Multi-parameter feedback circuit module of sputtering power supply

Abstract

The utility model relates to the technical field of sputtering power supplies, in particular to a multi-parameter feedback circuit module of a sputtering power supply, which comprises the sputtering power supply and a detection module, the sputtering power supply is powered by mains supply, and the detection module comprises an input end detection unit, an output end detection unit, a temperature detection unit and a processing chip. The input end detection unit is used for detecting voltage and current parameters of mains supply input, the output end detection unit is used for detecting output voltage and output current of the sputtering power supply, and the temperature detection unit is used for detecting the internal temperature of the sputtering power supply. According to the utility model, comprehensive real-time monitoring of voltage and current input by the commercial power, voltage and current output by the power supply and internal temperature is realized, and the processing chip feeds back multi-dimensional data to the main control chip, so that the main control chip can accurately judge the running state of the power supply and timely deal with the problems of fluctuation of the commercial power, abnormal load or overheating and the like; and the stability and reliability of the sputtering power supply are effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of sputtering power supply technology, and more specifically, to a multi-parameter feedback circuit module for sputtering power supply. Background Technology

[0002] In the field of sputtering power supply technology, sputtering power supply is the core component of thin film preparation equipment, and its stability and reliability directly affect the quality of thin film deposition.

[0003] Utility model patent CN222673980U discloses a dual-power supply control circuit and electronic device, including a primary power supply, a backup power supply, a first power supply detection and control circuit, a second power supply detection and control circuit, a status detection circuit, a first switch, and a second switch. The primary power supply is connected to the load through the first switch, and the backup power supply is connected to the load through the second switch. The first power supply detection and control circuit is connected to both the primary power supply and the status detection circuit. The second power supply detection and control circuit is connected to both the backup power supply and the status detection circuit. When the primary power supply voltage is normal, the first power supply detection and control circuit drives the first switch to close, using the primary power supply to supply power to the load. When the primary power supply voltage is abnormal and the backup power supply voltage is normal, the second power supply detection and control circuit drives the second switch to close, using the backup power supply to supply power to the load.

[0004] Although this invention solves the problem that existing circuit designs lack over / under voltage protection and are prone to sparking when switching between different power supplies, it can only detect a single parameter, such as voltage or current at the output terminal. It lacks comprehensive monitoring of the input mains voltage and current parameters as well as the internal temperature of the power supply. This makes it impossible for the main control chip to obtain the complete operating status of the power supply in real time, making it difficult to respond promptly to potential problems such as mains power fluctuations, abnormal loads, or internal overheating. This may lead to problems such as power supply failure, reduced efficiency, or equipment damage. Utility Model Content

[0005] The purpose of this invention is to provide a multi-parameter feedback circuit module for sputtering power supplies, in order to solve the problem mentioned in the background art of detecting only a single parameter, either voltage or current, at the output terminal.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A multi-parameter feedback circuit module for a sputtering power supply includes a sputtering power supply and a detection module. The sputtering power supply is powered by AC mains. The detection module includes an input detection unit, an output detection unit, a temperature detection unit, and a processing chip. The input detection unit is located at the connection between the sputtering power supply and the AC mains power supply and is used to detect the voltage and current parameters of the AC mains input. The output detection unit is located at the output end of the sputtering power supply and is used to detect the output voltage and output current of the sputtering power supply. The temperature detection unit is located inside the sputtering power supply and is used to detect the internal temperature of the sputtering power supply. The input detection unit, the output detection unit, and the temperature detection unit are all signal-connected to the processing chip, and the processing chip is signal-connected to the main control chip within the sputtering power supply.

[0008] Preferably, the input detection unit includes a current transformer TA, a first analog-to-digital converter chip, a voltage transformer TV, and a second analog-to-digital converter chip.

[0009] The current transformer TA is mounted outside the neutral line. The two output terminals of the current transformer TA are connected to the input terminals of the first analog-to-digital converter chip. The first input terminal of the voltage transformer TV is connected to the live wire, and the second input terminal of the voltage transformer TV is connected to the neutral line. The two output terminals of the voltage transformer TV are connected to the input terminals of the second analog-to-digital converter chip. The output terminals of the first and second analog-to-digital converter chips are respectively connected to different input pins of the processing chip.

[0010] Preferably, the output detection unit includes resistor R1, resistor R2, operational amplifier U1, third analog-to-digital converter chip, resistor R3, resistor R4, resistor R5, resistor R6, resistor R7, operational amplifier U2, and fourth analog-to-digital converter chip.

[0011] The first terminal of resistor R1 is connected to the positive terminal of the sputtering power supply, the second terminal of resistor R1 is connected to the first terminal of resistor R2, the second terminal of resistor R2 is connected to the negative terminal of the sputtering power supply, the non-inverting input terminal of operational amplifier U1 is connected to the second terminal of resistor R1, the inverting input terminal of operational amplifier U1 is connected to the output terminal of operational amplifier U1, the output terminal of operational amplifier U1 is connected to the input terminal of the third analog-to-digital converter chip, and the output terminal of the third analog-to-digital converter chip is connected to the input pin of the processing chip.

[0012] The first terminal of resistor R3 is connected to the positive terminal of the sputtering power supply, and the second terminal of resistor R3 is connected to the load. The first terminal of resistor R4 is connected to the second terminal of resistor R3, and the second terminal of resistor R4 is connected to the inverting input terminal of operational amplifier U2. The first terminal of resistor R5 is connected to the first terminal of resistor R3, and the second terminal of resistor R5 is connected to the non-inverting input terminal of operational amplifier U2. The first terminal of resistor R6 is connected to the inverting input terminal of operational amplifier U2, and the second terminal of resistor R6 is connected to the output terminal of operational amplifier U2. The first terminal of resistor R7 is connected to the non-inverting input terminal of operational amplifier U2, and the second terminal of resistor R7 is grounded. The output terminal of operational amplifier U2 is connected to the input terminal of the fourth analog-to-digital converter chip, and the output terminal of the fourth analog-to-digital converter chip is connected to the input pin of the processing chip.

[0013] Preferably, the temperature detection unit includes a temperature sensing chip U3 and a resistor R8. The temperature sensing chip U3 is a DS18B20 and is installed inside the sputtering power supply.

[0014] The VDD pin of the temperature sensing chip U3 is connected to the power supply VCC, the DO pin of the temperature sensing chip U3 is connected to the input pin of the processing chip, the GND pin of the temperature sensing chip U3 is grounded, the first end of the resistor R8 is connected to the power supply VCC, and the second end of the resistor R8 is connected to the DO pin of the temperature sensing chip U3.

[0015] Preferably, the system also includes a display unit, which is signal-connected to the processing chip.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] This utility model, by setting up an input detection unit, an output detection unit, and a temperature detection unit, achieves comprehensive real-time monitoring of the voltage and current of the mains input, the voltage and current of the power supply output, and the internal temperature. The processing chip feeds back multi-dimensional data to the main control chip, enabling the main control chip to accurately determine the power supply's operating status and respond promptly to problems such as mains power fluctuations, abnormal loads, or overheating, effectively improving the stability and reliability of the sputtering power supply. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a circuit diagram of the input terminal detection unit in the utility model;

[0020] Figure 3 This is a circuit diagram of the output detection unit in the utility model.

[0021] Figure 4 This is a circuit diagram of the temperature detection unit in the utility model.

[0022] In the picture:

[0023] 1. Sputtering power supply;

[0024] 2. Detection module; 20. Input detection unit; 21. Output detection unit; 22. Temperature detection unit; 23. Processing chip; 24. Display unit. Detailed Implementation

[0025] The technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0026] Please see Figures 1-4 The present invention provides the following technical solution:

[0027] A multi-parameter feedback circuit module for a sputtering power supply includes a sputtering power supply 1 and a detection module 2. The sputtering power supply 1 is powered by mains electricity. The detection module 2 includes an input detection unit 20, an output detection unit 21, a temperature detection unit 22, and a processing chip 23. The input detection unit 20 is located at the connection between the sputtering power supply 1 and the mains electricity and is used to detect the voltage and current parameters of the mains electricity input. The output detection unit 21 is located at the output end of the sputtering power supply 1 and is used to detect the output voltage and output current of the sputtering power supply 1. The temperature detection unit 22 is located inside the sputtering power supply 1 and is used to detect the internal temperature of the sputtering power supply 1. The input detection unit 20, the output detection unit 21, and the temperature detection unit 22 are all signal-connected to the processing chip 23, and the processing chip 23 is signal-connected to the main control chip inside the sputtering power supply 1.

[0028] The sputtering power supply 1 is the core component of the thin film preparation equipment. Its core function is to convert the mains power into a stable power supply suitable for the sputtering process, provide energy to the sputtering target to generate plasma, and thus deposit a thin film on the substrate surface. Therefore, the stability of the sputtering power supply 1 is very important. The mains power may have voltage fluctuations (overvoltage, undervoltage), current surges or harmonic interference, which will directly affect the reliability of the internal circuit of the power supply.

[0029] The input detection unit 20 detects input voltage and current parameters, and the main control chip can identify abnormal mains power (such as voltage drop or instantaneous overload) in real time and trigger protection mechanisms (such as input current limiting and soft restart) to prevent the power supply from shutting down or being damaged due to mains problems. During sputtering, the load (plasma impedance) will change dynamically with the target material state, gas pressure and other factors. The fluctuation of output voltage and current directly affects the film deposition quality (such as thickness uniformity and composition consistency).

[0030] The output detection unit 21 can monitor the output current (to determine if there is an overload or short circuit) and the output voltage (to determine if it deviates from the set value) in real time. Through closed-loop feedback, the main control chip can dynamically adjust the power supply working mode (such as constant voltage mode or constant current mode) according to the output detection data to ensure that the output parameters strictly match the process requirements. The internal power devices (such as IGBTs and transformers) and capacitors of the sputtering power supply 1 will generate a lot of heat when working under high load. Excessive temperature will lead to a decrease in component performance (such as a shortened capacitor life), reduced efficiency, or even short circuits or fires. The temperature detection unit 22 collects the internal temperature in real time. When the temperature exceeds the threshold, the main control chip can start forced cooling (such as high-speed fan operation) or derating (reducing output power) to avoid permanent damage caused by overheating. The processing chip 23 can use common microprocessors.

[0031] In this embodiment, the input detection unit 20 includes a current transformer TA, a first analog-to-digital converter chip, a voltage transformer TV, and a second analog-to-digital converter chip;

[0032] The current transformer TA is installed outside the neutral wire. The current transformer TA measures the mains current using the principle of electromagnetic induction. The current in the live wire and the neutral wire are equal in magnitude but opposite in direction, so the current transformer TA can also be installed outside the live wire. The two output terminals of the current transformer TA are connected to the input terminals of the first analog-to-digital converter chip. The first input terminal of the voltage transformer TV is connected to the live wire, and the second input terminal of the voltage transformer TV is connected to the neutral wire. The two output terminals of the voltage transformer TV are connected to the input terminals of the second analog-to-digital converter chip. The output terminals of the first and second analog-to-digital converter chips are respectively connected to different input pins of the processing chip 23. The voltage transformer TV also measures the mains voltage based on the principle of electromagnetic induction, converting the high voltage into the low voltage.

[0033] Specifically, the output detection unit 21 includes resistors R1 and R2, operational amplifier U1, a third analog-to-digital converter chip, resistors R3, R4, R5, R6, R7, operational amplifier U2, and a fourth analog-to-digital converter chip.

[0034] The first terminal of resistor R1 is connected to the positive terminal of sputtering power supply 1, the second terminal of resistor R1 is connected to the first terminal of resistor R2, the second terminal of resistor R2 is connected to the negative terminal of sputtering power supply 1, the non-inverting input terminal of operational amplifier U1 is connected to the second terminal of resistor R1, the inverting input terminal of operational amplifier U1 is connected to the output terminal of operational amplifier U1, the output terminal of operational amplifier U1 is connected to the input terminal of the third analog-to-digital converter chip, and the output terminal of the third analog-to-digital converter chip is connected to the input pin of processing chip 23. The branch formed by resistors R1 and R2 is connected in parallel with the load. The output voltage of sputtering power supply 1 can be determined by measuring the voltage at the second terminal of resistor R1, and the voltage can be converted to a suitable range through the voltage divider principle.

[0035] Resistor R3 is connected to the positive terminal of sputtering power supply 1, and its second terminal is connected to the load. Resistor R4 is connected to the second terminal of R3 and its second terminal is connected to the inverting input of operational amplifier U2. Resistor R5 is connected to the first terminal of R3 and its second terminal is connected to the non-inverting input of operational amplifier U2. Resistor R6 is connected to the inverting input of operational amplifier U2 and its second terminal is connected to the output of operational amplifier U2. Resistor R7 is connected to the non-inverting input of operational amplifier U2 and its second terminal is grounded. The output of operational amplifier U2 is connected to the input of the fourth analog-to-digital converter chip, and the output of the fourth analog-to-digital converter chip is connected to the input pin of processing chip 23. Resistor R3 is a sampling resistor, and it is connected in series with the load. The current information is converted into voltage information. Operational amplifier U2 and its peripheral circuits constitute an amplifier circuit.

[0036] Furthermore, the temperature detection unit 22 includes a temperature sensing chip U3 and a resistor R8. The temperature sensing chip U3 is a DS18B20 and is installed inside the sputtering power supply 1.

[0037] The VDD pin of the temperature sensing chip U3 is connected to the power supply VCC, the DO pin of the temperature sensing chip U3 is connected to the input pin of the processing chip 23, the GND pin of the temperature sensing chip U3 is grounded, the first end of the resistor R8 is connected to the power supply VCC, and the second end of the resistor R8 is connected to the DO pin of the temperature sensing chip U3. The DS18B20 is a commonly used digital temperature sensor that can achieve communication and power supply through only one data line, which is convenient and fast.

[0038] In addition, there is a display unit 24, which is connected to the processing chip 23. Common types of display units 24 include LED digital tubes, LCD liquid crystal displays or OLED displays. The displayed content includes various parameters. The connection method between the display unit 24 and the processing chip 23 is a common method, so it will not be described in detail here.

[0039] In use, the multi-parameter feedback circuit module of the sputtering power supply of this utility model has a current transformer TA connected to the neutral line. It collects the mains input current signal through the principle of electromagnetic induction. The current signal is converted into a digital signal by the first analog-to-digital converter chip and input to the processing chip 23. The voltage transformer TV is connected between the live wire and the neutral wire to collect the mains input voltage signal. It is converted into a digital signal by the second analog-to-digital converter chip and input to the processing chip synchronously. The circuit monitors the voltage fluctuations (such as overvoltage and undervoltage) and current anomalies (such as surges and leakage) of the mains power supply in real time, providing a data basis for the power supply to cope with grid disturbances.

[0040] The branch containing resistors R1 and R2 is connected in parallel with the load, forming a voltage divider branch. Operational amplifier U1 forms a voltage follower. The first analog-to-digital converter chip converts the output voltage of sputtering power supply 1 into a digital signal for processing chip 23. Resistor R3 is connected in series with the load and serves as a sampling resistor. Operational amplifier U2 and its peripheral circuits form an amplification circuit. The fourth analog-to-digital converter chip converts the output current of sputtering power supply 1 into a digital signal for processing chip 23. It monitors whether the output current and voltage of sputtering power supply 1 are stable, identifies load abnormalities (such as short circuits and overloads) and provides timely feedback. Temperature sensing chip U3 is directly installed inside sputtering power supply 1. Temperature sensing chip U3 transmits temperature data to processing chip 23 to monitor the temperature of internal components (such as power devices and capacitors) to prevent device aging or failure due to overheating.

[0041] The processing chip 23 is connected to the main control chip of the sputtering power supply 1. The main control chip adjusts its working state according to the feedback data. The display unit 24 can display relevant data in real time for easy viewing by the user.

[0042] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A multi-parameter feedback circuit module for sputtering power supply, characterized in that: The device includes a sputtering power supply (1) and a detection module (2). The sputtering power supply (1) is powered by mains electricity. The detection module (2) includes an input detection unit (20), an output detection unit (21), a temperature detection unit (22), and a processing chip (23). The input detection unit (20) is located at the connection between the sputtering power supply (1) and the mains electricity and is used to detect the voltage and current parameters of the mains input. The output detection unit (21) is located at the output end of the sputtering power supply (1). The output detection unit (21) is used to detect the output voltage and output current of the sputtering power supply (1). The temperature detection unit (22) is located inside the sputtering power supply (1) and is used to detect the internal temperature of the sputtering power supply (1). The input detection unit (20), the output detection unit (21) and the temperature detection unit (22) are all connected to the processing chip (23). The processing chip (23) is connected to the main control chip inside the sputtering power supply (1).

2. The sputtering power supply multi-parameter feedback circuit module according to claim 1, characterized in that: The input detection unit (20) includes a current transformer TA, a first analog-to-digital converter chip, a voltage transformer TV, and a second analog-to-digital converter chip; The current transformer TA is mounted outside the neutral line. The two output terminals of the current transformer TA are connected to the input terminals of the first analog-to-digital converter chip. The first input terminal of the voltage transformer TV is connected to the live wire. The second input terminal of the voltage transformer TV is connected to the neutral line. The two output terminals of the voltage transformer TV are connected to the input terminals of the second analog-to-digital converter chip. The output terminals of the first and second analog-to-digital converter chips are respectively connected to different input pins of the processing chip (23).

3. The sputtering power supply multi-parameter feedback circuit module according to claim 1, characterized in that: The output detection unit (21) includes resistor R1, resistor R2, operational amplifier U1, third analog-to-digital converter chip, resistor R3, resistor R4, resistor R5, resistor R6, resistor R7, operational amplifier U2 and fourth analog-to-digital converter chip; The first end of resistor R1 is connected to the positive terminal of the sputtering power supply (1), the second end of resistor R1 is connected to the first end of resistor R2, the second end of resistor R2 is connected to the negative terminal of the sputtering power supply (1), the non-inverting input terminal of operational amplifier U1 is connected to the second end of resistor R1, the inverting input terminal of operational amplifier U1 is connected to the output terminal of operational amplifier U1, the output terminal of operational amplifier U1 is connected to the input terminal of the third analog-to-digital converter chip, and the output terminal of the third analog-to-digital converter chip is connected to the input pin of the processing chip (23). The first end of resistor R3 is connected to the positive terminal of the sputtering power supply (1), the second end of resistor R3 is connected to the load, the first end of resistor R4 is connected to the second end of resistor R3, the second end of resistor R4 is connected to the inverting input terminal of operational amplifier U2, the first end of resistor R5 is connected to the first end of resistor R3, the second end of resistor R5 is connected to the non-inverting input terminal of operational amplifier U2, the first end of resistor R6 is connected to the inverting input terminal of operational amplifier U2, the second end of resistor R6 is connected to the output terminal of operational amplifier U2, the first end of resistor R7 is connected to the non-inverting input terminal of operational amplifier U2, the second end of resistor R7 is grounded, the output terminal of operational amplifier U2 is connected to the input terminal of the fourth analog-to-digital converter chip, and the output terminal of the fourth analog-to-digital converter chip is connected to the input pin of the processing chip (23).

4. The sputtering power supply multi-parameter feedback circuit module according to claim 1, characterized in that: The temperature detection unit (22) includes a temperature measuring chip U3 and a resistor R8. The temperature measuring chip U3 is a DS18B20 and is installed inside the sputtering power supply (1). The VDD pin of the temperature measuring chip U3 is connected to the power supply VCC, the DO pin of the temperature measuring chip U3 is connected to the input pin of the processing chip (23), the GND pin of the temperature measuring chip U3 is grounded, the first end of the resistor R8 is connected to the power supply VCC, and the second end of the resistor R8 is connected to the DO pin of the temperature measuring chip U3.

5. The sputtering power supply multi-parameter feedback circuit module according to claim 1, characterized in that: It also includes a display unit (24), which is signal-connected to the processing chip (23).

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