 15. The multi-segmented housing 1 is easy to disassemble for cleaning, and adjacent components of the housing 1 can be fixed and sealed using existing flange connections, clamp connections, etc.

[0037] Preferably, the system further includes a separator 21 located inside the cooling chamber. The top of the separator 21 forms a channel with the inner wall of the cooling liner 2, and the bottom of the separator 21 is fixedly connected to the base plate 15. The liquid inlet 17 and the liquid outlet 18 are respectively formed on the base plate 15, and are located on the left and right sides of the separator 21. The separator 21 restricts the flow path of the refrigerant, ensuring that the refrigerant must pass through the upper part of the cooling chamber, resulting in a more uniform temperature throughout the cooling liner 2. More preferably, the refrigerant is cooling water.

[0038] Preferably, the system further includes a first support plate 41 and a second support plate 51, which are respectively fixedly connected to the inner wall of the upper housing 12. The first mesh plate 4 is placed above the first support plate 41, and the second mesh plate 5 is placed above the second support plate 51. Installing the first mesh plate 4 and the second mesh plate 5 by placing them together simplifies the process of disassembly and installation.

[0039] More preferably, the number of first trays 41 and second trays 51 is greater than two.

[0040] Preferably, it also includes casters 7, with multiple casters 7 located below the base plate 15 and fixedly connected to the base plate 15 to facilitate the movement of the housing 1.

[0041] Preferably, it also includes a handle 19, which is located above the top plate 16 and fixedly connected to the top plate 16, and provides a point of leverage for the worker when moving the housing 1.

[0042] Preferably, the air inlet 13 is integrally formed with the lower housing 11, and the air outlet 14 is integrally formed with the top plate 16.

[0043] Working principle:

[0044] During operation, the exhaust gas leaves the dry pump and enters the housing 1 through the inlet 13. At this time, refrigerant enters the cooling chamber through the liquid inlet 17 and exchanges heat with the cooling inner tank 2, lowering its temperature. The refrigerant then flows out through the liquid outlet 18. The cooling inner tank 2 cools the mounting cylinder 3 and the adsorption plates 31. The exhaust gas moves between the adsorption plates 31 and continuously passes through the vent 30, moving upwards. During this process, dust particles in the exhaust gas are adsorbed by the adsorption plates 31.

[0045] After leaving the adsorption plate 31, the exhaust gas rises through the first mesh plate 4 and comes into contact with the adsorbed particles. After being adsorbed by the particles, the exhaust gas continues to rise through the second mesh plate 5 and exits the interior of the housing 1 through the outlet 14. Afterward, the adsorbed exhaust gas enters the exhaust gas treatment equipment through a pipeline. The dust content in the adsorbed exhaust gas is greatly reduced, minimizing dust deposition on the inner wall of the pipeline and preventing blockage of the pipeline between the dry pump and the exhaust gas treatment equipment.

[0046] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. An adsorption-type cold trap, characterized in that, include: The shell (1), the cooling liner (2) and the first mesh plate (4) are provided. An air inlet (13) is formed at the bottom of the shell (1) and an air outlet (14) is formed at the top of the shell (1). The cooling liner (2) is located inside the shell (1) and is fixedly connected to the shell (1). A cooling cavity is formed inside the cooling liner (2). The cooling cavity is connected to the liquid inlet (17) and the liquid outlet (18) respectively. The first mesh plate (4) is located inside the shell (1) and is fixedly positioned to the shell (1). The first mesh plate (4) is located above the cooling liner (2).

2. The adsorption-type cold trap according to claim 1, characterized in that: It also includes a second mesh plate (5), which is located inside the shell (1) and above the first mesh plate (4). The second mesh plate (5) is fixed in position to the shell (1); adsorption particles are provided between the first mesh plate (4) and the second mesh plate (5).

3. An adsorption-type cold trap according to claim 2, characterized in that: It also includes a transparent lens (6), a mesh tube (61) and a fixing shell (62). The mesh tube (61) is located between the first mesh plate (4) and the second mesh plate (5). The fixing shell (62) is fixedly connected to the shell (1). The open end of the mesh tube (61) is fixedly and detachably connected to the fixing shell (62). The fixing shell (62) is fixedly connected to the transparent lens (6). The mesh tube (61) contains a detection reagent.

4. An adsorption-type cold trap according to claim 1, characterized in that: It also includes an installation cylinder (3) and an adsorption plate (31). The installation cylinder (3) is fitted on the outside of the cooling inner liner (2) and in contact with the cooling inner liner (2). The outside of the installation cylinder (3) is fixedly connected to the adsorption plate (31).

5. An adsorption-type cold trap according to claim 4, characterized in that: The inner and outer sides of the adsorption plate (31) are respectively attached to the outer side of the mounting cylinder (3) and the inner wall of the shell (1). The adsorption plate (31) forms a vent (30) that runs through the vertical direction. Multiple adsorption plates (31) are arranged in a straight line along the vertical direction. The vents (30) of two adjacent adsorption plates (31) do not overlap.

6. An adsorption-type cold trap according to claim 2, characterized in that: The housing (1) includes a lower housing (11), an upper housing (12), a bottom plate (15), and a top plate (16). The upper housing (12) is located above the lower housing (11) and is fixed and detachably connected to the lower housing (11). The top plate (16) is located above the upper housing (12) and is fixed and detachably connected to the upper housing (12). The bottom plate (15) is located below the lower housing (11) and is fixed and detachably connected to the lower housing (11). The first mesh plate (4) is located inside the upper housing (12), and the cooling inner liner (2) is located inside the lower housing (11) and is fixedly connected to the bottom plate (15).

7. An adsorption-type cold trap according to claim 6, characterized in that: It also includes a partition (21), which is located inside the cooling chamber. The top of the partition (21) forms a channel with the inner wall of the cooling inner liner (2). The bottom of the partition (21) is fixedly connected to the bottom plate (15). The liquid inlet (17) and liquid outlet (18) are respectively formed on the bottom plate (15). The liquid inlet (17) and liquid outlet (18) are respectively located on the left and right sides of the partition (21).

8. An adsorption-type cold trap according to claim 6, characterized in that: It also includes a first tray (41) and a second tray (51), the first tray (41) and the second tray (51) being fixedly connected to the inner wall of the upper housing (12) respectively, the first mesh plate (4) being placed above the first tray (41), and the second mesh plate (5) being placed above the second tray (51).

9. An adsorption-type cold trap according to claim 6, characterized in that: It also includes casters (7), multiple casters (7) located below the base plate (15) and fixedly connected to the base plate (15); it also includes a handle (19), the handle (19) located above the top plate (16) and fixedly connected to the top plate (16).

10. An adsorption-type cold trap according to claim 6, characterized in that: The air inlet (13) is integrally formed with the lower housing (11), and the air outlet (14) is integrally formed with the top plate (16).

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