Chemical vapor deposition furnace

Abstract

The utility model discloses a chemical vapor deposition furnace, and belongs to the field of solar cell manufacturing. The furnace comprises a furnace body, the furnace body comprises a first mounting section and a second mounting section which communicate with each other, and a first heating wire is connected into the first mounting section; a second heating wire is connected into the second mounting section; the sectional area of the first heating wire is larger than that of the second heating wire; the first mounting section is mounted at a furnace mouth of the furnace body, or the furnace body comprises two first mounting sections, and the two first mounting sections are respectively mounted at the furnace mouth and the furnace tail of the furnace body. Rapid heating can be achieved by means of the low resistance characteristic of the thick heating wire, so that the temperature recovery time of the furnace mouth area is shortened, production delay and energy consumption waste caused by waiting for natural heating or overall power improvement are avoided, the problem of temperature fluctuation caused by frequent opening and closing of a furnace mouth of traditional LPCVD equipment is solved, and the service life of the LPCVD equipment is prolonged. And the process stability and the production efficiency are obviously improved.

Description

Technical Field

[0001] The embodiments of this application relate to the field of solar cell manufacturing, and more specifically, this application relates to a chemical vapor deposition furnace. Background Technology

[0002] Chemical vapor deposition (CVD) is a process that utilizes gaseous or vaporous substances to undergo chemical reactions on the surface of a silicon wafer, generating solid deposits. The TOPCon cell process mainly involves three thin-film deposition routes: LPCVD, PECVD, and ALD. LPCVD is currently the primary technology for TOPCon thin-film deposition, possessing excellent step coverage, high film quality, controllable film composition and structure, low gas consumption, and reliance on heating equipment as a heat source to maintain the reaction, thus reducing particulate contamination sources.

[0003] In existing technology, chemical vapor deposition (CVD) of materials is achieved using a resistance chemical vapor deposition (CVD) furnace. This furnace employs a resistance band as the heating element, positioned circumferentially on the inner wall of the furnace body to heat the material. However, during operation, the furnace opening needs to be opened for loading / unloading or gas replacement. When the opening is opened, heat is lost from the furnace body to the outside, causing the temperature at the opening to drop below the operating temperature. After material is fed into the furnace, to raise the temperature at the opening to the operating temperature as quickly as possible, the resistance band's power is typically increased, after which the resistance band operates at its rated power.

[0004] The disadvantage of the above solution is that it requires frequent adjustment of the power of the resistance band. When the power of the resistance band at the furnace opening is to be adjusted, the power of the entire resistance band in the furnace body will be adjusted simultaneously, which increases the power consumption and shortens the life of the heating system, requiring frequent shutdowns for maintenance and replacement of heating wires, thus increasing production costs. Utility Model Content

[0005] This application aims to address at least one of the technical problems existing in the prior art. To this end, the present invention provides a chemical vapor deposition furnace to ensure a shorter temperature recovery time in the furnace mouth area, avoiding production delays and energy waste caused by waiting for natural heating or increasing overall power, and solving the temperature fluctuation problem caused by frequent opening and closing of the furnace mouth in traditional LPCVD equipment.

[0006] To solve the above problems, the technical solution adopted in this application is as follows:

[0007] A chemical vapor deposition furnace includes: a furnace body, the furnace body comprising:

[0008] At least one first mounting section, internally connected to a first heating wire;

[0009] The second installation section has a second heating wire connected internally.

[0010] The cross-sectional area of ​​the first heating wire is larger than that of the second heating wire.

[0011] The first installation section is located at the furnace opening of the furnace body, or the first installation section is located at both the furnace opening and the furnace tail of the furnace body.

[0012] The chemical vapor deposition furnace provided in this application achieves rapid heating by thickening the heating wire at the furnace mouth section, leveraging the low resistance of the thicker heating wire. This shortens the temperature recovery time in the furnace mouth area, avoiding production delays and energy waste caused by waiting for natural heating or increasing overall power. This solves the temperature fluctuation problem caused by frequent opening and closing of the furnace mouth in traditional LPCVD equipment, significantly improving process stability and production efficiency. Furthermore, by setting the heating wire at the furnace tail end to a thicker wire, similar to the furnace mouth, the problem of the significant temperature impact at the furnace tail end due to the exhaust structure is solved.

[0013] In one embodiment, the chemical vapor deposition furnace further includes:

[0014] The insulation layer is fitted onto the outside of the furnace body to fix the first installation section and the second installation section.

[0015] By fixing the coarse wire mounting section and the fine wire mounting section separately, it is easy to assemble heating wires of different sizes separately.

[0016] In one embodiment, the insulation layer is a one-piece molded structure.

[0017] By setting up an integrally molded insulation layer, the installation sections of different heating wires are inserted from the ports of the insulation layer and connected in sequence. There is no need to divide the insulation layer into multiple parts and then splice them together, which saves cutting, positioning and other processes and reduces assembly costs.

[0018] In one embodiment, the insulation layer includes:

[0019] The first insulation layer is fitted onto the outside of the first installation section;

[0020] The second insulation layer is fitted onto the outside of the second installation section;

[0021] The ends of the first and second insulation layers are connected with multiple quick-release parts along the circumferential direction, so that the first and second installation sections can be detachably connected along the axial direction.

[0022] By setting up an axially removable insulation layer, when the insulation layer or heating wire of a single furnace section is damaged or aged, it is not necessary to disassemble the entire furnace body. Only the insulation layer of the faulty section needs to be removed for component replacement, which significantly reduces maintenance costs and time and reduces equipment downtime losses.

[0023] In one embodiment, the insulation layer includes:

[0024] The first insulation layer is fitted onto the outside of the first installation section;

[0025] The second insulation layer is fitted onto the outside of the second installation section;

[0026] The first insulation layer is a split structure, including a first flip-top and a second flip-top. The first flip-top and the second flip-top are connected by a hinge so that they can be flipped around a flip axis.

[0027] By designing the insulation layer of the coarse wire installation section as a flip-top structure, the internal heating wire installation section can be directly exposed simply by flipping open the insulation layer cover. The purpose of heating wire replacement and wire installation can be achieved without disassembling the insulation layer, which greatly shortens the maintenance time.

[0028] In one embodiment, at least a portion of the first flap and the second flap, and the ends of the second insulation layer, are connected circumferentially to a plurality of quick-release components, so that the first mounting section and the second mounting section are detachably connected axially.

[0029] By setting up an axially removable insulation layer and cooperating with a flip-top structure, when the insulation layer or heating wire of a single furnace section is damaged or aged, the insulation layer of the entire faulty section can be disassembled for repair, or only the cover can be opened to repair the internal heating wire installation section.

[0030] In one embodiment, the first mounting section is a split structure, including:

[0031] The first component is fixedly installed inside the first flip-top portion of the first insulation layer;

[0032] The second component is fixedly installed inside the second flap section of the first insulation layer;

[0033] When the first and second flip-top sections are opened, the first and second mounting sections flip together under the action of the first insulation layer.

[0034] By designing the internal heating wire mounting section as a split structure, the heating wire mounting section automatically separates when the flip cover is opened, directly exposing the heating wire body without disassembling any fasteners. After replacing the heating wire, closing the flip cover will reset the structure, further shortening the heating wire replacement time.

[0035] In one embodiment, at least a portion of the first flap and the second flap, and the ends of the second insulation layer, are connected circumferentially to a plurality of quick-release components, so that the first mounting section and the second mounting section are detachably connected axially.

[0036] By setting up an axially removable insulation layer and using a flip-top structure, when the insulation layer or heating wire of a single furnace section is damaged or aged, the insulation layer of the entire faulty section can be disassembled for repair, or only the cover can be opened to expose the heating wire body inside and repair it.

[0037] In one embodiment, the quick-release element includes a latch;

[0038] One of the locking part and the movable part of the latch is fixedly installed at the end of the second insulation layer, and the other of the locking part and the movable part of the latch is fixedly installed at the end of the first insulation layer.

[0039] By integrating the latch directly into the end of the insulation layer, there is no need for external flanges or connecting plates, which reduces the overall weight.

[0040] In one embodiment, the diameter of the first heating wire is 5-9 mm, and the diameter of the second heating wire is 2-4 mm.

[0041] By designing the diameters of the thick and thin heating wires, precise control of the thermal field can be achieved while quickly compensating for heat loss during furnace door opening operations. Attached Figure Description

[0042] Figure 1 This is a schematic diagram of the overall structure of Embodiment 1 in this application;

[0043] Figure 2 This is a schematic diagram of the overall structure of Embodiment 2 in this application;

[0044] Figure 3 This is a schematic diagram of the overall structure of Embodiment 3 in this application;

[0045] Figure 4 This is a schematic diagram of the overall structure of Embodiment 4 in this application;

[0046] Figure 5 This is a schematic diagram of the structure of the first heating wire and the second heating wire inside the furnace body in this application.

[0047] In the picture:

[0048] First installation section 1, first split 101, second split 102, insulation layer 2, first insulation layer 201, first flip cover 20101, second flip cover 20102, second insulation layer 202, first heating wire 3, second heating wire 4, quick release part 5. Detailed Implementation

[0049] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0050] This application discloses a chemical vapor deposition furnace, comprising: a furnace body, the furnace body including:

[0051] At least one first mounting section 1, internally connected to a first heating wire 3;

[0052] The second installation section is internally connected to a second heating wire 4;

[0053] Among them, the cross-sectional area of ​​the first heating wire 3 is larger than the cross-sectional area of ​​the second heating wire 4;

[0054] The first installation section 1 is located at the furnace mouth of the furnace body, or the first installation section 1 is located at both the furnace mouth and the furnace tail of the furnace body. By thickening the heating wire at the furnace mouth of the chemical vapor deposition furnace, rapid heating is achieved by utilizing the low resistance characteristics of the thicker heating wire, thereby shortening the temperature recovery time in the furnace mouth area. This avoids production delays and energy waste caused by waiting for natural heating or increasing the overall power, thus solving the temperature fluctuation problem caused by frequent opening and closing of the furnace mouth in traditional LPCVD equipment, and significantly improving process stability and production efficiency. Furthermore, by setting the heating wire at the furnace tail end to a thicker wire, similar to the furnace mouth, the problem of the significant temperature impact caused by the exhaust structure at the furnace tail end is solved.

[0055] The above basic embodiments provide the core technical solution of this application. The specific implementation of the above solution will be described below through multiple embodiments.

[0056] Example 1

[0057] This embodiment discloses a chemical vapor deposition furnace, such as Figure 1 As shown, based on the above basic embodiment, the chemical vapor deposition furnace further includes: a heat insulation layer 2, sleeved on the outside of the furnace body, fixing the first mounting section 1 and the second mounting section. By fixing the first mounting section 1 and the second mounting section separately, it is convenient to assemble heating wires of different sizes separately. Specifically, the heat insulation layer 2 is a one-piece molded structure. By setting the one-piece molded heat insulation layer 2, the mounting sections of different heating wires are inserted from the port of the heat insulation layer 2 and connected sequentially, without having to divide the heat insulation layer 2 into multiple parts and then splice them, saving cutting, positioning and other processes, and reducing assembly costs.

[0058] Example 2

[0059] This embodiment discloses a chemical vapor deposition furnace, such as Figure 2As shown, as a variation of Embodiment 1, the insulation layer 2 includes a first insulation layer 201 and a second insulation layer 202, wherein the first insulation layer 201 is sleeved on the outside of the first mounting section 1, and the second insulation layer 202 is sleeved on the outside of the second mounting section.

[0060] The ends of the first insulation layer 201 and the second insulation layer 202 are connected with multiple quick-release parts 5 in the circumferential direction, so that the first installation section 1 and the second installation section can be detachably connected in the axial direction. By setting the insulation layer 2 that can be detached in the axial direction, when the insulation layer 2 of a single furnace section or the heating wire is damaged or aged, it is not necessary to disassemble the entire furnace body. Only the insulation layer 2 of the faulty section needs to be removed for component replacement, which significantly reduces maintenance costs and time and reduces equipment downtime losses.

[0061] Example 3

[0062] This embodiment discloses a chemical vapor deposition furnace, such as Figure 3 As shown, as a variation of Embodiment 1, the insulation layer 2 includes a first insulation layer 201 and a second insulation layer 202, wherein the first insulation layer 201 is sleeved on the outside of the first mounting section 1, and the second insulation layer 202 is sleeved on the outside of the second mounting section.

[0063] The first insulation layer 201 is a split structure, including a first flip cover 20101 and a second flip cover 20102. The first flip cover 20101 and the second flip cover 20102 are connected by a hinge and can be flipped, so that the first flip cover 20101 and the second flip cover 20102 can be flipped around the flip axis. By designing the insulation layer 2 of the first installation section 1 as a flip cover structure, the internal heating wire installation section can be directly exposed by simply folding open the cover of the insulation layer 2. The heating wire can be replaced without disassembling the insulation layer 2, which greatly shortens the maintenance time.

[0064] Furthermore, in the first flip-top section 20101 and the second flip-top section 20102, at least a portion of the end of the second insulation layer 202 is connected to a plurality of quick-release pieces 5 in the circumferential direction, so that the first mounting section 1 and the second mounting section are detachably connected in the axial direction. By setting an insulation layer 2 that can be detached in the axial direction, and in conjunction with the flip-top structure, when the insulation layer 2 of a single furnace section or the heating wire is damaged or aged, the insulation layer 2 of the entire faulty section can be disassembled for repair, or only the cover can be opened to repair the internal heating wire mounting section.

[0065] Example 4

[0066] This embodiment discloses a chemical vapor deposition furnace, such as Figure 4As shown, as a preferred example of Embodiment 3, the first mounting section 1 is further divided into a split structure, including a first split 101 and a second split 102. The first split 101 is fixedly installed inside the first flip-top portion 20101 of the first insulation layer 201, and the second split 102 is fixedly installed inside the second flip-top portion 20102 of the first insulation layer 201.

[0067] When the first flip cover 20101 and the second flip cover 20102 are flipped open, the first split 101 and the second split 102 flip together under the flipping action of the first insulation layer 201. By designing the internal heating wire mounting section as a split structure, the heating wire mounting section automatically separates when the flip cover is opened, directly exposing the heating wire body. There is no need to disassemble any fasteners. After replacing the heating wire, the flip cover can be closed to reset, further shortening the heating wire replacement time.

[0068] In the first flip-top section 20101 and the second flip-top section 20102, at least a portion of the second insulation layer 202 is circumferentially connected to a plurality of quick-release pieces 5, so that the first mounting section 1 and the second mounting section are detachably connected axially. By setting an insulation layer 2 that can be detached axially, and in conjunction with the flip-top structure, when the insulation layer 2 or heating wire of a single furnace section is damaged or aged, the insulation layer 2 of the entire faulty section can be disassembled for repair, or only the cover can be opened to expose the heating wire body inside and repair it.

[0069] Specifically, such as Figures 2-4 As shown, the quick-release part 5 uses a latch; one of the locking part and the movable part of the latch is fixedly installed at the end of the second insulation layer 202, and the other of the locking part and the movable part of the latch is fixedly installed at the end of the first insulation layer 201. By directly integrating the latch into the end of the insulation layer 2, there is no need for external flanges or connecting plates and other connecting parts, which can reduce the overall weight.

[0070] In a preferred embodiment, the diameter of the first heating wire 3 is 5-9 mm, and the diameter of the second heating wire 4 is 2-4 mm. By designing the diameters of the thick and thin heating wires, the heat loss during the furnace door opening operation can be quickly compensated while achieving precise control of the thermal field.

[0071] In the foregoing description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0072] Based on the above description of this application, those skilled in the art will also understand that the terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are based on the orientation or positional relationship shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the solution of this application and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms should not be understood or interpreted as a limitation on the solution of this application.

[0073] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0074] While numerous embodiments of this application have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will arise for those skilled in the art without departing from the spirit and intent of this application. It should be understood that various alternatives to the embodiments of this application described herein may be employed in the practice of this application. The appended claims are intended to define the scope of protection of this application and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A chemical vapor deposition furnace, characterized in that, The chemical vapor deposition furnace includes a furnace body, which includes a first mounting section and a second mounting section connected in series, wherein: The first mounting section is internally connected to a first heating wire; The second mounting section is internally connected to a second heating wire; Wherein, the cross-sectional area of ​​the first heating wire is larger than the cross-sectional area of ​​the second heating wire; The first mounting section is installed at the furnace opening of the furnace body, or the furnace body includes two first mounting sections, which are respectively installed at the furnace opening and the furnace tail of the furnace body.

2. The chemical vapor deposition furnace according to claim 1, characterized in that, The chemical vapor deposition furnace also includes: An insulation layer is fitted over the outside of the furnace body, and the first mounting section and the second mounting section are detachably embedded in the inner cavity of the insulation layer.

3. The chemical vapor deposition furnace according to claim 2, characterized in that, The insulation layer is a one-piece molded structure.

4. The chemical vapor deposition furnace according to claim 2, characterized in that, The insulation layer includes: The first insulation layer is fitted onto the outside of the first installation section; The second insulation layer is fitted onto the outside of the second installation section; The ends of the first insulation layer and the second insulation layer are connected with multiple quick-release parts along the circumferential direction, so that the first insulation layer and the second insulation layer can be detachably connected.

5. The chemical vapor deposition furnace according to claim 2, characterized in that, The insulation layer includes: The first insulation layer is fitted onto the outside of the first installation section; The second insulation layer is fitted onto the outside of the second installation section; The first insulation layer is a split structure, including a first flap portion and a second flap portion that are split radially along the first insulation layer. The first flap portion and the second flap portion are connected by a hinge so that the first flap portion and the second flap portion can be flipped around the hinge axis.

6. The chemical vapor deposition furnace according to claim 5, characterized in that, In the first and second flip-top sections, the ends of the first and / or second flip-top sections and the second insulation layer are connected circumferentially to a plurality of quick-release parts, so that the first and / or second flip-top sections and the second insulation layer are detachably connected.

7. The chemical vapor deposition furnace according to claim 5, characterized in that, The first mounting section is a split structure, including: The first component is fixedly installed inside the first flip cover. The second component is fixedly installed inside the second flip cover. When the first and second flip-tops are opened, the first and second parts open together under the flip-top action of the first insulation layer.

8. The chemical vapor deposition furnace according to claim 7, characterized in that, In the first and second flip-top sections, at least a portion of the first flip-top section and the end of the second insulation layer are connected circumferentially to a plurality of quick-release components, so that the first mounting section and the second mounting section are detachably connected axially.

9. The chemical vapor deposition furnace according to any one of claims 4, 6, and 8, characterized in that, The quick-release component includes a latch; One of the locking part and the movable part of the latch is fixedly installed at the end of the second insulation layer, and the other of the locking part and the movable part of the latch is fixedly installed at the end of the first insulation layer.

10. The chemical vapor deposition furnace according to claim 1, characterized in that, The diameter of the first heating wire is 5-9 mm, and the diameter of the second heating wire is 2-4 mm.

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