Charged ion current characteristic measuring device and ion implanter

Abstract

The utility model discloses a charged ion current characteristic measuring device and an ion implanter. The charged ion current characteristic measuring device comprises a beam limiting plate and a Faraday cup insulated from the beam limiting plate, the beam limiting plate comprises an incident plane and an emergent plane, and a plurality of first through holes penetrating from the incident plane to the emergent plane are formed in the beam limiting plate; the Faraday cup is arranged on the emergent surface of the beam limiting plate, and the Faraday cup and the first through hole are oppositely arranged; and the driving mechanism is connected with the measuring assembly, and the driving mechanism is used for driving the measuring assembly to move and rotate so as to realize the detection of the characteristics of the charged ion current. According to the scheme of the utility model, the accuracy of measuring the characteristics of the charged ion current is high, and the detection efficiency is high.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to a charged ion flow characteristic measurement device and an ion implanter. Background Technology

[0002] The ion beam characteristic measurement device is one of the key components of an ion implanter. During the implantation process, the implantation angle of the charged ion stream needs to be measured using the ion beam characteristic measurement device.

[0003] With the rapid development of semiconductor manufacturing technology, the requirements for various indicators of ion implantation are becoming increasingly stringent. This places higher demands on the performance of current ion beam characteristic measurement devices. Utility Model Content

[0004] The problem solved by this utility model embodiment is to provide a charged ion current characteristic measurement device and ion implanter, which is beneficial to improve the accuracy of charged ion current characteristic measurement and improve measurement efficiency.

[0005] To address the aforementioned problems, this utility model provides a charged ion current characteristic measurement device, comprising: a measurement component, including a beam limiting plate and a Faraday cup insulated from the beam limiting plate; wherein the beam limiting plate includes an incident surface and an exit surface, and a plurality of first through holes extending from the incident surface to the exit surface are formed in the beam limiting plate; the Faraday cup is disposed on one side of the exit surface of the beam limiting plate, and the Faraday cup is disposed opposite to the first through holes; and a driving mechanism connected to the measurement component, the driving mechanism being used to drive the measurement component to move and rotate.

[0006] Optionally, multiple first through-hole arrays are arranged in the beam confinement plate.

[0007] Optionally, the relationship between the diameter and depth of the first through hole satisfies the following condition: tan1°≤diameter / depth≤tan15°.

[0008] Optionally, the beam confinement plate may be made of conductive materials.

[0009] Optional, the beam limiting plate is grounded.

[0010] Optionally, the beam confinement plate may be made of graphite.

[0011] Optionally, a plurality of Faraday cups are provided on one side of the exit surface of the beam confinement plate, and the plurality of Faraday cups correspond one-to-one with a plurality of first through holes.

[0012] Optionally, a plurality of Faraday cups are provided on one side of the exit surface of the beam confinement plate, and each Faraday cup corresponds to a plurality of first through holes.

[0013] Optionally, a Faraday cup is provided on one side of the exit surface of the beam confinement plate, and the Faraday cup corresponds to all the first through holes.

[0014] Optionally, in a Faraday cup, the electrical signal output terminals of each Faraday cup are independent of each other, or, in a Faraday cup, any number of Faraday cups can be connected in parallel to each other.

[0015] Optionally, the driving mechanism is used to drive the measuring component to rotate about an axis with a first direction as the axis, the first direction being perpendicular to the depth direction of the first through hole.

[0016] Optionally, the driving mechanism is used to drive the measuring component to rotate about an axis with a second direction as the axis, the second direction being perpendicular to the depth direction of the first through hole and perpendicular to the first direction.

[0017] Optionally, the measurement assembly also includes: an electron suppression plate disposed between the beam limiting plate and the Faraday cup, wherein the electron suppression plate has a plurality of through second through holes, the positions of the second through holes are configured to correspond one-to-one with the first through holes, the projection of the second through holes on the exit surface covers the first through holes corresponding to the second through holes, the electron suppression plate is insulated from the beam limiting plate, and the electron suppression plate is insulated from the Faraday cup.

[0018] Optionally, the electron suppression plate is connected to a negative voltage.

[0019] Accordingly, this utility model embodiment also provides an ion implanter, including the charged ion flow characteristic measurement device provided by this utility model.

[0020] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0021] In the charged ion current characteristic measurement device provided in this embodiment of the invention, the measurement component includes a beam limiting plate and a Faraday cup insulated from the beam limiting plate. The beam limiting plate includes an incident surface and an exit surface, and multiple first through holes extending from the incident surface to the exit surface are formed in the beam limiting plate. The Faraday cup is disposed on one side of the exit surface of the beam limiting plate, opposite to the first through holes. A driving mechanism is connected to the measurement component, and the driving mechanism is used to drive the measurement component to move and rotate. In this embodiment of the invention, since multiple first through holes are formed in the beam limiting plate, ions passing through the first through holes in the charged ion current are received by the Faraday cup, and the incident angle of the charged ion current is detected by an electrical signal. The driving mechanism is used to drive the measurement component to move and rotate; that is, the measurement component can be moved to the charged ion current coverage area by the driving mechanism, and then the measurement component can be driven to rotate by the driving mechanism. During the rotation of the component, the opening orientation of the first through-hole also rotates accordingly. Consequently, the amount of ions reaching the Faraday cup through the first through-hole also changes. When the electrical signal received by the Faraday cup is strongest, that is, when the amount of ions reaching the Faraday cup through the first through-hole is greatest, the injected angle of the charged ion current can be measured by the opening orientation of the first through-hole at this time. In other words, the injected angle of the charged ion current can be measured by the deflection angle of the measuring component at this time. The measurement is relatively simple and accurate. At the same time, the measuring component can be driven to rotate in different directions by the driving mechanism to measure the injected angle of the charged ion current in multiple directions, thereby improving the accuracy, comprehensiveness, and detection efficiency of the charged ion current characteristic measurement. Moreover, by changing the rotation angle of the measuring component, the measurement is based on the strongest electrical signal received by the Faraday cup, and the measurement result is not affected by the charged ion current density, which is beneficial to improving the accuracy of the charged ion current characteristic measurement. Attached Figure Description

[0022] Figures 1 to 2 This is a schematic diagram of an existing charged ion current characteristic measurement device.

[0023] Figure 3 This is a schematic diagram of the structure of an embodiment of the charged ion current characteristic measuring device of this utility model from one perspective;

[0024] Figures 4 to 6 This is an embodiment of the charged ion current characteristic measuring device of this utility model based on Figure 3 A schematic diagram of the structure viewed in section AA;

[0025] Figure 7 This is an embodiment of the charged ion current characteristic measuring device of this utility model based on Figures 4 to 6 The deflection angle-current curve of the state;

[0026] Figure 8 This is another embodiment of the charged ion current characteristic measuring device of this utility model based on Figure 3A schematic diagram of the structure viewed in cross-section along the extension direction of AA. Detailed Implementation

[0027] Currently, the accuracy of charged ion current characteristic measurement is not good. This paper analyzes the reasons for the poor accuracy of charged ion current characteristic measurement in conjunction with a charged ion current characteristic measurement device.

[0028] Figures 1 to 2 This is a schematic diagram of a device for measuring the characteristics of charged ion current.

[0029] Reference Figure 1 and Figure 2 The charged ion current characteristic measuring device includes: two Faraday cups 20 arranged side by side along the incident surface; an aperture plate 10 disposed on one side of the incident surface of the Faraday cups 20, an incident port formed in the aperture plate 10, and the incident surfaces of the two Faraday cups 20 are evenly distributed in the incident port.

[0030] Based on the current value detected by the Faraday cup 20, the deflection angle of the charged ion current 30 is calculated. Specifically, in the injection port, the incident surfaces of the two Faraday cups 20 are evenly distributed, such as... Figure 1 As shown, when the density of the charged ion current 30 is consistent, the ratio of the currents measured by the two Faraday cups 20 is proportional to the area of ​​the two Faraday cups 20 struck by the charged ion current 30. Therefore, the deflection angle of the charged ion current 30 can be calculated based on the ratio and the distance between the Faraday cup 20 and the aperture plate 10. For example, when the charged ion current 30 has no deflection angle, the ratio of the currents measured by the two Faraday cups 20 is 1 / 1.

[0031] However, if the density of the charged ion current 30 is inconsistent, it will also affect the current values ​​measured by the two Faraday cups 20, such as... Figure 2 As shown, the charged ion current 30 did not deflect, but the charged ion current density was inconsistent, resulting in the current ratio measured by the two Faraday cups 20 not being 1 / 1. Based on the measured current ratio, a deflection angle of the charged ion current 30 would be obtained, which contradicts the fact that the charged ion current 30 did not deflect. Therefore, both the deflection angle and the charged ion current density affect the current value measured by the Faraday cup 20, resulting in a large deviation in the deflection angle measurement result, thus leading to inaccurate measurement of the charged ion current characteristics.

[0032] To address the aforementioned technical problems, the charged ion current characteristic measurement device provided in this embodiment of the present invention includes: a measurement component, comprising a beam limiting plate and a Faraday cup insulated from the beam limiting plate; wherein the beam limiting plate includes an incident surface and an exit surface, and a plurality of first through holes extending from the incident surface to the exit surface are formed in the beam limiting plate; the Faraday cup is disposed on one side of the exit surface of the beam limiting plate, and the Faraday cup is disposed opposite to the first through holes; a driving mechanism is connected to the measurement component, and the driving mechanism is used to drive the measurement component to move and rotate.

[0033] In this embodiment of the invention, a plurality of first through holes are formed in the beam confinement plate. Charged ion streams passing through the first through holes are received by the Faraday cup, and the incident angle of the charged ion stream is detected by an electrical signal. A driving mechanism is used to drive the measurement component to move and rotate. Specifically, the driving mechanism can move the measurement component to the surface covered by the charged ion stream, and then drive the measurement component to rotate. During the rotation of the measurement component, the opening orientation of the first through holes also rotates accordingly. Correspondingly, the amount of ions reaching the Faraday cup through the first through holes also changes. When the electrical signal received by the Faraday cup is strongest, that is, when the amount of ions reaching the Faraday cup through the first through hole is... At its maximum, the injection angle of the charged ion current can be measured by the orientation of the opening of the first through hole at this time. In other words, the injection angle of the charged ion current can be measured by the deflection angle of the measuring component at this time. The measurement is relatively simple and accurate. At the same time, the measuring component can be driven to rotate in different directions by the driving mechanism to measure the injection angle of the charged ion current in multiple directions, which improves the accuracy, comprehensiveness and detection efficiency of the charged ion current characteristic measurement. Moreover, by changing the rotation angle of the measuring component, the measurement is based on the strongest electrical signal received by the Faraday cup. The measurement result is not affected by the charged ion current density, which helps to improve the accuracy of the charged ion current characteristic measurement.

[0034] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0035] Figure 3 This is a schematic diagram of the structure of an embodiment of the charged ion current characteristic measuring device of this utility model from one perspective. Figures 4 to 6 This is an embodiment of the charged ion current characteristic measuring device of this utility model based on Figure 3 A schematic diagram of the structure viewed in section AA. Figure 7 This is an embodiment of the charged ion current characteristic measuring device of this utility model based on Figures 4 to 6 The deflection angle-current curve of the state.

[0036] Reference Figures 3 to 7The charged ion current characteristic measurement device includes: a measurement component 600, including a beam limiting plate 100 and a Faraday cup 200 insulated from the beam limiting plate 100; wherein the beam limiting plate 100 includes an incident surface 100a and an exit surface 100b, and a plurality of first through holes 110 are formed in the beam limiting plate 100, extending from the incident surface 100a to the exit surface 100b; the Faraday cup 200 is disposed on one side of the exit surface 100b of the beam limiting plate 100, and the Faraday cup 200 is disposed opposite to the first through holes 110; and a driving mechanism 400 is connected to the measurement component 600, and the driving mechanism 400 is used to drive the measurement component 600 to move and rotate.

[0037] A profiler is used to measure the characteristics of charged ion currents, such as the ion beam, and to determine the injection angle of the charged ion current based on these characteristics. As an example, the profiler is a key component of an ion implanter; during ion implantation, the injection angle of the ion beam needs to be measured using this profiler.

[0038] The measurement component 600 is used to detect the charged ion flow at the detection location to obtain the charged ion flow injection angle.

[0039] In this embodiment, the measurement component 600 includes a beam limiting plate 100 and a Faraday cup 200 that is insulated from the beam limiting plate 100.

[0040] The beam limiting plate 100 is used to limit and control the charged ion flow. Specifically, the beam limiting plate 100 limits and controls the shape of the charged ion flow and the number of ions reaching the Faraday cup 200 through a plurality of first through holes 110 extending from the incident surface 100a to the exit surface 100b.

[0041] The beam limiting plate 100 includes an incident surface 100a and an exit surface 100b. The incident surface 100a is the surface on which the charged ion stream enters the beam limiting plate 100, and the exit surface 100b is the surface on which the charged ion stream exits the beam limiting plate 100.

[0042] In this embodiment, a plurality of first through holes 110 are arranged in an array in the beam confinement plate 100.

[0043] In the beam confinement plate 100, a plurality of first through holes 110 are arranged in an array, so that the first through holes 110 are evenly and densely distributed on the incident surface 100a, so that the plurality of first through holes 110 can obtain the passage of charged ion current in a relatively uniform and accurate manner.

[0044] In this embodiment, the beam limiting plate 100 can also be referred to as an aperture plate, shielding cover, or baffle plate.

[0045] In this embodiment, the beam limiting plate 100 is made of a conductive material.

[0046] By using a conductive material to form the beam confinement plate 100, compared to the scheme using an insulating material, the charged ion current is received by the beam confinement plate, and the charge carried by the ions accumulates on the beam confinement plate and cannot be guided out (neutralized), resulting in charge accumulation on the beam confinement plate, forming a local high voltage, causing electrostatic discharge, and thus causing a series of adverse problems. In this scheme, the conductive material is conducive to guiding the charge, thereby avoiding the accumulation of charge on the beam confinement plate 100 as much as possible, and maintaining better performance of the beam confinement plate 100 during measurement.

[0047] As an example, in this embodiment, the beam confinement plate 100 is made of graphite.

[0048] In this embodiment, the beam limiting plate 100 is grounded.

[0049] Using a conductive material (such as graphite) and grounding the beam current limiting plate 100 helps to effectively guide the charge in the charged ion flow, avoids the accumulation of charge on the beam current limiting plate 100, and prevents local high voltage and electrostatic discharge caused by charge accumulation, thereby minimizing adverse problems such as equipment damage and impact on measurement accuracy.

[0050] In this embodiment, the relationship between the diameter and depth of the first through hole 110 satisfies the following condition: tan1° ≤ diameter / depth ≤ tan15°. Diameter / depth represents the ratio of the diameter to the depth, and tan represents the tangent function.

[0051] This embodiment Figure 3 The cross-section of the first through hole 110 shown is square. It can be understood that the diameter of the first through hole 110 is the width of the square. The relationship between the width of the square and the hole depth satisfies the following condition: tan1°≤width / hole depth≤tan15°.

[0052] In other embodiments, the cross-section of the first through hole 110 can be other shapes, such as rectangle, circle, ellipse, waist-shaped, etc. When the cross-section of the first through hole 110 is rectangular, the relationship between the length or width of the rectangle and the hole depth satisfies the following condition: tan1° ≤ length or width / hole depth ≤ tan15°. When the cross-section of the first through hole 110 is circular, the relationship between the diameter of the circle and the hole depth satisfies the following condition: tan1° ≤ diameter / hole depth ≤ tan15°.

[0053] The specific ratio of aperture to depth can be set according to the actual situation. For example, it can be set as aperture / depth = tan1°, or aperture / depth = tan2°, or aperture / depth = tan3°, or aperture / depth = tan4°.

[0054] = tan4°, or aperture / depth = tan5°, or aperture / depth = tan6°, or aperture / depth = tan7°, or aperture / depth = tan8°, or aperture / depth = tan9°, or aperture / depth = tan10°, or aperture / depth = tan11°, or aperture / depth = tan12°, or aperture / depth = tan13°, or aperture / depth = tan14°, or aperture / depth = tan15°, etc.

[0055] Referring to the attached diagram, a larger aperture / depth ratio indicates a larger ratio of aperture to depth, resulting in a smaller change in the electrical signal detected by the Faraday cup 200 when the measuring component 600 rotates by a unit angle. Conversely, a smaller aperture / depth ratio indicates a smaller ratio, resulting in a larger change in the electrical signal detected by the Faraday cup 200 when the measuring component 600 rotates by a unit angle. In other words, a larger aperture / depth ratio indicates lower sensitivity of the measuring component 600, while a smaller ratio indicates higher sensitivity.

[0056] All the accompanying drawings in this embodiment are for general illustration only, and are intended to make it easier for those skilled in the art to understand this solution. The aperture and depth shown in the drawings do not necessarily satisfy tan1°≤aperture / depth≤tan15°. If the drawings are drawn according to the condition tan1°≤aperture / depth≤tan15°, some structures in the drawings may not be clearly shown. Therefore, when drawing, the focus is more on the clarity of the solution, and the drawing does not necessarily have to be based on the condition tan1°≤aperture / depth≤tan15°.

[0057] The Faraday cup 200 is used to receive the charged ion stream emitted through the first through-hole 110 of the beam limiting plate 100 and to detect the electrical signal of the received charged ion stream.

[0058] The Faraday cup 200 and the first through hole 110 are arranged opposite to each other, meaning that the outlet of the first through hole 110 on the side of the outlet surface 100b is mapped onto the Faraday cup 200, so that the charged ion flow passes through the first through hole 110 and is emitted onto the Faraday cup 200.

[0059] As an example, in this embodiment, the Faraday cup 200 is used to detect current signals.

[0060] Charged ion currents carry electrical charges, and can therefore be detected using current signals.

[0061] In this embodiment, the Faraday cup 200 has a groove 210, the opening of which faces the beam limiting plate 100, and the groove 210 is disposed opposite to the first through hole 110.

[0062] In other embodiments, the Faraday cup may not have a groove, and the side of the Faraday cup near the first through hole may be a planar structure.

[0063] The Faraday cup 200 generates an electric current by receiving ions passing through the first through hole 110. The groove 210 in the Faraday cup 200 is used to receive the charged ion flow emitted from the emission surface 100b of the first through hole 110. Accordingly, the groove 210 is arranged opposite to the first through hole 110, so that the charged ion flow is emitted to the bottom and side wall of the groove 210 after passing through the first through hole 110.

[0064] In this embodiment, a plurality of Faraday cups 200 are provided on one side of the exit surface 100b of the beam limiting plate 100, and each Faraday cup 200 corresponds to a first through hole 110.

[0065] The Faraday cup 200 corresponds one-to-one with the first through hole 110, that is, each exit surface 100b of the first through hole 110 is provided with a Faraday cup 200, and each Faraday cup 200 can characterize the charged ion flow in the corresponding first through hole 110 through the current signal.

[0066] In this embodiment, the electrical signal output terminals of each Faraday cup 200 are independent of each other.

[0067] The electrical signal output terminals of each Faraday cup 200 are independent of each other, that is, each Faraday cup 200 can output a current signal corresponding to the first through hole 110. The charged ion current of each first through hole 110 has its own corresponding current signal characterization, which helps to make the Faraday cup 200 measure the entire charged ion current more comprehensively and accurately.

[0068] Furthermore, the current signals corresponding to multiple first through holes 110 can be used to detect the cross-section of the entire charged ion flow, thereby obtaining the injection angle of the entire charged ion flow. The current signal of the local Faraday cup 200 can also be extracted to obtain the current signal corresponding to the local first through hole 110, thereby obtaining the injection angle of the local charged ion flow.

[0069] In other embodiments, the electrical signal output terminals of any number of Faraday cups can be connected in parallel.

[0070] The electrical signal output terminals of any number of Faraday cups can be connected in parallel, so that each of the multiple Faraday cups can be connected in parallel and output only one current signal to characterize the charged ion flow in the first through hole corresponding to the multiple Faraday cups.

[0071] The drive mechanism 400 is used to drive the measurement component 600 to move and rotate.

[0072] In this embodiment, a plurality of first through holes 110 are formed in the beam confinement plate 100. Ions passing through the first through holes 110 in the charged ion flow are received by the Faraday cup 200, and the incident angle of the charged ion flow is detected by an electrical signal. The driving mechanism 400 is used to drive the measurement component 600 to move and rotate. That is, the measurement component 600 can be moved to the charged ion flow coverage area by the driving mechanism 400, and then the measurement component 600 is driven to rotate by the driving mechanism 400. During the rotation of the measurement component 600, the opening orientation of the first through holes 110 also rotates accordingly. Correspondingly, the magnitude of the charged ion flow reaching the Faraday cup 200 through the first through holes 110 also changes. When the electrical signal received by the Faraday cup 200 is the strongest, that is, when the charged ion flow through the first through holes 110 is the strongest, the charged ion flow reaches the Faraday cup 200. When the charged ion flux reaching the Faraday cup 200 is at its maximum, the injected angle of the charged ion flux can be measured by the opening orientation of the first through-hole 110 at this time. In other words, the injected angle of the charged ion flux can be measured by the deflection angle of the measuring component 600 at this time. The measurement is relatively simple and accurate. At the same time, the measuring component 600 can be driven to rotate in different directions by the driving mechanism 400 to measure the injected angle of the charged ion flux in multiple directions, thereby improving the accuracy, comprehensiveness and detection efficiency of the charged ion flux characteristic measurement. Moreover, by changing the rotation angle of the measuring component 600, the measurement is based on the strongest electrical signal received by the Faraday cup 200. The measurement result is not affected by the charged ion flux density, which is beneficial to improving the accuracy of the charged ion flux characteristic measurement.

[0073] In this embodiment, the driving mechanism 400 is used to drive the measurement component 600 to move. As an example, the charged ion current characteristic measurement device is installed in the process chamber. During detection, the driving mechanism 400 can drive the measurement component 600 to move to the charged ion current coverage surface to detect the charged ion current implantation angle at the wafer position during charged ion current implantation. After the detection is completed, the driving mechanism 400 can drive the measurement component 600 to move out of the detection position.

[0074] In this embodiment, the driving mechanism 400 is used to drive the measuring component 600 to rotate around an axis with a first direction as the axis, and the first direction is perpendicular to the depth direction of the first through hole 110.

[0075] If the first direction is perpendicular to the depth direction of the first through hole 110, the driving mechanism 400 drives the measuring component 600 to rotate around the axis with the first direction as the axis, so that the measuring component 600 can deflect the inlet of the first through hole 110 at any angle, that is, it can adjust the deflection angle of the incident surface 100a, so as to adjust the charged ion flow rate entering the Faraday cup 200 through the first through hole 110, thereby obtaining the charged ion flow situation according to the electrical signal output by the Faraday cup 200.

[0076] In this embodiment, the first direction is taken as Figure 3As shown in the X direction, when the measuring component 600 rotates around the axis with the first direction as the axis, it is Figure 3 As shown in the θX rotation direction, the driving mechanism is further configured to drive the measuring component 600 to rotate around the axis with the second direction (such as Figure 3 as shown in the Y direction) as the axis (such as Figure 3 as shown in the θY rotation direction). The second direction is perpendicular to the depth direction of the first through hole 110 and perpendicular to the first direction.

[0077] That is to say, the driving mechanism 400 can drive the measuring component 600 to rotate around the axis with the first direction as the axis, adjust the deflection angle of the incident surface 100a in the second direction, and detect the injection angle of the charged ion flow in the second direction. It can also drive the measuring component 600 to rotate around the axis with the second direction as the axis, adjust the deflection angle of the incident surface 100a in the first direction, and detect the injection angle of the charged ion flow in the first direction, so as to realize a more comprehensive detection of the injection angle of the charged ion flow, and there is no need to use multiple measuring devices to measure the angles of the charged ion flow in different directions respectively, thus improving the measuring efficiency.

[0078] The following is combined with reference Figures 4 to 7 , Figure 7 is the deflection angle-current curve graph based on the Figures 4 to 6 measuring state. Taking the driving mechanism 400 driving the measuring component 600 to rotate around the axis with the X direction as the axis to detect the injection angle of the charged ion flow in the Y direction as an example, the detection of the injection angle of the charged ion flow is elaborated in detail.

[0079] Refer to Figure 4 . The charged ion flow 500 has an injection angle in the Y direction. When the measuring component 600 does not rotate, part of the charged ion flow 500 passing through the first through hole 110 is received by the Faraday cup 200, and the other part hits the side wall of the first through hole 110 and is not received by the Faraday cup 200. Then the current value measured by the Faraday cup 200 is small. At this time, as Figure 7 shown at point L in the figure, the deflection angle of the measuring component 600 is 0, and the current signal output by the Faraday cup 200 corresponds to the current value at point L in the figure.

[0080] Refer to Figure 5 . After the driving mechanism 400 drives the measuring component 600 to rotate by an α angle, at this time, the opening of the first through hole 110 is vertically facing the injection direction of the charged ion flow 500, and all the charged ion flow 500 passing through the first through hole 110 is received by the Faraday cup 200, and the current value measured by the Faraday cup 200 reaches the peak value. That is to say, the deflection angle α reaches the injection angle θ of the charged ion flow 500 in the Y direction. At this time, as Figure 7 shown at point M in the figure, the deflection angle of the measuring component 600 is α, and the current signal output by the Faraday cup 200 corresponds to the current value at point M in the figure.

[0081] refer to Figure 6 The driving mechanism 400 drives the measuring component 600 to continue rotating, which causes part of the charged ion current 500 passing through the first through hole 110 to be received by the Faraday cup 200, while the other part impacts the side wall of the first through hole 110 and is not received by the Faraday cup 200. The current value measured by the Faraday cup 200 is then too low. At this time, if... Figure 7 As shown at point R, the deflection angle of the measuring component 600 is greater than α, and the current signal output by the Faraday cup 200 corresponds to the current value at point R in the figure.

[0082] Therefore, it can be seen that the driving mechanism 400 drives the measuring component 600 to rotate around the axis with the X direction as the axis. When the Faraday cup 200 measures the maximum current value, it indicates that the opening of the first through hole 110 is facing the injection direction of the charged ion flow 500. At this time, the deflection angle of the measuring component 600 recorded is the injection angle of the charged ion flow 500 in the Y direction. Therefore, during the measurement process, the deflection angle obtained when the current intensity of the Faraday cup 200 reaches the maximum is the injection angle of the charged ion flow 500 in the Y direction. Furthermore, it can be seen that the detection of the injection angle of the charged ion flow 500 in this embodiment is not affected by the local density of the charged ion flow 500, and the accuracy of the measurement result is high.

[0083] It should be noted that the measurement component 600 is driven by the driving mechanism 400 to rotate around the axis in the Y direction, and the injection angle of the charged ion flow in the X direction is detected in the same way as described above.

[0084] As an example, in this embodiment, the drive mechanism 400 includes a robotic arm.

[0085] The robotic arm can achieve multi-degree-of-freedom three-dimensional spatial movement with high operational precision. At the same time, the robotic arm's movements can be set and adjusted through programming software, adapting to different task requirements and exhibiting high flexibility, thus enabling it to effectively perform drive functions.

[0086] In this embodiment, the measurement component 600 further includes an electron suppression plate 300 disposed between the beam limiting plate 100 and the Faraday cup 200. The electron suppression plate 300 has a plurality of through-holes 310 formed therethrough. The positions of the second through-holes 310 correspond one-to-one with the first through-holes 110. The projection of the second through-holes 310 on the emission surface 100b covers the first through-holes 110 corresponding to the second through-holes 310. The electron suppression plate 300 is insulated from the beam limiting plate 100 and from the Faraday cup 200.

[0087] The electron suppression plate 300 is used to suppress the movement of space electrons to the Faraday cup 200, and to suppress the escape of electrons sputtered by ions from the Faraday cup 200 or the beam limiting plate 100 to the adjacent Faraday cup 200, so as to avoid increasing the measurement error.

[0088] In this embodiment, the electron suppression plate 300 is connected to a negative voltage.

[0089] The electron suppression plate 300 is connected to a negative voltage, and the electric field generated is used to suppress electrons that escape to the adjacent Faraday cup 200 due to ion collisions with the Faraday cup 200 or the beam limiting plate 100, and to suppress spatial electrons that accidentally enter the Faraday cup 200. This helps to reduce the probability of inaccurate current value detection, and thus helps to reduce the probability of inaccurate measurement of the injection angle of charged ion current.

[0090] Figure 8 This is another embodiment of the charged ion current characteristic measuring device of this utility model based on Figure 3 A schematic diagram of the structure viewed in cross-section along the extension direction of AA.

[0091] The similarities between this embodiment and the previous embodiments will not be repeated here. The difference between this embodiment and the previous embodiments lies in the relative arrangement of the Faraday cup and the first through hole.

[0092] refer to Figure 8 A plurality of Faraday cups 201 are provided on one side of the exit surface 101b of the beam limiting plate 101, and each Faraday cup 201 corresponds to a plurality of first through holes 111.

[0093] Each Faraday cup 201 corresponds to multiple first through holes 111. The current output by a Faraday cup 201 can characterize the amount of ions that reach the Faraday cup 201 through multiple first through holes 111.

[0094] In other embodiments, a Faraday cup may be provided on one side of the exit surface of the beam confinement plate, and the Faraday cup corresponds to all the first through holes.

[0095] A Faraday cup corresponds to all the first through holes, meaning that a Faraday cup can characterize the amount of charged ion flow that reaches the Faraday cup through all the first through holes.

[0096] This invention also provides an ion implanter, including the charged ion flow characteristic measurement device provided in any of the foregoing embodiments.

[0097] The charged ion current characteristic measurement device is one of the key components of an ion implanter. During the ion implantation process, the charged ion current characteristic measurement device is used to measure the ion beam characteristics of the ion implanter and to measure the ion beam injection angle based on the ion beam characteristics.

[0098] In this embodiment of the invention, a plurality of first through holes are formed in the beam confinement plate. Charged ion streams passing through the first through holes are received by the Faraday cup, and the incident angle of the charged ion stream is detected by an electrical signal. A driving mechanism is used to drive the measurement component to move and rotate. Specifically, the driving mechanism can move the measurement component to the surface covered by the charged ion stream, and then drive the measurement component to rotate. During the rotation of the measurement component, the opening orientation of the first through holes also rotates accordingly. Correspondingly, the amount of ions reaching the Faraday cup through the first through holes also changes. When the electrical signal received by the Faraday cup is strongest, that is, when the amount of ions reaching the Faraday cup through the first through hole is... At its maximum, the injection angle of the charged ion current can be measured by the orientation of the opening of the first through hole at this time. In other words, the injection angle of the charged ion current can be measured by the deflection angle of the measuring component at this time. The measurement is relatively simple and accurate. At the same time, the measuring component can be driven to rotate in different directions by the driving mechanism to measure the injection angle of the charged ion current in multiple directions, which improves the accuracy, comprehensiveness and detection efficiency of the charged ion current characteristic measurement. Moreover, by changing the rotation angle of the measuring component, the measurement is based on the strongest electrical signal received by the Faraday cup. The measurement result is not affected by the charged ion current density, which helps to improve the accuracy of the charged ion current characteristic measurement.

[0099] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A charged ion current characteristic measuring device, characterized by comprising: include: The measurement assembly includes a beam limiting plate and a Faraday cup that is insulated from the beam limiting plate; The beam limiting plate includes an incident surface and an exit surface, and a plurality of first through holes are formed in the beam limiting plate, extending from the incident surface to the exit surface; The Faraday cup is disposed on one side of the exit surface of the beam limiting plate, and the Faraday cup is disposed opposite to the first through hole; A drive mechanism is connected to the measuring component, and the drive mechanism is used to drive the measuring component to move and rotate.

2. The charged ion current characteristic measuring apparatus according to claim 1, wherein In the beam confinement plate, a plurality of the first through holes are arranged in an array.

3. The charged ion current characteristic measuring apparatus according to claim 1, wherein The relationship between the diameter and depth of the first through hole satisfies the following condition: tan1°≤diameter / depth≤tan15°.

4. The charged ion current characteristic measuring apparatus according to claim 1, wherein The beam confinement plate is made of conductive material.

5. The charged ion current characteristic measuring apparatus according to claim 3, wherein The beam limiting plate is grounded.

6. The charged ion current characteristic measuring apparatus according to claim 3, wherein The beam confinement plate is made of graphite.

7. The charged ion current characteristic measuring apparatus according to claim 1, wherein The beam limiting plate has a plurality of Faraday cups on one side of its exit surface, and each of the plurality of Faraday cups corresponds one-to-one with a plurality of the first through holes.

8. The charged ion current characteristic measuring apparatus according to claim 1, wherein The beam limiting plate has a plurality of Faraday cups on one side of its exit surface, and each Faraday cup corresponds to a plurality of the first through holes.

9. The charged ion current characteristic measuring apparatus according to claim 1, wherein A Faraday cup is provided on one side of the exit surface of the beam limiting plate, and the Faraday cup corresponds to all the first through holes.

10. The charged ion current characteristic measuring apparatus according to claim 7 or 8, wherein In the Faraday cup, the electrical signal output terminals of each Faraday cup are independent of each other, or, in the Faraday cup, any number of electrical signal output terminals of the Faraday cup are connected in parallel.

11. The charged ion current characteristic measuring apparatus according to claim 1, wherein The driving mechanism is used to drive the measuring component to rotate about an axis with a first direction as the axis, the first direction being perpendicular to the depth direction of the first through hole.

12. The charged ion current characteristic measuring apparatus according to claim 11, wherein The driving mechanism is also used to drive the measuring component to rotate about an axis with a second direction as the axis, the second direction being perpendicular to the depth direction of the first through hole, and the second direction being perpendicular to the first direction.

13. The charged ion current characteristic measuring apparatus according to claim 1, wherein The measurement component further includes: an electron suppression plate disposed between the beam limiting plate and the Faraday cup, wherein the electron suppression plate has a plurality of through-holes, the positions of the second through-holes correspond one-to-one with the first through-holes, and the projection of the second through-holes on the emission surface covers the first through-holes corresponding to the second through-holes, the electron suppression plate is insulated from the beam limiting plate, and the electron suppression plate is insulated from the Faraday cup.

14. The charged ion current characteristic measuring apparatus according to claim 13, wherein The electron suppression plate is subjected to a negative voltage.

15. An ion implanter, comprising: Includes the charged ion flow characteristic measuring device as described in any one of claims 1 to 14.

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