Target material assembly, coating device and coating production line

Abstract

The utility model discloses a target material assembly, a coating device and a coating production line, and relates to the technical field of magnetron sputtering coating. The target material assembly comprises a target tube, a first magnet and a second magnet, a containing cavity is defined by the inner side wall of the target tube, the first magnet and the second magnet are both arranged in the containing cavity and located at the two ends of the containing cavity in the first direction respectively, and the first direction is perpendicular to the extending direction of the axis of the target tube. According to the target assembly provided by the utility model, the magnetron sputtering device has bidirectional coating capability, and the coating efficiency can be obviously improved.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating technology, specifically to a target assembly, a coating device, and a coating production line. Background Technology

[0002] The target assembly in a magnetron sputtering system typically consists of a target tube and a magnet. The target material is mounted on the outer surface of the target tube and serves as the cathode, connected to the negative terminal of the power supply. The magnet is located inside the target tube, generating a magnetic field to control the movement of atoms or molecules during the deposition process.

[0003] Currently, in the target material components on the market, the magnets are usually concentrated at one end of the internal space of the target tube. The magnetic field generated by the magnets can only penetrate the target material from one side of the target tube, that is, it is only manifested on the outside side of the target tube. This makes the magnetron sputtering device only able to perform unidirectional coating, resulting in low coating efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a target assembly that enables a magnetron sputtering device to have bidirectional coating capability, thereby significantly improving coating efficiency.

[0005] Another objective of this invention is to provide a coating device that has bidirectional coating capability and higher coating efficiency.

[0006] Another objective of this invention is to provide a coating device that has higher coating efficiency.

[0007] The embodiments of this utility model provide a technical solution:

[0008] A target assembly includes a target tube, a first magnet, and a second magnet. The inner wall of the target tube defines a receiving cavity. The first magnet and the second magnet are both disposed within the receiving cavity and are located at opposite ends of the receiving cavity in a first direction, which is perpendicular to the axial extension direction of the target tube.

[0009] In an optional embodiment, the number of the first magnets is multiple, and the multiple first magnets are symmetrically distributed about the diameter of the target tube extending in the first direction as an axis of symmetry; and / or,

[0010] The number of the second magnets is multiple, and the multiple second magnets are symmetrically distributed about the diameter of the target tube extending in the first direction as the axis of symmetry.

[0011] In an optional embodiment, there are multiple first magnets and multiple second magnets, and the multiple first magnets and multiple second magnets are symmetrically distributed about the diameter of the target tube extending in the second direction as an axis of symmetry. The second direction is perpendicular to the first direction and the axial extension direction of the target tube.

[0012] In an optional embodiment, the length extension direction of the first magnet and / or the second magnet is parallel to the axial extension direction of the target tube.

[0013] In an optional embodiment, a fixing tube is further included, which is coaxially sleeved inside the target tube, and the two can rotate relative to each other;

[0014] The first magnet and the second magnet are both disposed on the fixed tube and are respectively located on both sides of the fixed tube in the first direction.

[0015] This utility model also provides a coating device, including the aforementioned target material assembly. The target material assembly includes a target tube, a first magnet, and a second magnet. The inner sidewall of the target tube defines a receiving cavity. The first magnet and the second magnet are both disposed in the receiving cavity and are respectively located at both ends of the receiving cavity in a first direction. The first direction is perpendicular to the axial extension direction of the target tube.

[0016] In an optional embodiment, the coating apparatus further includes a drive mechanism, which is connected to the target tube in a transmission manner, and is used to drive the target tube to rotate relative to the first magnet and the second magnet.

[0017] In an optional embodiment, the coating apparatus has a coating chamber, and the target assembly is disposed within the coating chamber;

[0018] The coating chamber is further provided with a first conveying component and a second conveying component for conveying the substrate, the first conveying component and the second conveying component being located on both sides of the target component in the first direction.

[0019] In an optional embodiment, there are multiple target material assemblies, which are arranged sequentially in the conveying directions of the first conveying assembly and the second conveying assembly.

[0020] This utility model also provides a coating production line, including the aforementioned coating device. The coating device includes the aforementioned target assembly, which includes a target tube, a first magnet, and a second magnet. The inner sidewall of the target tube defines a receiving cavity. The first magnet and the second magnet are both disposed in the receiving cavity and are respectively located at both ends of the receiving cavity in a first direction, which is perpendicular to the axial extension direction of the target tube.

[0021] Compared to existing technologies, the target assembly provided by this invention includes a first magnet and a second magnet, which are respectively located at opposite ends of the accommodating cavity in a first direction. The magnetic fields generated by the first magnet and the second magnet can exit from opposite sides of the target tube in the first direction, i.e., appear on opposite sides of the target tube, enabling the magnetron sputtering device to perform bidirectional coating, thus doubling the coating efficiency. Therefore, the beneficial effects of the target assembly provided by this invention include: enabling the magnetron sputtering device to have bidirectional coating capability, and significantly improving coating efficiency. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and therefore should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without any creative effort.

[0023] Figure 1 A schematic diagram of the coating apparatus provided in an embodiment of this utility model;

[0024] Figure 2 A cross-sectional schematic diagram of the coating apparatus provided in an embodiment of this utility model;

[0025] Figure 3 for Figure 2 An enlarged schematic diagram of region A in the middle.

[0026] Icons: 10-Coating device; 11-Box; 12-Cathode cover; 13-Coating chamber; 14-First conveying assembly; 15-Second conveying assembly; 16-First opening; 17-Second opening; 18-Separator; 100-Target assembly; 110-Target tube; 111-Accommodation cavity; 120-First magnet; 130-Second magnet; 140-Fixing tube; 200-Carrier plate; Y-First direction; X-Second direction. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0029] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0030] In the description of this utility model, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use, or the orientation or positional relationship that is commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0032] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, terms such as "set" and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0033] The specific embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0034] Example

[0035] Please refer to the following: Figure 1 and Figure 2 , Figure 1 The diagram shown is a structural schematic of the coating apparatus 10 provided in this embodiment. Figure 2 The diagram shown is a cross-sectional view of the coating apparatus 10.

[0036] The coating apparatus 10 provided in this embodiment is used for magnetron sputtering coating of a substrate, such as a silicon wafer. The coating apparatus 10 includes a housing 11, a cathode cover 12, a drive mechanism, and a target assembly 100. The cathode cover 12 is integrally connected to the drive mechanism and covers the opening of the housing 11, forming a coating chamber 13. The target assembly 100 is drive-connected to the drive mechanism and is located within the coating chamber 13. The target assembly 100 is also electrically connected to the cathode cover 12 to form a cathode.

[0037] It should be noted that in this embodiment, the housing 11 itself serves as the anode for coating, providing a stable potential reference point for the coating process, so that the negative high voltage on the target assembly 100 can effectively attract positive ions to bombard the target surface. In other embodiments, an additional anode may be configured in the coating chamber 13, which is not specifically limited in this application.

[0038] In this embodiment, the cathode cover 12 seals the opening of the housing 11, and an installation chamber is formed inside the cathode cover 12. The drive mechanism is installed inside the installation chamber, and the drive mechanism extends from the lower surface of the cathode cover 12 into the housing 11 and is connected to the target assembly 100 for transmission. In other words, the cathode cover 12, the drive mechanism, and the target assembly 100 are connected as an integral structure, which can significantly improve the assembly and disassembly efficiency of the coating device 10 and the ease of operation during the coating process.

[0039] In another embodiment, the cathode cover 12 and the drive mechanism can also be independent structures. For example, the drive mechanism can be disposed on the housing 11.

[0040] Please refer to the following: Figure 3 , Figure 3 As shown Figure 2 An enlarged schematic diagram of region A in the middle.

[0041] In this embodiment, the target assembly 100 includes a target tube 110, a first magnet 120 and a second magnet 130. The inner sidewall of the target tube 110 defines a receiving cavity 111. The first magnet 120 and the second magnet 130 are both disposed in the receiving cavity 111 and are respectively located at both ends of the receiving cavity 111 in a first direction, which is perpendicular to the axial extension direction of the target tube 110.

[0042] Figure 2 and Figure 3 The direction indicated by the Y-arrow is the first direction, which is actually the vertical direction with the coating device 10 as the reference standard. A target material is provided on the outer wall of the target tube 110. The target material is electrically connected to the cathode cover 12 to form a cathode. The drive mechanism is connected to the target tube 110 for transmission and is used to drive the target tube 110 to rotate the target material relative to the first magnet 120 and the second magnet 130.

[0043] Preferably, the driving mechanism in this embodiment includes a rotary motor disposed in the mounting cavity of the cathode cover 12. The rotary motor is connected to the target tube 110 via a belt, and the output torque of the rotary motor is transmitted to the target tube 110 via the belt, thereby driving the target tube 110 to rotate.

[0044] Since the first magnet 120 and the second magnet 130 are located at the two ends of the accommodating cavity 111 in the first direction, the magnetic fields generated by the first magnet 120 and the second magnet 130 can pass through the opposite sides of the target tube 110 in the first direction, that is, they are respectively displayed on both sides of the target tube 110 in the first direction.

[0045] Therefore, in practical applications, the magnetron sputtering device provided in this embodiment can perform bidirectional coating, that is, it can perform coating on both the upper and lower sides of the target tube 110 assembly at the same time, which can significantly improve the coating efficiency.

[0046] Furthermore, by driving the target tube 110 through the drive mechanism to rotate the target material relative to the first magnet 120 and the second magnet 130, it can be ensured that all parts of the target material are bombarded evenly, avoiding excessive local erosion, thereby improving the utilization rate of the target material and extending its life.

[0047] The coating chamber 13 is also provided with a first conveying component 14 and a second conveying component 15 for conveying the substrate. The first conveying component 14 and the second conveying component 15 are respectively located on both sides of the target component 100 in the first direction, that is, on the upper and lower sides of the target component 100 respectively.

[0048] In practice, both the first conveying assembly 14 and the second conveying assembly 15 are in the second direction. Depending on actual needs, their conveying directions can be the same or opposite. The second direction is... Figure 2 and Figure 3 The direction indicated by the X arrow, with the coating device 10 as the reference standard, is actually the horizontal direction.

[0049] In this embodiment, the first conveying component 14 is located above the target component 100, the second conveying component 15 is located below the target component 100, and the first magnet 120 is located above the second magnet 130, that is, the first magnet 120 is close to the first conveying component 14, and the second magnet 130 is close to the second conveying component 15.

[0050] Both the first conveying assembly 14 and the second conveying assembly 15 are used for horizontally conveying the carrier plate 200 carrying the substrate. In practical applications, the coating chamber 13 is evacuated and then purged with working gas. When the carrier plate 200 conveyed by the first conveying assembly 14 passes above the target assembly 100, under the combined action of the applied electric field and the magnetic field formed by the first magnet 120, the target is bombarded by ions, and the atoms on the surface are sputtered out and deposited on the lower surface of the substrate, thereby forming a thin film on the lower surface of the substrate above the target assembly 100.

[0051] When the carrier plate 200 conveyed by the second conveying component 15 passes under the target component 100, the atoms on the surface of the target material are sputtered out and deposited on the upper surface of the substrate under the combined action of the electric field and the magnetic field formed by the second magnet 130, thereby forming a thin film on the upper surface of the substrate located below the target component 100.

[0052] To minimize the impact on the coating effect of the substrate, in this embodiment, both the first conveying assembly 14 and the second conveying assembly 15 consist of multiple drive wheels arranged sequentially at intervals in the second direction. Taking the first conveying assembly 14 as an example, in practical applications, the multiple drive wheels of the first conveying assembly 14 rotate in the same direction to achieve the conveying of the commonly supported carrier plate 200 in the second direction.

[0053] In this embodiment, there are multiple target material assemblies 100, which are arranged sequentially in a direction parallel to the conveying direction of the first conveying assembly 14 and the second conveying assembly 15. In other words, the multiple target material assemblies 100 are arranged sequentially at intervals in the second direction. In fact, both the first and second directions are perpendicular to the axial extension direction of the target tube 110, and the axial extension direction of the target tube 110 is parallel to the rotation center line of the transmission wheel.

[0054] The housing 11 has first openings 16 at both ends corresponding to the first conveying assembly 14. In practical applications, the carrier plate 200 loaded with substrate enters the coating chamber 13 through one of the first openings 16. Under the bearing and rolling conveying action of the multiple transmission wheels of the first conveying assembly 14, it passes over the multiple target material assemblies 100 in the second direction in sequence. After completing the coating of the lower surface of the substrate, it exits the coating chamber 13 through the other first opening 16.

[0055] Similarly, the housing 11 is provided with second openings 17 at both ends corresponding to the second conveying assembly 15. In practical applications, the carrier plate 200 loaded with substrate enters the coating chamber 13 through one of the second openings 17. Under the bearing and rolling conveying action of the multiple transmission wheels of the second conveying assembly 15, it passes under the multiple target material assemblies 100 in sequence along the second direction. After completing the coating of the upper surface of the substrate, it exits the coating chamber 13 through the other second opening 17.

[0056] It should be noted that the first conveying assembly 14 and the second conveying assembly 15 can convey the same carrier plate 200 sequentially, enabling sequential coating of the upper and lower surfaces of the same substrate. The first conveying assembly 14 and the second conveying assembly 15 can also convey different carrier plates 200 simultaneously, enabling simultaneous single-sided coating of different substrates.

[0057] Since the first conveying component 14 is located above the second conveying component 15, in order to prevent the carrier plate conveyed by the first conveying component 14 from falling off when the first conveying component 14 and the second conveying component 15 convey the carrier plate 200 at the same time, which would cause the substrate conveyed by the second conveying component 15 to be contaminated, in this embodiment, a partition 18 is also provided in the coating chamber 13. The partition 18 is located between the first conveying component 14 and the second conveying component 15 and is used to prevent the slag falling from the carrier plate above it from reaching the surface of the substrate below it.

[0058] In this embodiment, there are four target material assemblies 100. Two cathode covers 12 are connected to two drive mechanisms to form two integral structures, which together cover the opening of the housing 11 and are arranged sequentially in the second direction. One drive mechanism is connected to the target tubes 110 of the two target material assemblies 100, that is, one drive mechanism drives the two target tubes 110 to rotate.

[0059] Preferably, in this embodiment, both the first magnet 120 and the second magnet 130 are elongated, and the extending directions of the first magnet 120 and the second magnet 130 are parallel to the axial extending direction of the target tube 110.

[0060] Furthermore, to fix the first magnet 120 and the second magnet 130, the target assembly 100 provided in this embodiment also includes a fixing tube 140. The fixing tube 140 is coaxially sleeved inside the target tube 110. The first magnet 120 and the second magnet 130 are both disposed on the fixing tube 140 and are respectively located on both sides of the fixing tube 140 in the first direction. The fixing tube 140 can be a ceramic tube, a stainless steel tube, or an aluminum tube, etc. The fixing tube 140 is fixedly connected to the cathode cover 12 so as to remain fixed during the rotation of the target tube 110.

[0061] In order to improve the uniformity of bombardment on the target surface and obtain a better coating effect, in this embodiment, there are multiple first magnets 120 and multiple second magnets 130, and the multiple first magnets 120 and multiple second magnets 130 are symmetrically distributed with the diameter of the target tube 110 extending in the second direction as the axis of symmetry.

[0062] Furthermore, the plurality of first magnets 120 are symmetrically distributed about the diameter of the target tube 110 extending in the first direction as the axis of symmetry, and the plurality of second magnets 130 are symmetrically distributed about the diameter of the target tube 110 extending in the first direction as the axis of symmetry.

[0063] In summary, the target assembly 100 provided in this embodiment enables the magnetron sputtering device to have bidirectional coating capabilities, which can significantly improve the coating efficiency and coating effect of the magnetron sputtering device. Benefiting from the beneficial effects of the target assembly 100, the coating device 10 provided in this embodiment has higher coating efficiency and better coating effect.

[0064] This embodiment also provides a coating production line, including the aforementioned coating apparatus 10. In fact, the coating production line provided in this embodiment also includes loading and unloading devices and a lifting device for raising and lowering the carrier plate 200, etc.

[0065] Benefiting from the beneficial effects of the coating device 10, the coating production line provided in this embodiment also has the characteristics of higher coating efficiency and better coating effect.

[0066] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A target assembly, characterized in that, The device includes a target tube (110), a first magnet (120), and a second magnet (130). The inner wall of the target tube (110) defines a receiving cavity (111). The first magnet (120) and the second magnet (130) are both disposed in the receiving cavity (111) and are respectively located at both ends of the receiving cavity (111) in a first direction, which is perpendicular to the axial extension direction of the target tube (110).

2. The target assembly according to claim 1, characterized in that, The number of the first magnets (120) is plurality of, and the plurality of first magnets (120) are symmetrically distributed about the diameter of the target tube (110) extending in the first direction as an axis of symmetry; and / or, The number of the second magnets (130) is multiple, and the multiple second magnets (130) are symmetrically distributed with respect to the diameter of the target tube (110) extending in the first direction as the axis of symmetry.

3. The target assembly according to claim 1, characterized in that, There are multiple first magnets (120) and multiple second magnets (130). The multiple first magnets (120) and multiple second magnets (130) are symmetrically distributed about the diameter of the target tube (110) extending in the second direction as the axis of symmetry. The second direction is perpendicular to the first direction and the axial extension direction of the target tube (110).

4. The target assembly according to claim 1, characterized in that, The length extension direction of the first magnet (120) and / or the second magnet (130) is parallel to the axial extension direction of the target tube (110).

5. The target assembly according to claim 1, characterized in that, It also includes a fixing tube (140), which is coaxially sleeved inside the target tube (110), and the two can rotate relative to each other; The first magnet (120) and the second magnet (130) are both disposed on the fixed tube (140) and are respectively located on both sides of the fixed tube (140) in the first direction.

6. A coating apparatus, characterized in that, Includes the target assembly (100) as described in any one of claims 1-5.

7. The coating apparatus according to claim 6, characterized in that, The coating apparatus (10) further includes a driving mechanism, which is connected to the target tube (110) for transmission. The driving mechanism is used to drive the target tube (110) to rotate relative to the first magnet (120) and the second magnet (130).

8. The coating apparatus according to claim 6, characterized in that, The coating apparatus (10) has a coating chamber (13), and the target assembly (100) is disposed in the coating chamber (13); The coating chamber (13) is further provided with a first conveying assembly (14) and a second conveying assembly (15) for conveying the substrate. The first conveying assembly (14) and the second conveying assembly (15) are respectively located on both sides of the target assembly (100) in the first direction.

9. The coating apparatus according to claim 8, characterized in that, The number of target material assemblies (100) is multiple, and the multiple target material assemblies (100) are arranged sequentially in the conveying direction of the first conveying assembly (14) and the second conveying assembly (15).

10. A coating production line, characterized in that, Includes the coating apparatus (10) as described in any one of claims 6-9.

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