Nanoimprinter

Abstract

This utility model discloses a nanoimprinting machine, including an imprinting template mounting stage and a substrate mounting base. Multiple sets of suction cups (secondary) for adsorbing and fixing the substrate are mounted on the upper center of the substrate mounting base. The imprinting template mounting stage is positioned above the substrate mounting base. Above the positions where the suction cups (secondary) are positioned to fix the substrate, multiple sets of suction cups (tertiary) for adsorbing and fixing the imprinting template are provided, with the adsorption ends of the suction cups (tertiary) forming the adsorption end face of the imprinting template. Each set of suction cups (tertiary) is connected to a suction cup mounting plate. The suction cup mounting plate is also connected to multiple sets of laser sensors for detecting the tilt of the adsorption end face of the imprinting template relative to the substrate surface. A suction cup fixing component is located at the upper end of the suction cup mounting plate, and multiple voice coil motors are located at the upper end of the suction cup fixing component for adjusting the tilt of the adsorption end face of the imprinting template. This utility model solves the leveling problem during the imprinting process, avoids damage to the template, substrate, and imprinting head, improves the performance of the nanoimprinting machine, and achieves better nanoimprinting results.

Description

Technical Field

[0001] This utility model relates to the field of micro-nano device processing equipment technology, and in particular to a nanoimprint embossing machine. Background Technology

[0002] With the advent of the information age, various micro and nano devices have been widely used. At the same time, the market is constantly demanding higher performance from these devices, leading to increasingly higher requirements for the processing capabilities of micro and nano fabrication equipment. Nanoimprint lithography is an important micro and nano device fabrication process that achieves the same effect as the well-known micro-nano lithography: transferring patterns from a template to a resist surface coated on a substrate, facilitating subsequent etching to transfer these patterns onto the substrate. However, compared to micro-nano lithography, nanoimprint lithography is lower in cost and has a simpler process flow, giving it advantages in the manufacture of certain micro and nano devices.

[0003] The equipment used to perform nanoimprinting is a nanoimprinter. A crucial factor affecting the performance of a nanoimprinter is the leveling of the imprinting template during the nanoimprinting process. Template leveling refers to ensuring that the template is parallel to the substrate before it comes into contact with it. If the template, held by the nanoimprinter's template suction cup, does not maintain parallelism before direct contact with the substrate, it can easily create large gaps between the template and the substrate, leading to incomplete patterns during imprinting and resulting in imprinting failure. Furthermore, excessive template tilt can even damage the imprinting head, template, and substrate.

[0004] To address this, some nanoimprinters employ a hinged flexible imprint head. When the imprint template contacts the substrate, as the imprint head gradually applies pressure, the template also exerts a reaction force. At this point, the hinged flexible structure of the imprint head undergoes a slight deformation, allowing the imprint template to adaptively adjust and adhere tightly to the substrate, thus achieving template leveling. However, this approach has a problem: when achieving template leveling, the imprint template is already in contact with the substrate. During adaptive adjustment, the template may scrape against the substrate. Furthermore, this adaptive adjustment places high demands on the quality of the flexible structure of the imprint head, which can easily lead to irreversible twisting and deformation. If the template tilt is large, the flexible structure may even break directly during the adjustment process. Utility Model Content

[0005] This invention aims to at least partially solve one of the technical problems in related technologies. Therefore, one objective of this invention is to provide a nanoimprint emulation machine that solves the leveling problem during the imprinting process, avoids damage to the template, substrate, and imprint head, improves the performance of the nanoimprint emulation machine, and achieves better nanoimprinting results.

[0006] According to the present invention, a nanoimprinting machine includes an imprinting template mounting stage and a substrate mounting base. Multiple sets of suction cups (secondary) for adsorbing and fixing the substrate are mounted on the upper center of the substrate mounting base. The imprinting template mounting stage is located above the substrate mounting base. Above the position of the suction cups (secondary) corresponding to the substrate fixing position, multiple sets of suction cups (tertiary) for adsorbing and fixing the imprinting template are provided, with the adsorption ends of the multiple sets of suction cups (tertiary) forming the adsorption end face of the imprinting template. All sets of suction cups (tertiary) are connected to a suction cup mounting plate. The suction cup mounting plate is also connected to multiple sets of laser sensors for detecting the inclination of the adsorption end face of the imprinting template relative to the surface of the substrate. A suction cup fixing component is provided at the upper end of the suction cup fixing component. Multiple sets of voice coil motors are provided at the upper end of the suction cup fixing component for adjusting the inclination of the adsorption end face of the imprinting template. The upper end of the voice coil motor is connected to the imprinting template mounting stage via the imprinting head main frame. A light-transmitting hole is opened on the imprinting head main frame corresponding to the imprinting template fixing position. A light source is provided above the imprinting head main frame at the position corresponding to the light-transmitting hole.

[0007] Preferably, the laser sensor is in three sets, located at the three vertices of an equilateral triangle. The detection ends of the three sets of laser sensors together form a detection end face parallel to the adsorption end face of the imprint template. The installation height of the detection end face is higher than or equal to the installation height of the adsorption end face of the imprint template, and the center position of the detection end face is located above or coincides with the center position of the adsorption end face of the imprint template.

[0008] Preferably, the voice coil motor consists of three sets, with the extension and retraction ends of the three sets of voice coil motors located at the three vertices of an equilateral triangle to jointly form an adjustment end face. The adjustment end face is parallel to the detection end face, and the projection of the detection end face onto the adjustment end face can be proportionally magnified to coincide with the adjustment end face.

[0009] Preferably, there are four sets of suction cups, and the suction cup mounting plate is rectangular, with the four sets of suction cups located at the four corners of the suction cup mounting plate.

[0010] Preferably, the light source is an ultraviolet exposure light source.

[0011] The beneficial effects of this invention are as follows: Based on the principle of laser ranging, by combining the laser sensor and the voice coil motor, the distance between the four corners of the template and the substrate is kept consistent, achieving a leveling effect before the template contacts the substrate, avoiding damage to the template, substrate, and imprint head, improving the performance of the nanoimprint machine, and achieving better nanoimprinting effects; at the same time, it realizes non-contact leveling operation between the template and the substrate, avoiding the potential damage to the template and substrate caused by the template's self-adjustment after contact with the substrate, and greatly reducing the rate of shortening of the lifespan of the flexible structure of the imprint head. Attached Figure Description

[0012] In the attached diagram:

[0013] Figure 1 This is a schematic diagram of the structure of a nanoimprinting machine proposed in this utility model;

[0014] Figure 2 This is a schematic diagram of the embossing and leveling component proposed in this utility model;

[0015] Figure 3 This is a schematic diagram of the connection between the voice coil motor and the suction cup fixing component proposed in this utility model;

[0016] Figure 4 This is a schematic diagram of the structure of one part of the suction cup proposed in this utility model;

[0017] Figure 5 This is a top-down view of one part of the suction cup proposed in this utility model;

[0018] Figure 6 This is a flowchart of the leveling method for the nanoimprinter proposed in this utility model.

[0019] In the diagram: 1-Laser sensor, 2-Imprint head main frame, 3-Voice coil motor, 4-Suction cup fixing piece, 5-Suction cup one, 6-Suction cup two, 7-Light source, 8-First mounting hole, 9-Second mounting hole, 10-Third mounting hole, 11-Voice coil motor telescopic end. Detailed Implementation

[0020] Reference Figure 1 A nanoimprinting machine includes an imprinting template mounting stage and a substrate mounting base. Multiple sets of suction cups 6 for adsorbing and fixing the substrate are mounted on the upper center of the substrate mounting base. The imprinting template mounting stage is located above the substrate mounting base. Above the positions where the suction cups 6 are fixed to the substrate, multiple sets of suction cups 5 for adsorbing and fixing the imprinting template are provided, with the adsorption ends of the multiple sets of suction cups 5 being coplanar to form the adsorption end face of the imprinting template. All sets of suction cups 5 are connected to a suction cup mounting plate. The suction cup mounting plate is also connected to multiple sets of laser sensors 1 for detecting the tilt of the adsorption end face of the imprinting template relative to the surface of the substrate. A suction cup fixing component 4 is located at the upper end of the suction cup mounting plate. Multiple sets of voice coil motors 3 for adjusting the tilt of the adsorption end face of the imprinting template are located at the upper end of the suction cup fixing component 4. The upper end of the voice coil motors 3 is connected to the imprinting template mounting stage via an imprinting head main frame 2. A light-transmitting hole is opened on the imprinting head main frame 2 corresponding to the imprinting template fixing position. A light source 7 is located above the imprinting head main frame 2 at the position corresponding to the light-transmitting hole.

[0021] Obviously, based on the above, the tilt of the adsorption end face of the imprint template and the substrate can be detected by the laser sensor 1, and the leveling work can be achieved by adjusting the voice coil motor 3 to make the adsorption end face of the imprint template parallel to the substrate.

[0022] In this embodiment, refer to Figure 2 , Figure 3 and Figure 4 There are three sets of laser sensors 1, which are located at the three vertices of an equilateral triangle. The detection ends of the three sets of laser sensors 1 together form a detection end face parallel to the adsorption end face of the imprint template. The installation height of the detection end face is higher than or equal to the installation height of the adsorption end face of the imprint template, and the center position of the detection end face is located above or coincides with the center position of the adsorption end face of the imprint template.

[0023] Obviously, based on the above: the detection end face formed by the three sets of laser sensors 1 is parallel to the adsorption end face of the imprint template, which facilitates the detection of the inclination of the adsorption end face of the imprint template to the surface of the substrate. At the same time, the detected data can be easily correlated with the adsorption end face of the imprint template, simplifying the control method process.

[0024] In this embodiment, refer to Figure 2 and Figure 3 The voice coil motor 3 consists of three sets. The extension ends 11 of the three sets of voice coil motors are located at the three vertices of an equilateral triangle and together form the adjustment end face. The adjustment end face is parallel to the detection end face, and the projection of the detection end face on the adjustment end face can be enlarged proportionally to coincide with the adjustment end face.

[0025] Obviously, based on the above: the three sets of voice coil motor extension ends 11 together form an adjustment end face that is parallel to the detection end face, and the projection can be magnified proportionally to facilitate the adjustment of the inclination of the imprint template adsorption end face. At the same time, the distance of the voice coil motors can be easily matched with the data detected by the laser sensor 1, simplifying the control method process.

[0026] In this embodiment, refer to Figure 3 , Figure 4 and Figure 5 There are four sets of suction cups 1-5. The suction cup mounting plate is rectangular, and the four sets of suction cups 1-5 are located at the four corners of the suction cup mounting plate.

[0027] Obviously, based on the above, the suction cups 5 set at the four corners facilitate the fixing of the four corners of the embossing template.

[0028] In this embodiment, light source 7 is an ultraviolet exposure light source.

[0029] To more clearly illustrate the implementation plan and its effects, we will use the attached diagram as an example:

[0030] Reference Figure 5 A first mounting hole 8 is made on each of the three sides of the suction cup mounting plate to serve as the connection structure for the laser sensor 1. The diameter of each hole is 8.5mm. The centers of the three holes can be connected to form an equilateral triangle, i.e., θ1=θ2=θ3=120°. The center of this equilateral triangle coincides with the center of the adsorption end face of the imprint template. The distance from the center of each hole to the center of the adsorption end face of the imprint template is r=31.5mm.

[0031] The laser sensor 1 is a Keyence CL3000. The front ends of the three laser sensors are fixed in the first mounting holes 8, with the front surface of each laser sensor 1 lying in the same plane, coinciding with the plane of the adsorption end face of the imprint template. Simultaneously, the center of the front end of each laser sensor 1 coincides with the center of its corresponding mounting hole, completing the assembly of the laser sensor 1 onto the suction cup mounting plate. Figure 4 As shown.

[0032] Then this assembled component is installed into the impression head system, such as... Figure 2 As shown, the data ports at the end of laser sensor 1 are all connected to the computer. The overall structure of the impression head system is also an equilateral triangle. Figure 3 As shown by the dashed line, the centers of the three voice coil motors 3 in the impression head system can be connected to form an equilateral triangle. The center of the equilateral triangle is on the central axis of the main frame of the impression head system. Similarly, the center of the equilateral triangle formed by connecting the centers of the first mounting holes 8 is also on the central axis of the main frame of the impression head system. The sides of these two equilateral triangles are parallel to each other.

[0033] Then, the assembled impression head is connected to the impression machine system to form... Figure 1 The nanoimprinter shown incorporates an imprint template leveling mechanism system.

[0034] The distance from the center of the equilateral triangle formed by connecting the centers of the three voice coil motors in the designed imprint head system to the center of each voice coil motor is 195mm. Therefore, the distance from the central axis of the main frame of the imprint head system to the center of each voice coil motor is 195mm. As mentioned above, the distance from the center of each first mounting hole 8 to the center of the imprint template's suction end face is 31.5mm. Therefore, the distance from the central axis of the main frame of the imprint head system to the center of the template suction cup is also 31.5mm. Based on the law of similar triangles, the numerical change of each laser sensor when a single voice coil motor moves can be calculated. For each voice coil motor 3, when the precession distance of one motor is 1mm, the numerical changes of each laser in the laser sensor 1 are 0.279mm, 0.279mm, and 0.441mm, respectively.

[0035]

[0036]

[0037]

[0038] Where M is the mapping matrix of the motion of the voice coil motor 3 to the change of sensor values;

[0039] It can be found that:

[0040]

[0041] exist Figure 1 The template and sample substrate are loaded into the embossing machine system, and then the system program is started according to... Figure 6 Method and Flow:

[0042] Laser sensor 1 measures the optical signal path distances l1, l2, and l3 as 40.2 mm, 40.4 mm, and 39.8 mm, respectively. Based on the standard distance setting d0 = 40 mm, then... ,according to:

[0043]

[0044] The required precession value for the voice coil motor is: Each voice coil motor then completes a precession of -0.5450mm, -1.7796mm, and 1.9241mm respectively. Then, the distances along the optical signal path, l1, l2, and l3, are measured again and found to be 40mm, 40mm, and 40mm respectively, thus completing the leveling process.

Claims

1. A nanoimprint embroidery machine, characterized in that: The device includes an imprinting template mounting stage and a substrate mounting base. Multiple sets of suction cups (6) for adsorbing and fixing the substrate are mounted on the upper center of the substrate mounting base. The imprinting template mounting stage is located above the substrate mounting base. Above the position where the suction cups (6) are fixed to the substrate, multiple sets of suction cups (5) for adsorbing and fixing the imprinting template are provided, and the adsorption ends of the multiple sets of suction cups (5) are coplanar, forming the adsorption end face of the imprinting template. All sets of suction cups (5) are connected to a suction cup mounting plate. The suction cup mounting plate is also connected to a device for detecting the imprinting template. Multiple laser sensors (1) are provided to adjust the inclination of the adsorption end face of the plate and the substrate. The upper end of the suction cup mounting plate is provided with a suction cup fixing part (4). The upper end of the suction cup fixing part (4) is provided with multiple voice coil motors (3) for adjusting the inclination of the adsorption end face of the imprint template. The upper end of the voice coil motor (3) is connected to the imprint template mounting table through the imprint head main frame (2). The imprint head main frame (2) is provided with a light-transmitting hole corresponding to the imprint template fixing position. A light source (7) is provided above the imprint head main frame (2) at the position corresponding to the light-transmitting hole.

2. The nanoimprint embroidery machine according to claim 1, characterized in that: The laser sensor (1) consists of three sets. The three sets of laser sensors (1) are located at the three vertices of an equilateral triangle. The detection ends of the three sets of laser sensors (1) together form a detection end face parallel to the adsorption end face of the imprint template. The installation height of the detection end face is higher than or equal to the installation height of the adsorption end face of the imprint template, and the center position of the detection end face is located above or coincides with the center position of the adsorption end face of the imprint template.

3. The nanoimprint embroidery machine according to claim 2, characterized in that: The voice coil motor (3) consists of three sets. The telescopic ends (11) of the three sets of voice coil motors are located at the three vertices of an equilateral triangle and together form an adjustment end face. The adjustment end face is parallel to the detection end face, and the projection of the detection end face on the adjustment end face can be enlarged proportionally to coincide with the adjustment end face.

4. The nanoimprint embroidery machine according to claim 1, characterized in that: The suction cups (5) are in four groups, and the suction cup mounting plate is rectangular. The four groups of suction cups (5) are located at the four corners of the suction cup mounting plate.

5. A nanoimprint embroidery machine according to claim 1, characterized in that: The light source (7) is an ultraviolet exposure light source.

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