Lower thermal insulation cylinder for single crystal furnace thermal field

Abstract

The utility model relates to the technical field of monocrystalline silicon preparation, in particular to a lower thermal insulation cylinder for a thermal field of a single crystal furnace, which comprises a cylindrical thermal insulation cylinder liner, a support component for increasing the contact area is fixedly mounted at the bottom end of the thermal insulation cylinder liner, and an inner side thermal insulation material is arranged in the support component. The outer side of the heat preservation barrel inner container and the outer side of the supporting assembly are sleeved with an outer side heat preservation layer. According to the utility model, the contact area of the bottom of the lower thermal-insulation cylinder is increased by arranging the thermal-insulation cylinder support ring, so that the pressure of the weight of a thermal field in unit area on a bottom thermal-insulation material is reduced in the operation process of the single crystal furnace, the total height of the thermal field in the operation process of the single crystal furnace is kept unchanged, and the corrosion damage of the lower thermal-insulation cylinder on the bottom thermal-insulation material is reduced; the service life of the bottom thermal insulation material is prolonged, so that the crystallization effect of the single crystal furnace is ensured; and the inner side heat preservation material is filled in the heat preservation cylinder supporting ring, so that the cost can be reduced while the heat preservation performance of the lower heat preservation cylinder is ensured.

Description

Technical Field

[0001] This utility model relates to the field of single crystal silicon preparation technology, specifically to a lower heat preservation cylinder for the hot zone of a single crystal furnace. Background Technology

[0002] The thermal insulation cylinder used in the current Czochralski monocrystalline silicon industry mainly consists of a cylindrical high-temperature resistant, high-strength inner liner (usually C / C composite material) and an outer layer of high-efficiency insulation material.

[0003] During the operation of a single crystal furnace, the weight of the hot zone itself and the high temperature will cause the cylindrical inner liner to compact or corrode the bottom insulation material, resulting in a decrease in the overall height of the hot zone. This will cause changes in the temperature gradient of the hot zone, making it difficult to crystallize. At the same time, corrosion will also reduce the service life of the bottom insulation material and increase production costs.

[0004] Therefore, it is necessary to invent a lower insulation cylinder for the hot zone of a single crystal furnace to solve the above problems. Utility Model Content

[0005] To address the shortcomings of existing technologies, the purpose of this utility model is to provide a lower insulation cylinder for the hot zone of a single crystal furnace. This solves the problem that changes in the temperature gradient and the resulting temperature variations can occur when the bottom insulation material is compacted or corroded during actual use, thus affecting crystal formation in the single crystal furnace.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A lower insulation cylinder for the hot zone of a single crystal furnace includes a cylindrical insulation cylinder inner liner. A support component for increasing the contact area is fixedly installed at the bottom of the insulation cylinder inner liner. An inner insulation material is provided inside the support component. An outer insulation layer is sleeved on the outer side of the insulation cylinder inner liner and the support component.

[0008] As a preferred embodiment of this utility model, the support assembly includes a heat insulation cylinder support ring and a sealing cap. The heat insulation cylinder support ring is fixedly installed on the outside of the inner liner of the heat insulation cylinder. The top end of the heat insulation cylinder support ring is provided with an annular groove, and the two end faces of the sealing cap are adapted to the annular groove.

[0009] As a preferred embodiment of this utility model, the inner insulation material includes an inner insulation layer one and an inner insulation layer two. The inner insulation layer one is located at the bottom end of the annular groove, and the inner insulation layer two is fixedly installed at the bottom end of the sealing cover. The contact surfaces of the inner insulation layer one and the inner insulation layer two are matched.

[0010] As a preferred embodiment of this utility model, the bottom end of the heat insulation cylinder support ring is provided with a plurality of guide posts extending to its outer side, and the top end of the sealing cover is provided with a plurality of holes adapted to the guide posts.

[0011] As a preferred embodiment of this utility model, the top of the guide column is provided with a bolt hole, and the inner side of the bolt hole is provided with a casting hole, which is located at the junction of the inner insulation material.

[0012] As a preferred embodiment of this utility model, the bottom end of the bolt hole is provided with an internal thread, and the top end of the sealing cap is provided with a plurality of sealing bolts that mate with the bolt hole.

[0013] As a preferred embodiment of this utility model, the bottom end of the insulation cylinder support ring is also provided with a plurality of locking bolts, the locking bolts and the guide column are intermittently distributed, and the threaded end of the locking bolt is located on the outside of the sealing cover.

[0014] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0015] In this invention, the contact area at the bottom of the lower insulation cylinder is increased by setting up a support ring for the insulation cylinder. During the operation of the single crystal furnace, the pressure of the thermal field weight per unit area on the bottom insulation material is reduced, ensuring that the total height of the thermal field remains unchanged during the operation of the single crystal furnace. This reduces the corrosion and damage to the bottom insulation material caused by the lower insulation cylinder, improves the service life of the bottom insulation material, and thus ensures the crystal formation effect of the single crystal furnace. By filling the inside of the support ring of the insulation cylinder with inner insulation material, the insulation performance of the lower insulation cylinder can be guaranteed while reducing costs. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the position and structure of the support ring of the insulation cylinder of this utility model;

[0018] Figure 3 This is a schematic cross-sectional view of the overall structure of this utility model;

[0019] Figure 4 This is a schematic cross-sectional view of the support ring structure of the insulation cylinder of this utility model;

[0020] Figure 5 This is a schematic diagram of the internal structure of the support ring of the insulation cylinder of this utility model;

[0021] Figure 6 This is a partially enlarged schematic diagram of the guide column structure of this utility model.

[0022] Explanation of reference numerals in the attached drawings: 1. Inner liner of the insulation cylinder; 2. Outer insulation layer; 3. Support ring of the insulation cylinder; 301. Guide post; 302. Internal thread; 303. Pouring hole; 4. Sealing cap; 5. Inner insulation layer one; 6. Inner insulation layer two; 7. Sealing bolt; 8. Locking bolt; 9. Bottom insulation material. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and should not be used to limit the scope of protection of the present invention.

[0024] This utility model provides, for example Figure 1-6 The illustration shows a lower insulation cylinder for a single-crystal furnace hot zone, comprising a cylindrical insulation cylinder inner liner 1. A support assembly for increasing the contact area is fixedly installed at the bottom of the inner liner 1. An inner insulation material is disposed inside the support assembly, and an outer insulation layer 2 is fitted over the inner liner 1 and the support assembly. When the lower insulation cylinder is positioned above the bottom insulation material 9, the support assembly increases the contact area with the bottom insulation material 9, reducing the pressure exerted on the bottom insulation material 9 per unit area by the weight of the hot zone, preventing changes in the height of the hot zone, and improving product consistency.

[0025] The support assembly includes an insulation cylinder support ring 3 and a sealing cap 4. The insulation cylinder support ring 3 is fixedly installed on the outside of the inner liner 1 of the insulation cylinder. The top of the insulation cylinder support ring 3 is provided with an annular groove, and the two end faces of the sealing cap 4 are adapted to the annular groove. The sealing cap 4 can slide longitudinally along the inner side of the annular groove. By pressing the sealing cap 4 with a nut, the inner insulation material is tightly fitted, reducing the formation of gaps and minimizing the impact of gaps on the insulation effect of the lower insulation cylinder.

[0026] The inner insulation material includes an inner insulation layer 5 and an inner insulation layer 6. The inner insulation layer 5 is located at the bottom end of the annular groove, and the inner insulation layer 6 is fixedly installed at the bottom end of the sealing cover 4. The contact surfaces of the inner insulation layer 5 and the inner insulation layer 6 mate with each other. The contact surfaces of the inner insulation layer 5 and the inner insulation layer 6 can be provided with multiple interlocking grooves. After they are pressed against each other, they can fill the gap between the inner end face of the insulation cylinder support ring 3 and the inner end face of the insulation cylinder. By reducing the generation of gaps, the insulation effect of the lower insulation cylinder is guaranteed.

[0027] The bottom end of the insulation cylinder support ring 3 is provided with multiple guide posts 301 extending to its outer side, and the top end of the sealing cover 4 is provided with multiple holes that are adapted to the guide posts 301. The guide posts 301 facilitate the guiding installation of the sealing cover 4 and reduce the difficulty of positioning and installation.

[0028] The guide post 301 has a bolt hole at its top, and a pouring hole 303 is located inside the bolt hole at the junction of the inner insulation material. After the inner insulation layer 5 and the inner insulation layer 6 are installed, insulation material is injected into the bolt hole. The insulation material is injected into the contact surface of the two materials through the pouring hole 303, filling the gaps inside the insulation cylinder support ring 3. This ensures that the insulation material is evenly distributed inside, further preventing temperature differences caused by uneven heat distribution, ensuring temperature consistency, and guaranteeing the crystallization effect of the single crystal furnace.

[0029] The bottom end of the bolt hole is provided with an internal thread 302, and the top end of the sealing cap 4 is provided with a plurality of sealing bolts 7 that mate with the bolt hole. The sealing bolts 7 are provided to seal the pouring hole 303 and the bolt hole, to prevent the leakage of the poured insulation material, and at the same time to prevent the sealing cap 4 from falling off.

[0030] The bottom end of the insulation cylinder support ring 3 is also provided with multiple locking bolts 8. The locking bolts 8 and the guide post 301 are intermittently distributed, and the threaded end of the locking bolt 8 is located on the outside of the sealing cover 4. With the threaded end of the locking bolt 8 on the outside, after the sealing cover 4 is installed, the tightening of the nut causes the inner insulation layer 5 and the inner insulation layer 6 to be pressed against each other, applying a preload force to prevent the gap from widening due to separation of the two layers.

[0031] This invention increases the contact area at the bottom of the lower insulation cylinder by adding a support ring 3. During the operation of the single crystal furnace, this reduces the pressure of the thermal field weight per unit area on the bottom insulation material 9, ensuring that the total height of the thermal field remains constant during the operation of the single crystal furnace. This also reduces corrosion and damage to the bottom insulation material 9 caused by the lower insulation cylinder, extends the service life of the bottom insulation material 9, and thus ensures the crystal formation effect of the single crystal furnace. Furthermore, by filling the inner insulation material inside the support ring 3, the insulation performance of the lower insulation cylinder can be guaranteed while reducing costs.

[0032] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A lower heat-insulating cylinder for the hot zone of a single crystal furnace, characterized in that: The device includes a cylindrical heat-insulating inner liner (1), and a support component for increasing the contact area is fixedly installed at the bottom of the heat-insulating inner liner (1). The support component is provided with an inner heat-insulating material, and an outer heat-insulating layer (2) is sleeved on the outer side of the heat-insulating inner liner (1) and the support component.

2. The lower insulation cylinder for the hot zone of a single crystal furnace according to claim 1, characterized in that: The support assembly includes a heat insulation cylinder support ring (3) and a sealing cap (4). The heat insulation cylinder support ring (3) is fixedly installed on the outside of the heat insulation cylinder inner liner (1). The top of the heat insulation cylinder support ring (3) is provided with an annular groove, and the two end faces of the sealing cap (4) are adapted to the annular groove.

3. The lower insulation cylinder for the hot zone of a single crystal furnace according to claim 2, characterized in that: The inner insulation material includes an inner insulation layer one (5) and an inner insulation layer two (6). The inner insulation layer one (5) is located at the bottom of the annular groove, and the inner insulation layer two (6) is fixedly installed at the bottom of the sealing cover (4). The contact surfaces of the inner insulation layer one (5) and the inner insulation layer two (6) are matched.

4. The lower heat-insulating cylinder for the hot zone of a single crystal furnace according to claim 3, characterized in that: The bottom end of the insulation cylinder support ring (3) is provided with a plurality of guide posts (301) extending to its outer side, and the top end of the sealing cover (4) is provided with a plurality of holes adapted to the guide posts (301).

5. The lower insulation cylinder for the hot zone of a single crystal furnace according to claim 4, characterized in that: The guide column (301) has a bolt hole at the top, and a casting hole (303) is provided inside the bolt hole. The casting hole (303) is located at the junction of the inner insulation material.

6. The lower insulation cylinder for the hot zone of a single crystal furnace according to claim 5, characterized in that: The bottom end of the bolt hole is provided with an internal thread (302), and the top end of the sealing cap (4) is provided with a plurality of sealing bolts (7) that cooperate with the bolt hole.

7. The lower insulation cylinder for the hot zone of a single crystal furnace according to claim 4, characterized in that: The bottom end of the insulation cylinder support ring (3) is also provided with multiple locking bolts (8), which are intermittently distributed with the guide post (301), and the threaded end of the locking bolt (8) is located on the outside of the sealing cover (4).

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