Ozone water decomposition device

Abstract

The utility model discloses an ozone water decomposition device which comprises at least one decomposition tower, a water tank and a drainage pump, the decomposition towers are vertically arranged long containers and are connected in series, a first water inlet and a first water outlet are formed in the bottom end and the top end of each decomposition tower respectively, and ultraviolet lamps are arranged in the decomposition towers in the length direction of the decomposition towers and used for decomposing ozone water entering the decomposition towers; the water tank is a container of which the top end and the bottom end are respectively provided with a second water inlet and a second water outlet; the second water inlet is connected with the first water outlet at the tail end; the drainage pump comprises a third water inlet and a third water outlet; the third water inlet is connected with the second water outlet; and the third water outlet is used for being connected with a wastewater drainage pipe positioned above the decomposition tower. The system is high in integration level and reasonable in arrangement, and the safety and reliability of wastewater discharge are improved; in addition, the service lives of the drainage pump and the pipeline can be prolonged, so that the service life of the ozone water decomposition device is prolonged, and the cost is reduced.

Description

Technical Field

[0001] This utility model belongs to the technical field of water treatment systems, specifically, it relates to an ozone water decomposition device. Background Technology

[0002] In the semiconductor industry, deionized ozone water is frequently used for wafer cleaning. The ozone-containing wastewater after cleaning is discharged by gravity from the bottom of the machine. This ozone water still has a high concentration of dissolved ozone and strong oxidizing properties. Direct discharge of this water would cause significant damage to the environment and plant piping systems; therefore, it must be treated before discharge. Since the cleaning machine's wastewater is discharged by gravity, a well-designed decomposition equipment and wastewater drainage pipe system are crucial. Summary of the Invention

[0003] This invention provides an ozone water decomposition device with high integration and reasonable setup, which improves the safety and reliability of wastewater discharge, increases lifespan, and reduces costs.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A power-driven ozone water decomposition device includes at least one decomposition tower, a water tank, and a drainage pump;

[0006] Each of the decomposition towers is a vertically arranged elongated container connected in series, with a first water inlet and a first water outlet formed at the bottom and top respectively. An ultraviolet lamp along its length is installed inside to decompose the ozone water entering the decomposition tower.

[0007] The water tank is a container with a second water inlet at the top and a second water outlet at the bottom; the second water inlet is connected to the first water outlet at the bottom.

[0008] The drainage pump includes a third inlet and a third outlet; the third inlet is connected to the second outlet; the third outlet is used to connect to the wastewater drainage pipe located above the decomposition tower.

[0009] In some specific embodiments, there are two decomposition towers, namely a first decomposition tower and a second decomposition tower, and the ultraviolet lamps installed inside the towers are respectively a first ultraviolet lamp and a second ultraviolet lamp; the first ultraviolet lamp is located in the middle of the first decomposition tower; and the second ultraviolet lamp is located in the middle of the second decomposition tower.

[0010] In some specific embodiments, a first ultraviolet light intensity meter and a second ultraviolet light intensity meter are also included, which are respectively installed in the first decomposition tower and the second decomposition tower, and are used to detect the ultraviolet light intensity of the first ultraviolet lamp and the second ultraviolet lamp respectively;

[0011] It also includes an ozone concentration detection unit, which is installed on the pipeline between the second decomposition tower and the water tank, and is used to detect the ozone concentration of the decomposed water output by the second decomposition tower.

[0012] In some specific embodiments, both the first decomposition tower and the second decomposition tower are cylindrical;

[0013] Multiple baffles are evenly arranged on the side walls of the first decomposition tower and the second decomposition tower, respectively.

[0014] In some specific embodiments, a first temperature detection unit and a second temperature detection unit connected in series with the first ultraviolet lamp and the second ultraviolet lamp are respectively provided in the first decomposition tower and the second decomposition tower; the first ultraviolet lamp and the second ultraviolet lamp are linked to the first temperature detection unit and the second temperature detection unit to operate or stop operating.

[0015] In some specific embodiments, a maintenance module is also included, which includes a first drain valve, a second drain valve, and a third drain valve;

[0016] A first maintenance outlet, a second maintenance outlet, and a third maintenance outlet are respectively provided at the bottom of the first decomposition tower, the second decomposition tower, and the water tank. These outlets are connected to the maintenance drainage pipe through the first drain valve, the second drain valve, the third drain valve, and pipelines, respectively.

[0017] In some specific embodiments, a check valve is also included, one end of which is connected to the drain pump and located between the drain pump and the wastewater drain pipe, and the other end is used to connect to the wastewater drain pipe through a pipeline.

[0018] In some specific embodiments, it also includes a water inlet valve and a pressure detection unit disposed on its front side; one end of the water inlet valve is connected to the first water inlet at the front end through a pipeline, and the other end is used to connect to the cleaning machine located above it; the water inlet valve is connected to the pressure detection unit, and the pressure detection unit is opened or closed in conjunction with the valve.

[0019] In some specific embodiments, a water level detection unit is also included, which is disposed inside the water tank and is used to detect the water level in the water tank; the drainage pump is connected to the water level detection unit and is linked to the water level detection unit to start or stop operation.

[0020] In some specific embodiments, a balancing valve is also included;

[0021] The water tank is provided with an air outlet at the upper end; the balance valve is located at the air outlet and is used to control the air outlet to open or close.

[0022] The balancing valve is connected to the water level detection unit, and the water level detection unit is opened or closed in conjunction with the valve.

[0023] Compared with existing technologies, the advantages and positive effects of this invention are as follows: The ozone water decomposition device of this invention improves the safety of wastewater discharge by setting at least one decomposition tower to decompose ozone water using ultraviolet lamps; by setting a water tank to store and allow the decomposed wastewater to settle and vent, it not only provides good full-water operation conditions for the drainage pump but also prevents the gas contained in the wastewater from corroding the pipes, thus extending the lifespan of both the drainage pump and the pipes; the drainage pump ensures that the wastewater decomposed by the ozone water decomposition device at the bottom layer is reliably discharged into the wastewater drainage pipe above it, improving the reliability of wastewater discharge. In summary, the ozone water decomposition device of this invention has high integration and a reasonable layout, improving the safety and reliability of wastewater discharge; extending the lifespan of the drainage pump, thereby extending the lifespan of the ozone water decomposition device and reducing costs. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure and connection of the ozone water decomposition device according to an embodiment.

[0026] In the picture,

[0027] 11. First inlet; 12. First outlet; 13. First decomposition tower; 14. Second decomposition tower; 15. Baffle plate; 16. First maintenance outlet; 17. Second maintenance outlet; 2. Water tank; 21. Second inlet; 22. Second outlet; 23. Third maintenance outlet; 24. Air outlet; 3. Maintenance module; 4. Cleaning machine; 5. Maintenance drain pipe; 6. Wastewater drain pipe; 71. Third inlet; 72. Third outlet;

[0028] PT1, Pressure detection unit; SV1, Inlet valve; Q1, First UV intensity meter; Q2, Second UV intensity meter; Q3, Ozone concentration detection unit; UV1, First UV lamp; UV2, Second UV lamp; T1, First temperature detection unit; T2, Second temperature detection unit; L1, Water level detection unit; SV2, Balancing valve; MV1, First drain valve; MV2, Second drain valve; MV3, Third drain valve; P1, Drain pump; CV1, Check valve. Detailed Implementation

[0029] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0030] Reference Figure 1 This utility model discloses an ozone water decomposition device, including at least one decomposition tower, a water tank 2, and a drainage pump P1.

[0031] Each decomposition tower is a vertically arranged elongated container connected in series. Specifically, each decomposition tower has a first inlet 11 and a first outlet 12 at its bottom and top, respectively. The first outlet 12 and first inlet 11 of adjacent decomposition towers are connected by pipelines, allowing wastewater to enter from the first decomposition tower, pass through each tower sequentially, and then be discharged. Each decomposition tower is equipped with ultraviolet lamps running along its length to decompose the ozone water entering the tower. Of course, some or all of the ultraviolet lamps can be operated as needed or according to the attenuation of the individual lamps to ensure complete decomposition of the wastewater sample.

[0032] Water tank 2 is a container with a second water inlet 21 and a second water outlet 22 at its top and bottom, respectively; the second water inlet 21 is connected to the first water outlet 12 of the decomposition tower at the end; water tank 2 is used for water storage and for allowing the stored water to stand still and release gas.

[0033] The drainage pump P1 includes a third inlet 71 and a third outlet 72; the third inlet 71 is connected to the second outlet 22; the third outlet 72 is used to connect to the wastewater drainage pipe 6 located above the decomposition tower, and is used to discharge the wastewater in the water tank 2.

[0034] This invention's ozone water decomposition device improves wastewater safety by using at least one decomposition tower to decompose ozone water with ultraviolet lamps. A water tank 2 stores and allows for stabilization and venting of the decomposed wastewater, providing optimal full-water operation conditions for the drainage pump P1 and preventing gas from corroding the pipes, thus extending the lifespan of both the pump and the pipes. The drainage pump P1 ensures reliable discharge of wastewater from the bottom-level ozone water decomposition device into the wastewater drain pipe 6 above it, further enhancing wastewater discharge reliability. In summary, this invention's ozone water decomposition device features high integration, a rational design, improved wastewater discharge safety and reliability, extended drainage pump lifespan, and consequently, the lifespan of the entire ozone water decomposition device, while reducing costs.

[0035] The specific structure and principle of the ozone water decomposition device of this utility model will be described in detail below through specific embodiments.

[0036] In some specific embodiments, refer to Figure 1 There are two decomposition towers, namely the first decomposition tower 13 and the second decomposition tower 14, and the ultraviolet lamps installed inside them are the first ultraviolet lamp UV1 and the second ultraviolet lamp UV2, respectively; the first ultraviolet lamp UV1 is located in the middle of the first decomposition tower 13; and the second ultraviolet lamp UV2 is located in the middle of the second decomposition tower 14.

[0037] The ozone water decomposition device in this embodiment achieves the following: by setting up two decomposition towers and operating the ultraviolet lamps of each decomposition tower separately and operating the ultraviolet lamps of each decomposition tower together, it can fully utilize each ultraviolet lamp when the ultraviolet lamps have not decayed, while ensuring the ozone decomposition rate in the wastewater; when the ultraviolet lamps decay, operating each ultraviolet lamp simultaneously can ensure the ozone decomposition rate in the wastewater, thus ensuring the wastewater treatment quality. In addition, the ultraviolet lamps are placed in the middle of the decomposition towers to improve their decomposition efficiency.

[0038] In some specific embodiments, refer to Figure 1 The ozone water decomposition device also includes a first ultraviolet light intensity meter Q1 and a second ultraviolet light intensity meter Q2, which are respectively installed in the first decomposition tower 13 and the second decomposition tower 14, and are used to detect the ultraviolet light intensity of the first ultraviolet lamp UV1 and the second ultraviolet lamp UV2 respectively; and determine the switching time for the first ultraviolet lamp UV1 and the second ultraviolet lamp UV2 to operate individually or together based on the ultraviolet light intensity of the first ultraviolet lamp UV1 and the second ultraviolet lamp UV2.

[0039] In some specific embodiments, refer to Figure 1 The ozone water decomposition device also includes an ozone concentration detection unit Q3, which is installed on the pipeline between the second decomposition tower 14 and the water tank 2, and is used to detect the ozone concentration of the decomposed water output by the second decomposition tower 14.

[0040] In this embodiment, the ozone concentration detected by the ozone concentration detection unit Q3 is used to monitor the wastewater treatment quality in real time, ensuring the safety of the discharged wastewater.

[0041] In some specific embodiments, refer to Figure 1 Both the first decomposition tower 13 and the second decomposition tower 14 are cylindrical; multiple baffles 15 are evenly arranged on the side wall inside the first decomposition tower 13 and the side wall inside the second decomposition tower 14.

[0042] The ozone water decomposition device in this embodiment reduces the flow rate of wastewater in the decomposition tower by setting baffles 15, thereby increasing the sampling decomposition rate.

[0043] In some specific embodiments, one end of each baffle 15 is fixedly connected to the side wall of the opposite side inside the decomposition tower, and the other end, i.e. the free end, overlaps and crosses each other.

[0044] In some specific embodiments, refer to Figure 1A first temperature detection unit T1 and a second temperature detection unit T2, which are connected to a first ultraviolet lamp UV1 and a second ultraviolet lamp UV2, are respectively installed in the first decomposition tower 13 and the second decomposition tower 14. The first ultraviolet lamp UV1 and the second ultraviolet lamp UV2 are linked to the first temperature detection unit T1 and the second temperature detection unit T2 to operate or stop operating.

[0045] That is, when the temperature of each decomposition tower detected by the first temperature detection unit T1 and the second temperature detection unit T2 reaches the set threshold, the first ultraviolet lamp UV1 and the second ultraviolet lamp UV2 will stop operating in conjunction to protect the ultraviolet lamps; when another temperature threshold is reached, they will operate in conjunction; this can be achieved by using temperature detection to link the power supply line switch.

[0046] The ozone water decomposition device in this embodiment protects the ultraviolet lamp by setting up a temperature detection unit and linking the ultraviolet lamp with the temperature detection unit, thereby improving the lifespan and reliability of the ultraviolet lamp.

[0047] In some specific embodiments, refer to Figure 1 The ozone water decomposition device also includes a maintenance module 3, which includes a first drain valve MV1, a second drain valve MV2, and a third drain valve MV3.

[0048] The bottom of the first decomposition tower 13, the second decomposition tower 14, and the water tank 2 are respectively provided with a first maintenance outlet 16, a second maintenance outlet 17, and a third maintenance outlet 23, which are respectively connected to the maintenance drainage pipe 5 through a first drain valve MV1, a second drain valve MV2, a third drain valve MV3, and pipelines.

[0049] In this embodiment, the ozone water decomposition device has a first maintenance outlet 16, a second maintenance outlet 17, a third maintenance outlet 23, and a maintenance drain pipe 5 respectively installed at the bottom of the first decomposition tower 13, the second decomposition tower 14, and the water tank 2. The connection and disconnection of the first maintenance outlet 16, the second maintenance outlet 17, the third maintenance outlet 23 and the maintenance drain pipe 5 are controlled by the first drain valve MV1, the second drain valve MV2 and the third drain valve MV3. This allows for the separate discharge of maintenance liquid used for the maintenance of the decomposition towers and the water tank 2, thereby improving discharge safety and extending the lifespan of the ozone water decomposition device.

[0050] In some specific embodiments, refer to Figure 1 The ozone water decomposition device also includes a check valve CV1, one end of which is connected to the third outlet 72 of the drainage pump P1 and located between the drainage pump P1 and the wastewater drainage pipe 6, and the other end is used to connect to the wastewater drainage pipe 6 through a pipeline.

[0051] In this embodiment, the ozone water decomposition device improves the safety and reliability of the ozone water decomposition device by installing a check valve CV1 between the drainage pump P1 and the wastewater drainage pipe 6 to prevent wastewater in the wastewater drainage pipe 6 from flowing back into the water tank 2 when the drainage pump P1 stops running.

[0052] In some specific embodiments, refer to Figure 1 The ozone water decomposition device also includes an inlet valve SV1 and a pressure detection unit PT1 located in front of it. One end of the inlet valve SV1 is connected to the first inlet 11 of the decomposition tower located at the front end via a pipeline, and the other end is used to connect to the cleaning machine 4 located above it. The cleaning machine 4 is used to clean high-precision electronic products such as wafers. The inlet valve SV1 is connected to the pressure detection unit PT1, and the pressure detection unit PT1 is opened or closed in conjunction with it. This can be achieved by linking the power switch of the pressure detection unit PT1 with that of the inlet valve SV1.

[0053] In this embodiment, the ozone water decomposition device ensures that the pressure of the wastewater entering the decomposition tower is within a safe range by setting a pressure detection unit PT1 and an inlet valve SV1 linked to the pressure detection unit PT1, thereby improving the safety and reliability of the ozone water decomposition device.

[0054] In some specific embodiments, refer to Figure 1 The ozone water decomposition device also includes a water level detection unit L1, which is installed in the water tank 2 to detect the water level in the water tank 2; the drain pump P1 is connected to the water level detection unit L1 and activates or stops the water level detection unit L1.

[0055] The ozone water decomposition device in this embodiment ensures that the drainage pump P1 operates in a full water state, which not only saves energy but also improves drainage efficiency and extends the life of the drainage pump P1.

[0056] In some specific embodiments, refer to Figure 1 The ozone water decomposition device also includes a balancing valve SV2.

[0057] The upper end of the water tank 2 is provided with an air outlet 24; the balance valve SV2 is located at the air outlet 24 and is used to control the opening or closing of the air outlet 24; the balance valve SV2 is connected to the water level detection unit L1 and is linked to the water level detection unit L1 to open or close.

[0058] In this embodiment, the ozone water decomposition device ensures that the gas in the water tank 2 remains balanced by setting a balance valve SV2 that is linked to the water level detection unit L1, preventing the continuous accumulation of gas in the water tank 2 and improving the safety of the ozone water decomposition device.

[0059] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0060] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0061] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0062] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0063] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0064] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. An ozone water decomposition device, characterized in that, include: At least one decomposition tower, which are all vertically arranged long containers connected in series, with a first water inlet and a first water outlet formed at the bottom and top respectively, and an ultraviolet lamp along its length is installed inside for decomposing the ozone water entering the decomposition tower. A water tank is a container with a second water inlet at the top and a second water outlet at the bottom; the second water inlet is connected to the first water outlet at the bottom. The drainage pump includes a third inlet and a third outlet; the third inlet is connected to the second outlet; the third outlet is used to connect to a wastewater drainage pipe located above the decomposition tower.

2. The ozone water decomposition device according to claim 1, characterized in that, There are two decomposition towers, namely a first decomposition tower and a second decomposition tower, and the ultraviolet lamps installed inside them are a first ultraviolet lamp and a second ultraviolet lamp, respectively; the first ultraviolet lamp is located in the middle of the first decomposition tower; the second ultraviolet lamp is located in the middle of the second decomposition tower.

3. The ozone water decomposition device according to claim 2, characterized in that, It also includes a first ultraviolet light intensity meter and a second ultraviolet light intensity meter, which are respectively installed in the first decomposition tower and the second decomposition tower, and are used to detect the ultraviolet light intensity of the first ultraviolet lamp and the second ultraviolet lamp respectively; It also includes an ozone concentration detection unit, which is installed on the pipeline between the second decomposition tower and the water tank, and is used to detect the ozone concentration of the decomposed water output by the second decomposition tower.

4. The ozone water decomposition device according to claim 2, characterized in that, Both the first decomposition tower and the second decomposition tower are cylindrical. Multiple baffles are evenly arranged on the side walls of the first decomposition tower and the second decomposition tower, respectively.

5. The ozone water decomposition device according to claim 2, characterized in that, A first temperature detection unit and a second temperature detection unit, respectively connected to the first ultraviolet lamp and the second ultraviolet lamp, are respectively installed in the first decomposition tower and the second decomposition tower; the first ultraviolet lamp and the second ultraviolet lamp are respectively linked to the first temperature detection unit and the second temperature detection unit to operate or stop operating.

6. The ozone water decomposition device according to claim 2, characterized in that, It also includes a maintenance module, which includes a first drain valve, a second drain valve, and a third drain valve; A first maintenance outlet, a second maintenance outlet, and a third maintenance outlet are respectively provided at the bottom of the first decomposition tower, the second decomposition tower, and the water tank. These outlets are connected to the maintenance drainage pipe through the first drain valve, the second drain valve, the third drain valve, and pipelines, respectively.

7. The ozone water decomposition apparatus according to any one of claims 1 to 6, characterized in that, It also includes a check valve, one end of which is connected to the drain pump and located between the drain pump and the wastewater drain pipe, and the other end is used to connect to the wastewater drain pipe through a pipeline.

8. The ozone water decomposition device according to claim 7, characterized in that, It also includes a water inlet valve and a pressure detection unit located on its front side; one end of the water inlet valve is connected to the first water inlet at the front end through a pipeline, and the other end is used to connect to the cleaning machine located above it; the water inlet valve is connected to the pressure detection unit, and the pressure detection unit is opened or closed in conjunction with the valve.

9. The ozone water decomposition device according to claim 7, characterized in that, It also includes a water level detection unit, which is installed inside the water tank to detect the water level in the water tank; the drainage pump is connected to the water level detection unit and is linked to the water level detection unit to start or stop operation.

10. The ozone water decomposition device according to claim 9, characterized in that, It also includes a balancing valve; The water tank is provided with an air outlet at the upper end; the balance valve is located at the air outlet and is used to control the air outlet to open or close. The balancing valve is connected to the water level detection unit, and the water level detection unit is opened or closed in conjunction with the valve.

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