Semiconductor gas pipeline modular welding device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a semiconductor gas pipeline modularized welding device. The modularized welding device for the semiconductor gas pipeline comprises a main body and two welding modules, the welding modules are symmetrically and oppositely arranged at the upper part of the main body, and a positioning gap is formed between the two welding modules; the welding module comprises a pressing block, a ventilation block and a limiting block; positioning grooves are formed in the main body; a ventilation channel is arranged in the ventilation block, the ventilation block is arranged above the positioning groove, and the ventilation channel is communicated with a gas hole in the semiconductor gas pipeline; the limiting block is connected with the pressing block; and the pressing block is used for pressing and positioning the semiconductor gas pipeline in the positioning groove. The two semiconductor gas pipelines are positioned through the two symmetrically-arranged welding modules respectively, spot welding positioning is not needed, welding of a multi-flow-channel module can be compatible, welding efficiency and welding precision are guaranteed, and the requirement of a gas transmission panel in the semiconductor industry for module sealing precision consistency is met.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a modular welding device for semiconductor gas pipelines. Background Technology

[0002] The post-weld tolerance accuracy requirements for semiconductor gas pipeline welded components are extremely high, requiring an accuracy of 0.001.

[0003] The existing solution involves manual spot welding for welding pipe components with modules before welding in a Class 100 cleanroom. After spot welding, ordinary fixtures are used for clamping, which cannot guarantee the consistency of the post-weld tolerance accuracy of the modules and is prone to welding defects, resulting in wasted labor and time.

[0004] Furthermore, the post-soldering precision control of the module relies entirely on the sealing gaskets used in the later assembly process to ensure compatibility tolerances, which does not meet the precision manufacturing requirements of the semiconductor industry.

[0005] In the semiconductor industry, pipe-mounted components are welded using thin-walled self-fusion welds. Because the modules require multiple spot welds at 360° angles before welding, there is a high risk of tungsten inclusions, which can reduce weld quality and cause tungsten inclusion defects. There is also a risk of spot weld failure leading to module scrap. Utility Model Content

[0006] The purpose of this invention is to provide a modular welding device for semiconductor gas pipelines, which can improve welding accuracy and reduce the risk of module scrap.

[0007] This utility model provides a modular welding device for semiconductor gas pipelines, including a main body and two welding modules;

[0008] The welding modules are symmetrically arranged opposite each other on the upper part of the main body, and there is a positioning gap between the two welding modules;

[0009] The welding module includes a pressure block, a ventilation block, and a limiting block;

[0010] The main body is provided with a positioning groove, which is used to position the semiconductor gas pipeline to be welded;

[0011] The ventilation block is provided with a ventilation channel, the ventilation block is located above the positioning groove, and the ventilation channel is connected to the air hole on the semiconductor gas pipeline.

[0012] The limiting block is connected to the pressing block and can position the vent block.

[0013] The pressure block is used to press and position the semiconductor gas pipeline in the positioning groove.

[0014] In an optional embodiment, the pressing block includes an upper pressing block, a middle pressing block, and a lower pressing block;

[0015] The pressing block is disposed in the positioning groove;

[0016] The lower pressure block has a limiting groove, and the middle pressure block is disposed above the limiting groove;

[0017] The upper pressure block is positioned above the middle pressure block and is used to press the middle pressure block and the limiting block together.

[0018] In an optional embodiment, a vent pipe is provided between the upper pressure block and the middle pressure block, and the vent pipe is connected to the venting channel.

[0019] In an optional embodiment, the limiting block includes a clamping plate, a connecting plate, and a fixing plate that are fixedly connected in sequence;

[0020] The clamping plate is positioned above the venting block, the connecting plate is positioned to the side of the venting block, and the fixing plate is used to connect the lower pressing block.

[0021] In an optional embodiment, the fixing plate is provided with a first oblong hole, and the fixing bolt connects the fixing plate and the lower pressure block through the first oblong hole.

[0022] In an optional embodiment, the upper part of the pressing block has a second waist-shaped hole that matches the first waist-shaped hole;

[0023] The lower part of the pressure block has a third oblong hole, through which the fixing bolt can fix the pressure block to the main body.

[0024] In an optional implementation, the number of limiting blocks is two;

[0025] The two limiting blocks are symmetrically arranged on both sides of the limiting groove.

[0026] In an optional implementation, the main body includes a base and a top cover;

[0027] The positioning groove is disposed on the base, and the welding module is disposed within the positioning groove;

[0028] The upper cover is disposed above the positioning groove and is used to fix the welding module.

[0029] In an optional embodiment, there are two positioning slots, which are respectively disposed at both ends of the positioning gap for mounting two welding modules.

[0030] In an optional embodiment, the cross-section of the positioning groove is semi-circular.

[0031] The beneficial effects of this utility model embodiment are:

[0032] Two symmetrically arranged welding modules are used to position the two semiconductor gas pipelines, eliminating the need for spot welding. This approach is compatible with welding multi-channel modules, ensuring welding efficiency and precision, and meeting the consistent sealing accuracy requirements of gas transmission panels in the semiconductor cleanroom industry. Attached Figure Description

[0033] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 A front view of the modular welding apparatus for semiconductor gas pipelines provided in an embodiment of this utility model;

[0035] Figure 2 A top view of the modular welding apparatus for semiconductor gas pipelines provided in an embodiment of this utility model;

[0036] Figure 3 for Figure 2 AA section view;

[0037] Figure 4 for Figure 2 BB section view;

[0038] Figure 5 A three-dimensional structural schematic diagram of the modular welding device for semiconductor gas pipelines provided in this embodiment of the utility model;

[0039] Figure 6 Exploded view of the modular welding device for semiconductor gas pipelines provided in this embodiment of the utility model;

[0040] Figure 7 A three-dimensional structural schematic diagram of the vent block of the modular welding device for semiconductor gas pipelines provided in this embodiment of the utility model;

[0041] Figure 8 A three-dimensional structural schematic diagram of the lower pressure block of the modular welding device for semiconductor gas pipelines provided in this embodiment of the utility model;

[0042] Figure 9 A three-dimensional structural schematic diagram of the medium pressure block of the modular welding device for semiconductor gas pipelines provided in this embodiment of the utility model;

[0043] Figure 10 A three-dimensional structural schematic diagram of the upper pressure block of the modular welding device for semiconductor gas pipelines provided in this embodiment of the utility model;

[0044] Figure 11 A three-dimensional structural diagram of the limiting block of the modular welding device for semiconductor gas pipelines provided in this embodiment of the utility model.

[0045] Icons: 1-Gas pipeline; 2-Welding module; 3-Main body; 4-Positioning gap; 5-Lower pressure block; 6-Middle pressure block; 7-Upper pressure block; 8-Ventilation block; 9-Ventilation pipe; 10-Base; 11-Top cover; 12-Limiting block; 13-Ventilation channel; 14-Bolt hole; 15-Second oblong hole; 16-Third oblong hole; 17-Fixing plate; 18-Connecting plate; 19-Pressure plate; 20-First oblong hole. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0047] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0048] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0049] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0050] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0051] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0052] The following is combined with Figures 1-11 The following describes some embodiments of the present invention in detail. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0053] This utility model provides a modular welding device for a semiconductor gas pipeline 1, including a main body 3 and two welding modules 2; the welding modules 2 are symmetrically arranged opposite each other on the upper part of the main body 3, and there is a positioning gap 4 between the two welding modules 2; each welding module 2 includes a pressure block, a venting block 8, and a limiting block 12; the main body 3 is provided with a positioning groove, which is used to position the semiconductor gas pipeline 1 to be welded; the venting block 8 is provided with a venting channel 13, and the venting block 8 is located above the positioning groove, and the venting channel 13 communicates with the vent on the semiconductor gas pipeline 1; the limiting block 12 is connected to the pressure block and can position the venting block 8; the pressure block is used to press and position the semiconductor gas pipeline 1 in the positioning groove.

[0054] In this embodiment, the modular welding device for semiconductor gas pipeline 1 includes a main body 3 and two welding modules 2. The main body 3 has a positioning groove for placing the semiconductor gas pipeline 1 to be welded; the two welding modules 2 are symmetrically arranged on the upper part of the main body 3, with a positioning gap 4 between them.

[0055] During welding, two gas pipelines 1 are placed on two welding modules 2 respectively, and the ends of the two gas pipelines 1 are spliced ​​in the positioning gap 4 to complete precise positioning. Then, the stability of the gas pipelines 1 and the welding accuracy are ensured by fixing them with the welding modules 2.

[0056] Specifically, in this embodiment, each welding module 2 includes a pressure block, a venting block 8, and a limiting block 12. The pressure block is used to press and position the semiconductor gas pipeline 1 within the positioning groove, ensuring the stability of the gas pipeline 1 during the welding process. The venting block 8 has a venting channel 13 inside, which is connected to the vent on the semiconductor gas pipeline 1 to ensure smooth gas flow during welding. The limiting block 12 is connected to the pressure block and is used to precisely position the venting block 8, ensuring that the welding module 2 is accurately aligned with the semiconductor gas pipeline 1.

[0057] During the welding process, the semiconductor gas pipeline 1 is first placed into the positioning groove, and then the welding module 2 clamps and positions the pipeline. The vent block 8 ensures gas flow, while the pressure block and limiting block 12 ensure the accurate positioning of the pipeline during the welding process.

[0058] This modular design not only improves welding efficiency but also ensures welding quality. It is suitable for welding various semiconductor gas pipelines and can achieve fast and precise welding operations, meeting the high requirements for welding accuracy and efficiency in semiconductor manufacturing processes.

[0059] In an optional embodiment, the pressing block includes an upper pressing block 7, a middle pressing block 6, and a lower pressing block 5; the lower pressing block 5 is disposed in the positioning groove; the lower pressing block 5 has a limiting groove, and the middle pressing block 6 is disposed above the limiting groove; the upper pressing block 7 is disposed above the middle pressing block 6 and is used to press the middle pressing block 6 and the limiting block 12 together.

[0060] In this embodiment, the pressure block is divided into three parts: upper pressure block 7, middle pressure block 6, and lower pressure block 5. Each of the three parts has different functions and roles, which can provide more stable clamping force and more precise positioning control to the gas pipeline 1.

[0061] Specifically, in this embodiment, the pressure block 5 is placed in the positioning groove, and a limiting groove is provided on the upper part of the pressure block 5. The limiting groove is square in shape and can realize the rotation positioning of the gas pipeline 1.

[0062] Specifically, in this embodiment, the medium pressure block 6 is located above the limiting groove. Its main function is to press the gas pipeline 1 in the limiting groove, thereby achieving the positioning of the gas pipeline 1 in the length direction and ensuring the relative positioning accuracy between the two gas pipelines 1.

[0063] More specifically, in this embodiment, the intermediate pressure block 6 and the ventilation block 8 are arranged in parallel on the lower pressure block 5.

[0064] Specifically, in this embodiment, the upper pressure block 7 is located above the middle pressure block 6. Its function is to apply pressure to the middle pressure block 6 and the vent block 8, and at the same time, to fix the upper pressure block 7 to the main body 3 to enhance the clamping force on the pipeline. Through the clamping action of the upper pressure block 7, it can be ensured that the middle pressure block 6 and the lower pressure block 5 tightly fix the gas pipeline 1, preventing any possible movement or displacement during the welding process.

[0065] This clamping block structure, consisting of an upper clamping block 7, a middle clamping block 6, and a lower clamping block 5, not only improves the stability and reliability of the welding device but also further enhances the welding quality through precise layered clamping. Furthermore, this structure helps simplify the operation of the welding device, making welding work more efficient and convenient. Through this modular and layered clamping design, the welding device of this embodiment can meet the high-precision welding requirements in semiconductor manufacturing processes.

[0066] In an optional embodiment, a vent pipe 9 is provided between the upper pressure block 7 and the middle pressure block 6, and the vent pipe 9 is connected to the venting channel 13.

[0067] In this embodiment, the upper pressure block 7 has a semi-circular groove, and the middle pressure block 6 also has a corresponding semi-circular groove. The two semi-circular grooves are arranged opposite each other to form a complete circular hole. The vent pipe 9 passes through the circular hole and communicates with the venting channel 13 on the vent block 8.

[0068] In this embodiment, the ventilation channel 13 in the ventilation block 8 is L-shaped, with one connecting port at the bottom of the ventilation block 8 and another connecting port on the side of the ventilation block 8 away from the positioning gap 4, which is connected to the ventilation pipe 9.

[0069] Specifically, in this embodiment, one end of the vent block 8 has a bolt hole 14, which can be fixedly connected to the gas pipeline 1 by bolts. The other end has an L-shaped ventilation channel 13. Providing a bolt hole 14 would compromise the sealing of the ventilation channel 13. Therefore, in this embodiment, the vent block 8 is fixed and positioned by a limiting block 12. The limiting block 12 also has a notch to allow the front bolt to pass. Figure 11 As shown.

[0070] In this embodiment, the vent pipe 9 ensures that gas can pass stably and continuously through the vent block 8 during the welding process, thereby avoiding gas blockage or pressure buildup caused by the heat generated during welding. The presence of the vent pipe 9 allows gas to flow smoothly from the semiconductor gas pipeline 1 to the external environment, or from the external environment into the pipeline, depending on the specific requirements of the welding process.

[0071] In this embodiment, by providing a vent pipe 9 between the upper pressure block 7 and the middle pressure block 6, the welding device not only improves the efficiency of gas flow but also helps maintain the gas pressure balance in the welding area. This effectively prevents gas leakage or pressure abnormalities that may occur during the welding process, thereby improving the safety and reliability of the welding.

[0072] Furthermore, the design of the vent pipe 9 helps reduce gas contamination that may occur during the welding process, which is crucial for maintaining a clean semiconductor manufacturing environment. By ensuring effective gas management and flow, the welding apparatus of this embodiment meets the high cleanliness and safety requirements of semiconductor manufacturing processes.

[0073] In summary, by incorporating a vent pipe 9 between the upper pressure block 7 and the middle pressure block 6, the welding apparatus of this embodiment offers significant advantages in improving gas flow efficiency, ensuring welding safety, and meeting high cleanliness requirements. This design represents an important step in optimizing the performance of the welding apparatus and contributes to improving the quality and efficiency of the entire semiconductor manufacturing process.

[0074] In an optional embodiment, the limiting block 12 includes a pressing plate 19, a connecting plate 18, and a fixing plate 17 that are fixedly connected in sequence; the pressing plate 19 is disposed above the venting block 8, the connecting plate 18 is disposed on the side of the venting block 8, and the fixing plate 17 is used to connect the lower pressing block 5.

[0075] In this embodiment, there are two limiting blocks 12, which are respectively set at opposite ends of the vent block 8 to press the vent block 8. The limiting block 12 is Z-shaped, and the pressing plate 19 and the connecting plate 18 are arranged perpendicularly to each other, and the connecting plate 18 and the fixing plate 17 are arranged perpendicularly to each other.

[0076] With this configuration, the two limiting blocks 12 can position the vent block 8 at both ends respectively. That is, the fixing plate 17 is fixed to the lower pressure block 5 by bolts, and the pressing plate 19 is above the vent block 8 through the connecting plate 18.

[0077] Specifically, in this embodiment, the clamping plate 19 is located above the vent block 8. Its main function is to apply downward pressure to the vent block 8 to ensure close contact between the vent block 8 and the semiconductor gas pipeline 1, as well as the sealing between the venting channel 13 and the vent on the gas pipeline 1. The connecting plate 18 is located on the side of the vent block 8. Its function is to connect the clamping plate 19 and the fixing plate 17 to form a whole. The fixing plate 17 is used to connect the lower pressure block 5. It not only provides additional support for the limiting block 12, but also ensures the stability of the entire welding module 2. The fixing plate 17 enables the limiting block 12 to be firmly fixed on the welding device, thereby maintaining its position during the welding process and further improving the welding accuracy and reliability.

[0078] With the design of the limiting block 12, which consists of a pressure plate 19, a connecting plate 18, and a fixing plate 17, the welding device of this embodiment can more effectively position and fix the vent block 8, thereby ensuring smooth gas flow and stable welding quality during the welding process.

[0079] In an optional embodiment, the fixing plate 17 is provided with a first waist-shaped hole 20, and the fixing bolt connects the fixing plate 17 and the lower pressure block 5 through the first waist-shaped hole 20.

[0080] In this optional embodiment, the fixing plate 17 of the welding device is provided with a first oblong hole 20, which allows the fixing bolt to move laterally to a certain extent. This helps to accommodate minor dimensional deviations that may occur during the manufacturing process, thereby improving the flexibility and success rate of assembly. Through the oblong hole, the fixing bolt can firmly connect the fixing plate 17 and the lower pressure block 5, ensuring the stability of the device during welding and preventing displacement or vibration caused by pressure changes. The oblong hole simplifies the installation process of the fixing bolt, making the assembly work more convenient and faster, and also facilitating subsequent maintenance and replacement. Compared with common round or square holes, the oblong hole can more effectively disperse the stress generated by the tightening of the fixing bolt, thereby reducing material fatigue and improving the durability of the device.

[0081] In an optional embodiment, the upper part of the lower pressure block 5 has a second waist-shaped hole 15 that matches the first waist-shaped hole 20; the lower part of the lower pressure block 5 has a third waist-shaped hole 16, through which the fixing bolt can fix the lower pressure block 5 to the main body 3.

[0082] In this embodiment, the upper part of the pressing block 5 has a second waist-shaped hole 15, which matches the first waist-shaped hole 20, and can increase the position adjustment range of the limiting block 12.

[0083] In this embodiment, the lower pressure block 5 has a third oblong hole 16 at its bottom. The lower pressure block 5 can be fixedly mounted on the main body 3 by cooperating with the fixing bolt through the third oblong hole 16.

[0084] Specifically, in this embodiment, the lower pressure block 5 has a hollow structure, which can both ensure the overall strength and facilitate the installation of the lower pressure block 5.

[0085] The second oblong hole 15 and the third oblong hole 16 facilitate the assembly and disassembly of the device. The oblong hole design allows for some adjustment space during assembly to accommodate manufacturing tolerances and assembly errors, making the assembly process more flexible and efficient. At the same time, this design also facilitates subsequent maintenance and component replacement, improving the maintainability of the device.

[0086] In an optional embodiment, the main body 3 includes a base 10 and a top cover 11; the positioning groove is disposed on the base 10, and the welding module 2 is disposed in the positioning groove; the top cover 11 covers the positioning groove and is used to fix the welding module 2.

[0087] In this optional embodiment, the main body 3 of the modular welding device for semiconductor gas pipeline 1 consists of two parts: a base 10 and an upper cover 11. The base 10 is provided with a positioning groove for placing and pressing the block 5. The upper cover 11 is used to fix and position the block, and also has a certain protective function.

[0088] In this embodiment, the welding module 2 is set in the positioning groove and includes key components such as the pressure block, the vent block 8 and the limiting block 12. These components work together to achieve precise positioning and clamping of the pipeline.

[0089] The function of the top cover 11 is to cover the positioning groove and fix the welding module 2, ensuring the stability of the module during the welding process. The top cover 11, together with the base 10, forms a groove structure with a relatively large depth, which helps to protect the welding area and reduce the impact of the external environment on the welding process.

[0090] In an optional embodiment, the cross-section of the positioning groove is semi-circular.

[0091] It is understood that in this embodiment, the cross-sectional shape of the positioning groove is semi-circular, but it is not limited to semi-circular. It can also be other types of shapes, such as square, trapezoid, etc., as long as it can match the shape of the welding module 2 to achieve the positioning of the welding module 2.

[0092] The beneficial effects of this utility model embodiment are:

[0093] Two symmetrically arranged welding modules 2 are used to position the two semiconductor gas pipelines 1 respectively, eliminating the need for spot welding positioning. This approach is compatible with welding of multi-channel modules, ensuring welding efficiency and precision, and meeting the requirements of the semiconductor clean gas transmission panel for consistent module sealing precision.

[0094] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A semiconductor gas line modular welding apparatus, characterized by, Includes the main body and two welding modules; The welding modules are symmetrically arranged opposite each other on the upper part of the main body, and there is a positioning gap between the two welding modules; The welding module includes a pressure block, a ventilation block, and a limiting block; The main body is provided with a positioning groove, which is used to position the semiconductor gas pipeline to be welded; The ventilation block is provided with a ventilation channel, the ventilation block is located above the positioning groove, and the ventilation channel is connected to the air hole on the semiconductor gas pipeline. The limiting block is connected to the pressing block and can position the vent block. The pressure block is used to press and position the semiconductor gas pipeline in the positioning groove.

2. The semiconductor gas line modular welding apparatus of claim 1, wherein, The pressing block includes an upper pressing block, a middle pressing block, and a lower pressing block; The pressing block is disposed in the positioning groove; The lower pressure block has a limiting groove, and the middle pressure block is disposed above the limiting groove; The upper pressure block is positioned above the middle pressure block and is used to press the middle pressure block and the limiting block together.

3. The semiconductor gas line modular welding apparatus of claim 2, wherein, A vent pipe is provided between the upper pressure block and the middle pressure block, and the vent pipe is connected to the vent channel.

4. The semiconductor gas line modular welding apparatus of claim 2, wherein, The limiting block includes a clamping plate, a connecting plate, and a fixing plate that are fixedly connected in sequence. The clamping plate is positioned above the venting block, the connecting plate is positioned to the side of the venting block, and the fixing plate is used to connect the lower pressing block.

5. The semiconductor gas line modular welding apparatus of claim 4, wherein, The fixing plate is provided with a first oblong hole, and the fixing bolt connects the fixing plate and the lower pressure block through the first oblong hole.

6. The semiconductor gas line modular welding apparatus of claim 5, wherein, The upper part of the lower pressure block has a second waist-shaped hole that matches the first waist-shaped hole; The lower part of the pressure block has a third oblong hole, through which the fixing bolt can fix the pressure block to the main body.

7. The semiconductor gas line modular welding apparatus of claim 4, wherein, The number of the limiting blocks is two; The two limiting blocks are symmetrically arranged on both sides of the limiting groove.

8. The semiconductor gas line modular welding apparatus of claim 1, wherein, The main body includes a base and a top cover; The positioning groove is disposed on the base, and the welding module is disposed within the positioning groove; The upper cover is disposed above the positioning groove and is used to fix the welding module.

9. The semiconductor gas line modular welding apparatus of claim 8, wherein, There are two positioning slots, which are respectively set at both ends of the positioning gap, for installing the two welding modules.

10. The semiconductor gas line modular welding apparatus of claim 8, wherein, The cross-section of the positioning groove is semi-circular.

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