Cavity plasma detection device

Abstract

The utility model discloses a cavity plasma detection device, comprising: a support assembly, the support assembly comprises a vertical plate, a bearing plate and a plasma pool, the upper part of the front end of the vertical plate is fixedly connected with the bearing plate, and the lower part of the front end of the vertical plate is fixedly connected with the plasma pool; the flexible detection assembly comprises a rectangular frame, a large-size probe and a small-size probe, the two sides of the front end of the bearing plate are movably connected with the rectangular frame, and the large-size probe and the small-size probe are movably connected into the rectangular frame. According to the utility model, the large-size probe is inserted into the plasma pool, so that macroscopic parameters, such as overall electron density, temperature distribution and the like, of plasma can be detected, and the general state of the plasma can be reflected; the small-size probe can go deep into the microscopic detail part of the plasma to measure the plasma parameter change in the local tiny area, such as the parameter at the edge of the plasma or near the internal tiny structure; the combination of the two improves the detection accuracy.

Description

Technical Field

[0001] This utility model relates to the field of plasma detection technology, and in particular to a detection device for cavity plasma. Background Technology

[0002] Plasma detection includes probe detection technology, which works by inserting a thin metal wire into the plasma and measuring the current-voltage characteristics between the wire and the plasma to obtain parameters such as electron temperature and electron density. When a Langmuir probe is inserted into the plasma, a sheath forms around it, and relevant plasma information is obtained by analyzing and measuring the sheath.

[0003] Most existing detection devices use a single probe for detection, which has certain limitations and results in inaccurate local detection. Therefore, a multi-probe combination structure is needed to improve the accuracy of local detection. Utility Model Content

[0004] The purpose of this invention is to provide a detection device for cavity plasma, in order to solve the problem mentioned in the background art, that most existing detection devices use a single probe for detection, which has certain limitations and leads to inaccurate local detection results.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model relates to a detection device for cavity plasma, comprising:

[0007] A support assembly, comprising a vertical plate, a receiving plate, and a plasma tank, wherein the receiving plate is fixedly connected to the upper front end of the vertical plate, and the plasma tank is fixedly connected to the lower front end of the vertical plate.

[0008] A flexible detection component includes a rectangular frame, a large-size probe, and a small-size probe. The rectangular frame is movably connected to both sides of the front end of the receiving plate, and the large-size probe and the small-size probe are movably connected to the rectangular frame, respectively.

[0009] Furthermore, the flexible detection component also includes a receiving rod, a hydraulic telescopic device, and a rectangular block. One end of the receiving rod is fixedly connected to both sides of the top of the vertical plate, and the other end of the receiving rod is fixedly connected to one end of the hydraulic telescopic device. The rectangular block is movably connected to both sides of the front end of the receiving plate, and the other end of the hydraulic telescopic device is fixedly connected to the top of the rectangular block.

[0010] Furthermore, the flexible detection component also includes a T-shaped slider and a T-shaped limiting groove. T-shaped limiting grooves are opened on both sides of the front end of the receiving plate. The T-shaped slider is fixedly connected to the rear of the rectangular block, and the T-shaped slider is movably connected in the T-shaped limiting groove.

[0011] Furthermore, it also includes a convenient replacement component, which includes a rubber plate, a threaded groove, and a wing screw. The rubber plate is movably connected to the rectangular frame, and a threaded groove is opened through the side of the rectangular frame, in which the wing screw is movably inserted.

[0012] Furthermore, the length of the wing screw is greater than the width of the rectangular frame.

[0013] Furthermore, the convenient replacement component also includes a rectangular limiting groove and a square slider. The rectangular limiting groove is opened on both sides of the inner wall of the rectangular frame, and the square slider is fixedly connected to both sides of the rubber plate. The square slider is movably connected in the rectangular limiting groove.

[0014] Compared with existing technologies, the advantages of this utility model are:

[0015] This invention allows researchers to detect macroscopic parameters of the plasma by inserting a large probe into the plasma cell, such as the overall electron density and temperature distribution, reflecting the general state of the plasma. Meanwhile, a small probe can penetrate deep into the microscopic details of the plasma to measure changes in plasma parameters in localized micro-regions, such as parameters near the plasma edges or internal microstructures. The combination of these two methods enables researchers to grasp both the overall characteristics of the plasma and its microscopic details, thereby gaining a more comprehensive understanding of the spatial distribution characteristics of the plasma and improving the accuracy of local detection.

[0016] Based on the aforementioned beneficial effects, by turning the wing screw in the threaded groove, the rubber plate can be moved, thereby enabling the dimensional change between the rubber plate and the rectangular frame. This allows for the clamping and adjustment of probes of different sizes, and thus enables precise replacement of probes according to actual usage. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall design of this utility model;

[0019] Figure 2 This is a schematic diagram of the connection of the hydraulic telescopic device of this utility model;

[0020] Figure 3 This is a schematic diagram of the rubber sheet connection according to the present invention;

[0021] Figure 4 A schematic diagram of the T-shaped limiting groove of this utility model is provided.

[0022] The attached diagram lists the components represented by each number as follows:

[0023] 101. Vertical plate; 102. Support plate; 103. Plasma cell;

[0024] 201. Rectangular frame; 202. Large-size probe; 203. Small-size probe; 204. Support rod; 205. Hydraulic telescopic device; 206. Rectangular block; 207. T-shaped slider; 208. T-shaped limiting groove;

[0025] 301. Rubber plate; 302. Threaded groove; 303. Wing screw; 304. Rectangular limit groove; 305. Square slider. Detailed Implementation

[0026] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0027] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0029] Please see Figure 1-4 As shown, this embodiment is a detection device for cavity plasma, comprising:

[0030] The support assembly includes a vertical plate 101, a receiving plate 102, and a plasma tank 103. The upper front end of the vertical plate 101 is fixedly connected to the receiving plate 102, and the lower front end of the vertical plate 101 is fixedly connected to the plasma tank 103.

[0031] The vertical plate 101 and the receiving plate 102 provide support, and the plasma is placed in the plasma tank 103.

[0032] The flexible detection component includes a rectangular frame 201, a large-size probe 202, and a small-size probe 203. The rectangular frame 201 is movably connected to both sides of the front end of the receiving plate 102, and the large-size probe 202 and the small-size probe 203 are movably connected to the rectangular frame 201 respectively.

[0033] The rectangular frame 201 is used to connect the large probe 202 and the small probe 203.

[0034] The flexible detection component also includes a support rod 204, a hydraulic telescopic device 205, and a rectangular block 206. The top two sides of the vertical plate 101 are fixedly connected to one end of the support rod 204, and the other end of the support rod 204 is fixedly connected to one end of the hydraulic telescopic device 205. The front two sides of the support plate 102 are movably connected to the rectangular block 206, and the top of the rectangular block 206 is fixedly connected to the other end of the hydraulic telescopic device 205.

[0035] The receiving rod 204 is used to connect the hydraulic telescopic device 205, which provides a guarantee for the rectangular block 206 to drive the rectangular frame 201 to move up and down.

[0036] The flexible detection component also includes a T-shaped slider 207 and a T-shaped limiting groove 208. T-shaped limiting grooves 208 are opened on both sides of the front end of the receiving plate 102. The T-shaped slider 207 is fixedly connected to the rear of the rectangular block 206. The T-shaped slider 207 is movably connected in the T-shaped limiting groove 208.

[0037] The T-shaped limiting groove 208 and the T-shaped slider 207 work together to limit the up and down movement of the rectangular frame 201.

[0038] It also includes a convenient replacement component, which includes a rubber plate 301, a threaded groove 302 and a wing screw 303. The rubber plate 301 is movably connected in the rectangular frame 201, and the threaded groove 302 is opened through the side of the rectangular frame 201. The wing screw 303 is movably inserted in the threaded groove 302.

[0039] The rubber plate 301 is used to clamp probes of different sizes. The threaded groove 302 and the wing screw 303 work together to fix the clamped probes.

[0040] The length of the wing screw 303 is greater than the width of the rectangular frame 201;

[0041] The dimensions of the aforementioned components ensure that probes of various sizes can be clamped and fixed.

[0042] The easy-to-replace components also include a rectangular limiting groove 304 and a square slider 305. The rectangular limiting groove 304 is opened on both sides of the inner wall of the rectangular frame 201. The square slider 305 is fixedly connected to both sides of the rubber plate 301. The square slider 305 is movably connected in the rectangular limiting groove 304.

[0043] The rectangular limiting groove 304 and the square slider 305 are used together to limit the movement of the rubber plate 301.

[0044] Working principle: The large-size probe 202 and the small-size probe 203 are placed in the rectangular frame 201 in sequence. Then, the wing screw 303 is turned in the threaded groove 302 to push the rubber plate 301 into contact with the large-size probe 202 and the small-size probe 203 until they are firmly clamped. The plasma is injected into the plasma tank 103. Then, the hydraulic telescopic device 205 is opened to drive the rectangular block 206 down, which in turn drives the large-size probe 202 and the small-size probe 203 into the plasma solution. The formed sheath layer is then detected. This step can improve the detection accuracy and facilitate the precise replacement of the probes.

[0045] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0046] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A detection device for cavity plasma, characterized in that, include: The support assembly includes a vertical plate (101), a receiving plate (102), and a plasma tank (103). The upper front end of the vertical plate (101) is fixedly connected to the receiving plate (102), and the lower front end of the vertical plate (101) is fixedly connected to the plasma tank (103). The flexible detection component includes a rectangular frame (201), a large-size probe (202), and a small-size probe (203). The rectangular frame (201) is movably connected to both sides of the front end of the receiving plate (102). The large-size probe (202) and the small-size probe (203) are movably connected to the rectangular frame (201).

2. The detection device for cavity plasma according to claim 1, characterized in that, The flexible detection component also includes a support rod (204), a hydraulic telescopic device (205), and a rectangular block (206). One end of the support rod (204) is fixedly connected to both sides of the top of the vertical plate (101), and the other end of the support rod (204) is fixedly connected to one end of the hydraulic telescopic device (205). The rectangular block (206) is movably connected to both sides of the front end of the support plate (102), and the other end of the hydraulic telescopic device (205) is fixedly connected to the top of the rectangular block (206).

3. The detection device for cavity plasma according to claim 2, characterized in that, The flexible detection component also includes a T-shaped slider (207) and a T-shaped limiting groove (208). The receiving plate (102) has T-shaped limiting grooves (208) on both sides of its front end. The T-shaped slider (207) is fixedly connected to the rear of the rectangular block (206). The T-shaped slider (207) is movably connected in the T-shaped limiting groove (208).

4. The detection device for cavity plasma according to claim 1, characterized in that, It also includes a convenient replacement component, which includes a rubber plate (301), a threaded groove (302) and a wing screw (303). The rubber plate (301) is movably connected in the rectangular frame (201), and the threaded groove (302) is opened through the side of the rectangular frame (201). The wing screw (303) is movably inserted in the threaded groove (302).

5. The detection device for cavity plasma according to claim 4, characterized in that, The length of the wing screw (303) is greater than the width of the rectangular frame (201).

6. The detection device for cavity plasma according to claim 4, characterized in that, The convenient replacement component also includes a rectangular limiting groove (304) and a square slider (305). The rectangular limiting groove (304) is opened on both sides of the inner wall of the rectangular frame (201). The square slider (305) is fixedly connected to both sides of the rubber plate (301). The square slider (305) is movably connected in the rectangular limiting groove (304).

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