Thermal protection components and thermal components

Abstract

This application provides a thermal protection component and a thermal component, relating to the field of semiconductor or photovoltaic material processing, and solves the technical problem that product fragments falling onto the heating structure after a furnace tube ruptures, easily damaging the heating structure. The thermal protection component includes a protective element disposed between the heating structure and the furnace tube, and located below the furnace tube. After the furnace tube ruptures, the protective element can support the product, preventing short circuits caused by product contact with the heating structure and thus preventing thermal damage. Furthermore, when the protective element is removed from the furnace chamber, it can also pull the product out of the furnace chamber, improving cleaning efficiency. In addition, since the protective element is only located below the furnace tube, the obstruction area on the heating structure is small, reducing the impact on heating efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a thermal field protection component and a thermal field component. Background Technology

[0002] In the production of photovoltaic materials (such as silicon wafers), the photovoltaic materials are typically placed in a quartz tube for processing. The outside of the quartz tube is equipped with a thermal field formed by heating structures such as heating wires. Taking silicon wafer processing as an example, if the quartz tube breaks during the process, the silicon wafers will be damaged and spill. Broken wafers can easily fall onto the heating wires, causing the heating wires to overlap with the wafers. Because silicon wafers are highly conductive, this can eventually lead to a short circuit in the heating wires, thus disrupting the thermal field of the photovoltaic material processing equipment.

[0003] In related technologies, the heating wire of the hot zone is partially buried with aluminum silicate fiber, exposing part of the heating wire. This reduces the area of ​​the heating wire that can be damaged and lowers the probability of the heating wire being damaged due to the quartz tube bursting. However, this method cannot completely prevent the silicon wafer from contacting the heating wire, and it also reduces the exposed area of ​​the heating wire, resulting in reduced heating efficiency and increased energy consumption. Utility Model Content

[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a thermal field protection component and a thermal field component.

[0005] In a first aspect, one embodiment of this application provides a thermal protection component applied to a thermal component configured to heat a furnace tube extending horizontally. The thermal component includes a heating structure and a furnace chamber extending horizontally, the furnace chamber being fitted outside the furnace tube. The heating structure is located on the side of the furnace chamber near the furnace tube and is configured to heat the furnace tube. The furnace tube has a process chamber with a placement space within it, where a product is placed. The thermal protection component includes a protective element disposed between the heating structure and the furnace tube, and located below the furnace tube. In the event of a furnace tube rupture, the protective element can support the product, and when the protective element is removed from the furnace chamber, it can also move the product out of the furnace chamber.

[0006] In some embodiments, the furnace chamber has a heating space, a furnace tube and a heating structure are disposed in the heating space, and a protective member has at least one heat exchange hole. The heat exchange hole connects a portion of the space between the heating structure and the protective member in the heating space and another portion of the space between the protective member and the furnace tube, so that the heat generated by the heating structure can be transferred to the furnace tube through the heat exchange hole.

[0007] In some embodiments, the pore density of the heat exchange holes in the protective member ranges from 5 ppi to 15 ppi, and / or the pore diameter ranges from 3 mm to 5 mm.

[0008] In some embodiments, the protective element includes a plurality of sub-protective elements arranged sequentially along the extension direction of the furnace tube; wherein adjacent sub-protective elements are connected by adhesive, or adjacent sub-protective elements are connected by a convex-concave fit.

[0009] In some embodiments, the protective component includes a plurality of sub-protective components arranged sequentially along the extension direction of the furnace tube; wherein, the thermal field protection assembly further includes: at least one connecting rope, which can pass through the heat exchange holes of adjacent sub-protective components to connect adjacent sub-protective components.

[0010] In some embodiments, the connecting rope is made of alumina fiber or metal.

[0011] In some embodiments, the material of the protective element is foam ceramic, and / or the thickness of the protective element ranges from 5 mm to 10 mm.

[0012] In some embodiments, the first projection of the protective member on the furnace tube in the vertical direction covers the second projection of the placement space on the furnace tube in the vertical direction; and / or, the protective member has a first end and a second end along the circumference of the furnace tube, the perpendicular line between the first end of the protective member and the axis of the furnace tube is the first perpendicular line, the perpendicular line between the second end of the protective member and the axis of the furnace tube is the second perpendicular line, and the included angle between the first perpendicular line and the second perpendicular line is in the range of 90 degrees to 150 degrees.

[0013] In some embodiments, the first cross-section of the furnace tube in the radial direction is annular, the second cross-section of the furnace chamber in the radial direction is annular, and the third cross-section of the protective member in the radial direction is an arc-shaped surface. The protective member, the furnace tube, and the furnace chamber are all coaxially arranged.

[0014] Secondly, one embodiment of this application provides a thermal field assembly configured to heat a furnace tube. The furnace tube extends horizontally and has a process chamber. A placement space is provided within the process chamber, and a product is placed in the placement space. The thermal field assembly includes: a furnace chamber extending horizontally and fitted over the furnace tube; a heating structure located on the side of the furnace chamber near the furnace tube, the heating structure being configured to heat the furnace tube; and a thermal field protection assembly as described in any of the first aspects above, wherein a protective member of the thermal field protection assembly is disposed between the heating structure and the furnace tube, and located below the furnace tube. In the event of a furnace tube rupture, the protective member can support the product, and when the protective member is removed from the furnace chamber, the protective member can move the product out of the furnace chamber.

[0015] The thermal protection component and thermal assembly proposed in this application have a unique feature: the protective component is located below the furnace tube. Therefore, after the furnace tube ruptures, the broken product fragments fall onto the protective component instead of the heating structure, preventing short circuits caused by contact between the product and the heating structure, which could lead to thermal damage. Furthermore, when cleaning product fragments, the protective component catches the fragments, allowing them to be removed by dragging it out, thus improving cleaning efficiency. Additionally, because the protective component is only located below the furnace tube, its obstruction area on the heating structure is small, reducing the impact on heating efficiency compared to related technologies that use aluminum silicate fiber to bury the heating wire. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of a protective element provided in an exemplary embodiment of this application.

[0018] Figure 2 The diagram shown is a schematic diagram of the structure of a thermal field component provided in an exemplary embodiment of this application.

[0019] Figure 3 The image shown is a side view of a thermal field assembly and furnace tube provided in an exemplary embodiment of this application.

[0020] Figure 4 The diagram shown is a schematic diagram of a protective member with heat exchange holes provided in an exemplary embodiment of this application.

[0021] Figure 5 The diagram shown is a structural schematic of multiple sub-protective components spliced ​​together according to an exemplary embodiment of this application.

[0022] Figure label:

[0023] 100. Thermal protection component; 110. Protective element; 111. Heat exchange hole; 112. Sub-protective element; 113. First end of the protective element; 114. Second end of the protective element; 115. First vertical line; 116. Second vertical line; 200. Thermal protection component; 210. Furnace chamber; 211. Groove; 220. Furnace tube; 221. Process chamber. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] Figure 1 The diagram shown is a structural schematic of a protective element provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a schematic representation of the structure of a thermal field component provided in an exemplary embodiment of this application. Figure 3 The image shown is a side view of a thermal field assembly and furnace tube provided in an exemplary embodiment of this application.

[0026] like Figures 1-3 As shown, this application embodiment provides a thermal protection component 100, applied to a thermal component 200. The thermal component 200 is configured to heat a furnace tube 220, which extends horizontally (as shown by the X direction in the figure). The thermal component 200 includes a heating structure and a furnace chamber 210 extending horizontally. The furnace chamber 210 is fitted outside the furnace tube 220. The heating structure is located on the side of the furnace chamber 210 near the furnace tube 220 and is configured to heat the furnace tube 220. The furnace tube 220 has a process chamber 221, and the process chamber 221 has a placement space (such as...). Figure 3 As shown in area A (marked by a dashed box), the product is placed in the placement space. The thermal protection assembly 100 includes a protective member 110. The protective member 110 is disposed between the heating structure and the furnace tube 220, and is located below the furnace tube 220. In the event of a rupture in the furnace tube 220, the protective member 110 can support the product, and when the protective member 110 is removed from the furnace chamber 210, the protective member 110 can also move the product out of the furnace chamber 210.

[0027] For example, the heating structure includes a heating wire.

[0028] For example, the furnace chamber 210 is provided with a plurality of grooves 211 on the side near the furnace tube 220, and the heating structure is disposed in the grooves 211.

[0029] For example, the placement space is the central area of ​​the process chamber 221.

[0030] For example, the product may be a silicon wafer, a crystal wafer, a glass substrate, a solar cell, etc.

[0031] In the above embodiments, since the protective component 110 is located below the furnace tube 220, after the furnace tube 220 ruptures, the broken product fragments can fall onto the protective component 110 instead of onto the heating structure. This avoids short circuits caused by the product contacting the heating structure, thus preventing thermal damage. Furthermore, when cleaning product fragments, since the protective component 110 catches the fragments, they can be removed by dragging out the protective component 110, improving cleaning efficiency. Additionally, because the protective component 110 is only located below the furnace tube 220, its obstruction area on the heating structure is small, reducing the impact on heating efficiency compared to the method of burying heating wires with aluminum silicate fiber in related technologies.

[0032] Figure 4 The diagram shown is a schematic diagram of a protective member with heat exchange holes provided in an exemplary embodiment of this application.

[0033] In some embodiments, such as Figures 2-4 As shown, the furnace chamber 210 has a heating space (such as...) Figure 2 As shown, the furnace chamber 210 has a cavity inside (which is a heating space). The furnace tube 220 and the heating structure are disposed in the heating space. The protective member 110 has at least one heat exchange hole 111. The heat exchange hole 111 connects a part of the space between the heating structure and the protective member 110 in the heating space and another part of the space between the protective member 110 and the furnace tube 220, so that the heat generated by the heating structure can be transferred to the furnace tube 220 through the heat exchange hole 111.

[0034] For example, the shape of the cross-section of the heat exchange hole 111 can be circular, elliptical, rectangular, rhomboid, other polygonal, or irregular.

[0035] For example, if there are multiple heat exchange holes 111, the shapes and sizes of the multiple heat exchange holes 111 may be the same or different.

[0036] For example, if there are multiple heat exchange holes 111, the multiple heat exchange holes 111 can be arranged in the form of M rows and N columns, where M and N are both integers greater than 0, or the multiple heat exchange holes 111 can be arranged in an alternating manner (such as in a fishing net pattern), or the multiple heat exchange holes 111 can be arranged irregularly.

[0037] For example, the heat exchange hole 111 may extend in a straight line or may extend in a curved shape.

[0038] In the above embodiments, by providing heat exchange holes 111, heat can be quickly passed through the heat exchange holes 111 to heat the furnace tube 220, thereby improving heating efficiency and reducing the impact of the protective component 110 on heating efficiency.

[0039] In some embodiments, the pore density of the heat exchange holes 111 of the protective member 110 ranges from 5 ppi to 15 ppi.

[0040] Pore ​​density refers to the average number of pores per unit inch of length. For example, if the pore density of the heat exchange holes 111 of the protective component 110 is 5 ppi, it means that the protective component 110 has an average of 5 heat exchange holes 111 per inch of length.

[0041] For example, the pore density of the heat exchange holes 111 of the protective element 110 is 10 ppi.

[0042] In the above embodiments, by making the protective element 110 have a sufficiently high pore density, even if the protective element 110 has more heat exchange holes 111, more heat can pass through the heat exchange holes 111, thereby improving the heating efficiency.

[0043] In some embodiments, the diameter of the heat exchange hole 111 ranges from 3 mm to 5 mm.

[0044] For example, the diameter of the heat exchange hole 111 is 4 mm.

[0045] If the diameter of the heat exchange hole 111 is too small, the heat transfer efficiency will be low. If the diameter of the heat exchange hole 111 is too large, product fragments will easily fall out of the protective component 110 through the heat exchange hole 111. In the above embodiment, by making the diameter of the heat exchange hole 111 range from 3mm to 5mm, the heating efficiency of the thermal field can be improved while making it less likely for product fragments to fall out of the protective component 110.

[0046] Figure 5 The diagram shown is a structural schematic of multiple sub-protective components spliced ​​together according to an exemplary embodiment of this application.

[0047] In some embodiments, such as Figure 5 As shown, the protective component 110 includes multiple sub-protective components 112, which are arranged sequentially along the extension direction of the furnace tube 220 (i.e., the X direction in the figure). Adjacent sub-protective components 112 are connected by adhesive, or they are connected by a convex-concave fit.

[0048] For example, the adhesive is a high-temperature resistant adhesive, such as an inorganic high-temperature adhesive, specifically such as silicate adhesive, aluminate adhesive, etc.

[0049] For example, for two adjacent sub-protective members 112, one sub-protective member 112 has a protrusion and the other sub-protective member 112 has a recess. The protrusion can be inserted into the recess, thereby achieving a convex-concave mating connection.

[0050] Since directly producing the large-sized protective component 110 is quite difficult, the production difficulty can be reduced by producing multiple small-sized sub-protective components 112 and then assembling them into the large-sized protective component 110. Furthermore, by connecting the multiple sub-protective components 112, when removing the protective component 110, all the sub-protective components 112 can be removed by dragging the first sub-protective component 112, making it easier to remove the protective component 110.

[0051] In some embodiments, the protective member 110 includes a plurality of sub-protective members 112, which are arranged sequentially along the extension direction of the furnace tube 220. The thermal field protection assembly 100 further includes at least one connecting rope. The connecting rope can pass through the heat exchange holes 111 of adjacent sub-protective members 112, thereby connecting adjacent sub-protective members 112.

[0052] For example, the connecting rope can be used to connect adjacent sub-protective elements 112 by winding it back and forth through a plurality of heat exchange holes 111 of adjacent sub-protective elements 112.

[0053] For example, the connecting rope can be combined with the glue connection method and / or the concave-convex fit connection method in the above embodiments to connect the sub-protective components 112 together, so as to ensure that the adjacent sub-protective components 112 can be more securely connected.

[0054] Since directly producing the large-sized protective component 110 is quite difficult, the production difficulty can be reduced by producing multiple small-sized sub-protective components 112 and then assembling them into the large-sized protective component 110. Furthermore, by connecting the multiple sub-protective components 112, when removing the protective component 110, all the sub-protective components 112 can be removed by dragging the first sub-protective component 112, making it easier to remove the protective component 110.

[0055] In some embodiments, the connecting rope is made of alumina fiber or metal.

[0056] If the connecting rope is made of metal, it is necessary to avoid winding the connecting rope onto the side of the sub-protective component 112 that is close to the heating structure, in order to prevent the heating structure from short-circuiting.

[0057] For example, the metal is stainless steel.

[0058] In the above embodiments, by selecting alumina fiber or metal as the material of the connecting rope, the connecting rope can have excellent properties such as high temperature resistance, high strength, good flexibility and oxidation resistance. In addition, alumina fiber has excellent insulation properties. Therefore, selecting these two materials can improve the service life of the connecting rope.

[0059] In some embodiments, the material of the protective element 110 is foam ceramic.

[0060] Among them, foam ceramic is a porous material, and the pores of foam ceramic can be used as heat exchange pores 111.

[0061] In the above embodiments, by selecting foam ceramic as the material of the protective component 110, the protective component 110 can have excellent properties such as thermal shock resistance, high temperature resistance, high strength, oxidation resistance and high insulation, thereby improving the service life of the protective component 110.

[0062] In some embodiments, the thickness of the protective element 110 ranges from 5 mm to 10 mm.

[0063] Since the distance between the furnace tube 220 and the heating structure is usually only a few millimeters, in the above embodiment, by making the thickness of the protective component 110 less than 10mm, it can be ensured that the protective component 110 can be placed between the furnace tube 220 and the heating structure. In addition, in actual process, it is difficult to make the thickness of foam ceramic less than 5mm. Therefore, making the thickness of foam ceramic more than 5mm can reduce the production difficulty.

[0064] In some embodiments, the first projection of the protective member 110 on the furnace tube 220 in the vertical direction (such as the Y direction in the figure) covers the second projection of the placement space on the furnace tube 220 in the vertical direction.

[0065] For example, the size of the first projection is larger than the size of the second projection.

[0066] In the above embodiments, by making the first projection cover the second projection, even if the protective member 110 can cover the area directly below the placement space, the free-falling product fragments can be caught by the protective member 110, reducing the risk of the product fragments falling onto the heating structure.

[0067] In some embodiments, such as Figure 3 As shown, the protective element 110 has a first end 113 and a second end 114 along the circumference of the furnace tube 220. The perpendicular line between the first end 113 of the protective element 110 and the axis of the furnace tube 220 is the first perpendicular line 115, and the perpendicular line between the second end 114 of the protective element 110 and the axis of the furnace tube 220 is the second perpendicular line 116. The included angle between the first perpendicular line 115 and the second perpendicular line 116 (e.g., ...) is... Figure 3 The included angle P (as shown in the figure) ranges from 90 degrees to 150 degrees.

[0068] For example, the angle between the first perpendicular line 115 and the second perpendicular line 116 is 120 degrees.

[0069] In the above embodiments, by making the included angle between the first vertical line 115 and the second vertical line 116 range from 90 degrees to 150 degrees, it can be ensured that the protective component 110 can catch the product fragments, while also preventing the protective component 110 from having an excessively large area, thereby reducing the impact of the protective component 110 on the heating efficiency.

[0070] In some embodiments, such as Figure 3 As shown, the first cross-section of the furnace tube 220 in the radial direction is annular, the second cross-section of the furnace chamber 210 in the radial direction is annular, and the third cross-section of the protective member 110 in the radial direction is arc-shaped. The protective member 110, the furnace tube 220, and the furnace chamber 210 are all coaxially arranged.

[0071] In the above embodiments, this structure allows the shape of the protective member 110 to conform to the shape of the furnace chamber 210 and the furnace tube 220, thereby enabling the protective member 110 to occupy less of the available space of the furnace tube 220 in the heating space.

[0072] Based on the same concept, this application embodiment also provides a thermal field assembly 200, configured to heat a furnace tube 220. The furnace tube 220 extends horizontally and has a process chamber with a placement space within it. A product is placed in the placement space. The thermal field assembly 200 includes a furnace chamber 210, a heating structure, and a thermal field protection assembly 100 as described in the above embodiment. The furnace chamber 210 extends horizontally and is fitted over the furnace tube 220. The heating structure is located on the side of the furnace chamber 210 near the furnace tube 220 and is configured to heat the furnace tube 220. The protective member 110 of the thermal field protection assembly 100 is disposed between the heating structure and the furnace tube 220 and is located below the furnace tube 220. In the event of a rupture in the furnace tube 220, the protective member 110 can support the product, and when the protective member 110 is removed from the furnace chamber 210, it can also move the product out of the furnace chamber 210.

[0073] For example, the thermal field component 200 is used in a low-pressure chemical vapor deposition (LPCVD) apparatus.

[0074] For example, the furnace tube 220 is made of quartz.

[0075] Since the thermal field assembly 200 includes the thermal field protection assembly 100, all the technical features and effects of the thermal field protection assembly 100 are included in the thermal field assembly 200 and will not be described in detail here.

[0076] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0077] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0078] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0079] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0080] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A thermal field protection component, characterized in that, An application is made to a thermal field assembly configured to heat a furnace tube extending horizontally. The thermal field assembly includes a heating structure and a horizontally extending furnace chamber fitted over the furnace tube. The heating structure is located on the side of the furnace chamber closest to the furnace tube and is configured to heat the furnace tube. The furnace tube has a process chamber with a placement space within it, where a product is placed. The thermal field protection assembly includes: A protective element is disposed between the heating structure and the furnace tube, and located below the furnace tube. The protective element is capable of supporting the product after the furnace tube breaks, and can also move the product out of the furnace when the protective element is removed from the furnace chamber.

2. The thermal field protection component according to claim 1, characterized in that, The furnace chamber has a heating space, the furnace tube and the heating structure are disposed in the heating space, and the protective member has at least one heat exchange hole. The heat exchange hole connects a portion of the space between the heating structure and the protective member in the heating space and another portion of the space between the protective member and the furnace tube, so that the heat generated by the heating structure can be transferred to the furnace tube through the heat exchange hole.

3. The thermal field protection component according to claim 2, characterized in that, The pore density of the heat exchange holes in the protective component ranges from 5 ppi to 15 ppi, and / or the pore diameter ranges from 3 mm to 5 mm.

4. The thermal field protection component according to any one of claims 1 to 3, characterized in that, The protective element includes multiple sub-protective elements, which are arranged sequentially along the extension direction of the furnace tube; The adjacent sub-protective components are connected by adhesive, or the adjacent sub-protective components are connected by a concave-convex fit.

5. The thermal field protection component according to claim 2 or 3, characterized in that, The protective element includes multiple sub-protective elements, which are arranged sequentially along the extension direction of the furnace tube; The thermal protection component further includes: At least one connecting rope is provided, which can pass through the heat exchange hole of an adjacent sub-protective element to connect the adjacent sub-protective element.

6. The thermal field protection component according to claim 5, characterized in that, The connecting rope is made of alumina fiber or metal.

7. The thermal field protection component according to any one of claims 1 to 3, characterized in that, The protective element is made of foam ceramic, and / or the thickness of the protective element ranges from 5mm to 10mm.

8. The thermal field protection component according to any one of claims 1 to 3, characterized in that, The first projection of the protective component on the furnace tube in the vertical direction covers the second projection of the placement space on the furnace tube in the vertical direction; And / or, The protective element has a first end and a second end along the circumference of the furnace tube. The perpendicular line between the first end of the protective element and the axis of the furnace tube is the first perpendicular line, and the perpendicular line between the second end of the protective element and the axis of the furnace tube is the second perpendicular line. The included angle between the first perpendicular line and the second perpendicular line is in the range of 90 degrees to 150 degrees.

9. The thermal field protection component according to any one of claims 1 to 3, characterized in that, The furnace tube has an annular shape in its first cross-section in the radial direction, the furnace chamber has an annular shape in its second cross-section in the radial direction, and the protective member has an arc-shaped surface in its third cross-section in the radial direction. The protective member, the furnace tube, and the furnace chamber are all coaxially arranged.

10. A thermal field assembly, characterized in that, Configured to heat a furnace tube extending horizontally and having a process chamber with a placement space therein, the product being placed in the placement space, the thermal field assembly includes: The furnace chamber extends horizontally and is fitted over the furnace tube; A heating structure is located on the side of the furnace chamber near the furnace tube, and the heating structure is configured to heat the furnace tube; The thermal protection component according to any one of claims 1 to 9, wherein the protective member of the thermal protection component is disposed between the heating structure and the furnace tube and located below the furnace tube, wherein, after the furnace tube ruptures, the protective member can support the product, and, when the protective member is removed from the furnace chamber, the protective member can drive the product out of the furnace chamber.

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