Chip raw material slicing device

Abstract

The utility model discloses a chip raw material slicing device which comprises a machine box, a diamond wire cutting machine body and a placing table are arranged in the machine box, a round seat is fixedly connected to the top of the placing table, a round placing groove is formed in the top of the round seat, a bearing seat is fixedly connected to the interior of the machine box, and the bearing seat is fixedly connected to the interior of the machine box. A worm wheel is fixedly connected to an inner ring of the bearing seat, a gear motor is fixedly connected to the interior of the machine box, a worm is fixedly connected to one end of an output shaft of the gear motor, a disc of a hollow structure is fixedly connected to the top of the worm wheel, and two arc-shaped long grooves are formed in the top of the disc. By arranging the bearing seat, the worm gear, the speed reduction motor, the worm, the disc, the arc-shaped long groove, the round block, the rectangular plate, the rectangular groove, the guide plate and the V-shaped plate, stepless adjustment of silicon ingots with different diameters is achieved, the downtime of clamp replacement is avoided, and a bidirectional symmetrical force application structure counteracts transverse loads caused by cutting vibration.

Description

Technical Field

[0001] This utility model relates to the field of chip processing equipment technology, and in particular to a chip raw material slicing device. Background Technology

[0002] In the semiconductor manufacturing and microelectronics industry, precision slicing of chip raw materials is one of the key steps in the production process. Chip raw materials (such as silicon ingots) need to be sliced ​​into thin and uniform wafers for subsequent processes such as photolithography, etching, and packaging. The quality of the slices directly affects the chip's performance, yield, and production cost. Traditional slicing techniques mainly employ methods such as diamond wire cutting or internal circular saw (IDSaw).

[0003] In existing technologies, traditional fixed clamping mechanisms are difficult to adapt to the clamping requirements of silicon ingots of different diameters. When the specifications of silicon ingots change, the clamps need to be changed frequently, which leads to increased equipment downtime and reduced production efficiency. Secondly, mechanical clamping devices mostly adopt a unidirectional force application structure, which is prone to fluctuations in clamping force due to vibration during high-speed slicing, causing micro-displacement of silicon ingots or even uneven slice thickness. Therefore, we propose a chip raw material slicing device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a chip raw material slicing device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A chip raw material slicing device includes a chassis. Inside the chassis are a diamond wire cutting machine body and a placement stage. A circular seat is fixedly connected to the top of the placement stage, and a circular placement groove is formed on the top of the circular seat. A bearing seat is fixedly connected inside the chassis, and a worm gear is fixedly connected to the inner ring of the bearing seat. A geared motor is fixedly connected inside the chassis, and a worm is fixedly connected to one end of the output shaft of the geared motor. A hollow disc is fixedly connected to the top of the worm gear, and two arc-shaped slots are formed on the top of the disc. Circular blocks are slidably connected to the inner walls of the two arc-shaped slots. A clamping assembly is provided on the top of the placement stage.

[0007] Preferably, the clamping assembly includes two rectangular plates, the tops of two circular blocks are fixedly connected to the bottoms of the two rectangular plates respectively, guide plates are fixedly sleeved on the outer walls of the two rectangular plates, and V-shaped plates are fixedly sleeved on the tops of the two rectangular plates. The silicon ingot is clamped and fixed by setting the clamping assembly.

[0008] Preferably, the outer wall of the chassis is hinged with two hinged doors to protect the interior of the chassis. Existing door locks are installed between the hinged doors and the chassis.

[0009] Preferably, a silicon ingot is placed inside the circular placement groove, and the silicon ingot has a cylindrical structure.

[0010] Preferably, a roller bearing is fixedly sleeved at one end of the worm gear, and the outer ring of the roller bearing is fixedly connected to the inner wall of the housing, thereby assisting the worm gear to rotate.

[0011] Preferably, the outer wall of the placement platform has two rectangular grooves, the inner walls of the two rectangular grooves are slidably connected to the outer walls of the two rectangular plates respectively, and the two rectangular grooves assist the two rectangular plates in linear movement.

[0012] Preferably, the bottom of the guide plate is slidably connected to the top of the placement platform.

[0013] Compared with the prior art, the advantages of this utility model are:

[0014] This solution achieves stepless adjustment of silicon ingots of different diameters by setting up bearing seats, worm gears, geared motors, worms, discs, arc-shaped long slots, circular blocks, rectangular plates, rectangular slots, guide plates, and V-shaped plates, avoiding downtime for changing fixtures. The bidirectional symmetrical force application structure offsets the lateral load caused by cutting vibration. Attached Figure Description

[0015] To more clearly illustrate the technical solution of this utility model, the drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a three-dimensional structural diagram of a chip raw material slicing device proposed in this utility model;

[0017] Figure 2 This is a cross-sectional structural diagram of a chip raw material slicing device proposed in this utility model;

[0018] Figure 3 This is a partial cross-sectional structural diagram of a chip raw material slicing device proposed in this utility model;

[0019] Figure 4 This is a partial three-dimensional structural diagram of a chip raw material slicing device proposed in this utility model.

[0020] Figure 5 This utility model proposes a chip raw material slicing device. Figure 2 A magnified structural diagram of part A in the diagram.

[0021] In the diagram: 1. Chassis; 2. Opening door; 3. Diamond wire cutting machine body; 4. Placement table; 5. Round seat; 6. Circular placement slot; 7. Bearing seat; 8. Worm gear; 9. Gear motor; 10. Worm; 11. Disc; 12. Arc-shaped long slot; 13. Round block; 14. Rectangular plate; 15. Rectangular slot; 16. Guide plate; 17. V-shaped plate. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model; the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In addition, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0024] Depend on Figures 1-5 As shown, a chip raw material slicing device is disclosed, including a chassis 1. The outer wall of the chassis 1 is hinged with two hinged doors 2. Inside the chassis 1, there is a diamond wire cutting machine body 3 (kldj60q) and a placement table 4. Existing cooling equipment is installed inside the chassis 1 to cool the cutting position with water during diamond wire cutting. A circular seat 5 is fixedly connected to the top of the placement table 4. A circular placement groove 6 is opened on the top of the circular seat 5, and a silicon ingot is placed inside the circular placement groove 6.

[0025] A bearing housing 7 is fixedly connected inside the casing 1. A worm gear 8 is fixedly connected to the inner ring of the bearing housing 7. The bearing housing 7 assists the worm gear 8 to rotate stably. A geared motor 9 is fixedly connected inside the casing 1. A worm 10 is fixedly connected to one end of the output shaft of the geared motor 9. The operation of the geared motor 9 drives the worm 10 to rotate. A roller bearing assists the worm 10 to rotate stably. The transmission between the worm gear 8 and the worm 10 has a self-locking characteristic (the helix angle of the worm 10 is less than the equivalent friction angle between the meshing tooth surfaces), which can maintain a constant clamping force. A roller bearing is fixedly sleeved on one end of the worm 10. The outer ring of the roller bearing is fixedly connected to the inner wall of the casing 1.

[0026] The top of the worm gear 8 is fixedly connected to a hollow disc 11. The top of the disc 11 has two arc-shaped grooves 12. The inner walls of the two arc-shaped grooves 12 are slidably connected to round blocks 13, which move through the arc-shaped grooves 12.

[0027] The top of the placement stage 4 is equipped with a clamping assembly, which includes two rectangular plates 14. The outer wall of the placement stage 4 has two rectangular grooves 15. The inner walls of the two rectangular grooves 15 are slidably connected to the outer walls of the two rectangular plates 14 respectively. The tops of the two round blocks 13 are fixedly connected to the bottoms of the two rectangular plates 14 respectively. The movement of the round blocks 13 drives the rectangular plates 14 to move. The outer walls of the two rectangular plates 14 are fixedly fitted with guide plates 16. The bottom of the guide plates 16 is slidably connected to the top of the placement stage 4. The guide plates 16 assist the rectangular plates 14 to move in a stable linear motion. The tops of the two rectangular plates 14 are fixedly fitted with V-shaped plates 17. The V-shaped plates 17 have a V-shaped structure, which can easily clamp and fix silicon ingots of different diameters.

[0028] Working principle: When slicing silicon ingots, the silicon ingots are placed inside the circular placement groove 6. As the geared motor 9 rotates, it drives the worm gear 10 to rotate. The rotation of the worm gear 10 drives the worm wheel 8 to rotate. The rotation of the worm wheel 8 drives the disc 11 to rotate. The rotation of the disc 11 drives the two arc-shaped long grooves 12 to rotate. The two circular blocks 13 move relative to each other along the arc-shaped long grooves 12 and the two rectangular plates 14. The relative movement of the two rectangular plates 14 drives the relative movement of the two guide plates 16 and the two V-shaped plates 17. The two V-shaped plates 17 clamp the silicon ingots of different thicknesses.

[0029] All standard parts used in this utility model can be purchased from the market. Irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. In addition, the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. Furthermore, the structure and principle of the components known to those skilled in the art can be learned by those skilled in the art through technical manuals or conventional experimental methods.

[0030] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A chip raw material slicing apparatus comprising a cabinet (1), characterized in that, The machine housing (1) is equipped with a diamond wire cutting machine body (3) and a placement platform (4). A round seat (5) is fixedly connected to the top of the placement platform (4). A circular placement groove (6) is opened on the top of the round seat (5). A bearing seat (7) is fixedly connected to the inside of the machine housing (1). A worm gear (8) is fixedly connected to the inner ring of the bearing seat (7). A geared motor (9) is fixedly connected to the inside of the machine housing (1). A worm (10) is fixedly connected to one end of the output shaft of the geared motor (9). A hollow disc (11) is fixedly connected to the top of the worm gear (8). Two arc-shaped long grooves (12) are opened on the top of the disc (11). A round block (13) is slidably connected to the inner wall of the two arc-shaped long grooves (12). A clamping assembly is provided on the top of the placement platform (4).

2. The apparatus for slicing a chip raw material according to claim 1, wherein The clamping assembly includes two rectangular plates (14), the tops of two round blocks (13) are fixedly connected to the bottoms of the two rectangular plates (14), the outer walls of the two rectangular plates (14) are fixedly fitted with guide plates (16), and the tops of the two rectangular plates (14) are fixedly fitted with V-shaped plates (17).

3. The apparatus of claim 1, wherein the apparatus further comprises a cutting device. The outer wall of the chassis (1) is hinged with two opening and closing doors (2).

4. The apparatus of claim 1, wherein the apparatus further comprises a cutting device. The circular placement groove (6) contains a silicon ingot.

5. A chip raw material slicing apparatus according to claim 1, characterized in that, One end of the worm (10) is fixedly fitted with a roller bearing, and the outer ring of the roller bearing is fixedly connected to the inner wall of the housing (1).

6. A chip raw material slicing apparatus according to claim 2, characterized in that, The outer wall of the placement platform (4) has two rectangular grooves (15), and the inner walls of the two rectangular grooves (15) are slidably connected to the outer walls of the two rectangular plates (14).

7. The apparatus of claim 2, wherein the apparatus further comprises a chip material slicing device, characterized by The bottom of the guide plate (16) is slidably connected to the top of the placement platform (4).

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