Crystal disc cleaning machine with long service life

Abstract

The utility model discloses a long-service-life crystal disc cleaning machine which comprises a rack and a partition plate dividing the rack into an upper cavity and a lower cavity. Transverse grooves are formed in the front and rear ends of the partition plate; two transverse rails are arranged in the upper cavity, a sliding frame is arranged on the two transverse rails, and a sliding frame driving device is arranged on the sliding frame; each transverse groove is movably and hermetically connected with a vertical column; a sliding groove is vertically formed in the side, close to the other stand column, of each stand column in the lower cavity, a first rack is arranged on each sliding groove, the bottom end of each first rack is connected with a hanging frame, and a clamp hook is arranged on the side, close to the center of the hanging frame, of the bottom end of each hanging frame. The top ends of the stand columns are sleeved with corrugated pipes, the top ends of the corrugated pipes are connected with the two transverse corrugated plates, and the bottom ends of the corrugated pipes are connected with a certain height in the lower cavity of the first rack closest to the corrugated pipes. A cleaning chamber and a drying chamber are arranged below the two transverse rails in the lower cavity; a drying table is arranged in the drying chamber; a lifting channel is longitudinally arranged between the drying table and the cleaning table, a partition door is arranged in the lifting channel, and the partition door is connected with a movable sealing device of the lifting channel.

Description

Technical Field

[0001] This utility model relates to the field of cleaning equipment technology, and in particular to a crystal disk cleaning machine. Background Technology

[0002] In semiconductor device manufacturing, silicon wafers must undergo rigorous cleaning because even minute amounts of contamination can lead to device failure. The purpose of cleaning is to remove surface contaminants, including both organic and inorganic substances. These impurities exist on the silicon wafer surface in various states, such as atomic or ionic, thin films, or particles. Pure water, acidic, or alkaline liquids can be used to clean the silicon wafers.

[0003] Tank cleaning machines can clean multiple silicon wafers simultaneously. They can also clean sapphire substrates for LEDs. The silicon wafer cleaning process typically consists of four stages: loading, cleaning, drying, and unloading. The area containing the loading station and the cleaning tank (also called the process tank) is called the wet zone, while the area containing the spin dryer and the unloading station is called the dry zone. During the cleaning process, materials need to be transferred between the wet and dry zones. However, when materials are not being transferred, the wet and dry zones need to be isolated; otherwise, moisture, acid fumes, and other contaminants from the wet zone will diffuse into the dry zone, causing secondary pollution. To isolate the wet and dry zones and facilitate material transfer, tank cleaning machines usually employ an openable isolation structure. Currently, the drive mechanism of the cleaning system is relatively complex, susceptible to corrosion from acid fumes and mists, and has a short lifespan. Therefore, a low-cost, simple, and easy-to-maintain isolation device is needed to isolate the dry and wet zones in the tank cleaning machine, while preventing moisture, acid fumes, or other contaminants from the wet zone from spreading to the drive mechanism. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by providing a long-life crystal disk cleaning machine that can prevent moisture, acid gas, or acid mist from the humid area from spreading to the power mechanism, thereby extending the service life of the power mechanism.

[0005] The technical solution adopted in this invention is as follows.

[0006] A long-life crystal disk cleaning machine is characterized by: including a frame and a partition that divides the frame into an upper cavity and a lower cavity; the partition has horizontal grooves at its front and rear ends; the upper cavity has two horizontal rails, and a sliding frame is provided on the two horizontal rails, and a sliding frame drive device is provided on the sliding frame.

[0007] Each transverse groove is equipped with a column, and the two columns are respectively connected to the bottom surfaces of the front and rear ends of the sliding frame. The left end of the column is connected to the left end of the transverse groove, and the right end is connected to the right end of the transverse groove through a transverse corrugated plate. Each column in the lower cavity has a vertical sliding groove near the other column. A first rack is provided on the sliding groove. The bottom end of each first rack is connected to a hanger. The bottom end of each hanger is provided with a clamp hook near the center of the hanger. Each first rack is connected to a first rack lifting device set on the sliding frame and passing through the nearest transverse groove. A corrugated pipe is fitted on the top of the column. The top end of the corrugated pipe is connected to two transverse corrugated plates, and the bottom end is connected to a certain height in the lower cavity of the nearest first rack.

[0008] Below the two horizontal rails in the lower cavity, there is a cleaning chamber and a drying chamber. The cleaning chamber has a cleaning table, and the drying chamber has a drying table. A vertical lifting channel is provided between the drying table and the cleaning table, and a partition door is provided in the lifting channel. A drive chamber is provided behind the drying table. A lifting mechanism is provided in the drive chamber, and the rear end of the partition door is connected to the lifting mechanism. The partition door is connected to the rear end of the lifting channel through a movable sealing device.

[0009] Its beneficial effects are as follows: When the partition door rises in the lifting mechanism, it separates the cleaning chamber and the drying chamber into two unconnected spaces. Using this lifting door to isolate the drying and wet areas, the door is open when materials need to be transferred between them, facilitating material transfer by the robotic arm; when no material transfer is needed, the door is closed to prevent moisture, acid fumes, or acid mist from the wet area from spreading into the drying area. A cantilever structure is used, with the lifting mechanism located in the drive chamber. The partition door is connected to the rear end of the lifting channel via a movable sealing device, preventing volatile substances from the cleaning liquid in the cleaning chamber from entering the drive chamber. Two horizontal rails are provided in the upper cavity, and the sliding frame and its drive device are mounted on these rails. The horizontal groove is sealed by two horizontal corrugated plates, and the space between the corrugated pipe and the top of the first rack is sealed by a vertical corrugated plate. Regardless of the movement of the sliding frame and the first rack, volatile substances from the cleaning liquid in the cleaning chamber can be prevented from entering the upper cavity and corroding the drive mechanism, extending the lifespan of each drive mechanism. This design features a simple structure, high safety and reliability, and ease of maintenance.

[0010] As a preferred technical solution, the movable sealing device includes two sealing plates and a corrugated plate. Each side of the partition door has a sealing plate that contacts the rear end of the lifting channel. A corrugated plate connects the top of the two sealing plates to the top of the drive chamber, and the corrugated plate contacts the rear end of the lifting channel. The front side of the lifting channel on the frame has a long, vertical groove with an opening facing rearward. The front end of the partition door is connected to several rollers that can slide within the long groove. The rollers roll within the long groove, resulting in low resistance, making it suitable for heavy loads. It features a simple structure and high reliability.

[0011] As a preferred technical solution, a second rack is provided laterally on the side of one horizontal rail near the other horizontal rail, and the sliding frame drive device includes a sliding frame drive motor arranged vertically, and a first gear is provided on the output shaft of the sliding frame drive motor, the first gear meshing with the second rack; the sliding frame drive motor is mounted on the sliding frame.

[0012] As a preferred technical solution, the first rack lifting device includes two second gears respectively disposed at the front and rear ends of the sliding frame, a longitudinally disposed linkage shaft, and a linkage shaft drive motor. Each second gear meshes with the first rack closest to it, and the two second gears are connected by the linkage shaft. The linkage shaft is connected to the linkage shaft drive motor disposed in the middle of the sliding frame.

[0013] As a preferred technical solution, a number of cleaning tanks are arranged horizontally on the cleaning table, and a drying tank is arranged on the drying table; a crystal disk clamp is provided in the cleaning tank or drying tank; the center of the top surface of each cleaning tank and drying tank is on the same horizontal straight line; a number of crystal disks are provided on each cleaning tank and drying tank.

[0014] As a preferred technical solution, the lifting mechanism includes a partition door guide rail vertically arranged in the drive chamber, a partition door sliding groove vertically provided at the rear end of the right side of the partition door, and the partition door guide rail being inserted into the partition door sliding groove; a partition door drive rack vertically provided at the rear end of the right side of the partition door; a partition door drive motor longitudinally provided on the frame, and a third gear provided on the output shaft of the partition door drive motor, which meshes with the partition door drive rack.

[0015] As a preferred technical solution, a sleeve is provided vertically on the left side of the drive interior partition door, a counterweight is inserted in the sleeve, the top of the counterweight is connected to a first vertical rod, the top of the first vertical rod is connected to a horizontal rod, and the horizontal rod is connected to the top of the partition door drive rack through a second vertical rod.

[0016] As a preferred technical solution, the crystal disk fixture includes a horizontal plate and two uprights arranged symmetrically on the left and right sides, with the two ends of the horizontal plate connected to the bottom end of one of the uprights respectively.

[0017] Each upright has a top support near the side of the other upright, and a bottom support is provided on the top surface of the middle part of the horizontal plate.

[0018] Each top support has a top support crystal disk support arc groove at both its front and rear ends, and each bottom support has a number of bottom support crystal disk support arc grooves at both its front and rear ends. The top support crystal disk support arc grooves at the front end of each top support and the bottom support crystal disk support arc grooves at the front end of each bottom support are tangent to the same arc line, and the plane of the arc line is parallel to the front side of the two uprights. The top support crystal disk support arc grooves at the rear end of each top support and the bottom support crystal disk support arc grooves at the rear end of each bottom support are tangent to the same arc line, and the plane of the arc line is parallel to the front side of the two uprights.

[0019] Each upright has a protrusion at the top of its side closest to the other upright for engaging with the crystal disk clamp.

[0020] As a preferred technical solution, the sliding frame is equipped with a sealing cover. Each first rack is located inside the sealing cover.

[0021] This technical solution can further seal the power mechanism on the sliding frame to prevent moisture, acid gas, or acid mist from the wet area from spreading to the power mechanism inside the sliding frame.

[0022] As a preferred technical solution, the frame is provided with several exhaust holes communicating with the cleaning chamber. The sliding frame is provided with two first rack through holes in a vertical direction, and each first rack passes through one first rack through hole. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural schematic diagram of a preferred embodiment of the long-life crystal disk cleaning machine of the present invention.

[0024] Figure 2 yes Figure 1 The image shows a front view of a crystal disk cleaning machine.

[0025] Figure 3 yes Figure 2 A magnified view of part A.

[0026] Figure 4 yes Figure 2 The image shows a cross-sectional view of the crystal disk cleaning machine along line B-B'.

[0027] Figure 5 yes Figure 2 The image shows a cross-sectional view of the crystal disk cleaning machine along C-C'.

[0028] Figure 6 yes Figure 5 A magnified view of part D.

[0029] Figure 7 yes Figure 5 A magnified view of part E.

[0030] Figure 8 This is a three-dimensional structural diagram of the lifting mechanism.

[0031] Figure 9 yes Figure 8 A magnified view of part F.

[0032] Figure 10 yes Figure 8 A magnified view of part G.

[0033] Figure 11 This is a state diagram of the lifting mechanism.

[0034] Figure 12 yes Figure 1 The diagram shows the hidden part of the frame of the crystal disk cleaning machine.

[0035] Figure 13 yes Figure 12 A magnified view of part H.

[0036] Figure 14 yes Figure 12 A magnified view of part I.

[0037] Figure 15 yes Figure 12 A magnified view of part J.

[0038] Figure 16 yes Figure 12 A magnified view of part K.

[0039] Figure 17 yes Figure 12 The image shows a right view of a crystal disk cleaning machine.

[0040] Figure 18 yes Figure 17 A magnified view of part L.

[0041] Figure 19 yes Figure 17 A magnified view of part M.

[0042] Figure 20 yes Figure 17 A magnified view of part N.

[0043] Figure 21 yes Figure 12 The image shows a top view of a crystal disk cleaning machine.

[0044] Figure 22 yes Figure 21 A magnified view of part O.

[0045] Figure 23 yes Figure 12 The image shows a front view of a crystal disk cleaning machine.

[0046] Figure 24 yes Figure 23 A magnified view of part P.

[0047] Figure 25 This is a schematic diagram of a crystal disk clamp.

[0048] Figure 26 yes Figure 12 The diagram shows a usage state of the crystal disk cleaning machine.

[0049] Figure 27 yes Figure 26 A magnified view of part Q.

[0050] Figure 28 This is a three-dimensional structural schematic diagram of another preferred embodiment of the crystal disk cleaning machine of the present invention.

[0051] Figure 29 This is a schematic diagram of a crystal disk clamp.

[0052] Figure 30 yes Figure 29 A magnified view of the R part.

[0053] Figure 31 yes Figure 29 A magnified view of part S.

[0054] Figure 32 This is a schematic diagram of a crystal disk clamp.

[0055] Figure 33 yes Figure 32 A magnified view of part T.

[0056] Figure 34 This is a schematic diagram of a crystal disk clamp.

[0057] The components include: frame-1; lifting channel-10; drive chamber-11; long groove-12; upper cavity-13; lower cavity-14; partition-15; transverse groove-16; transverse corrugated plate-17; and window-18.

[0058] Horizontal rail-2; Sealing cover-20; Sliding frame-21; Second rack-22; Sliding frame drive motor-23; First gear-24;

[0059] First rack-31; Hanger-32; Crystal disk clamp hook-33; Second gear-34; Linkage shaft-35; Linkage shaft drive motor-36; Column-37; Bellows-38;

[0060] Cleaning chamber - 4; Cleaning table - 41; Cleaning tank - 42; Exhaust vent - 43;

[0061] Drying chamber-5; Drying table-51; Drying tank-52; Crystal disk fixture inlet / outlet-53;

[0062] Crystal disk clamp-6; horizontal plate-61; vertical plate-611; vertical plate longitudinal insertion hole-612; horizontal plate insertion hole-613; second connecting screw-614;

[0063] Upright pole - 62; Upright pole longitudinal insertion hole - 621; First connecting screw - 622;

[0064] Top support - 63; Bottom support - 64; Top support crystal disk support arc groove - 65; Bottom support crystal disk support arc groove - 66; Protrusion - 67; Leakage hole - 68; Positioning block - 69.

[0065] Partition door - 7; Partition door sliding groove - 70; Sealing plate - 71; Roller - 72; Partition door guide rail - 73; Third gear - 74; Partition door drive rack - 75; Partition door drive motor - 76; Sleeve - 77; Counterweight - 78; First vertical rod - 79; Horizontal rod - 710; Second vertical rod - 711; Corrugated plate - 712;

[0066] Crystal disk-8. Detailed Implementation

[0067] The present invention will now be further described with reference to the accompanying drawings and embodiments.

[0068] Example 1. As... Figure 1-27 As shown, a long-life crystal disk cleaning machine includes a frame 1 and a partition 15 that divides the frame 1 into an upper cavity 13 and a lower cavity 14; the partition 15 has horizontal grooves 16 at its front and rear ends; the upper cavity 13 has two horizontal rails 2, and a sliding frame 21 is provided on the two horizontal rails 2, and a sliding frame drive device is provided on the sliding frame 21.

[0069] like Figure 17 As shown, each transverse groove 16 is provided with a column 37. Two columns 37 are respectively connected to the bottom surfaces of the front and rear ends of the sliding frame 21. The left end of the column 37 is connected to the left end of the transverse groove 16, and the right end is connected to the right end of the transverse groove 16 through a corrugated plate 17. The corrugated plate 17 between the left ends of the columns 37 on the transverse groove 16 is in an open state. The corrugated plate 17 between the right ends of the columns 37 on the transverse groove 16 is in a compressed state.

[0070] like Figure 17 Each column 37 in the lower cavity 14 has a vertical groove on the side near the other column 37. A first rack 31 is provided on the groove. The bottom end of each first rack 31 is connected to the bracket 32. The bottom end of each bracket 32 ​​is provided with a clamp hook 33 near the center of the bracket 32. Each first rack 31 is connected to a first rack lifting device provided on the sliding frame 21 and passing through the nearest horizontal groove 16. A corrugated pipe 38 is fitted on the top of the column 37. The top of the corrugated pipe 38 is connected to two horizontal corrugated plates 17, and the bottom end is connected to a certain height in the lower cavity of the nearest first rack 31.

[0071] Below the two horizontal rails 2 inside the lower cavity 14, there is a cleaning chamber 4 and a drying chamber 5. The cleaning chamber 4 is equipped with a cleaning table 41, and the drying chamber 5 is equipped with a drying table 51. A lifting channel 10 is longitudinally arranged between the drying table 51 and the cleaning table 41. A partition door 7 is installed in the lifting channel 10. A drive chamber 11 is located behind the drying table 51. A lifting mechanism is installed in the drive chamber 11. The rear end of the partition door 7 is connected to the lifting mechanism. The partition door is connected to the rear end of the lifting channel 10 through a movable sealing device.

[0072] The movable sealing device includes two sealing plates 71 and a corrugated plate 712. Each side of the partition door 7 is provided with a sealing plate 71 that contacts the rear end of the lifting channel 10. A corrugated plate 712 is connected between the top of the two sealing plates 71 and the top of the drive chamber 11, and the corrugated plate 712 contacts the rear end of the lifting channel 10.

[0073] like Figure 7 As shown, the front side of the lifting channel 10 on the frame 1 is provided with a long groove 12 with an opening facing backward and perpendicular to the ground. The front end of the partition door 7 is connected to three rollers 72 that can slide in the long groove 12.

[0074] The front end of the partition door 7 is connected to a roller 72 that can slide in the long groove 12. The roller 72 rolls in the long groove 12 with low resistance, is suitable for heavy loads, and has the characteristics of simple structure and safety and reliability.

[0075] like Figure 19 A second rack 22 is laterally arranged on the front side of the horizontal rail 2 located at the rear end of the upper cavity 13. The sliding frame drive device includes a vertically arranged sliding frame drive motor 23. A first gear 24 is provided on the output shaft of the sliding frame drive motor 23, and the first gear 24 meshes with the second rack 22. The sliding frame drive motor 23 is mounted on the sliding frame 21. Of course, the second rack 22 can also be arranged on the rear side of the horizontal rail 2 located at the front end of the upper cavity 13.

[0076] like Figure 17-19 As shown, the first rack lifting device includes two second gears 34 respectively disposed at the front and rear ends of the sliding frame 21, a longitudinally disposed linkage shaft 35, and a linkage shaft drive motor 36. Each second gear 34 meshes with the first rack 31 closest to it. The two second gears 34 are connected through the linkage shaft 35, and the linkage shaft 35 is connected to the linkage shaft drive motor 36 disposed in the middle of the sliding frame 21.

[0077] like Figure 5 As shown, ten cleaning tanks 42 are arranged horizontally on the cleaning table 41, and a drying tank 52 is arranged on the drying table 51; crystal disk clamps 6 are arranged in the cleaning tanks 42 and the drying tanks 52; the center of the top surface of each cleaning tank 42 and the drying tank 52 is on the same horizontal straight line. Two crystal disks 8 are arranged on each cleaning tank 42 and the drying tank 52.

[0078] like Figure 6-11 As shown, the lifting mechanism includes a partition door guide rail 73 vertically arranged in the drive chamber 11, a partition door sliding groove 70 vertically arranged at the rear end of the right side of the partition door 7, and the partition door guide rail 73 is inserted into the partition door sliding groove 70; a partition door drive rack 75 vertically arranged at the rear end of the right side of the partition door 7; a partition door drive motor 76 is longitudinally arranged on the frame 1, and a third gear 74 is arranged on the output shaft of the partition door drive motor 76, which meshes with the partition door drive rack 75.

[0079] like Figure 5 , 8 As shown in Figure -11, a sleeve 77 is vertically arranged on the left side of the partition door 7 inside the drive chamber 11. A counterweight 78 is inserted into the sleeve 77. The top of the counterweight 78 is connected to a vertically arranged first vertical rod 79. The top of the first vertical rod 79 is connected to a horizontal rod 710. The horizontal rod 710 is connected to the top of the partition door drive rack 75 through a second vertical rod 711. This technical solution can improve the stability of the partition door's lifting and lowering.

[0080] like Figure 5-7 The drying chamber 5 is equipped with a crystal disk clamp inlet / outlet 53. The drive chamber 11 is located behind the drying chamber 5, and the drying chamber 5 is located to the left of the cleaning chamber 4. Of course, the drying chamber 5 can also be located to the left of the cleaning chamber 4.

[0081] like Figure 16 and Figure 20 As shown, the crystal disk clamp 6 includes a horizontal plate 61 and two uprights 62 arranged symmetrically on the left and right. The two ends of the horizontal plate 61 are respectively connected to the bottom end of one of the uprights 62.

[0082] Each upright 62 has a top support 63 on the side closest to the other upright 62, and a bottom support 64 is provided on the top surface of the middle part of the horizontal plate 61.

[0083] Each top support 63 has a top support crystal disk support arc groove 65 at both its front and rear ends, and each bottom support 64 has a plurality of bottom support crystal disk support arc grooves 66 at both its front and rear ends. The top support crystal disk support arc grooves 65 at the front end of each top support 63 and the bottom support crystal disk support arc grooves 66 at the front end of each bottom support 64 are tangent to the same arc line, and the plane of the arc line is parallel to the front side of the two uprights 62. The top support crystal disk support arc grooves 65 at the rear end of each top support 63 and the bottom support crystal disk support arc grooves 66 at the rear end of each bottom support 64 are tangent to the same arc line, and the plane of the arc line is parallel to the front side of the two uprights 62.

[0084] Each upright 62 has a protrusion 67 on the top side of the side closest to the other upright 62 for engaging with the crystal disk clamp hook 33.

[0085] The frame is provided with several exhaust holes 43 that communicate with the cleaning chamber 4. The sliding frame 21 is provided with two first rack through holes in a vertical direction, and each first rack 31 passes through a first rack 31 through hole.

[0086] The frame is equipped with several windows 13 that connect to the cleaning chamber 4.

[0087] The upper cavity 13 is equipped with two horizontal rails 2, and a sliding frame 21 is mounted on the two horizontal rails 2. A sliding frame drive device is mounted on the sliding frame 21; both the sliding frame 21 and the sliding frame drive device are located within the upper cavity. When the partition door 7 rises in the lifting mechanism, the partition door 7 separates the washing chamber 4 and the drying chamber 5 into two unconnected spaces. This lifting door is used to isolate the drying area and the wet area. When materials need to be transferred between the drying and wet areas, the lifting door is in the open state to facilitate material transfer by the robotic arm; when materials do not need to be transferred, the lifting door is in the closed state to prevent moisture, acid gas, or acid mist from the wet area from spreading into the drying area. A cantilever structure is adopted, with the lifting mechanism housed within the drive chamber 11. Each side of the partition door is equipped with a sealing plate 71, which contacts the rear side of the lifting channel 10. A corrugated plate 712 connects the tops of the two sealing plates 71 to the top of the drive chamber 11, and the corrugated plate 712 contacts the rear end of the lifting channel 10. This prevents volatile substances from the cleaning fluid inside the cleaning chamber from entering the drive chamber 11 and corroding the drive mechanism. Specifically, it prevents corrosion of the sliding frame 21, the sliding frame drive device, and the cross rail 2. The cleaning fluid is an acid solution.

[0088] The upper cavity 13 is provided with two horizontal rails 2, and the sliding frame 21 and the sliding frame drive device are set on the horizontal rails 2. The horizontal groove 16 is sealed by two horizontal corrugated plates 17, and the space between the bellows 38 and the top of the first rack 31 is sealed by the vertical corrugated plate 712. No matter how the sliding frame and the first rack 31 move, it can prevent the volatile substances of the cleaning liquid in the cleaning chamber from entering the upper cavity 13 and corroding the drive mechanism inside, thus extending the life of each drive mechanism. It has the characteristics of simple structure, safety and reliability, and easy maintenance.

[0089] Example 2. (As shown) Figure 28 As shown, the difference between this embodiment and Embodiment 1 is that a sealing cover 20 is provided on the sliding frame 21; each first rack 31 is located inside the sealing cover 20. This technical solution further seals the power mechanism on the sliding frame 21, preventing moisture, acid gas, or acid mist from the humid area from spreading to the power mechanism inside the sliding frame 21.

[0090] Example 3. (As shown) Figures 29-31As shown, the difference between this embodiment and Embodiment 1 lies in the structure of the crystal disk clamp used. The crystal disk clamp includes a horizontal plate 61 and two uprights 62. The two ends of the horizontal plate 61 are respectively fixed to the bottom end of one upright 62. The top of the inner side of each upright 62 is provided with a protrusion 67, and the inner side of the upright 62 is the side of the upright 62 closest to the other upright 62. The inner side of each upright 62 is connected to a side top support 63, and the middle of the top surface of the horizontal plate 61 is connected to a bottom support 64. Each side top support 63 has a top support crystal disk support groove 65 at both the front and rear ends, and the bottom support 64... Each of the front and rear ends is provided with a bottom support crystal disk support arc groove 66; the top support crystal disk support arc groove 65 at the front end of each side top support 63 and the bottom support crystal disk support arc groove 66 at the front end of each bottom support 64 are tangent to the same arc line and the plane of the arc line is parallel to the front side of the upright 62; the top support crystal disk support arc groove 65 at the rear end of each side top support 63 and the bottom support crystal disk support arc groove 66 at the rear end of each bottom support 64 are tangent to the same arc line and the plane of the arc line is parallel to the front side of the upright 62.

[0091] The inner side of each upright 62 is movably connected to the top support 63 via the first height adjustment device; each bottom support 64 is movably connected to the middle of the horizontal plate 61 via the first height adjustment device; the distance between the top ends of the two uprights 62 is greater than the length of the horizontal plate 61.

[0092] Specifically, the inner side of the upright 62 located at the left end of the horizontal plate 61 is perpendicular to the top surface of the horizontal plate 61, and the inner side of the upright 62 located at the right end of the horizontal plate 61 forms an obtuse angle with the top surface of the horizontal plate 61. The obtuse angle is 110 degrees.

[0093] The bottom support 64 has four vertically arranged leakage holes 68, each of which is connected to a bottom support crystal disk support arc groove 66.

[0094] The first height adjustment device includes seven vertical insertion holes 621 at different heights on the upright 62, two side fixing seat insertion holes on the side top support 63, and several first connecting screws 622. Each first connecting screw 622 is connected to a vertical insertion hole 621 and a fixing seat insertion hole.

[0095] The second height adjustment device includes two vertical plates 611, eight vertical plate longitudinal insertion holes 612 located on the vertical plates 611 at different heights, ten horizontal plate insertion holes 613 located on the horizontal plate 61, and two second connecting screws 614. Each first connecting screw is connected to a vertical plate longitudinal insertion hole 612 and a horizontal plate insertion hole 613.

[0096] The tops of the two vertical plates 611 are connected to the bottom support 64 and are located on the front and rear sides of the horizontal plate 61, respectively.

[0097] Each upright plate 611 has a positioning block 69 on its side away from the other upright plate 611. Thus, the position of the top support 63 can be adjusted by adjusting the first height adjustment device, and the position of the bottom support 64 can be adjusted by adjusting the second height adjustment device, thereby accommodating crystal disks of different sizes. The diameter of the crystal disk is not less than 600mm, and the curvature is not less than 6mm.

[0098] Example 4. (As shown) Figures 32-33 As shown, the difference between this embodiment and embodiment 3 is that, specifically, the angle between the inner side of the upright 62 located at the left end of the horizontal plate 61 and the top surface of the horizontal plate 61 is an obtuse angle, and the angle between the inner side of the upright 62 located at the right end of the horizontal plate 61 and the top surface of the horizontal plate 61 is also an obtuse angle. The obtuse angle is 110 degrees.

[0099] Example 5. (As shown) Figure 34 As shown, the difference between this embodiment and embodiment 3 is that the inner side of the upright 62 located at the right end of the horizontal plate 61 is perpendicular to the top surface of the horizontal plate 61, and the angle between the inner side of the upright 62 located at the left end of the horizontal plate 61 and the top surface of the horizontal plate 61 is an obtuse angle. The obtuse angle is 110 degrees.

Claims

1. A long-life crystal disk cleaning machine, characterized in that: The system includes a frame and a partition that divides the frame into an upper cavity and a lower cavity. The partition has transverse grooves at its front and rear ends. The upper cavity contains two transverse rails, each with a sliding frame and a sliding frame drive device. Each transverse groove has a column, which is connected to the bottom surfaces of the front and rear ends of the sliding frame, respectively. The left end of each column is connected to the left end of the transverse groove, and the right end is connected to the right end of the transverse groove via a transverse corrugated plate. In the lower cavity, each column has a vertically oriented sliding groove near the other column. A first rack is mounted on the sliding groove, and the bottom end of each first rack is connected to a hanger. Each hanger has a clamp hook near its center at its bottom end. Each first rack is connected to a first rack lifting device mounted on the sliding frame and passing through the nearest transverse groove. A corrugated pipe is fitted onto the top of each column, with its top end connected to two transverse corrugated plates and its bottom end connected to a certain height within the lower cavity of the nearest first rack. Below the two horizontal rails in the lower cavity, there is a cleaning chamber and a drying chamber. The cleaning chamber has a cleaning table, and the drying chamber has a drying table. A vertical lifting channel is provided between the drying table and the cleaning table, and a partition door is provided in the lifting channel. A drive chamber is provided behind the drying table. A lifting mechanism is provided in the drive chamber, and the rear end of the partition door is connected to the lifting mechanism. The partition door is connected to the rear end of the lifting channel through a movable sealing device.

2. The long-life crystal disk cleaning machine as described in claim 1, characterized in that: The movable sealing device includes two sealing plates and a corrugated plate; each side of the partition door is provided with a sealing plate that contacts the rear end of the lifting channel, and the top of the two sealing plates is connected to the top of the drive chamber with a corrugated plate, which contacts the rear end of the lifting channel; the front side of the lifting channel on the frame is provided with a long groove with an opening facing backward and perpendicular to the ground, and the front end of the partition door is connected to several rollers that can slide in the long groove.

3. The long-life crystal disk cleaning machine as described in claim 1, characterized in that: One of the horizontal rails has a second rack arranged laterally on the side near the other horizontal rail. The sliding frame drive device includes a sliding frame drive motor arranged vertically. The output shaft of the sliding frame drive motor is provided with a first gear, which meshes with the second rack. The sliding frame drive motor is mounted on the sliding frame.

4. The long-life crystal disk cleaning machine as described in claim 1, characterized in that: The first rack lifting device includes two second gears respectively disposed at the front and rear ends of the sliding frame, a longitudinally disposed linkage shaft, and a linkage shaft drive motor. Each second gear meshes with the first rack closest to it. The two second gears are connected by a linkage shaft, and the linkage shaft is connected to a linkage shaft drive motor disposed in the middle of the sliding frame.

5. The long-life crystal disk cleaning machine as described in claim 1, characterized in that: The cleaning table has several cleaning tanks arranged horizontally, and the drying table has a drying tank; crystal disk clamps are installed in the cleaning tanks or drying tanks; the center of the top surface of each cleaning tank and drying tank is on the same horizontal straight line; each cleaning tank and drying tank has several crystal disks.

6. The long-life crystal disk cleaning machine as described in claim 5, characterized in that: The lifting mechanism includes a partition door guide rail vertically arranged in the drive chamber, a partition door sliding groove vertically provided at the rear end of the right side of the partition door, and the partition door guide rail being inserted into the partition door sliding groove; a partition door drive rack vertically provided at the rear end of the right side of the partition door; a partition door drive motor longitudinally provided on the frame, and a third gear provided on the output shaft of the partition door drive motor, which meshes with the partition door drive rack.

7. The long-life crystal disk cleaning machine as described in claim 6, characterized in that: A sleeve is vertically installed on the left side of the drive interior partition door, and a counterweight is inserted inside the sleeve. The top of the counterweight is connected to a first vertical rod, the top of the first vertical rod is connected to a horizontal rod, and the horizontal rod is connected to the top of the partition door drive rack through a second vertical rod.

8. The long-life crystal disk cleaning machine as described in claim 1, characterized in that: The crystal disk fixture includes a horizontal plate and two uprights arranged symmetrically on the left and right sides. The two ends of the horizontal plate are respectively connected to the bottom end of one of the uprights. Each upright has a top support on the side closest to the other upright, and a bottom support is provided on the top surface of the middle part of the horizontal plate; Each top support has a top support crystal disk support arc groove at both its front and rear ends, and each bottom support has a number of bottom support crystal disk support arc grooves at both its front and rear ends; the top support crystal disk support arc grooves at the front end of each top support and the bottom support crystal disk support arc grooves at the front end of each bottom support are tangent to the same arc line, and the plane of the arc line is parallel to the front side of the two uprights; the top support crystal disk support arc grooves at the rear end of each top support and the bottom support crystal disk support arc grooves at the rear end of each bottom support are tangent to the same arc line, and the plane of the arc line is parallel to the front side of the two uprights. Each upright has a protrusion at the top of its side closest to the other upright for engaging with the crystal disk clamp.

9. The long-life crystal disk cleaning machine as described in claim 1, characterized in that: The sliding frame is equipped with a sealing cover; each first rack is located inside the sealing cover.

10. The long-life crystal disk cleaning machine as described in claim 1, characterized in that: The frame is provided with several exhaust holes that communicate with the cleaning chamber; the sliding frame is provided with two first rack through holes in a vertical direction, and each first rack passes through a first rack through hole.

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