A molybdenum block grinding mill for CVD

Abstract

This utility model provides a molybdenum block grinding machine for CVD, comprising: a grinding machine body; a drive telescopic component fixedly installed on the top of the grinding machine body, with a movable frame fixedly installed on the moving end of the drive telescopic component; a vacuum machine fixedly installed on the top of the movable frame; and multiple feeding assemblies, all disposed on the top of the grinding machine body. This CVD molybdenum block grinding machine, through the coordinated structure of the drive telescopic component, vacuum machine, and feeding assemblies, effectively solves the problem of difficult material removal after grinding low-height molybdenum blocks in existing technologies. Operators no longer need to laboriously remove material from inside the rotating mechanism, reducing work difficulty and improving work efficiency. Simultaneously, this material removal method avoids accidental damage to the molybdenum blocks or equipment due to inconvenient operation during the material removal process, ensuring product quality and normal equipment operation.

Description

Technical Field

[0001] This utility model relates to the field of CVD processing technology, and in particular to a molybdenum block grinding machine for CVD. Background Technology

[0002] Molybdenum blocks are the substrate used for diamond CVD (chemical vapor deposition) film deposition and growth, and the flatness of their working surface affects the quality of the CVD film. Molybdenum blocks are usually cylindrical, with one plane serving as the working surface. Since only one plane is machined, a single-disc rotary grinder is typically used for grinding.

[0003] Existing technologies, such as the CVD molybdenum block grinding machine with authorization announcement number CN212762842U, possess numerous advantages. By incorporating four rotating mechanisms above the grinding machine body, it combines the rotation of the molybdenum block with the rotation of the grinding disc, effectively improving the uniformity of the grinding of the molybdenum block's working surface and ensuring its flatness. Simultaneously, this equipment can grind multiple molybdenum blocks at once, significantly improving grinding efficiency. Furthermore, this design avoids unevenness caused by uneven localized force on the grinding disc, reducing downtime for leveling and waiting, and extending the service life of the grinding disc.

[0004] However, this device has certain limitations. When grinding molybdenum blocks with relatively low heights, because the top of the block is inside the rotating mechanism, it is difficult for the user to remove the block after grinding. This not only increases the difficulty of the operator's work and reduces work efficiency, but may also cause accidental damage to the molybdenum block or equipment during the material removal process, affecting product quality and the normal operation of the equipment.

[0005] Therefore, it is necessary to provide a molybdenum block grinding mill for CVD to solve the above-mentioned technical problems. Utility Model Content

[0006] This invention provides a molybdenum block grinding machine for CVD, which solves the problem in the prior art that it is difficult to remove the material after grinding molybdenum blocks with low height, and that it is easy to damage the molybdenum blocks or equipment.

[0007] To solve the above-mentioned technical problems, this utility model provides a molybdenum block grinding machine for CVD, comprising:

[0008] Grinding machine body;

[0009] A drive telescopic component is fixedly installed on the top of the grinding machine body, and a movable frame is fixedly installed on the moving end of the drive telescopic component.

[0010] A vacuum machine, which is fixedly installed on the top of the movable frame;

[0011] Multiple feeding components are disposed on the top of the grinding machine body. Each feeding component includes a moving tube, a limiting plate, an elastic element, a filter assembly, a silicone suction cup, and an adsorption hole. The moving tube is slidably connected to the inside of the moving frame. The limiting plate is fixedly installed on the top of the moving tube. The elastic element is sleeved on the outer side of the moving tube. The filter assembly is disposed at the bottom of the moving tube. The silicone suction cup is disposed at the bottom of the filter assembly. The adsorption hole is opened at the bottom of the silicone suction cup.

[0012] Preferably, an air pipe is fixedly installed at the input end of the vacuum machine, and a three-way valve is fixedly installed at the input end of the air pipe, with the three-way valve fixedly installed at the top of the moving tube.

[0013] Preferably, the elastic element is disposed at the bottom of the movable frame.

[0014] Preferably, a support frame is fixedly installed around the bottom of the grinding machine body.

[0015] Preferably, the filter assembly includes a cover, a box, a filter plate, a baffle plate, and a retaining ring. The box is threaded to the bottom of the cover, the filter plate is fixedly installed at the bottom of the cover, and the baffle plate and the retaining ring are both fixedly installed on the inner side of the box.

[0016] Preferably, the top of the cover is fixedly installed on the bottom of the movable tube.

[0017] Preferably, the silicone suction cup is fixedly installed at the bottom of the box body.

[0018] Compared with related technologies, the molybdenum block grinding mill for CVD provided by this utility model has the following advantages:

[0019] Beneficial effects:

[0020] This utility model provides a molybdenum block grinding machine for CVD. Through the coordinated structure of the drive telescopic component, vacuum machine and feeding assembly, it effectively solves the problem of difficult material removal after grinding low-height molybdenum blocks in the prior art. Operators no longer need to laboriously remove the material from inside the rotating mechanism, reducing the difficulty of the work and improving the efficiency. At the same time, this material removal method avoids accidental damage to the molybdenum block or equipment due to inconvenient operation during the material removal process, ensuring product quality and normal operation of the equipment. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the first embodiment of a molybdenum block grinding mill for CVD provided by this utility model;

[0022] Figure 2 for Figure 1The diagram shows the structure of the feeding assembly.

[0023] Figure 3 for Figure 2 The enlarged schematic diagram of part A shown below;

[0024] Figure 4 This is a schematic diagram of the second embodiment of a molybdenum block grinding machine for CVD provided by this utility model.

[0025] The following are the labels in the diagram: 1. Grinding machine body, 11. Support frame, 2. Drive telescopic component, 21. Moving frame, 3. Vacuum machine, 31. Air pipe, 32. Three-way valve, 4. Feeding assembly, 41. Moving pipe, 42. Limiting plate, 43. Elastic component, 44. Filter assembly, 45. Silicone suction cup, 46. Adsorption hole, 441. Cover, 442. Box body, 443. Filter plate, 444. Baffle plate, 445. Retaining ring. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0027] First Embodiment

[0028] Please refer to the following: Figure 1 , Figure 2 , Figure 3 ,in, Figure 1 This is a schematic diagram of the first embodiment of a molybdenum block grinding mill for CVD provided by this utility model; Figure 2 for Figure 1 The diagram shows the structure of the feeding assembly. Figure 3 for Figure 2 The enlarged schematic diagram of part A is shown. A molybdenum block grinding machine for CVD includes: a grinding machine body 1;

[0029] Drive telescopic component 2, which is fixedly installed on the top of the grinding machine body 1, and a movable frame 21 is fixedly installed on the movable end of the drive telescopic component 2;

[0030] Vacuum machine 3, which is fixedly installed on the top of the movable frame 21;

[0031] Multiple feeding components 4 are disposed on the top of the grinding machine body 1. Each feeding component 4 includes a moving tube 41, a limiting plate 42, an elastic element 43, a filter assembly 44, a silicone suction cup 45, and an adsorption hole 46. The moving tube 41 is slidably connected to the inside of the moving frame 21. The limiting plate 42 is fixedly installed on the top of the moving tube 41. The elastic element 43 is sleeved on the outer side of the moving tube 41. The filter assembly 44 is disposed at the bottom of the moving tube 41. The silicone suction cup 45 is disposed at the bottom of the filter assembly 44. The adsorption hole 46 is opened at the bottom of the silicone suction cup 45.

[0032] The vacuum machine 3 has an air pipe 31 fixedly installed at its input end, and a three-way valve 32 fixedly installed at its input end. The three-way valve 32 is fixedly installed on the top of the moving pipe 41.

[0033] The elastic element 43 is disposed at the bottom of the movable frame 21.

[0034] Support frames 11 are fixedly installed around the bottom of the grinding machine body 1.

[0035] The grinding machine body 1 is the grinding machine mentioned in the prior art with authorization announcement number CN212762842U;

[0036] The drive telescopic component 2 is usually selected as an electric telescopic rod or a hydraulic telescopic rod to meet different working environments and load requirements. In this embodiment, the function of the drive telescopic component 2 is to drive the moving frame 21 and the vacuum machine 3 and the feeding component 4 on it to move up and down, thereby realizing the material taking operation of the molybdenum block in the grinding machine body 1.

[0037] Vacuum machine 3 is fixedly installed on the top of mobile frame 21. Air pipe 31 is fixedly installed at its input end. The input end of air pipe 31 is connected to the top of mobile pipe 41 through three-way valve 32. The function of vacuum machine 3 is to generate negative pressure, which, through air pipe 31 and mobile pipe 41, causes the bottom of silicone suction cup 45 to form suction, thereby adsorbing molybdenum block.

[0038] The moving tube 41 is slidably connected to the inside of the moving frame 21. This connection method not only ensures that the moving tube 41 can slide freely up and down within the moving frame 21, but also plays a certain guiding role in its movement, ensuring that the moving tube 41 remains stable during the lifting and lowering process. The limiting plate 42 is fixedly installed on the top of the moving tube 41, and its function is to prevent the moving tube 41 from detaching from the moving frame 21. The elastic element 43 is generally a spring. Utilizing the elastic characteristics of the spring, it plays a buffering role during the material picking process. When the driving telescopic element 2 drives the moving frame 21 to descend, and the silicone suction cup 45 contacts the molybdenum block, the elastic element 43 can prevent damage to the molybdenum block and equipment due to excessive descent speed or excessive contact force. The silicone suction cup 45 has good flexibility and sealing properties, and can closely adhere to the surface of the molybdenum block. The molybdenum block is adsorbed under vacuum through the adsorption hole 46.

[0039] The working principle of the molybdenum block grinding machine for CVD provided by this utility model is as follows:

[0040] When using the machine, place the molybdenum block inside the grinder body 1 and grind it. After grinding, drive the telescopic component 2 to retract, causing the silicone suction cup 45 to move downwards and the bottom of the silicone suction cup 45 to abut against the top of the molybdenum block. Then, start the vacuum machine 3 to evacuate the air, adsorbing the molybdenum block onto the bottom of the silicone suction cup 45. Then, drive the telescopic component 2 to extend, moving the molybdenum block out of the grinder body 1. Then, the user turns the three-way valve 32, at which point external gas enters the moving tube 41, allowing the molybdenum block at the bottom of the silicone suction cup 45 to be removed.

[0041] Compared with related technologies, the molybdenum block grinding mill for CVD provided by this utility model has the following advantages:

[0042] Beneficial effects:

[0043] By cooperating with each other, the telescopic component 2, vacuum machine 3, and unloading assembly 4 effectively solves the problem of difficulty in removing molybdenum blocks with low height after grinding in the existing technology. Operators no longer need to laboriously remove the material from inside the rotating mechanism, reducing the difficulty of the work and improving the efficiency. At the same time, this material removal method avoids accidental damage to the molybdenum blocks or equipment due to inconvenient operation during the material removal process, ensuring product quality and normal operation of the equipment.

[0044] Second Embodiment

[0045] Please refer to the following: Figure 4 Based on the first embodiment of this application which provides a molybdenum block grinding mill for CVD, the second embodiment of this application proposes another molybdenum block grinding mill for CVD. The second embodiment is merely a preferred embodiment of the first embodiment, and the implementation of the second embodiment will not affect the separate implementation of the first embodiment.

[0046] Specifically, the second embodiment of this application provides a molybdenum block grinding machine for CVD, wherein the filter assembly 44 includes a cover 441, a box 442, a filter plate 443, a baffle plate 444, and a retaining ring 445. The box 442 is threaded to the bottom of the cover 441, the filter plate 443 is fixedly installed at the bottom of the cover 441, and the baffle plate 444 and the retaining ring 445 are both fixedly installed on the inner side of the box 442.

[0047] The top of the cover 441 is fixedly installed on the bottom of the movable tube 41.

[0048] The silicone suction cup 45 is fixedly installed at the bottom of the box body 442.

[0049] The baffle 444 is located at the top of the vent hole opened at the bottom of the box body 442, and also at the bottom of the vent hole opened at the top of the cover body 441.

[0050] The retaining ring 445 is located at the edge of the vent hole at the bottom of the box body 442, reducing the amount of impurities that fall through the vent hole onto the top of the grinding machine body 1.

[0051] The working principle of the molybdenum block grinding machine for CVD provided by this utility model is as follows:

[0052] When the molybdenum block inside the grinding machine body 1 is adsorbed by the silicone suction cup 45, if there are impurities on the top of the molybdenum block, the impurities will enter the inner side of the box 442 through the adsorption hole 46 and be guided by the baffle plate 444, so that the impurities can move to the bottom of the filter plate 443. When the adsorption of the molybdenum block is stopped, the impurities will fall to the top of the baffle plate 444 and then slide along the baffle plate 444 to one side of the inner side of the box 442. Subsequently, the user can rotate the box 442 to remove the box 442 from the bottom of the cover 441 and then process the impurities inside the box 442.

[0053] Compared with related technologies, the molybdenum block grinding mill for CVD provided by this utility model has the following advantages:

[0054] Beneficial effects:

[0055] The structure, consisting of cover 441, box 442, filter plate 443, baffle plate 444 and retaining ring 445, works together to adsorb impurities on the surface of the molybdenum block into the box 442 for storage during use, thus preventing impurities from entering the vacuum machine 3 and causing damage to the vacuum machine 3.

[0056] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A molybdenum block grinding mill for CVD, characterized in that, include: Grinding machine body; A drive telescopic component is fixedly installed on the top of the grinding machine body, and a movable frame is fixedly installed on the moving end of the drive telescopic component. A vacuum machine, which is fixedly installed on the top of the movable frame; Multiple feeding components are disposed on the top of the grinding machine body. Each feeding component includes a moving tube, a limiting plate, an elastic element, a filter assembly, a silicone suction cup, and an adsorption hole. The moving tube is slidably connected to the inside of the moving frame. The limiting plate is fixedly installed on the top of the moving tube. The elastic element is sleeved on the outer side of the moving tube. The filter assembly is disposed at the bottom of the moving tube. The silicone suction cup is disposed at the bottom of the filter assembly. The adsorption hole is opened at the bottom of the silicone suction cup.

2. A molybdenum block grinder for CVD according to claim 1, characterized in that, An air pipe is fixedly installed at the input end of the vacuum machine, and a three-way valve is fixedly installed at the input end of the air pipe. The three-way valve is fixedly installed at the top of the moving pipe.

3. The molybdenum block grinder for CVD according to claim 1, wherein The elastic element is located at the bottom of the movable frame.

4. The molybdenum block grinder for CVD according to claim 1, wherein The grinding machine body is fixedly equipped with support frames on all four sides of its bottom.

5. The molybdenum block grinder for CVD according to claim 1, wherein The filter assembly includes a cover, a box, a filter plate, a baffle plate, and a retaining ring. The box is threaded to the bottom of the cover, the filter plate is fixedly installed at the bottom of the cover, and the baffle plate and the retaining ring are both fixedly installed on the inner side of the box.

6. A molybdenum block grinder for CVD according to claim 5, wherein The top of the cover is fixedly installed at the bottom of the movable tube.

7. A molybdenum block grinder for CVD according to claim 5, wherein The silicone suction cup is fixedly installed at the bottom of the box.

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