Molybdenum-sodium alloy target material polishing device

By using a split-type support tray and mounting base structure and suction pipe for negative pressure fixation, the problem of adapting the molybdenum-sodium alloy target polishing device to different sizes is solved, achieving uniform polishing and efficient assembly, and avoiding the cost of equipment modification.

CN224255024UActive Publication Date: 2026-05-19YAXIN SEMICON MATERIALS (JIANGSU) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
YAXIN SEMICON MATERIALS (JIANGSU) CO LTD
Filing Date
2025-04-27
Publication Date
2026-05-19

AI Technical Summary

Technical Problem

Existing molybdenum-sodium alloy target polishing equipment is difficult to adapt to targets of different sizes, resulting in uneven polishing effects and low adjustment efficiency. It requires a lot of capital and time to upgrade the equipment or introduce a multi-functional polishing machine.

Method used

Design a split tray and mounting base structure, combined with suction tube negative pressure fixation and adjustable polishing head, to achieve stable assembly and uniform polishing of target materials of different sizes.

Benefits of technology

It enables rapid assembly and uniform polishing of targets of different sizes, improves polishing efficiency, and avoids the financial and time costs of equipment modification.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a molybdenum-sodium alloy target material polishing device which comprises a base, a polishing assembly used for polishing a molybdenum-sodium alloy target material is installed at the upper end of the base, a supporting assembly used for bearing and placing the molybdenum-sodium alloy target material is installed inside the lower end of the base, a bearing disc is fixed to the upper side of an installation base through a bolt, and the bearing disc is connected with the base through a bolt. Compared with the prior art, the polishing device has the advantages that the polishing assembly is arranged, the polishing head can conduct polishing stably, the uniformity of the polishing force is ensured, the supporting assembly is arranged, due to the fact that the bearing disc and the mounting base are of a split structure, the polishing effect is good, and the polishing effect is good. The bearing disc can be matched with the mounting base in a multi-specification mode, so that polishing of the target materials of different sizes can be met, and the bearing discs are the same except for the sizes.
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Description

Technical Field

[0001] This utility model belongs to the field of polishing equipment technology, and specifically relates to a polishing device for molybdenum-sodium alloy targets. Background Technology

[0002] Most existing molybdenum-sodium alloy target polishing equipment is designed for targets of specific sizes, making it difficult to guarantee polishing results when processing targets of different sizes. For example, uneven distribution of polishing pressure for larger or smaller targets may lead to localized over-polishing or under-polishing, thus affecting the target's performance. Low adjustment efficiency is also due to the need to recalibrate relevant equipment parameters after changing the target size, typically involving multiple steps, including resetting polishing speed and pressure, causing delays in the entire production process.

[0003] Conventional solutions typically involve modifying existing equipment to improve its adaptability or introducing multi-functional polishing machines to handle targets of different sizes. However, these methods have drawbacks: equipment modification usually requires significant financial and time investment and may not fully meet the needs of various target types, potentially leading to insufficient adaptability during operation. Therefore, we aim to design a polishing device with a novel structure to address this issue. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide a molybdenum-sodium alloy target polishing device, thereby solving the problems mentioned in the background section.

[0005] This utility model is achieved through the following technical solution: a polishing device for molybdenum-sodium alloy target, comprising: a base, a polishing component for polishing molybdenum-sodium alloy target is installed on the upper end of the base, and a support component for supporting and placing molybdenum-sodium alloy target is installed inside the lower end of the base.

[0006] The support assembly includes a support tray for directly placing the molybdenum-sodium alloy target and a mounting base for fixing the support tray. The support tray is fixed to the upper side of the mounting base by bolts, and the lower end of the mounting base is fixedly connected to the middle of the upper end of the support frame.

[0007] In a preferred embodiment, a protective cover for intercepting dust generated during polishing is welded to the middle of the upper end of the base. A suction hose for sucking up exhaust gas and dust generated during polishing is installed on the left side of the protective cover. The outer end of the suction hose is connected to the suction pipe of an industrial vacuum cleaner.

[0008] In a preferred embodiment, the polishing assembly includes a mounting bracket for providing a mounting base, with a guide post mounted on the left and right sides of the front end of the mounting bracket, and a spring fitted onto the lower end of each of the two guide posts.

[0009] In a preferred embodiment, the polishing assembly further includes an adjusting screw for adjusting the height of the slide plate. The slide plate is movably mounted on the lower front side of the mounting bracket via guide posts and springs, and the slide plate is slidably connected to the two guide posts.

[0010] In a preferred embodiment, the middle rear side of the upper surface of the slide plate is rotatably connected to the lower end of the adjusting screw, and the upper side of the adjusting screw is threadedly connected to the middle of the upper end of the mounting bracket.

[0011] In a preferred embodiment, the polishing assembly further includes a polishing head for polishing the molybdenum-sodium alloy target. A motor for driving the polishing head is installed on the front side of the middle of the upper surface of the slide plate. The lower end of the motor is connected to the upper end of the rotating shaft, and the lower end of the rotating shaft passes through the upper end of the protective cover through a bushing and is fixedly connected to the upper end of the polishing head by bolts. In actual use, the diameter of the polishing head is larger than the diameter of the support tray. When the target is placed on the support tray, the upper end of the target is placed outside the placement groove and is not flush with the height and depth of the placement groove. In this way, the polishing head can polish the target evenly.

[0012] In a preferred embodiment, the support assembly further includes hydraulic cylinders. A hydraulic cylinder is fixed to the left and right sides of the lower end of the support frame, and the lower ends of the two hydraulic cylinders are fixedly connected to the left and right sides of the bottom of the base. The left and right sides of the support frame are slidably connected to the left inner wall and right inner wall of the base, respectively.

[0013] In a preferred embodiment, the upper end of the support tray is recessed downward to form a placement groove, the bottom of the placement groove is penetrated downward to form multiple through holes, and the bottom center of the placement groove is penetrated downward to form multiple countersunk holes for installing hexagon socket head cap screws.

[0014] In a preferred embodiment, the mounting base includes a suction cup and suction tubes. The bottom of the suction cup is hollow, and multiple suction tubes are installed on the upper surface of the suction cup. The lower end of each suction tube is connected to the hollow part at the bottom of the suction cup, and the bottom of the suction cup is connected to an external compressor via an air tube.

[0015] The suction tube passes through the through hole into the support tray, and the upper end of the suction tube is flush with the bottom of the placement groove. The number and distribution of the suction tubes match the number and distribution of the through holes. In actual use, the suction cup, together with multiple suction tubes, can adsorb the target material placed on the placement groove, making it stable and preventing shaking. Since the support tray and the mounting base are separate structures, in actual use, support trays of various specifications can be used with the mounting base to meet the polishing needs of target materials of different sizes. Except for the size, the support trays are all the same, which allows the support trays to be assembled quickly.

[0016] After adopting the above technical solution, the beneficial effects of this utility model are as follows: By setting the polishing component, when it is necessary to adjust the polishing force on the target material, the user only needs to rotate the adjusting screw to adjust the height of the slide plate on the guide post, thereby achieving the purpose of adjusting the downward pressure of the polishing head. In the early stage of polishing, the polishing head may encounter the uneven surface of the target material, and the polishing head may move up and down when rotating. The spring on the guide post can counteract this shaking, so that the polishing head can polish more stably and ensure the uniformity of the polishing force.

[0017] The support components are designed with a separate structure for the support tray and mounting base. The support tray can be matched with the mounting base in various specifications to meet the polishing requirements of different sized targets. Except for the size, the support trays are all the same, which allows for quick assembly. Multiple suction tubes create a negative pressure adsorption effect under the action of an external compressor, which can fix the lower end of the target in the placement groove with negative pressure, making the target more stable and preventing rotation. After polishing, it can be quickly removed, which helps to improve polishing efficiency. In use, the upper end of the target is placed outside the placement groove and is not flush with the height and depth of the placement groove, so that the polishing head can polish the target evenly. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of a molybdenum-sodium alloy target polishing device according to the present invention.

[0020] Figure 2 This is a schematic diagram showing the positional relationship between the polishing component and the support component of a molybdenum-sodium alloy target polishing device according to this utility model.

[0021] Figure 3 This is a schematic diagram of the support component structure of a molybdenum-sodium alloy target polishing device according to the present invention.

[0022] Figure 4 This is a schematic diagram of the tray structure of a molybdenum-sodium alloy target polishing device according to the present invention.

[0023] In the diagram, 100 is the base, 110 is the protective cover, and 120 is the suction hose.

[0024] 200-Polishing assembly, 210-Adjusting screw, 220-Mounting bracket, 230-Guide post, 240-Motor, 250-Slide plate, 260-Spring, 270-Busset, 280-Polishing head;

[0025] 300-Support assembly, 310-Pattern, 311-Placement slot, 312-Through hole, 313-Counterhead hole, 320-Mounting base, 321-Suction cup, 322-Suction pipe, 330-Support frame, 340-Hydraulic cylinder. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figures 1 to 4 The present invention provides a technical solution: a polishing device for a molybdenum-sodium alloy target, comprising: a base 100, a polishing component 200 for polishing the molybdenum-sodium alloy target installed on the upper end of the base 100, and a support component 300 for supporting and placing the molybdenum-sodium alloy target installed inside the lower end of the base 100.

[0028] The support assembly 300 includes a support tray 310 for directly placing a molybdenum-sodium alloy target and a mounting base 320 for fixing the support tray 310. The support tray 310 is fixed to the upper side of the mounting base 320 by bolts, and the lower end of the mounting base 320 is fixedly connected to the middle of the upper end of the support frame 330.

[0029] Please see Figures 1 to 2 A protective cover 110 for intercepting dust generated during polishing is welded to the middle of the upper end of the base 100. A suction hose 120 for sucking up exhaust gas and dust generated during polishing is installed on the left side of the protective cover 110. The outer end of the suction hose 120 is connected to the suction pipe of an industrial vacuum cleaner.

[0030] The polishing assembly 200 includes a mounting bracket 220 for providing a mounting base. A guide post 230 is mounted on the left and right sides of the front end of the mounting bracket 220, and a spring 260 is fitted on the lower end of each of the two guide posts 230.

[0031] The polishing assembly 200 also includes an adjusting screw 210 for adjusting the height of the slide plate 250. The slide plate 250 is movably mounted on the lower front side of the mounting bracket 220 via guide posts 230 and springs 260. The slide plate 250 is slidably connected to the two guide posts 230.

[0032] The upper surface of the slide plate 250 is rotatably connected to the lower end of the adjusting screw 210 at the middle rear side, and the upper side of the adjusting screw 210 is threadedly connected to the upper middle of the mounting bracket 220.

[0033] The polishing assembly 200 also includes a polishing head 280 for polishing the molybdenum-sodium alloy target. A motor 240 for driving the polishing head 280 is installed on the front side of the middle of the upper surface of the slide plate 250. The lower end of the motor 240 is connected to the upper end of the rotating shaft, and the lower end of the rotating shaft passes through the upper end of the protective cover 110 through the bushing 270 and is fixedly connected to the upper end of the polishing head 280 by bolts. In actual use, the diameter of the polishing head 280 is larger than the diameter of the support tray 310. When the target is placed on the support tray 310, the upper end of the target is placed outside the placement groove 311 and is not flush with the height and depth of the placement groove 311. In this way, the polishing head 280 can polish the target evenly.

[0034] As the first embodiment of this utility model, by setting up a polishing assembly 200, in actual use, the polishing assembly 200 includes a mounting bracket 220 for providing a mounting base. A guide post 230 is installed on the left and right sides of the front end of the mounting bracket 220, and a spring 260 is respectively fitted at the lower end of the two guide posts 230. A sliding plate 250 is movably installed on the lower side of the front end of the mounting bracket 220 through the guide posts 230 and the springs 260. The sliding plate 250 is slidably connected to the two guide posts 230. When it is necessary to adjust the polishing force on the target material, the user only needs to rotate the adjusting screw 210 to adjust the height of the sliding plate 250 on the guide post 230, thereby achieving the purpose of adjusting the downward pressure of the polishing head 280. In the early stage of polishing, the polishing head 280 may encounter a relatively uneven target material surface. When the polishing head 280 rotates, it may cause up and down movement. The springs 260 on the guide posts 230 can counteract this shaking, so that the polishing head 280 can polish more stably and ensure the uniformity of the polishing force.

[0035] Please see Figures 2 to 4 The support assembly 300 also includes hydraulic cylinders 340. A hydraulic cylinder 340 is fixed on the left and right sides of the lower end of the support frame 330. The lower ends of the two hydraulic cylinders 340 are fixedly connected to the left and right sides of the bottom of the base 100. The left and right sides of the support frame 330 are slidably connected to the left inner wall and right inner wall of the base 100, respectively.

[0036] The upper end of the tray 310 is recessed downward to form a placement groove 311. The bottom of the placement groove 311 extends downward to form multiple through holes 312. The bottom center of the placement groove 311 extends downward to form multiple countersunk holes 313 for installing hexagon socket head cap screws.

[0037] Mounting base 320 includes suction cup 321 and suction tube 322. The bottom of suction cup 321 is hollow. Multiple suction tubes 322 are installed on the upper surface of suction cup 321. The lower end of suction tube 322 is connected to the hollow part at the bottom of suction cup 321. The bottom of suction cup 321 is connected to an external compressor through an air tube.

[0038] The suction tube 322 passes through the through hole 312 through the support tray 310, and the upper end of the suction tube 322 is flush with the bottom of the placement groove 311. The number and distribution of the suction tubes 322 match the number and distribution of the through holes 312. In actual use, the suction cup 321, together with multiple suction tubes 322, can adsorb the target material placed on the placement groove 311, making it stable and avoiding shaking. Since the support tray 310 and the mounting base 320 are separate structures, in actual use, support trays 310 of various specifications can be used with the mounting base 320 to meet the polishing of target materials of different sizes. Except for the size, the support trays 310 are all the same, which allows the support trays 310 to be assembled quickly.

[0039] As a second embodiment of this utility model, based on the first embodiment described above, the support component 300 is configured such that, in actual use, since the support tray 310 and the mounting base 320 are separate structures, the support tray 310 can be matched with the mounting base 320 in multiple specifications, thereby meeting the polishing requirements of target materials of different sizes. Except for size, the support trays 310 are identical, allowing for rapid assembly. After selecting the support tray 310, it is assembled onto the mounting base 320 through the through hole 312 and the suction tube 322, and then the support is placed through the countersunk hole 313. The disc 310 is fixed on the mounting base 320. Then, the target material to be polished can be placed on the placement groove 311 on the support tray 310. Multiple suction tubes 322 form a negative pressure adsorption effect under the action of an external compressor, which can fix the lower end of the target material in the placement groove 311 with negative pressure. This makes the target material more stable and prevents it from rotating. After polishing, it can be quickly removed, which helps to improve polishing efficiency. In use, the upper end of the target material is placed outside the placement groove 311 and is not flush with the height and depth of the placement groove 311. This allows the polishing head 280 to polish the target material evenly.

[0040] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A polishing device for a molybdenum-sodium alloy target, comprising: The base (100) is characterized in that a polishing assembly (200) for polishing a molybdenum-sodium alloy target is installed at the upper end of the base (100), and a support assembly (300) for supporting and placing the molybdenum-sodium alloy target is installed inside the lower end of the base (100). The support assembly (300) includes a support tray (310) for directly placing a molybdenum-sodium alloy target and a mounting base (320) for fixing the support tray (310). The support tray (310) is fixed to the upper side of the mounting base (320) by bolts, and the lower end of the mounting base (320) is fixedly connected to the middle of the upper end of the support frame (330).

2. The molybdenum-sodium alloy target polishing device as described in claim 1, characterized in that: The base (100) has a protective cover (110) welded to the middle of the upper end for intercepting the dust generated during polishing. A suction hose (120) for sucking up the exhaust gas and dust generated during polishing is installed on the left side of the protective cover (110). The outer end of the suction hose (120) is connected to the suction pipe of an industrial vacuum cleaner.

3. The molybdenum-sodium alloy target polishing device as described in claim 1, characterized in that: The polishing assembly (200) includes a mounting bracket (220) for providing a mounting base, with a guide post (230) mounted on the left and right sides of the front end of the mounting bracket (220), and a spring (260) fitted onto the lower end of each of the two guide posts (230).

4. The molybdenum-sodium alloy target polishing device as described in claim 3, characterized in that: The polishing assembly (200) also includes an adjusting screw (210) for adjusting the height of the slide plate (250). The slide plate (250) is movably mounted on the lower front side of the mounting bracket (220) via guide posts (230) and springs (260). The slide plate (250) is slidably connected to the two guide posts (230).

5. The molybdenum-sodium alloy target polishing device as described in claim 4, characterized in that: The upper surface of the slide plate (250) is rotatably connected to the lower end of the adjusting screw (210) at the middle rear side, and the upper side of the adjusting screw (210) is threadedly connected to the upper middle of the mounting bracket (220).

6. The molybdenum-sodium alloy target polishing device as described in claim 5, characterized in that: The polishing assembly (200) also includes a polishing head (280) for polishing a molybdenum-sodium alloy target. A motor (240) for driving the polishing head (280) is installed on the front side of the middle of the upper surface of the slide plate (250). The lower end of the motor (240) is connected to the upper end of the rotating shaft, and the lower end of the rotating shaft passes through the upper end of the protective cover (110) through the bushing (270) and is fixedly connected to the upper end of the polishing head (280) by bolts.

7. The molybdenum-sodium alloy target polishing device as described in claim 1, characterized in that: The support assembly (300) also includes a hydraulic cylinder (340). A hydraulic cylinder (340) is fixed on the left and right sides of the lower end of the support frame (330). The lower ends of the two hydraulic cylinders (340) are fixedly connected to the left and right sides of the bottom of the base (100). The left and right sides of the support frame (330) are slidably connected to the left inner wall and right inner wall of the base (100), respectively.

8. The molybdenum-sodium alloy target polishing device as described in claim 7, characterized in that: The upper end of the support tray (310) is recessed downward to form a placement groove (311), the bottom of the placement groove (311) is penetrated downward to form multiple through holes (312), and the bottom middle of the placement groove (311) is penetrated downward to form multiple countersunk holes (313) for installing hexagonal bolts.

9. The molybdenum-sodium alloy target polishing device as described in claim 8, characterized in that: The mounting base (320) includes a suction cup (321) and a suction tube (322). The bottom of the suction cup (321) is hollow. Multiple suction tubes (322) are installed on the upper surface of the suction cup (321). The lower end of the suction tube (322) is connected to the hollow part at the bottom of the suction cup (321). The bottom of the suction cup (321) is connected to an external compressor through an air pipe. The suction tube (322) passes through the through hole (312) through the tray (310), and the upper end of the suction tube (322) is flush with the bottom of the placement groove (311). The number and distribution of the suction tube (322) are matched with the number and distribution of the through hole (312).