Temperature control ultrahigh nanometer vacuum multi-cavity coating cavity

Abstract

The utility model relates to the technical field of coating cavities, and discloses a temperature control ultrahigh nano vacuum multi-cavity coating cavity which comprises a cavity shell. According to the temperature-control ultrahigh nano vacuum multi-cavity coating cavity, through the arrangement of the heating mechanism, the water cooling mechanism, a high-precision temperature sensor and a PLC, when the temperature-control ultrahigh nano vacuum multi-cavity coating cavity is used, the high-precision temperature sensor monitors the temperature in the cavity groove in real time and transmits data to the PLC on one side, the PLC controls a heating net to heat, and the temperature in the cavity groove is controlled to be changed into the temperature-control ultrahigh nano vacuum multi-cavity coating cavity. The interior of the cavity groove is heated, if the temperature is too high, a water pump at the bottom is controlled to be started, the water pump conveys cooling liquid in the water cooling box into a cooling cavity formed in the cavity shell through a pipeline, and the temperature in the cavity groove is taken away through circulation of the cooling liquid; therefore, the effect of high-precision control over the temperature in the cavity groove is achieved, and it is ensured that the whole coating production process is efficiently and stably carried out.

Description

Technical Field

[0001] This utility model relates to the field of coating cavity technology, and in particular to a temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity. Background Technology

[0002] In today's era of rapid technological advancement, coating technology plays an indispensable role in numerous fields. From the manufacturing of semiconductor chips and the anti-reflective and filtering processes of optical lenses in the electronics and information industry, to the preparation of protective coatings for aircraft components in the aerospace field, and the coating processes for solar panels in the new energy industry, the application of coating technology has greatly improved product performance and quality. The ever-increasing performance requirements of various industries pose even more stringent challenges to the precision, stability, and functionality of coating technology.

[0003] Traditional coating cavities struggle to achieve high-precision temperature control. Even minute temperature fluctuations during the coating process can significantly impact film quality. For example, in fabricating high-performance optical thin films, temperature deviations can lead to non-uniform refractive indexes, affecting the imaging quality of optical components. In semiconductor chip manufacturing, inappropriate temperatures can alter the crystal structure of the coating material, affecting the chip's electrical performance. Existing temperature control systems, due to limitations in control algorithms and sensor accuracy, often fail to control temperature fluctuations within extremely small ranges, resulting in unstable film quality and a high defect rate. Therefore, a temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a temperature-controlled ultra-high nano-vacuum multi-cavity coating chamber, which solves the problem mentioned in the background art that traditional coating chambers are difficult to achieve high-precision temperature control. During the coating process, even slight temperature fluctuations can significantly affect the quality of the coating layer.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity, comprising a cavity shell, four cavity slots inside the cavity shell, a heating mechanism installed at the top of the cavity slots, a cooling cavity inside the cavity shell, a water-cooling mechanism connected through the cooling cavity, a PLC controller installed on the lower surface of the cavity shell, a high-precision temperature sensor electrically connected to one side of the PLC controller via a power line, the heating mechanism comprising a connecting frame installed at the top of the cavity slots, a heating mesh installed inside the connecting frame, and a battery electrically connected to one side of the heating mesh via a power line; the water-cooling mechanism comprising a flow pipe connected through the cooling cavity, a water pump connected to the end of the flow pipe, and a water-cooling box connected to one side of the water pump via a pipe.

[0006] As a further embodiment of this utility model, a return pipe is connected through the top of the water-cooled box, and the end of the return pipe is connected through the interior of the cooling cavity. The return pipe serves to achieve the function of return flow.

[0007] As a further embodiment of this utility model, the surface of the water-cooled box is provided with a liquid injection port, and the bottom of the water-cooled box is provided with a liquid drain port, which serves to drain the liquid.

[0008] As a further embodiment of this utility model, two vacuum pumps are installed on the top of the cavity shell, and the ends of the vacuum pumps are connected to air pipes, which serve to transport gas.

[0009] As a further embodiment of this utility model, a valve is installed on the surface of the trachea, and the end of the trachea is connected to the inside of the cavity groove. The valve controls the flow rate.

[0010] As a further embodiment of this utility model, a vacuum gauge is installed inside the cavity, and one side of the vacuum gauge is electrically connected to one side of the PLC controller via a power cord. The high-precision temperature sensor is installed inside the cavity, and the high-precision temperature sensor is used to detect the temperature.

[0011] As a further embodiment of this utility model, a base is installed at the bottom of the cavity shell, and four universal wheels are fixedly connected to the bottom of the base. Brake pads are installed inside the universal wheels, and the brake pads play a braking role.

[0012] This invention provides a temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity, which has the following beneficial effects:

[0013] This temperature-controlled ultra-high nano-vacuum multi-cavity coating chamber, through the setup of heating and water-cooling mechanisms, high-precision temperature sensors, and a PLC controller, allows for real-time monitoring of the temperature inside the chamber by the high-precision temperature sensor during operation. The data is transmitted to the PLC controller on one side, which controls the heating grid to generate heat and raise the temperature inside the chamber. If the temperature becomes too high, the water pump at the bottom is activated. The water pump delivers coolant from the water-cooling box through pipes to the cooling cavity inside the outer shell of the chamber. The coolant circulates and removes heat from the inside of the chamber, thus achieving high-precision temperature control and ensuring the efficient and stable operation of the entire coating production process. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the water-cooling mechanism of this utility model;

[0016] Figure 3 This is a schematic diagram of the heating mechanism of this utility model;

[0017] Figure 4 This is a schematic diagram of the cavity shell structure of this utility model.

[0018] In the diagram: 1. Cavity shell; 2. Heating mechanism; 201. Connecting frame; 202. Heating mesh; 203. Battery; 3. Water cooling mechanism; 301. Flow pipe; 302. Water pump; 303. Water-cooled box; 4. PLC controller; 5. High-precision temperature sensor; 6. Return pipe; 7. Injection port; 8. Drain port; 9. Vacuum pump; 10. Gas pipe; 11. Valve; 12. Vacuum gauge; 13. Base; 14. Casters. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0020] Please see Figures 1 to 4 This utility model provides a technical solution: a temperature-controlled ultra-high nano-vacuum multi-cavity coating chamber, including a cavity shell 1. The cavity shell 1 has four cavity slots inside. A heating mechanism 2 is installed at the top of each cavity slot. Through the arrangement of the heating mechanism 2, water cooling mechanism 3, high-precision temperature sensor 5, and PLC controller 4, high-precision temperature control of the cavity slots is achieved, ensuring efficient and stable operation of the entire coating process. A cooling cavity is provided inside the cavity shell 1, and the water cooling mechanism 3 is connected through the cooling cavity. A PLC controller 4 is installed on the lower surface of the cavity shell 1, and a high-precision temperature sensor 5 is electrically connected to one side of the PLC controller 4 via a power cord.

[0021] The heating mechanism 2 includes a connecting frame 201 installed at the top of the cavity groove. A heating mesh 202 is installed inside the connecting frame 201. A battery 203 is electrically connected to one side of the heating mesh 202 via a power cord.

[0022] The water cooling mechanism 3 includes a flow pipe 301 that runs through the interior of the cooling cavity. A water pump 302 is connected to the end of the flow pipe 301. A water cooling box 303 is connected to one side of the water pump 302 through a pipe.

[0023] The top of the water-cooled box 303 is connected to a return pipe 6, and the end of the return pipe 6 is connected to the inside of the cooling cavity. The return pipe 6 serves to achieve the function of return flow.

[0024] The surface of the water-cooled box 303 is provided with a liquid injection port 7, and the bottom of the water-cooled box 303 is provided with a liquid drain port 8. The liquid drain port 8 is provided to drain liquid.

[0025] Two vacuum pumps 9 are installed on the top of the outer shell 1 of the cavity. The end of the vacuum pump 9 is connected to a gas pipe 10, which serves to transport gas.

[0026] A valve 11 is installed on the surface of the trachea 10, and the end of the trachea 10 is connected to the inside of the cavity groove. The valve 11 is used to control the flow rate.

[0027] A vacuum gauge 12 is installed inside the cavity. One side of the vacuum gauge 12 is electrically connected to one side of the PLC controller 4 via a power cord. A high-precision temperature sensor 5 is installed inside the cavity. The high-precision temperature sensor 5 is used to detect the temperature.

[0028] A base 13 is installed at the bottom of the outer shell 1 of the cavity. Four casters 14 are fixedly connected to the bottom of the base 13. Brake pads are installed inside the casters 14, and the brake pads play a braking role.

[0029] In this invention, the working steps of the device are as follows:

[0030] During use, the high-precision temperature sensor 5 monitors the temperature inside the cavity in real time and transmits the data to the PLC controller 4 on one side. The PLC controller 4 controls the heating grid 202 to generate heat and raise the temperature inside the cavity. If the temperature is too high, the bottom water pump 302 is started. The water pump 302 transports the coolant inside the water-cooled box 303 through the pipeline to the cooling cavity opened inside the outer shell 1 of the cavity. The coolant circulates and removes the temperature inside the cavity.

[0031] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific details of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming.

[0032] All standard parts used can be purchased from the market, and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the structure and principle of the components known to those skilled in the art can be known by those skilled in the art through technical manuals or conventional experimental methods.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity, comprising a cavity shell (1), characterized in that: The cavity shell (1) has four cavity slots inside. A heating mechanism (2) is installed at the top of the cavity slot. A cooling cavity is opened inside the cavity shell (1). A water cooling mechanism (3) is connected through the cooling cavity. A PLC controller (4) is installed on the lower surface of the cavity shell (1). A high-precision temperature sensor (5) is electrically connected to one side of the PLC controller (4) through a power line. The heating mechanism (2) includes a connecting frame (201) installed at the top of the cavity groove. A heating mesh (202) is installed inside the connecting frame (201). A battery (203) is electrically connected to one side of the heating mesh (202) via a power line. The water cooling mechanism (3) includes a flow pipe (301) that runs through the interior of the cooling cavity. A water pump (302) is connected to the end of the flow pipe (301). A water cooling box (303) is connected to one side of the water pump (302) through a pipe.

2. The temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity according to claim 1, characterized in that: The top of the water-cooled box (303) is connected to a return pipe (6), and the end of the return pipe (6) is connected to the interior of the cooling cavity.

3. The temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity according to claim 1, characterized in that: The surface of the water-cooled box (303) is provided with a liquid injection port (7), and the bottom of the water-cooled box (303) is provided with a liquid drain port (8).

4. The temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity according to claim 1, characterized in that: Two vacuum pumps (9) are installed on the top of the cavity shell (1), and the ends of the vacuum pumps (9) are connected to air pipes (10).

5. The temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity according to claim 4, characterized in that: A valve (11) is installed on the surface of the trachea (10), and the end of the trachea (10) is connected to the inside of the cavity groove.

6. The temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity according to claim 1, characterized in that: A vacuum gauge (12) is installed inside the cavity. One side of the vacuum gauge (12) is electrically connected to one side of the PLC controller (4) via a power line. The high-precision temperature sensor (5) is installed inside the cavity.

7. The temperature-controlled ultra-high nano-vacuum multi-cavity coating cavity according to claim 1, characterized in that: The bottom of the cavity shell (1) is equipped with a base (13), and the bottom of the base (13) is fixedly connected with four casters (14), and the casters (14) are equipped with brake pads.

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