Vapor chamber with specially arranged wick

By setting axial and radial return gaps on the return support columns of the heat spreader, a multi-dimensional channel is constructed, which solves the problem of slow return speed of heat dissipation working fluid in the prior art and achieves more efficient heat conduction and diffusion effects.

CN224290391UActive Publication Date: 2026-05-26SHENZHEN FRD SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHENZHEN FRD SCI & TECH
Filing Date
2025-04-28
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

The existing columnar support structure of the heat spreader can only provide mechanical support and cannot speed up the flow of heat dissipation medium from the upper cover to the heating zone of the lower cover, resulting in poor temperature uniformity.

Method used

By employing a special arrangement of the liquid suction core and setting axial and radial return gaps on the return support column to construct a multi-dimensional channel, the capillary suction is enhanced, and the return efficiency of the heat dissipation working fluid is improved.

Benefits of technology

It significantly improves the return flow rate of the heat dissipation medium, reduces thermal resistance, and enhances the temperature uniformity and heat diffusion performance of the heat spreader.

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Abstract

The utility model relates to the technical field of temperature uniformizing plates, and particularly provides a temperature uniformizing plate with a specially arranged wick, which comprises an upper cover plate, a lower cover plate and a lower cover plate, the upper liquid absorbing core is arranged in the upper accommodating groove; a plurality of upper fixing holes are formed in the upper liquid absorbing core; the lower liquid absorbing core is provided with a plurality of lower fixing holes which are in one-to-one correspondence with the upper fixing holes; the lower cover plate is provided with a lower accommodating groove, and the lower liquid absorbing core is arranged in the lower accommodating groove; the plurality of backflow supporting columns are arranged in the plurality of lower fixing holes and the plurality of upper fixing holes; the two ends of the backflow supporting columns abut against the upper cover plate and the lower cover plate respectively. A multi-dimensional channel is constructed through the axial backflow gaps and the radial backflow gaps, the capillary suction force of the backflow supporting columns is enhanced, a working medium evaporated and rising to the upper cover plate in the heating area can be efficiently drained to the heating area of the lower cover plate, rapid circulation is formed, and therefore the heat resistance is remarkably reduced, and the temperature equalizing capacity is improved; the problem that a traditional columnar supporting structure can only provide mechanical supporting and cannot accelerate working medium backflow is solved.
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Description

Technical Field

[0001] This application relates to the field of temperature distribution plate technology, and more particularly to a temperature distribution plate with a specially arranged liquid absorption core. Background Technology

[0002] Heat spreaders have the function of rapid heat conduction and heat diffusion, and are widely used in the heat conduction of electronic components.

[0003] However, existing heat spreaders have structural strength defects and are prone to local dents in the direction of the upper and lower covers. In order to maintain structural strength, a large number of columnar support structures are set in the cavity. A single columnar support structure can only play the role of supporting strength and cannot speed up the flow of heat dissipation medium from the upper cover to the heating area of ​​the lower cover, resulting in poor actual temperature uniformity of the heat spreader.

[0004] Therefore, existing technologies have defects and shortcomings, and need further improvement and development. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of this application is to provide a heat spreader with a special arrangement of liquid absorption core, which aims to solve the problem that the column support structure of the heat spreader in the prior art can only play a role in supporting strength, but cannot accelerate the flow of heat dissipation medium from the upper cover to the heating zone of the lower cover, resulting in poor actual temperature uniformity of the heat spreader.

[0006] The technical solution adopted by this application to solve the technical problem is as follows: a heat-dissipating plate with a specially arranged liquid-absorbing core for heat conduction of electronic components, comprising:

[0007] Upper cover plate, the upper cover plate having an upper receiving groove;

[0008] An upper suction core is disposed in the upper receiving groove; the upper suction core is provided with a plurality of upper fixing holes;

[0009] The lower suction core is provided with a plurality of lower fixing holes that correspond one-to-one with a plurality of upper fixing holes;

[0010] The lower cover plate has a lower receiving groove, and the lower suction core is disposed in the lower receiving groove; the lower receiving groove is used to weld the upper receiving groove to form a receiving cavity;

[0011] A plurality of return flow support columns are disposed in a plurality of lower fixing holes and a plurality of upper fixing holes; the two ends of the plurality of return flow support columns respectively abut against the upper cover plate and the lower cover plate;

[0012] Among them, several of the return support columns are provided with axial return gaps and radial return gaps. The axial return gaps and radial return gaps are used to increase the capillary suction of the return support columns and accelerate the return speed of the heat dissipation working fluid.

[0013] Optionally, each of the aforementioned return support columns includes an upper return column and a lower return column. One end of the upper return column abuts against the upper cover plate, the other end of the upper return column abuts against one end of the lower return column, and the other end of the lower return column abuts against the lower cover plate.

[0014] Optionally, the radial reflux gap is disposed at the abutment of the upper reflux column and the lower reflux column;

[0015] The axial return gap is located on the axis of the upper and lower return columns.

[0016] Optionally, the width of the radial return gap is smaller than the width of the axial return gap.

[0017] Optionally, the axial reflux gap divides the upper reflux column and the lower reflux column into two, four, six, or eight parts.

[0018] Optionally, the lower cover plate has a heating zone and a non-heating zone at one end away from the upper cover plate, and the non-heating zone surrounds the heating zone; the heating zone is used to contact a heat source.

[0019] Optionally, the heating zone is provided with a heating boss.

[0020] Optionally, the upper and lower suction cores are disposed in the cavity of the receiving cavity corresponding to the non-heated zone.

[0021] Optionally, the number of return support columns provided in the heating zone is less than the number of return support columns provided in the non-heating zone.

[0022] Optionally, the specially arranged temperature equalization plate of the liquid absorption core also includes a water injection port, which is located at the edge of the upper cover plate and the lower cover plate; the water injection port is connected to the receiving cavity, and the water injection port is used to inject ultrapure water into the receiving cavity.

[0023] Compared with existing technologies, this application provides a heat spreader with a specially arranged liquid-absorbing core. This heat spreader, through several return support columns, provides support in maintaining the distance between the upper and lower cover plates and enhancing structural strength, further improving the return efficiency of the heat dissipation working fluid. By constructing multi-dimensional channels through axial and radial return gaps, the capillary suction of the return support columns is enhanced, allowing the working fluid evaporating and rising to the upper cover plate in the heating zone to be efficiently guided to the heating zone of the lower cover plate, forming a rapid circulation. This significantly reduces thermal resistance, improves temperature uniformity, and solves the problem that traditional columnar support structures can only provide mechanical support and cannot accelerate the return of the working fluid. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural diagram of the temperature equalization plate with a specially arranged liquid absorption core provided in this application;

[0025] Figure 2 This is a three-dimensional exploded structural diagram of a temperature equalization plate with a specially arranged liquid suction core provided in this application;

[0026] Figure 3 This is another three-dimensional exploded structural diagram of the temperature equalization plate with a specially arranged liquid suction core provided in this application;

[0027] Figure 4 This is a three-dimensional structural diagram of a return support column of a temperature equalization plate with a specially arranged liquid suction core provided in this application;

[0028] Figure 5 This is another three-dimensional exploded structural diagram of the temperature equalization plate with a specially arranged liquid absorption core provided in this application.

[0029] Explanation of reference numerals in the attached figures:

[0030] 10. Temperature equalization plate with specially arranged liquid suction core; 11. Upper cover plate; 111. Upper receiving groove; 12. Upper liquid suction core; 121. Upper fixing hole; 13. Lower liquid suction core; 131. Lower fixing hole; 14. Lower cover plate; 141. Lower receiving groove; 15. Return support column; 151. Axial return gap; 152. Radial return gap; 153. Upper return column; 154. Lower return column; 142. Heating zone; 143. Non-heating zone; 1421. Heating boss; 16. Water inlet. Detailed Implementation

[0031] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0032] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0033] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0034] Please refer to the following: Figures 1 to 5The first embodiment of this application provides a heat spreader 10 with a specially arranged liquid-absorbing core for heat conduction of electronic components. The heat spreader 10 with the specially arranged liquid-absorbing core includes an upper cover plate 11, a lower cover plate 14, an upper liquid-absorbing core 12, a lower liquid-absorbing core 13, a plurality of return support columns 15, and water inlets 16 disposed at the edges of the upper cover plate 11 and the lower cover plate 14. The upper cover plate 11 is provided with an upper receiving groove 111 for accommodating the upper liquid-absorbing core 12, and the upper liquid-absorbing core 12 is provided with a plurality of upper fixing holes 121; the lower cover plate 14 is provided with a lower receiving groove 141 for accommodating the lower liquid-absorbing core 13, and the lower liquid-absorbing core 13 is provided with a plurality of lower fixing holes 131, and the plurality of upper fixing holes 121 and the plurality of lower fixing holes 131 are arranged in a one-to-one correspondence. The upper receiving groove 111 and the lower receiving groove 141 are welded together to form a closed receiving cavity for injecting ultrapure water as a heat dissipation working fluid. Several reflux support columns 15 are inserted into corresponding upper fixing holes 121 and lower fixing holes 131, with their ends abutting against the upper cover plate 11 and the lower cover plate 14 respectively, to support the structure between the upper cover plate 11 and the lower cover plate 14. The reflux support columns 15 are provided with axial reflux gaps 151 and radial reflux gaps 152 to enhance capillary suction and improve the reflux capacity of the working fluid within the receiving cavity. One end of the lower cover plate 14 is provided with a heating zone 142 and a non-heating zone 143, with the non-heating zone 143 surrounding the heating zone 142; the heating zone 142 is provided with a heating boss 1421 for contact with an external heat source. The upper suction core 12 and the lower suction core 13 are arranged in the accommodating cavity corresponding to the non-heating zone 143, and a number of reflux support columns 15 are arranged in the non-heating zone 143.

[0035] Please refer to the following: Figures 1 to 5 In actual operation, after the heating zone 142 comes into contact with the heat source, the heat dissipation working fluid injected into the accommodating cavity rapidly vaporizes in the heating zone 142. The vapor rises along the cavity space to the area of ​​the upper cover plate 11 and releases heat. Specifically, a cooling fan, a cold pump, or other heat dissipation equipment can be installed at the end of the upper cover plate 11 away from the lower cover plate 14. The condensed liquid working fluid is guided by the upper suction core 12 to the upper fixing hole 121 under capillary action, and then flows back to the lower fixing hole 131 through several return support columns 15. Finally, it is attracted by the lower suction core 13 and guided to the heating zone 142, realizing the continuous evaporation and condensation cycle of the working fluid. The axial return gaps 151 and radial return gaps 152 set in the several return support columns 15 together form a multi-dimensional capillary loop, which not only increases the return speed of the working fluid inside the support columns, but also enhances the overall heat conduction path continuity and effectively reduces thermal resistance. In particular, the number of reflux support columns 15 in the non-heating zone 143 is greater than that in the heating zone 142, which further enhances the working fluid reflux capability of the non-heating zone 143, enabling the condensate to flow back to the heating zone 142 quickly and stably.

[0036] The upper and lower suction cores 12 and 13, positioned in the non-heating zone 143, create a dense and continuous capillary channel system, significantly improving the reflux efficiency of the heat dissipation medium. Ultrapure water can be injected into the accommodating cavity as the working medium through the water inlet 16, ensuring the vacuum seal and unobstructed capillary circuit of the cavity. This arrangement of the suction cores on the heat spreader 10 not only provides structural strength support but also accelerates the reflux of the working medium through multiple capillary reflux paths, improving temperature uniformity and achieving more efficient heat conduction and diffusion.

[0037] Please refer to the following: Figures 1 to 3 In some embodiments, the specially arranged temperature equalization plate 10 of the liquid-absorbing core includes an upper cover plate 11, a lower cover plate 14, an upper liquid-absorbing core 12, a lower liquid-absorbing core 13, and a plurality of return support columns 15; the upper cover plate 11 has an upper receiving groove 111; the upper receiving groove 111 is used to receive the upper liquid-absorbing core 12; the upper liquid-absorbing core 12 is disposed in the upper receiving groove 111; the upper liquid-absorbing core 12 is provided with a plurality of upper fixing holes 121; the lower liquid-absorbing core 13 is provided with a plurality of lower fixing holes 131 corresponding one-to-one with the plurality of upper fixing holes 121; the lower cover plate 14 has a lower receiving groove 141, the lower liquid-absorbing core 13 is disposed in the upper receiving groove 141, and the lower liquid-absorbing core 13 is disposed in the lower receiving groove 141. The core 13 is disposed in the lower receiving groove 141; the lower receiving groove 141 is used to weld the upper receiving groove 111 to form a receiving cavity; a plurality of return flow support columns 15 are disposed in a plurality of lower fixing holes 131 and a plurality of upper fixing holes 121; the two ends of the plurality of return flow support columns 15 respectively abut against the upper cover plate 11 and the lower cover plate 14; wherein, each of the plurality of return flow support columns 15 is provided with an axial return flow gap 151 and a radial return flow gap 152, the axial return flow gap 151 and the radial return flow gap 152 are used to increase the capillary suction of the return flow support column 15 and accelerate the return speed of the heat dissipation medium. Thus, the plurality of return flow support columns 15 provide support in maintaining the distance between the upper and lower cover plates 14 and enhancing the structural strength, and further improve the return efficiency of the heat dissipation medium. By constructing a multi-dimensional channel through the axial reflux gap 151 and the radial reflux gap 152, the capillary suction of the reflux support column 15 is enhanced, so that the working fluid evaporated and rising to the upper cover plate 11 in the heating zone 142 of the lower cover plate 14 can be efficiently guided to the heating zone 142 of the lower cover plate 14 to form a rapid circulation, thereby significantly reducing thermal resistance and improving temperature uniformity. This solves the problem that the traditional column support structure can only provide mechanical support and cannot accelerate the reflux of the working fluid.

[0038] Please refer to the following: Figure 4In some embodiments, each of the plurality of return support columns 15 includes an upper return column 153 and a lower return column 154. One end of the upper return column 153 abuts against the upper cover plate 11, the other end of the upper return column 153 abuts against one end of the lower return column 154, and the other end of the lower return column 154 abuts against the lower cover plate 14. This optimizes the radial return path, allowing the return working fluid to be driven to return in different directions by capillary force, further improving the uniformity of heat dissipation working fluid distribution and circulation efficiency in the vacuum cavity, and helping to improve the overall thermal response speed and thermal diffusion capability of the heat spreader.

[0039] Please refer to the following: Figure 4 In some embodiments, the radial reflux gap 152 is disposed at the abutment of the upper reflux column 153 and the lower reflux column 154; the axial reflux gap 151 is disposed on the axis of the upper reflux column 153 and the lower reflux column 154. This optimizes the channel structure of the reflux working fluid, ensuring the continuity of the working fluid reflux path in both the longitudinal and transverse directions, so that the working fluid formed after steam condensation can be quickly attracted to the heating zone 142, achieving faster closed-loop circulation of the working fluid, suppressing the local heat accumulation effect, and thus effectively improving the temperature uniformity performance.

[0040] Please refer to the following: Figure 4 In some embodiments, the width of the radial return slit 152 is smaller than the width of the axial return slit 151. Furthermore, by setting the width of the radial return slit 152 to be smaller than the width of the axial return slit 151, the return path exhibits a gradient capillary suction distribution in different directions. Narrow slits provide stronger capillary drive capability, while wide slits provide a larger flow channel, thereby achieving an optimized match between return velocity and driving force.

[0041] In some embodiments, the axial reflux gap 151 divides the upper reflux column 153 and the lower reflux column 154 into two, four, six, or eight parts. Furthermore, by dividing the upper reflux column 153 and the lower reflux column 154 into two, four, six, or eight parts through the axial reflux gap 151, each reflux support column 15 has a multi-channel structure. This further improves the diversion capacity of the working fluid and the number of reflux paths, enhances the overall liquid drainage capacity of the wick, and improves heat diffusion and heat exchange efficiency.

[0042] Please refer to the following: Figure 5In some embodiments, the lower cover plate 14 has a heating zone 142 and a non-heating zone 143 at the end opposite to the upper cover plate 11, with the non-heating zone 143 surrounding the heating zone 142; the heating zone 142 is used to contact the heat source. Furthermore, by dividing the lower cover plate 14 into a heating zone 142 and a non-heating zone 143 on one side, and with the non-heating zone 143 surrounding the heating zone 142, the evaporation and condensation areas of the working fluid are clearly distributed, forming a stable thermal circulation path. This structure facilitates the rapid vaporization of the working fluid in the heating zone 142, and after condensation in the upper cover plate 11, it is guided back to the non-heating zone 143 by the wicking core, and then re-enters the heating zone 142.

[0043] Please refer to the following: Figure 5 In some embodiments, the upper suction core 12 and the lower suction core 13 are disposed in the cavity of the receiving chamber corresponding to the non-heated zone 143. Specifically, the non-heated zone 143 has a lower temperature, which is more suitable for the liquefaction of the working fluid and capillary drainage, so that the suction core can shorten the return path of the working fluid, enhance the capillary drive efficiency, and improve the circulation response speed of the working fluid, thereby significantly improving the overall thermal balance effect of the heat spreader.

[0044] Please refer to the following: Figure 5 In some embodiments, the heating zone 142 is provided with a heating boss 1421. This allows the heating surface to form a larger contact area with the heat source, enhances the concentration of heat source input, and, in conjunction with the capillary structure within the cavity, achieves rapid evaporation, accelerates the thermal cycle, and improves the system's adaptability and response speed to high heat flux densities.

[0045] Please refer to the following: Figure 3 In some embodiments, the number of reflux support columns 15 provided in the heating zone 142 is less than the number of reflux support columns 15 provided in the non-heating zone 143. Furthermore, by having fewer reflux support columns 15 in the heating zone 142 than in the non-heating zone 143, the support structure functionally prioritizes capillary drainage in the non-heating zone 143, which primarily serves as the condensation and reflux driving area. This reduces thermal resistance interference in the heating zone 142, improves evaporation efficiency, and provides a denser capillary drainage channel in the non-heating zone 143, facilitating the formation of an efficient condensation and reflux closed-loop path.

[0046] Please refer to the following: Figure 1In some embodiments, the specially arranged temperature distribution plate 10 of the liquid absorption core further includes a water inlet 16, which is located at the edge of the upper cover plate 11 and the lower cover plate 14. The water inlet 16 communicates with the receiving cavity and is used to inject ultrapure water into the receiving cavity. Furthermore, by providing water inlets 16 communicating with the receiving cavity at the edges of the upper cover plate 11 and the lower cover plate 14, and injecting ultrapure water or other working fluids through the water inlets 16, an interface is provided for subsequent filling, maintenance, or process debugging, further expanding the practicality of the specially arranged temperature distribution plate 10 of the liquid absorption core.

[0047] In some embodiments, the upper cover plate 11, the lower cover plate 14, the upper liquid suction core 12, the lower liquid suction core 13, and the plurality of reflux support columns 15 are all made of oxygen-free copper.

[0048] In some embodiments, one end of the upper return column 153 can be fixedly disposed in the upper cover plate, and the lower return column 154 can be fixedly disposed in the lower cover plate. When the upper cover plate and the lower cover plate are welded, the upper return column 153 and the lower return column 154 abut together. The axial return gap 151 and the radial return gap 152 can be made by laser cutting, and the manufacturing equipment can adopt existing processes.

[0049] In some embodiments, the axial return gap 151 may also be arranged in an S-shape around the upper return column 153 and the lower return column 154, and the width of the gap may gradually decrease along the height.

[0050] In summary, this application provides a heat spreader with a specially arranged liquid-absorbing core for heat conduction of electronic components, comprising: an upper cover plate having an upper receiving groove; an upper liquid-absorbing core disposed in the upper receiving groove; the upper liquid-absorbing core having a plurality of upper fixing holes; a lower liquid-absorbing core having a plurality of lower fixing holes corresponding one-to-one with the plurality of upper fixing holes; a lower cover plate having a lower receiving groove, in which the lower liquid-absorbing core is disposed; the lower receiving groove being used to weld the upper receiving groove to form a receiving cavity; a plurality of return flow support columns disposed in the plurality of lower fixing holes and the plurality of upper fixing holes; the two ends of the plurality of return flow support columns respectively abutting against the upper cover plate and the lower cover plate; wherein, each of the plurality of return flow support columns is provided with an axial return flow gap and a radial return flow gap, the axial return flow gap and the radial return flow gap being used to increase the capillary suction of the return flow support column and accelerate the return speed of the heat dissipation working fluid. Furthermore, by constructing multi-dimensional channels through axial and radial reflux gaps, the capillary suction of the reflux support column is enhanced, enabling the working fluid that evaporates and rises to the upper cover plate in the heating zone to be efficiently guided to the heating zone of the lower cover plate, forming a rapid circulation. This significantly reduces thermal resistance, improves temperature uniformity, and solves the problem that traditional column support structures can only provide mechanical support and cannot accelerate the reflux of the working fluid.

[0051] It should be understood that the application of this application is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A heat spreader with a specially arranged liquid-absorbing core for heat conduction of electronic components, characterized in that, The specially arranged temperature equalization plate of the liquid absorption core includes: Upper cover plate, the upper cover plate having an upper receiving groove; An upper suction core is disposed in the upper receiving groove; the upper suction core is provided with a plurality of upper fixing holes; The lower suction core is provided with a plurality of lower fixing holes that correspond one-to-one with a plurality of upper fixing holes; The lower cover plate has a lower receiving groove, and the lower suction core is disposed in the lower receiving groove; the lower receiving groove is used to weld the upper receiving groove to form a receiving cavity; A plurality of return flow support columns are disposed in a plurality of lower fixing holes and a plurality of upper fixing holes; the two ends of the plurality of return flow support columns respectively abut against the upper cover plate and the lower cover plate; Among them, several of the return support columns are provided with axial return gaps and radial return gaps. The axial return gaps and radial return gaps are used to increase the capillary suction of the return support columns and accelerate the return speed of the heat dissipation working fluid.

2. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 1, characterized in that, Each of the aforementioned return flow support columns includes an upper return flow column and a lower return flow column. One end of the upper return flow column abuts against the upper cover plate, the other end of the upper return flow column abuts against one end of the lower return flow column, and the other end of the lower return flow column abuts against the lower cover plate.

3. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 2, characterized in that, The radial backflow gap is located at the junction of the upper and lower backflow columns; The axial return gap is located on the axis of the upper and lower return columns.

4. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 3, characterized in that, The width of the radial return gap is smaller than the width of the axial return gap.

5. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 4, characterized in that, The axial reflux gap divides the upper reflux column and the lower reflux column into two, four, six, or eight parts.

6. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 1, characterized in that, The lower cover plate has a heating zone and a non-heating zone at one end away from the upper cover plate, and the non-heating zone surrounds the heating zone; the heating zone is used to contact the heat source.

7. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 6, characterized in that, The heating zone is provided with heating bosses.

8. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 7, characterized in that, The upper and lower suction cores are disposed in the cavity of the receiving cavity corresponding to the non-heated zone.

9. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 6, characterized in that, The number of reflux support columns installed in the heating zone is less than the number of reflux support columns installed in the non-heating zone.

10. The temperature equalization plate with a specially arranged liquid-absorbing core according to claim 1, characterized in that, The specially arranged temperature equalization plate of the liquid absorption core also includes a water injection port, which is located at the edge of the upper cover plate and the lower cover plate; the water injection port is connected to the receiving cavity and is used to inject ultrapure water into the receiving cavity.