A wafer storage station

Abstract

This utility model discloses a wafer cassette temporary storage station, including a support cabinet. Each of the four corners of the lower end face of the support cabinet is provided with support feet, and casters are located near the support feet at the four corners of the lower end face of the support cabinet. A control panel is located near the top of the front end face of the support cabinet. This utility model, by incorporating a positioning detection device, allows three sets of on-site sensors to detect the on-site position of the wafer cassette's bottom periphery during temporary storage and retrieval. Simultaneously, an on-site sensor located in the center performs secondary on-site detection, effectively improving the accuracy of on-site detection of the temporarily stored wafer cassettes. Furthermore, a FIID sensor can identify and confirm the stored wafer cassette, effectively improving the accuracy of the overhead crane in storing and retrieving the wafer cassettes, and enhancing the practical performance of the equipment.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing equipment technology, specifically a wafer box temporary storage station. Background Technology

[0002] A wafer cassette storage station is a device used to temporarily store wafer cassettes during the semiconductor manufacturing process. It is designed to optimize material management, improve production efficiency, and ensure the safety and cleanliness of wafers during handling and storage. The storage station is usually located next to the production line to facilitate the rapid transfer of wafers between different process equipment, reduce transportation distance and time, and improve production efficiency.

[0003] For example, the utility model patent disclosed in publication number CN216270544U discloses a wafer cassette storage device, belonging to the field of wafer cassette storage and retrieval technology, specifically a nitrogen cabinet. The nitrogen cabinet is equipped with a four-axis or six-axis robotic arm, with a retractable gripper for grasping the wafer cassette. The nitrogen cabinet has a storage window and a retrieval window for the wafer cassette to pass through. It also has an operation display module for selecting the current wafer cassette storage and retrieval action. Furthermore, the nitrogen cabinet integrates a control module, with the operation display module, robotic arm, and gripper all connected to the control module. This utility model significantly improves the accuracy of wafer cassette storage and retrieval by introducing a robotic arm to complete the intelligent storage and retrieval action, avoiding collisions during wafer cassette storage and retrieval and preventing wafer damage. Secondly, during the entire wafer cassette storage and retrieval process, there is no need to open the nitrogen cabinet door, thereby achieving effective control of particle growth within the nitrogen cabinet.

[0004] Although the aforementioned storage device can perform temporary storage operations on wafer cassettes, the accuracy and stability of the storage station in locating and detecting wafer cassettes are insufficient. It also makes it difficult for the overhead crane to quickly and accurately identify the temporary storage station, thereby reducing the practical performance of the equipment. Therefore, there is an urgent need for a wafer cassette temporary storage station to solve the above-mentioned problems. Utility Model Content

[0005] The purpose of this invention is to provide a wafer storage station to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a wafer storage station, including a support cabinet, wherein each of the four corners of the lower end face of the support cabinet is provided with a support foot, and casters are provided at the four corners of the lower end face of the support cabinet near the support foot; a control panel is provided near the top of the front end face of the support cabinet; and two sets of tri-color warning lights are provided near the side of the top of the support cabinet.

[0007] The communication module consists of two sets, each set located at the top of the carrier cabinet near the center. The communication module is used for identification and docking between the site and the overhead crane.

[0008] A positioning detection device is installed on the upper part of the carrier cabinet, and the positioning detection device is used for in-situ detection and identification.

[0009] Preferably, the positioning detection device includes a support plate, on the lower end face of which are symmetrically arranged in a triangular pattern of in-situ sensors, a FIID sensor is located on the lower end face of the support plate directly in front of the in-situ sensors, and an on-site sensor is located in the middle of the three groups of in-situ sensors. A positioning pin is provided on the upper end face of the support plate near each group of in-situ sensors. A wafer cassette is detachably provided on the upper end face of the support plate, and an alignment holder is provided at the bottom of the wafer cassette.

[0010] Preferably, the wafer cassette is slidably engaged with the upper part of the support plate by means of the alignment bracket and the positioning pin. The sliding engagement of the positioning pin and the alignment bracket facilitates the subsequent rapid placement and retrieval of the wafer cassette by the overhead crane, improving the convenience of storing and retrieving the wafer cassette.

[0011] Preferably, the in-situ sensor is directly opposite the bottom of the alignment card holder, and the in-situ sensor is used to detect the in-situ condition of the wafer cassette. The three sets of in-situ sensors can detect the in-situ condition of the bottom of the wafer cassette, which can improve the accuracy and stability of subsequent wafer cassette storage and placement detection.

[0012] Preferably, the in-situ sensor is directly opposite the wafer cassette, and the in-situ sensor is used to perform in-situ detection of the wafer cassette. The in-situ sensor can perform in-situ detection of the middle part of the wafer cassette, which improves the stability of in-situ detection of the wafer cassette.

[0013] Preferably, the FIID sensor is directly opposite the bottom of the front end face of the wafer cassette. The FIID sensor is used to identify the wafer cassette. The FIID sensor can identify the information of the wafer cassette and thus determine the information of the temporary storage wafer cassette, which is convenient for subsequent retrieval and temporary placement.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] 1. This utility model, by setting up a positioning detection device, enables three sets of on-site sensors to perform on-site detection on the bottom periphery of the wafer box during temporary storage and retrieval. At the same time, the on-site sensor located in the middle can perform secondary on-site detection on the wafer box, effectively improving the accuracy of on-site detection of the temporarily stored wafer box. Meanwhile, the FIID sensor can identify and confirm the stored wafer box, effectively improving the accuracy of the overhead crane in storing and retrieving the wafer box, and improving the practical performance of the equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the main structure of the present utility model;

[0017] Figure 2 This is a side view of the main body of this utility model;

[0018] Figure 3 This is an exploded view of the positioning and detection device of this utility model;

[0019] Figure 4 For the present utility model Figure 3 A magnified view of section II in the image;

[0020] Figure 5 This is a schematic diagram of the positioning and detection device of this utility model;

[0021] Figure 6 For the present utility model Figure 5 A magnified view of a section at point I.

[0022] In the diagram: 1-Communication module, 2-Three-color warning light, 3-Positioning detection device, 4-Carrying cabinet, 5-Cast, 6-Foot cup, 7-Control panel, 31-Wafer box, 32-FIID sensor, 33-Supporting plate, 34-In-place sensor, 35-In-seat sensor, 36-Positioning pin, 37-Alignment slot. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figure 1-6This utility model provides an embodiment of a wafer storage station, including a support cabinet 4. Each of the four corners of the lower end face of the support cabinet 4 is provided with support feet 6, and casters 5 are located at the four corners of the lower end face of the support cabinet 4 near the support feet 6. A control panel 7 is located near the top of the front end face of the support cabinet 4, and two sets of tri-color warning lights 2 are located near the side of the top of the support cabinet 4.

[0025] Communication module 1, there are two sets of communication module 1, and the two sets of communication module 1 are respectively located on the top of the carrier cabinet 4 near the middle. Communication module 1 is used for identification and docking between the site and the overhead crane.

[0026] Positioning detection device 3 is installed on the upper part of the carrier cabinet 4 and is used for in-situ detection and identification.

[0027] like Figure 3 , Figure 4 and Figure 5 The positioning detection device 3 includes a support plate 33. On the lower end face of the support plate 33, there are in-situ sensors 34 arranged in a triangular pattern. A FIID sensor 32 is located on the lower end face of the support plate 33, directly opposite the front of the in-situ sensors 34. An in-situ sensor 35 is located in the middle of the three sets of in-situ sensors 34. A positioning pin 36 is provided on the upper end face of the support plate 33 near each set of in-situ sensors 34. A wafer cassette 31 is detachably provided on the upper end face of the support plate 33, and an alignment holder 37 is provided at the bottom of the wafer cassette 31.

[0028] like Figure 3 The wafer box 31 is slidably engaged on the upper part of the support plate 33 by the alignment bracket 37 and the positioning pin 36. The sliding engagement between the positioning pin 36 and the alignment bracket 37 facilitates the subsequent rapid placement and retrieval of the wafer box 31 by the overhead crane, improving the convenience of storing and retrieving the wafer box 31.

[0029] like Figure 3 and Figure 4 The bottom of the in-situ sensor 34 is directly opposite the bottom of the alignment card holder 37, and the in-situ sensor 34 is used to detect the in-situ state of the wafer cassette 31. The three sets of in-situ sensors 34 can detect the in-situ state of the bottom of the wafer cassette 31, which can improve the accuracy and stability of subsequent detection of the wafer cassette 31 in storage.

[0030] like Figure 4 The on-site sensor 35 is directly opposite the wafer cassette 31 and is used to detect the presence of the wafer cassette 31. The on-site sensor 35 can detect the presence of the middle part of the wafer cassette 31, which improves the stability of the on-site detection of the wafer cassette 31.

[0031] like Figure 5 The FIID sensor 32 is directly opposite the bottom of the front end of the wafer cassette 31. The FIID sensor 32 is used to identify the wafer cassette 31. The FIID sensor 32 can identify the information of the wafer cassette 31 and thus determine the information of the temporary storage wafer cassette 31, which is convenient for subsequent retrieval and temporary placement.

[0032] Working principle: Before removing wafer cassette 31, the external wafer cassette crane can first confirm the connection with the site through the communication module 1, thereby identifying the site as the site for wafer cassette 31 to be retrieved. After confirmation, the crane can limit the wafer cassette 31 and then lift it out. When temporarily storing the wafer cassette 31, the crane can locate the upper part of the carrier cabinet 4 after recognizing the communication module 1. Then the crane will gradually move the wafer cassette 31 down. At this time, the alignment card 37 at the bottom of the wafer cassette 31 can be positioned on the upper part of the support card plate 33 through three sets of positioning pins 36. At the same time, the in-situ sensor 34 and the on-site sensor 35 can detect the in-situ storage of the wafer cassette. The FIID sensor 32 located at the front of the support card plate 33 can identify the data of the wafer cassette 31 and determine the information of the temporarily stored wafer cassette 31, which is convenient for the crane to retrieve it again later.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer storage station, comprising a support cabinet (4), wherein each of the four corners of the lower end face of the support cabinet (4) is provided with a support foot cup (6), and casters (5) are provided at the four corners of the lower end face of the support cabinet (4) near the foot cup (6), a control panel (7) is provided at the upper part of the front end face of the support cabinet (4), and two sets of tri-color warning lights (2) are provided at the top of the support cabinet (4) near the side, characterized in that: The communication module (1) is provided in two sets, and the two sets of the communication module (1) are respectively located at the top of the carrier cabinet (4) near the middle. The communication module (1) is used for the identification and docking of the site and the overhead crane. Positioning detection device (3), the positioning detection device (3) is set on the upper part of the carrier cabinet (4), and the positioning detection device (3) is used for in-situ detection and identification; The positioning detection device (3) includes a support plate (33). The lower end face of the support plate (33) is symmetrically provided with in-situ sensors (34) arranged in a triangular pattern. A FIID sensor (32) is provided on the lower end face of the support plate (33) directly opposite the front of the in-situ sensors (34). An in-situ sensor (35) is provided in the middle of the three sets of in-situ sensors (34). A positioning pin (36) is provided on the upper end face of the support plate (33) near each set of in-situ sensors (34). A wafer cassette (31) is detachably provided on the upper end face of the support plate (33), and an alignment holder (37) is provided at the bottom of the wafer cassette (31).

2. The wafer cassette storage station according to claim 1, characterized in that: The wafer cassette (31) is adapted to the positioning pin (36) via the alignment bracket (37) and then slidably latched onto the upper part of the support plate (33).

3. A wafer cassette storage station according to claim 2, characterized in that: The in-situ sensor (34) is directly opposite the bottom of the alignment card holder (37), and the in-situ sensor (34) is used to detect the in-situ status of the wafer cassette (31).

4. A wafer cassette storage station according to claim 2, characterized in that: The in-situ sensor (35) is directly opposite the wafer cassette (31), and the in-situ sensor (35) is used to detect the presence of the wafer cassette (31).

5. A wafer cassette storage station according to claim 2, characterized in that: The FIID sensor (32) is directly opposite the bottom of the front end face of the wafer cassette (31), and the FIID sensor (32) is used to identify the wafer cassette (31).

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