An automatic loading and unloading mechanism applied to wafers and baskets

Abstract

The utility model discloses a kind of automatic feeding and discharging mechanisms applied to wafer and flower basket, comprising: flower basket moves and carries platform, including sequentially arranged flower basket in-out module, flower basket carrying module and flower basket moves and carries module;Flower basket in-out module includes adjacently arranged flower basket feeding carrier and flower basket discharging carrier, flower basket carrying module is arranged above flower basket moves and carries module, and transfer between flower basket moves and carries module and flower basket in-out module is grabbed flower basket, flower basket moves and carries module about linear direction moves and carries flower basket between flower basket moves and carries platform and wafer detection platform;Wafer detection platform includes manipulator module and sorting storage rack, clamping module is equipped on manipulator module, and manipulator at least rotates in vertical direction, to transfer flower basket on flower basket moves and carries module or sorting storage rack;Sorting storage rack is provided with wafer carrying module away from manipulator module, and at least one wafer detection module is equipped on the operating track of wafer carrying module.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection equipment technology, specifically to an automatic loading and unloading mechanism for wafers and baskets. Background Technology

[0002] Currently, in wafer manufacturing processes, to ensure that wafers function properly in subsequent operations, inspection equipment is typically used to inspect the wafer's morphology to avoid defective products, especially to check whether the wafer's weight is compliant and whether the wafer has cracks or chipped edges. For this purpose, multiple inspection stations need to be set up. At the same time, to improve the efficiency of wafer loading and unloading, wafer baskets are usually set up to hold multiple wafers in the wafer baskets and to clamp and transfer them.

[0003] However, existing wafer loading and unloading devices can only perform manual inspection of wafers in a single basket. Although the wafer basket facilitates the transfer for inspection and provides some protection for the wafer body, the inspection still requires manual assistance. Workers need to remove the wafer to be inspected from the basket, complete the inspection, and then put it back into the basket, resulting in low inspection efficiency. Furthermore, manual operation further increases the risk of wafer breakage. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an automatic loading and unloading mechanism for wafers and baskets.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution: an automatic loading and unloading mechanism for wafers and baskets, comprising:

[0006] The flower basket transfer platform includes a flower basket inlet / outlet module, a flower basket handling module, and a flower basket transfer module arranged in sequence. The flower basket inlet / outlet module includes an adjacent flower basket feeding carrier and a flower basket discharging carrier. The flower basket handling module is arranged above the flower basket transfer module and picks up the flower basket and transfers it between the flower basket transfer module and the flower basket inlet / outlet module. The flower basket transfer module transfers the flower basket in a linear direction between the flower basket transfer platform and the wafer inspection platform.

[0007] A wafer inspection platform includes a robotic arm module arranged on one end of a flower basket transfer module and a sorting and storage rack arranged on one side of the robotic arm module. The robotic arm module is provided with a clamping module for constraining and fixing the flower basket, and the robotic arm rotates at least in the vertical direction to transfer the flower basket on the flower basket transfer module or the sorting and storage rack.

[0008] The sorting and storage rack is equipped with a wafer handling module located away from the robotic arm module. At least one wafer inspection module is located on the running trajectory of the wafer handling module. The wafer handling module carries the wafers and transfers them between the wafer inspection module and the sorting and storage rack.

[0009] Furthermore, the flower basket loading and unloading module includes adjacent loading and unloading tracks, and the flower basket feeding carrier and the flower basket unloading carrier have manual loading and unloading positions and automatic loading and unloading positions near the flower basket transfer module through the loading and unloading tracks;

[0010] The flower basket feeding carrier and the flower basket discharging carrier are provided with multiple layers, and the layers are provided with limiting protrusions that constrain the position of the flower basket. The limiting protrusions are set with respect to the outline of the flower basket.

[0011] Furthermore, the flower basket handling module includes a three-axis moving assembly and a flower basket gripping assembly disposed at the moving end of the three-axis moving assembly. The flower basket transfer module includes a flower basket feeding track and a flower basket discharging track. The flower basket feeding track is configured to carry the flower basket toward the robotic arm module, and the flower basket discharging track is configured to move toward the flower basket discharging carrier.

[0012] Furthermore, the wafer inspection platform is also equipped with a queue-jumping platform, and an adjacent empty basket track and a queue-jumping basket unloading track are also provided on one side of the queue-jumping platform. The queue-jumping platform, the empty basket track and the queue-jumping basket unloading track are all arranged in the rotation area of ​​the robot arm module.

[0013] Furthermore, the queue-jumping platform is arranged between the end of the sorting and storage rack and the flower basket transfer module, and the empty flower basket track and the queue-jumping flower basket unloading track are perpendicular to the flower basket transfer module and are arranged between the queue-jumping platform and the flower basket transfer module.

[0014] Furthermore, the sorting and storage rack and the wafer handling module are arranged in parallel and perpendicular to the linear direction of the basket entry / exit module and the basket transfer module.

[0015] Furthermore, the sorting and storage rack is equipped with qualified product sorting positions, unqualified product sorting positions, automatic partial wafer sorting positions, and queue-jumping partial sorting positions. The queue-jumping partial sorting positions include queue-jumping test sorting positions and queue-jumping qualified sorting positions distributed vertically.

[0016] Furthermore, the flower basket includes multiple spaced-apart cavities, on which the wafer rests. The wafer handling module includes suction plates that move linearly toward the cavities, extending into the cavities and adsorbing onto the wafer surface.

[0017] Furthermore, the clamping module includes a fixed frame disposed on the moving end of the robotic arm module, and a rotating frame hinged below the fixed frame. The bottom of the rotating frame is provided with a clamping cylinder, and a clamping arm is disposed on the moving end of the clamping cylinder. The clamping arm is provided with clamping blocks disposed opposite to each other. The clamping blocks are arranged at an angle to the opposite surface of the flower basket, and a telescopic cylinder is hinged between the fixed frame and the rotating frame.

[0018] Furthermore, the flower basket includes two frames connected at least at the top or bottom, with a wafer accommodating space spaced between the two frames. The cavity is formed on each frame, one end of the frame is an open end, and the other side of the frame is provided with a stop at the rear of the cavity and a limiting end that prevents the wafer from leaving the other end of the frame.

[0019] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0020] This utility model achieves fully automated transfer of baskets from manual loading and unloading stations to the testing platform through the linkage of basket loading and unloading modules, basket transfer modules, and basket handling modules. This reduces manual intervention, lowers the risk of wafer breakage due to contact, and improves throughput efficiency. During the transfer process, the basket loading carrier outputs baskets full of wafers to be tested, and the robotic arm module grabs the baskets to the sorting and storage rack. The sorting and storage rack is set with qualified products, unqualified products, products to be tested, and queue-jumping sorting positions. Combined with the rotational freedom of the robotic arm module, it supports the rapid classification and storage of wafers according to the test results and allows queue-jumping wafers to be processed first, enhancing the system's flexibility in responding to emergency tasks.

[0021] After the automated wafer inspection is completed, the robotic arm module, basket handling module, and basket transfer module transfer the qualified wafers and baskets to the basket unloading carrier, completing the wafer feeding inspection and unloading process. The adjacent layout of the feeding / unloading tracks, combined with the working radius of the robotic arm module rotating around the vertical axis, achieves high-density connection between the wafer inspection platform and the wafer transfer platform, reducing the equipment footprint and adapting to the space constraints of cleanrooms.

[0022] With independently set queue-jumping platform, empty flower basket track and unloading track, flower baskets to be inspected can be dynamically inserted during the inspection process. The automatic replenishment of empty flower baskets and the recycling of queue-jumping flower baskets operate in parallel, ensuring that the main process is uninterrupted while improving the speed of abnormal response. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall layout of this utility model;

[0024] Figure 2 This is a schematic diagram of the layout of the flower basket transfer platform of this utility model;

[0025] Figure 3This is a structural schematic diagram of the flower basket handling module, flower basket entry and exit module, and flower basket transfer module of this utility model;

[0026] Figure 4 This is a schematic diagram of the structure of the flower basket transfer module of this utility model;

[0027] Figure 5 This is a schematic diagram of the structure of the limiting cylinder assembly of this utility model;

[0028] Figure 6 This is a schematic diagram of the structure of the flower basket inlet / outlet module of this utility model;

[0029] Figure 7 This is a schematic diagram of the layout of the wafer inspection platform of this utility model;

[0030] Figure 8 This is a schematic diagram of the sorting and storage rack of this utility model;

[0031] Figure 9 This is a schematic diagram of the arrangement of the sorting and storage rack of this utility model;

[0032] Figure 10 This is a schematic diagram of the wafer handling module of this utility model;

[0033] Figure 11 This is a schematic diagram of the suction plate of this utility model;

[0034] Figure 12 This is a schematic diagram of the structure of the robotic arm module of this utility model;

[0035] Figure 13 This is a schematic diagram of the clamping module of this utility model;

[0036] Figure 14 This is a schematic diagram showing the cooperation between the flower basket and the clamping module of this utility model;

[0037] Figure 15 This is a cross-sectional view of the flower basket and clamping module of this utility model;

[0038] Figure 16 This is a schematic diagram of the structure of the flower basket of this utility model;

[0039] Figure 17 This is a schematic diagram of the first air passage groove of the suction plate of this utility model;

[0040] In the picture:

[0041] 1. Flower basket transfer platform;

[0042] 2. Flower basket in / out module; 2.1 Flower basket feeding carrier; 2.2 Flower basket discharging carrier; 2.3 In / out track; 2.4 Shelves; 2.5 Third buffer cylinder;

[0043] 3. Flower basket handling module; 3.1. Three-axis moving assembly; 3.2. Flower basket gripping assembly; 3.21. Clamping plate; 3.22. Clamping cylinder;

[0044] 4. Flower basket transfer module; 4.1 Flower basket feeding track; 4.2 Flower basket discharging track; 4.3 Flower basket limiting platform;

[0045] 5. Wafer Inspection Platform; 5.1 Sorting and Storage Rack; 5.11 Qualified Sorting Station; 5.12 Unqualified Sorting Station; 5.13 Automatic Wafer Sorting Station for Testing; 5.14 Queue-jumping Sorting Station; 5.141 Queue-jumping Wafer Sorting Station for Testing; 5.142 Queue-jumping Qualified Wafer Sorting Station; 5.2 Storage and Transfer Module;

[0046] 6. Robotic arm module; 6.1. Clamping module; 6.11. Fixed frame; 6.12. Rotating frame; 6.13. Clamping cylinder; 6.14. Clamping arm; 6.15. Clamping block; 6.16. Telescopic cylinder; 6.2. Actuating shaft;

[0047] 7. Wafer handling module; 7.1 Linear handling assembly; 7.2 Handling rack; 7.3 Wafer pick-and-place assembly; 7.4 Suction plate; 7.41 First air duct slot; 7.42 Second air duct slot; 7.43 Air duct hole; 7.44 Plate; 7.5 Negative pressure block; 7.51 Negative pressure connector; 7.6 Connecting plate; 7.61 Embedded slot; 7.62 Limiting plate;

[0048] 8. Wafer inspection module;

[0049] 9. Flower basket; 9.1. Chamber; 9.2. Frame; 9.3. Wafer housing space; 9.4. Open end; 9.5. Limiting end;

[0050] 10. Limiting protrusion;

[0051] 11. Queue-jumping platform; 11.1. Empty flower basket track; 11.2. Queue-jumping flower basket unloading track; 11.3. Queue-jumping pushing module;

[0052] 12. Lifting platform; 12.1. Lifting plate; 12.2. Mounting plate; 12.2.1. Positioning pin; 12.3. Guide column; 12.4. Support base plate; 12.5. Lifting cylinder; 12.6. First contact block; 12.7. Second contact block; 12.8. First buffer cylinder; 12.9. Second buffer cylinder;

[0053] 13. Limit cylinder assembly; 13.1. First limit cylinder; 13.2. Second limit cylinder; 13.3. Third limit block; 13.4. Fourth limit cylinder; 13.5. Fifth limit cylinder;

[0054] 14. Wafer; Detailed Implementation

[0055] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0056] It should be understood that although the terms upper, middle, lower, top, one end, etc., appear in this document to describe various elements, these elements are not limited by these terms. These terms are only used to distinguish the elements from each other for ease of understanding, and are not used to define any directional or sequential restrictions.

[0057] like Figure 1-16 As shown, an automatic loading and unloading mechanism for wafer 14 includes:

[0058] The flower basket transfer platform 1 includes a flower basket in / out module 2, a flower basket handling module 3, and a flower basket transfer module 4 arranged sequentially. The flower basket in / out module 2 includes a flower basket feeding carrier 2.1 and a flower basket discharging carrier 2.2 arranged adjacent to each other, with the flower basket feeding carrier 2.1 and the flower basket discharging carrier 2.2 arranged parallel to each other in a linear direction. The flower basket handling module 3 is arranged above the flower basket transfer module 4 and picks up the flower basket 9 for transfer between the flower basket transfer module 4 and the flower basket in / out module 2. The flower basket handling module 3 is arranged perpendicular to the flower basket in / out module 2 and spans across both sides of the flower basket in / out module 2. The flower basket transfer module 4 transfers the flower basket 9 in a linear direction between the flower basket transfer platform 1 and the wafer inspection platform 5.

[0059] The wafer inspection platform 5 is attached to one side of the basket transfer platform (1), including a robotic arm module 6 arranged on one end side of the basket transfer module 4, and a sorting and storage rack 5.1 arranged on one side of the robotic arm module 6. The robotic arm module 6 is provided with a clamping module 6.1 for constraining and fixing the basket 9, and the robotic arm module 6 rotates at least in the vertical direction to transfer the basket 9 on the basket transfer module 4 or the sorting and storage rack 5.1.

[0060] The sorting and storage rack 5.1 is located away from the robotic arm module 6 and is equipped with a wafer handling module 7. At least one wafer 14 detection module 8 is located on the running trajectory of the wafer handling module 7. The wafer handling module 7 carries the wafer 14 and transfers it between the wafer 14 detection module 8 and the sorting and storage rack 5.1.

[0061] like Figure 3As shown, as a further embodiment of the flower basket transport module 3, the flower basket transport module 3 includes a three-axis moving assembly 3.1 and a flower basket 9 gripping assembly 3.2 disposed at the moving end of the three-axis moving assembly 3.1. The flower basket 9 gripping assembly 3.2 is composed of a clamping cylinder 3.22 and a clamping plate 3.21 disposed at the moving end of the clamping cylinder 3.22. The clamping plate 3.21 preferably acts on the open end 9.4 and the limiting end 9.5 of the flower basket 9, and the working surfaces of the open end 9.4, the limiting end 9.5, and the clamping plate 3.21 are planar. The linear direction of the flower basket transfer module 4 is perpendicular to the open end 9.4. The clamping plate 3.21 is preferably a flexible part to avoid movement caused by rigid contact with the flower basket 9.

[0062] The three-axis motion component 3.1 is a conventional multi-axis linear drive module in this field, and will not be described in detail here.

[0063] As a further embodiment of the flower basket transfer module 4, the flower basket transfer module 4 includes a flower basket feeding track 4.1 and a flower basket 9 discharging track 4.2. The flower basket feeding track 4.1 is configured to carry the flower basket 9 toward the robot arm module 6, and the flower basket 9 discharging track 4.2 is configured to move toward the flower basket discharging carrier 2.2. The flower basket 9 gripping component 3.2 is used to grip the full flower basket 9 on the flower basket feeding carrier 2.1 and transport it to the flower basket feeding track 4.1, or to transport the inspected flower basket 9 on the flower basket 9 discharging track 4.2 to the flower basket discharging carrier 2.2. Of course, when the flower basket transport module 3 is working, the flower basket feeding carrier 2.1 or the flower basket discharging carrier 2.2 is located at the automatic loading and unloading position of the flower basket 9.

[0064] like Figure 4 As shown, specifically, a basket 9 limiting platform 4.3 is provided on the moving end of the basket 9 feeding track 4.1 and the basket 9 discharging track 4.2. The basket 9 limiting platform 4.3 is provided with a limiting protrusion 10 that matches the contour of the basket 9. The basket 9 feeding track 4.1 and the basket 9 discharging track 4.2 can be selected as electric or pneumatic linear modules.

[0065] In this embodiment, the flower basket loading and unloading module 2 includes two adjacent loading and unloading tracks 2.3 arranged in parallel. The flower basket feeding carrier 2.1 and the flower basket unloading carrier 2.2 are respectively installed on the two loading and unloading tracks 2.3. The flower basket feeding carrier 2.1 and the flower basket unloading carrier 2.2 have manual loading and unloading positions and automatic loading and unloading positions for the flower basket 9 near the flower basket transfer module 4 through the loading and unloading tracks 2.3. The loading and unloading tracks 2.3 can be selected as electric or pneumatic linear modules.

[0066] At the manual loading and unloading position, the full basket 9 is placed on the basket feeding carrier 2.1 manually, or the basket 9 is taken out of the basket 9 unloading carrier. At the automatic loading and unloading position, the robot module 6 picks up the basket 9 at the end of the basket feeding track 4.1 and outputs the basket 9 to the sorting and storage rack 5.1 to prepare for wafer 14 inspection, or the robot module 6 picks up the inspected basket 9 on the sorting and storage rack 5.1 and sends it to the end of the basket 9 unloading track 4.2 to prepare for the recycling of the inspected basket 9.

[0067] from Figure 2 As can be seen, a third buffer cylinder 2.5 is provided at both ends of the inlet and outlet track 2.3. The third buffer cylinder 2.5 is set towards the bottom shelf 2.4, so as to provide a stop when the flower basket feeding carrier 2.1 and the flower basket discharging carrier 2.2 reach the end.

[0068] The wafer 14 inspection module 8 is a conventional device in the prior art, such as visual inspection. This utility model mainly modifies the transfer module on the basket transfer platform (1) and the wafer inspection platform 5. Further details about the wafer 14 inspection module 8 will not be provided here.

[0069] Combination Figure 2 and Figure 6 As shown, as a further embodiment of the flower basket feeding carrier 2.1 and the flower basket discharging carrier 2.2, the flower basket feeding carrier 2.1 and the flower basket discharging carrier 2.2 are provided with a plurality of shelves 2.4, and support columns are provided between the upper and lower shelves 2.4. The shelves 2.4 are provided with limiting protrusions 10 to constrain the position of the flower basket 9. The limiting protrusions 10 are provided with respect to the outline of the flower basket 9, thereby constraining the position of the flower basket 9 on the carrier.

[0070] Further reference Figure 6Specifically, the bottom of the flower basket feeding carrier 2.1 and the flower basket discharging carrier 2.2 is also equipped with a lifting platform 12. The lifting platform 12 includes a lifting plate 12.1 fixedly installed at the bottom of the bottom end plate 2.4, and a mounting plate 12.2 installed below the lifting plate 12.1. Guide columns 12.3 are provided around the lifting plate 12.1 and the mounting plate 12.2. A support base plate 12.4 is provided at the bottom of the guide columns 12.3. A lifting cylinder 12.5 is provided in the middle of the lifting plate 12.1 and the mounting plate 12.2. A first contact block 12.6 is provided at the bottom of the lifting plate 12.1. A second contact block 12.7 is provided on the support base plate 12.4. A vertical first buffer cylinder 12.8 is provided on the mounting plate 12.2. The first buffer cylinder 12.8 is positioned opposite to the first contact block 12.6, and the second buffer cylinder 12.9 is positioned opposite to the second contact block 12.7. Through the above improvements, the lifting cylinder 12.5 provides a vertical motion component for the basket feeding carrier 2.1 and the basket discharging carrier 2.2, so that the basket 9 can disengage from the limiting contour defined by the limiting protrusion 10. The first buffer cylinder 12.8 and the second buffer cylinder 12.9 provide effective buffering in the vertical up-down direction, and the relative action of the two buffer cylinders further constrains the vertical movement of the basket feeding carrier 2.1 and the basket discharging carrier 2.2 after vertical movement, thereby protecting the wafer 14 left on the carrier.

[0071] The mounting plate 12.2 is equipped with a positioning pin 12.21, and the bottom layer plate 2.4 is equipped with a positioning hole. This method facilitates the overall replacement of the basket feeding carrier 2.1 and the basket discharging carrier 2.2, and improves the efficiency of product changeover.

[0072] Further reference Figure 2 Specifically, the wafer inspection platform 5 is also equipped with a queue-jumping platform 11. On one side of the queue-jumping platform 11, there are also adjacent empty basket tracks and queue-jumping basket unloading tracks 11.2. The queue-jumping platform 11, the empty basket tracks and the queue-jumping basket unloading tracks 11.2 are all arranged in the rotation area of ​​the robot arm module 6.

[0073] Specifically, the queue-jumping platform 11 is located between the sorting and storage rack 5.1 and the end of the basket transfer module 4, serving as a key connection point. This allows the emergency wafer 14 basket 9 to be directly inserted into the inspection process without interrupting the current inspection task, thus improving the system's flexibility in handling priority tasks. It should be noted that the full basket 9 on the queue-jumping platform 11 is placed manually. Of course, in other embodiments, an independent feeding mechanism can also be set to feed the full basket 9 for queue-jumping, such as the aforementioned basket 9 feeding module. In addition, to facilitate the distinction between the queue-jumping basket 9 and the basket 9 of the automatic inspection section on the sorting and storage rack 5.1, it is preferable to set the number of full wafers 14 in the queue-jumping basket 9 to be different from the number of full wafers 14 in the automatic section basket 9. For example, the number of full wafers 14 in the automatic section basket 9 is 12, and the number of full wafers 14 in the queue-jumping basket 9 is 6.

[0074] The bottom of the sorting and storage rack 5.1 is also equipped with a storage and transfer module 5.2. The storage and transfer module 5.2 can be selected as a linear movement module and moves linearly between the robot arm module 6 and the wafer handling module 7, so as to smoothly dock the sorting and storage rack 5.1 to the position that cooperates with the robot arm module 6 and the wafer handling module 7, or move the sorting and storage rack 5.1 to the boundary position of the wafer inspection platform 5 to facilitate manual sorting operations.

[0075] As a further improvement to the queue-jumping platform 11, a queue-jumping push module 11.3 is provided at the bottom of the queue-jumping platform 11, facing the robot arm module 6. The actuation direction of the queue-jumping push module 11.3 is parallel to the sorting and storage rack 5.1 and perpendicular to the flower basket feeding track 4.1 and the flower basket 9 discharging track 4.2. Its purpose is to provide the queue-jumping platform 11 with a rotation area to enter and move away from the robot arm module 6, thereby providing a safe operating space for manual loading of the queue-jumping flower basket 9, and after the loading of the queue-jumping flower basket 9 is completed, it enters the rotation area to perform priority processing of the queue-jumping flower basket 9.

[0076] The robotic arm module 6 can identify the queue-jumping platform 11 and the queue-jumping flower baskets 9 on it through sensors. Multiple flower basket 9 limit areas are preset on the queue-jumping platform 11. The sensors provide signals that the queue-jumping platform 11 enters the rotation area. The robotic arm module 6 receives the signals and grabs the queue-jumping flower baskets 9 on the queue-jumping platform 11.

[0077] Furthermore, the empty flower basket track and the queue-jumping flower basket unloading track 11.2 are perpendicular to the flower basket transfer module 4 and are arranged between the queue-jumping platform 11 and the flower basket transfer module 4. Specifically, the sorting and storage rack 5.1 and the wafer handling module 7 are arranged in parallel and perpendicular to the linear direction of the flower basket in / out module 2 and the flower basket transfer module 4. The empty flower basket track and the queue-jumping flower basket unloading track 11.2 are perpendicular to the main transfer direction to avoid conflict with the main process movement path. At the same time, through the rotation coverage of the robotic arm module 6, the queue-jumping flower basket 9 can be quickly replenished and the queue-jumping flower basket 9 after inspection can be recovered, reducing equipment waiting time.

[0078] like Figure 8 and Figure 9 As shown, the sorting and storage rack 5.1 is parallel to and perpendicular to the main transfer direction of the wafer handling module 7, forming an "L"-shaped layout. This shortens the moving distance of the wafer 14 from the detection module to the sorting position, reduces the stroke redundancy of the wafer handling module 7, and the vertical layout allows the sorting and storage rack 5.1 to expand the number of sorting positions along the direction of the wafer handling module 7.

[0079] Specifically, the sorting and storage rack 5.1 is equipped with qualified sorting positions 5.11, unqualified sorting positions 5.12, automatic part-test wafer 14 sorting positions 5.13, and queue-jumping part sorting positions 5.14. The sorting and storage rack 5.1 serves as a transfer and accommodation space for queue-jumping wafers 14 and automatic part wafers 14, realizing the accurate classification of wafers 14 according to test results and task priority, avoiding the risk of mixing. The queue-jumping part sorting positions 5.14 include queue-jumping test sorting positions 5.141 and queue-jumping qualified sorting positions 5.142 distributed vertically. The vertically distributed queue-jumping test positions and qualified positions form a closed-loop process of "testing-re-inspection-recycling". Emergency wafers 14 can be re-inspected and temporarily stored in the same sorting rack, reducing efficiency losses caused by cross-area handling.

[0080] like Figures 14 to 16 As shown, as a further embodiment of the flower basket 9, the flower basket 9 includes a plurality of spaced-apart cavities 9.1 arranged vertically at intervals. The wafer 14 is placed on the cavity 9.1. The wafer handling module 7 includes a suction plate 7.4 that moves linearly toward the cavity 9.1. The suction plate 7.4 extends into the cavity 9.1 and adsorbs onto the surface of the wafer 14, thereby completing the picking and placing of the wafer 14.

[0081] Reference Figure 10As shown, as a further embodiment of the wafer handling module 7, the wafer handling module 7 includes a handling linear assembly 7.1 parallel to the sorting and storage rack 5.1, and a handling rack 7.2 disposed on the handling linear module. The handling rack 7.2 is provided with two wafer 14 pick-and-place assemblies 7.3. The wafer 14 pick-and-place assemblies 7.3 are configured to move linearly toward the sorting and storage rack 5.1. There are two suction plates 7.4. The linear movement directions of the wafer 14 pick-and-place assemblies 7.3 and the handling linear assembly 7.1 are perpendicular, and the module can be selected as a linear module. For example, the handling linear assembly 7.1 can be configured as an electric track, and the wafer 14 pick-and-place assembly 7.3 can be configured as a push cylinder.

[0082] like Figure 11 and Figure 17 As shown, in a further embodiment of the suction plate 7.4, the suction plate 7.4 is a sheet-like plate body, and the front end of the suction plate 7.4 is an arc-shaped claw portion, which extends corresponding to the contour of the wafer 14. A connecting plate 7.6 is provided on the actuating end of the wafer pick-and-place assembly, and a groove 7.61 for the rear end of the suction plate 7.4 to be inserted is provided at the lower part of the connecting plate 7.6. The groove 7.61 is also provided with a negative pressure block 7.5 for fixing the suction plate 7.4 to the connecting plate 7.6. A negative pressure component is connected to the negative pressure block 7.5. The negative pressure component includes at least a negative pressure connector 7.51 connected to the negative pressure block 7.5. The suction plate 7.4 is provided with an adsorption area communicating with the negative pressure component. The adsorption area matches the contour of the wafer 14. An arc-shaped first air channel groove 7.41 is formed on the claw. The first air channel groove 7.41 constitutes the adsorption area. The rear end of the suction plate 7.4 is provided with a through air channel hole 7.43. The upper surface of the suction plate 7.4 is provided with a second air channel groove 7.42 communicating with the air channel hole 7.43 and the first air channel groove 7.41. The negative pressure block 7.5 covers the air passage hole 7.43. The negative pressure block 7.5 has a channel for connecting the negative pressure connector 7.51, and the second air passage groove 7.42 is covered with a sealing plate 7.44. Thus, the negative pressure block, air passage hole 7.43, first air passage groove 7.41 and second air passage groove 7.42 form a negative pressure channel. Based on the sheet-like plate suction plate 7.4, the wafer 14 is adsorbed. Through the above improvements, the negative pressure block 7.5 forms part of the negative pressure channel and provides a fixed position for the suction plate 7.4. In this embodiment, the suction plate 7.4 can be set with a smaller thickness, and the forming difficulty of the air passage groove on the suction plate 7.4 is reduced.

[0083] The connecting plate 7.6 is also equipped with a limiting seat on its upper part. A limiting post is installed on the limiting seat and faces the sorting and storage rack 5.1. The end of the limiting post is equipped with a limiting plate 9.57.62. The limiting plate 9.57.62 is arranged parallel to the suction plate 7.4 above it, and the suction plate 7.4 extends out of the limiting plate 9.57.62. After the suction plate 7.4 enters the basket 9 and is in place, the limiting plate 9.57.62 abuts against the sorting and storage rack 5.1 to limit the suction plate 7.4 and prevent it from moving excessively.

[0084] like Figures 12 to 16 As shown, specifically, the flower basket 9 includes two frames 9.2, which are connected at least at the top or bottom, and an open wafer receiving space 9.3 is separated between the two frames 9.2. A cavity 9.1 is formed on each frame 9.2. One end of the frame 9.2 forms an open end 9.4, and the other side of the frame 9.2 is provided with a stop plate 9.57.62 that blocks the rear of the cavity 9.1 and prevents the wafer 14 from leaving the other end of the frame 9.2. The area into which the suction plate 7.4 extends is located within the wafer receiving space 9.3 between the two frames 9.2 and between the two cavities 9.1. The suction plate 7.4 directly grasps the wafer 14 by adsorption, which avoids the mechanical squeezing of the edge of the wafer 14 by traditional grippers, while the periphery of the wafer 14 is still within the cavity 9.1 of the frame 9.2, effectively reducing the risk of edge chipping.

[0085] As a further embodiment of the clamping module 6.1, the end of the robotic arm module 6 is configured as an circumferentially rotatable execution shaft 6.2. The clamping module 6.1 includes a fixed frame 6.11 disposed on the execution shaft 6.2, and a rotating frame 6.12 hinged below the fixed frame 6.11. The bottom of the rotating frame 6.12 is provided with a clamping cylinder 6.13, and two clamping arms 6.14 disposed on the actuating end of the clamping cylinder 6.13. A telescopic cylinder 6.16 is hinged between the fixed frame 6.11 and the rotating frame 6.12.

[0086] In this embodiment, there are two rotating frames 6.12, and the fixed frame 6.11 is arranged in an I-shape. The upper end of the fixed frame 6.11 is connected to the actuating shaft 6.2, and the rotating frames 6.12 are respectively hinged to the lower two sides of the fixed frame 6.11. Each rotating frame 6.12 is connected to the rotating frame 6.12 through a telescopic cylinder 6.16. The fixed end of the telescopic cylinder 6.16 is hinged to the upper end of the fixed frame 6.11, and the free end of the telescopic cylinder 6.16 is hinged to the rotating frame 6.12. With this arrangement, the clamping module 6.1 can clamp two flower baskets 9 at one time by the action of the actuating shaft 6.2.

[0087] In other embodiments, the clamping arm 6.14 is provided with a clamping block 6.15 arranged opposite to it. The clamping block 6.15 and the opposite surface of the basket 9 are inclined. The basket 9 has a passive inclined surface, which is specifically set on the outer wall of the frame 9.2. The clamping block 6.15 is provided with an active inclined surface. The cooperation of the active inclined surface and the passive inclined surface avoids the wafer 14 on the basket 9 from entering and exiting the open end 9.4. During the clamping process, the rotation of the rotating frame 6.12 relative to the fixed frame 6.11 is realized by the extension and retraction of the telescopic cylinder 6.16. Specifically, the basket 9 is forced to tilt towards the side of the limiting end 9.5 so that the wafer 14 abuts against the side of the limiting end 9.5, preventing the wafer 14 from leaving the open end 9.4 during the transfer process. Compared with the prior art of configuring a cover for the basket 9 to prevent the wafer 14 from falling, this method saves the side cover, thereby saving the side cover removal step and improving the transfer efficiency.

[0088] It is worth mentioning that the clamping block 6.15 is made of a high-friction coefficient material and, in combination with the active and passive inclined surfaces, improves the clamping force on the sides of the frame 9.2. Furthermore, the clamping plate 3.21 in the basket handling module 3 acts on the outer wall surfaces of the open end 9.4 and the limiting end 9.5 of the basket 9. In this way, the basket 9 is positioned with its opening perpendicular to the linear direction of the basket in / out module 2, the basket handling module 3, and the basket transfer module 4 during both loading and unloading processes. This adapts to the action of the robotic arm module 6 on both sides of the frame 9.2 of the basket 9 on the wafer inspection platform 5. The basket 9 is placed on the sorting and storage rack 5.1 with its open end 9.4 facing the wafer handling module 7. This effectively avoids positional interference between the clamping arm 6.14 and the wafer handling module 7 when the basket 9 is relatively unfolded to place it. This further improves the compactness of the module arrangement, enhances the overall compactness and space utilization. During the loading and unloading of the basket 9, setting the open end 9.4 of the basket 9 perpendicular to the linear direction of loading and unloading helps improve the stability of the wafer 14 in the basket 9 and prevents the wafer 14 from falling off the open end 9.4 of the basket 9 under the influence of linear force.

[0089] like Figure 5 As shown, in some other embodiments, the starting end of the flower basket feeding track 4.1 is provided with a limiting cylinder assembly 13 configured with respect to the outline of the flower basket 9. This assembly includes a first limiting cylinder 13.1 corresponding to the open end 9.4 of the flower basket 9, a second limiting cylinder 13.2 corresponding to the limiting end 9.5, and a third limiting block 13.3 and a fourth limiting cylinder 13.4 corresponding to the side of the frame 9.2 of the flower basket 9. The moving end of the limiting cylinder assembly 13 is provided with a clamping surface adapted to the corresponding side wall of the frame 9.2. The moving directions of the first limiting cylinder 13.1 and the second limiting cylinder 13.2 are both perpendicular to the linear direction of the flower basket feeding track 4.1.

[0090] The third limiting block 13.3 and the fourth limiting cylinder 13.4 are arranged in the linear direction of the basket feed track 4.1. The third limiting block 13.3 is located outside the starting end of the basket feed track 4.1, i.e., outside the linear trajectory. The fourth limiting cylinder 13.4 is located on one side of the linear feed direction at the starting end, and its actuating end is equipped with a fifth limiting cylinder 13.5. The actuating end of the first limiting cylinder 13.1 is equipped with a first limiting block, and the actuating end of the second limiting cylinder 13.2 is equipped with a second limiting block. The actuating end of the fifth limiting cylinder 13.5 is... A fourth limiting block is provided at the end. The action direction of the fourth limiting cylinder 13.4 is perpendicular to the linear direction, and the action direction of the fifth limiting cylinder 13.5 is set towards the side wall of the frame 9.2. In this way, after the flower basket handling module 3 places the full flower basket 9 at the starting end, the action of the limiting cylinder assembly 13 ensures the positional stability of the full flower basket 9, so as to ensure stable cooperation with the robot arm module 6. Moreover, the setting of the fifth limiting cylinder 13.5 and the fourth limiting cylinder 13.4 in the linear direction avoids the feeding direction of the flower basket 9, and the spatial layout is more reasonable.

[0091] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. An automatic loading and unloading mechanism for wafers and baskets, characterized in that, include: The flower basket transfer platform (1) includes a flower basket inlet / outlet module (2), a flower basket handling module (3), and a flower basket transfer module (4) arranged in sequence. The flower basket inlet / outlet module (2) includes a flower basket feeding carrier (2.1) and a flower basket discharging carrier (2.2) arranged adjacent to each other. The flower basket handling module (3) is arranged above the flower basket transfer module (4) and grabs the flower basket (9) to transfer it between the flower basket transfer module (4) and the flower basket inlet / outlet module (2). The flower basket transfer module (4) transfers the flower basket (9) in a linear direction between the flower basket transfer platform (1) and the wafer inspection platform (5). The wafer inspection platform (5) includes a robotic arm module (6) arranged on one side of the end of the flower basket transfer module (4) and a sorting and storage rack (5.1) arranged on one side of the robotic arm module (6). The robotic arm module (6) is provided with a clamping module (6.1) for constraining and fixing the flower basket (9), and the robotic arm module rotates at least in the vertical direction to transfer the flower basket (9) on the flower basket transfer module (4) or the sorting and storage rack (5.1). The sorting and storage rack (5.1) is provided with a wafer handling module (7) opposite to the robotic arm module (6). At least one wafer (14) detection module (8) is provided on the running trajectory of the wafer handling module (7). The wafer handling module (7) carries the wafer (14) and transfers it between the wafer (14) detection module (8) and the sorting and storage rack (5.1). The basket (9) includes a plurality of spaced cavities (9.1). The wafer (14) is placed on the cavity (9.1). The wafer handling module (7) includes a suction plate (7.4) that moves linearly toward the cavity (9.1). The suction plate (7.4) extends into the cavity (9.1) and adsorbs onto the surface of the wafer (14).

2. The automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The flower basket loading and unloading module (2) includes adjacent loading and unloading tracks (2.3). The flower basket feeding carrier (2.1) and the flower basket unloading carrier (2.2) have manual loading and unloading positions and automatic loading and unloading positions near the flower basket transfer module (4) via the loading and unloading tracks (2.3). The flower basket feeding carrier (2.1) and the flower basket discharging carrier (2.2) are provided with multiple shelves (2.4). The shelves (2.4) are provided with limiting protrusions (10) that constrain the position of the flower basket (9). The limiting protrusions (10) are set about the outline of the flower basket (9).

3. The automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The flower basket handling module (3) includes a three-axis moving assembly (3.1) and a flower basket (9) gripping assembly (3.2) disposed at the moving end of the three-axis moving assembly (3.1). The flower basket transfer module (4) includes a flower basket feeding track (4.1) and a flower basket discharging track (4.2). The flower basket feeding track (4.1) is configured to carry the flower basket (9) toward the robot arm module (6), and the flower basket discharging track (4.2) is configured to move toward the flower basket discharging carrier (2.2).

4. The automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The wafer inspection platform (5) is also provided with a queue-jumping platform (11). On one side of the queue-jumping platform (11), there are also adjacent empty basket tracks (11.1) and queue-jumping basket unloading tracks (11.2). The queue-jumping platform (11), empty basket tracks and queue-jumping basket unloading tracks (11.2) are all arranged in the rotation area of ​​the robot arm module (6).

5. An automatic loading and unloading mechanism for wafers and baskets according to claim 4, characterized in that: The queue-jumping platform (11) is arranged between the sorting and storage rack (5.1) and the end of the flower basket transfer module (4), and the empty flower basket track and the queue-jumping flower basket unloading track (11.2) are perpendicular to the flower basket transfer module (4) and are arranged between the queue-jumping platform (11) and the flower basket transfer module (4).

6. An automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The sorting and storage rack (5.1) and the wafer handling module (7) are arranged in parallel and perpendicular to the linear direction of the basket entry and exit module (2) and the basket transfer module (4).

7. An automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The sorting and storage rack (5.1) is equipped with qualified sorting positions (5.11), unqualified sorting positions (5.12), automatic partial wafer sorting positions (5.13), and queue-jumping partial sorting positions (5.14). The queue-jumping partial sorting positions (5.14) include queue-jumping test sorting positions (5.141) and queue-jumping qualified sorting positions (5.142) distributed vertically.

8. An automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The clamping module (6.1) includes a fixed frame (6.11) mounted on the moving end of the robotic arm module (6) and a rotating frame (6.12) hinged below the fixed frame (6.11). The rotating frame (6.12) has a clamping cylinder (6.13) at its bottom and a clamping arm (6.14) mounted on the moving end of the clamping cylinder (6.13). The clamping arm (6.14) has clamping blocks (6.15) arranged opposite to each other. The clamping blocks (6.15) and the opposite surface of the flower basket (9) are arranged at an angle. A telescopic cylinder (6.16) is hinged between the fixed frame (6.11) and the rotating frame (6.12).

9. An automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The flower basket (9) includes two frames (9.2) connected at least at the top or bottom, and a wafer receiving space (9.3) is spaced between the two frames (9.2). The cavity (9.1) is formed on each frame (9.2). One end of the frame (9.2) forms an open end (9.4). The other side of the frame (9.2) is provided with a stop at the rear of the cavity (9.1) and a limiting end (9.5) that prevents the wafer (14) from leaving the other end of the frame (9.2).

10. An automatic loading and unloading mechanism for wafers and baskets according to claim 1, characterized in that: The bottom of the flower basket feeding carrier and the flower basket discharging carrier are also provided with a lifting platform. The lifting platform includes a lifting plate fixedly installed at the bottom of the bottom layer plate and an installation plate installed below the lifting plate. A lifting cylinder is provided in the middle of the lifting plate and the installation plate. A first contact block is provided at the bottom of the lifting plate and a second contact block is provided on the support base plate. A first buffer cylinder and a second buffer cylinder are provided on the installation plate. The first buffer cylinder is arranged opposite to the first contact block and the second buffer cylinder is arranged opposite to the second contact block.

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