A showerhead cleaning system

Abstract

The utility model relates to cleaning equipment technical field discloses a kind of shower head cleaning systems, applied to the cleaning of developing equipment shower head, comprising: cleaning tank, cleaning structure, drying structure and controller;By integrating the cleaning structure and drying structure and being set on the cleaning tank, and being controlled by controller, the integration operation of shower head cleaning and drying process is realized, shower head can be vertically slidably arranged along the cleaning tank, shower head slides to first position, cleaning structure drives cleaning fluid to realize immersion cleaning to shower head, drying structure is located in the drying area above the cleaning tank mouth, so that shower head can be dried in first time after leaving cleaning fluid, reduce droplet residue, reduce pollution risk, further guarantee the working stability of shower head and developing quality.

Description

Technical Field

[0001] This utility model relates to the field of cleaning equipment technology, specifically to a nozzle cleaning system. Background Technology

[0002] With the continuous development of semiconductor manufacturing processes, the requirements for cleanliness and uniformity in the post-photolithography development process are becoming increasingly stringent. In the photolithography pattern development process, the coating and developing machine, as a key piece of equipment in wafer fabrication, directly affects the integrity of the wafer pattern and subsequent yield due to the stability of its development process.

[0003] Currently, most developing equipment uses static developing methods, with the main developing component being the nozzle structure. Existing nozzles have numerous nozzles on their surface, through which the developer flows continuously in a "waterfall" pattern, uniformly covering the wafer surface to achieve the desired developing effect. The developer distribution characteristics and spray uniformity of the nozzle play a crucial role in the developing quality.

[0004] In practical applications, printheads typically employ scanning spraying, where the printhead moves laterally along the wafer to cover it with developer from one side to the other. However, this spraying method results in indirect liquid contact between the printhead and wafer, as the developer fills the gap between them during spraying, forming a liquid film. When tiny particles or contaminants are present at the wafer edge, these particles or contaminants can easily migrate with the developer towards the printhead, contaminating the lower edge structure of the printhead or forming crystal deposits. This affects the stability and uniformity of the developer distribution, and can even lead to nozzle blockage and pattern defects.

[0005] In the prior art, cleaning the nozzle can effectively prevent the nozzle from becoming clogged. However, during the cleaning process, cleaning fluid remains in the nozzle, which can affect the development effect in the next coating and cause pattern defects. Utility Model Content

[0006] In view of this, the present invention provides a nozzle cleaning system to solve the problem in the prior art of cleaning nozzles and avoiding nozzle clogging while reducing cleaning fluid residue in the nozzles.

[0007] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0008] This utility model provides a printhead cleaning system for cleaning printheads in developing equipment, comprising: a cleaning tank, a cleaning structure, a drying structure, and a controller; the cleaning tank is suitable for holding cleaning fluid; the cleaning structure is disposed within the cleaning tank and is adapted to drive the cleaning fluid to clean the printhead; the drying structure is disposed at the opening of the cleaning tank and forms a drying zone above the opening of the cleaning tank to dry the printhead; both the cleaning structure and the drying structure are communicatively connected to the controller; the printhead can slide along the vertical direction of the cleaning tank to have a first position within the cleaning tank and a second position outside the cleaning tank, and the drying zone is located between the first position and the second position; the controller controls the cleaning structure to start so that the printhead is in a cleaning state at the first position, or the controller controls the drying structure to start so that the printhead is in a drying state in the drying zone.

[0009] It has the following advantages: By integrating the cleaning and drying structures on the cleaning tank and controlling them with a controller, the cleaning and drying processes of the printhead can be integrated. The printhead can slide vertically along the cleaning tank. When the printhead slides to the first position, the cleaning structure immerses the printhead in the cleaning liquid. The drying structure is located in the drying zone above the opening of the cleaning tank, which allows the printhead to be dried immediately after leaving the cleaning liquid, reducing droplet residue, lowering the risk of contamination, and further ensuring the stability of printhead operation and the quality of development.

[0010] According to some embodiments of the present invention, the cleaning structure is an ultrasonic cleaning structure, which includes multiple ultrasonic transducers that are evenly spaced on the inner wall of the cleaning tank.

[0011] According to some embodiments of the present invention, the outer periphery of the ultrasonic transducer is provided with a waterproof coating.

[0012] According to some embodiments of the present invention, the drying structure is a hot air blowing structure, and the drying structure is provided in multiple ways and is evenly distributed along the outer edge of the opening of the cleaning tank.

[0013] According to some embodiments of the present invention, the drying port of the drying structure is arranged facing the inner side of the cleaning tank, and its axial direction is set at an angle to the vertical direction, with the angle being 10° to 30°.

[0014] According to some embodiments of the present invention, the nozzle cleaning system further includes a water level monitoring element disposed in the cleaning tank. The controller and the water level monitoring element are communicatively connected. The side wall of the cleaning tank is provided with a water inlet, and the bottom of the cleaning tank is provided with a water outlet. The water level monitoring element is adapted to monitor the water level height parameter of the cleaning fluid in the cleaning tank and feed it back to the controller. The controller receives the water level height parameter to control the opening and closing of the water inlet and the water outlet.

[0015] According to some embodiments of the present invention, the controller is provided with a first water level threshold, a second water level threshold and a third water level threshold, wherein the first water level threshold is lower than the second water level threshold;

[0016] When the nozzle is in cleaning mode, the controller controls the opening and closing of the inlet and outlet to allow the cleaning tank to have replenishment, cessation, and discharge states. When the water level is below the first water level threshold, the controller controls the inlet to open and the outlet to close, so that the cleaning tank is in the replenishment state. When the water level is above the second water level threshold, the controller controls both the inlet and outlet to close, so that the cleaning tank is in the cessation state.

[0017] According to some embodiments of the present invention, the controller is provided with a third water level threshold, the second water level threshold is lower than the third water level threshold, and the third water level threshold is lower than the installation height of the drying structure;

[0018] When the nozzle is in cleaning mode, the water level is higher than the third water level threshold, or the nozzle is in drying mode, the controller controls the inlet to close and the outlet to open, so that the cleaning tank is in drainage mode.

[0019] According to some embodiments of the present invention, the bottom position of the ultrasonic transducer is lower than the first water level threshold, and its top position is located between the first water level threshold and the second water level threshold.

[0020] According to some embodiments of the present invention, the nozzle cleaning system further includes a position sensor communicatively connected to the controller. The position sensor is located at the second position and is adapted to monitor the position information of the nozzle and feed it back to the controller. The controller controls the closing of the drying structure based on the position information. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a nozzle cleaning system provided in some embodiments of the present invention;

[0023] Figure 2 This is a cross-sectional schematic diagram of a nozzle cleaning system provided in some embodiments of the present invention;

[0024] Figure 3 This is a top view of a nozzle cleaning system provided in some embodiments of the present invention.

[0025] Explanation of reference numerals in the attached figures:

[0026] 1. Cleaning tank; 11. Water inlet; 12. Water outlet; 2. Cleaning structure; 21. Ultrasonic transducer; 3. Drying structure; 4. Nozzle; 5. Position sensor; 6. Water level monitoring element. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0031] Reference Figure 1 As shown in some embodiments of this utility model, a nozzle 4 cleaning system is provided for cleaning nozzles 4 in a developing device. The system includes: a cleaning tank 1, a cleaning structure 2, a drying structure 3, and a controller. The cleaning tank 1 is suitable for holding cleaning fluid. The cleaning structure 2 is located within the cleaning tank 1 and is adapted to drive the cleaning fluid to clean the nozzle 4. The drying structure 3 is located at the opening of the cleaning tank 1 and forms a drying zone above the opening of the cleaning tank 1 to dry the nozzle 4. Both the cleaning structure 2 and the drying structure 3 are communicatively connected to the controller. The nozzle 4 can slide along the vertical direction of the cleaning tank 1, allowing it to have a first position within the cleaning tank 1 and a second position outside the cleaning tank 1. The drying zone is located between the first and second positions. The controller activates the cleaning structure 2 to enable the nozzle 4 to be in a cleaning state in the first position, or activates the drying structure 3 to enable the nozzle 4 to be in a drying state in the drying zone.

[0032] Specifically, by integrating the cleaning structure 2 and the drying structure 3 onto the cleaning tank 1 and controlling it with a controller, the cleaning and drying processes of the nozzle 4 are integrated. The nozzle 4 can slide vertically along the cleaning tank 1. When the nozzle 4 slides to the first position, the cleaning structure 2 immerses the nozzle 4 in the cleaning liquid for cleaning. The drying structure 3 is located in the drying zone above the opening of the cleaning tank 1, which allows the nozzle 4 to be dried immediately after leaving the cleaning liquid, reducing droplet residue, lowering the risk of contamination, and further ensuring the working stability and developing quality of the nozzle 4.

[0033] Understandably, the cleaning tank 1 has a cavity for holding the cleaning fluid, with the depth of the cavity in a vertical direction. The opening size of the cleaning tank 1 is larger than the size of the nozzle 4. When the nozzle 4 slides vertically, it can pass through the opening without obstruction to be in the first position inside the cleaning tank 1, or slide out to the second position outside the cleaning tank 1, avoiding interference and collision between the opening and the nozzle 4. The drying structure 3 is located at the opening, forming a drying zone above the cleaning tank 1. After cleaning, the nozzle 4 can dry during its ascent, thus preventing the accumulation of cleaning fluid in the nozzle 4, reducing droplet residue, and lowering the risk of contamination.

[0034] The controller enables the start-up control of the cleaning structure 2 and the drying structure 3. After cleaning is completed, the controller controls the cleaning structure 2 to shut down and controls the drying structure 3 to start, thereby achieving automated control and improving efficiency.

[0035] In some embodiments of this utility model, the cleaning structure 2 is an ultrasonic cleaning structure 2, which includes an ultrasonic transducer 21. Multiple ultrasonic transducers 21 are provided and are evenly distributed on the inner wall of the cleaning tank 1.

[0036] Reference Figure 2 As shown in the figure, the cleaning structure 2 is an ultrasonic cleaning structure 2. At least one ultrasonic transducer 21 is provided on the side wall of the cleaning tank 1. In order to improve the cleaning efficiency, multiple ultrasonic transducers 21 can be provided on the inner side wall of the cleaning tank 1, and the multiple ultrasonic transducers 21 are evenly spaced to achieve cleaning of the nozzle 4 from multiple angles, so as to improve the cleaning efficiency and cleaning quality.

[0037] In some embodiments of this utility model, the outer periphery of the ultrasonic transducer 21 is provided with a waterproof coating.

[0038] Specifically, the ultrasonic transducer 21 is installed inside the cleaning tank 1 to convert electrical energy into kinetic energy, causing high-frequency vibration of liquid particles. This helps dissolve dirt and enhances the contact between the solvent and the dirt, thereby improving the cleaning efficiency of the nozzle 4. Since the ultrasonic transducer 21 is immersed in the cleaning solution for a long time, a waterproof coating is applied to its outer surface to extend its service life and prevent corrosion of its internal structure and materials.

[0039] Understandably, the cleaning structure 2 can also be configured as a stirring structure or a flushing structure.

[0040] Reference Figure 3 As shown, in some embodiments of this utility model, the drying structure 3 is a hot air blowing structure, and the drying structure 3 is provided in multiple ways and is evenly distributed along the outer edge of the opening of the cleaning tank 1.

[0041] Specifically, the drying structure 3 is set as a hot air blowing structure. In order to improve the drying efficiency and enable the nozzle 4 to dry quickly in the drying zone, multiple drying structures 3 are set on the outer edge of the opening of the cleaning tank 1. The multiple drying structures 3 are evenly spaced to uniformly dry the nozzle 4, improve the drying efficiency and drying quality, reduce droplet residue, and reduce the risk of cross-contamination.

[0042] It is understood that the hot air blowing structure includes a heating body and an air outlet. There is one heating body and multiple air outlets. The multiple air outlets are evenly spaced around the outer edge of the cleaning tank 1. Alternatively, the heating body has one air outlet and multiple air outlets are evenly spaced around the outer edge of the cleaning tank 1.

[0043] Understandably, drying structure 3 can also be configured for ultraviolet drying or microwave drying.

[0044] In some embodiments of this utility model, the drying port of the drying structure 3 is arranged facing the inner side of the cleaning tank 1, and its axial direction is set at an angle to the vertical direction, with an angle of 10° to 30°.

[0045] Specifically, during the vertical sliding and upward movement of the nozzle 4, to ensure thorough drying, the drying port is tilted towards the inside of the cleaning tank 1, with its axis at an angle of 10° to 30° to the vertical direction. This prevents the wind from blowing the cleaning droplets on the nozzle 4 outwards from the cleaning tank 1, causing contamination. The upward-facing drying port directs the airflow upwards towards the nozzle 4, allowing the cleaning droplets to evaporate directly on it.

[0046] In some embodiments of this utility model, the nozzle 4 cleaning system further includes a water level monitoring element 6 disposed in the cleaning tank 1. The controller and the water level monitoring element 6 are communicatively connected. The side wall of the cleaning tank 1 is provided with a water inlet 11, and the bottom of the cleaning tank 1 is provided with a water outlet 12. The water level monitoring element 6 is adapted to monitor the water level height parameter of the cleaning liquid in the cleaning tank 1 and feed it back to the controller. The controller receives the water level height parameter to control the opening and closing of the water inlet 11 and the water outlet 12.

[0047] Specifically, the water level monitoring element 6 monitors the liquid level in the cleaning tank 1, thereby controlling the opening and closing of the inlet 11 and outlet 12 to achieve automated control and ensure cleaning efficiency.

[0048] In some embodiments of this utility model, the controller is provided with a first water level threshold, a second water level threshold, and a third water level threshold, wherein the first water level threshold is lower than the second water level threshold;

[0049] When the nozzle 4 is in the cleaning state, the controller controls the opening and closing of the inlet 11 and the outlet 12 so that the cleaning tank 1 has a replenishment state, a stop state, and a drain state; when the water level parameter is lower than the first water level threshold, the controller controls the inlet 11 to open and the outlet 12 to close so that the cleaning tank 1 is in the replenishment state; when the water level parameter is higher than the second water level threshold, the controller controls both the inlet 11 and the outlet 12 to close so that the cleaning tank 1 is in the stop state.

[0050] Specifically, during the cleaning process, the water level of the cleaning liquid in the cleaning tank 1 will drop due to factors such as evaporation or liquid splashing. To ensure cleaning efficiency, when the water level parameter detected by the water level monitoring element 6 is lower than the first water level threshold, the controller controls the inlet 11 to open and the outlet 12 to close. At this time, the cleaning liquid is replenished to the cleaning tank 1 to ensure that the water level of the cleaning liquid in the cleaning tank 1 meets the cleaning requirements. Until the water level parameter detected by the water level monitoring element 6 is higher than the second water level threshold, the controller controls both the inlet 11 and the outlet 12 to close. At this time, the controller controls the cleaning structure 2 to start, so as to realize the cleaning of the nozzle 4.

[0051] In some embodiments of this utility model, the controller is provided with a third water level threshold, the second water level threshold is lower than the third water level threshold, and the third water level threshold is lower than the installation height of the drying structure 3;

[0052] When nozzle 4 is in cleaning mode and the water level is higher than the third water level threshold, or when nozzle 4 is in drying mode, the controller controls the inlet 11 to close and the outlet 12 to open, so that the cleaning tank 1 is in drainage mode.

[0053] After the nozzle 4 finishes cleaning, the controller closes the inlet 11 and opens the outlet 12. At this time, the nozzle 4 rises vertically, and the controller starts the drying structure 3, putting the nozzle 4 into a drying state. To improve system reliability and prevent excessive liquid level from causing the cleaning fluid to overflow from the tank or damage the drying structure 3, the controller also sets a third water level threshold. When the water level exceeds the third water level threshold, the controller closes the inlet 11 and opens the outlet 12 to achieve drainage.

[0054] In some embodiments of this utility model, the nozzle 4 cleaning system further includes a position sensor 5 that is communicatively connected to the controller. The position sensor 5 is located in a second position and is adapted to monitor the position information of the nozzle 4 and feed it back to the controller. The controller controls the drying structure 3 to close based on the position information.

[0055] Specifically, by setting a position sensor 5 at the second position, the position information includes whether the nozzle 4 is detected as being in position or not. When the nozzle 4 rises vertically and leaves the drying area, the position sensor 5 can no longer detect the nozzle 4 and sends the information of not being detected as being in position to the controller. The controller then controls the drying structure 3 to close, thereby ending the drying process.

[0056] In some embodiments of this utility model, the bottom position of the ultrasonic transducer 21 is lower than the first water level threshold, and its top position is between the first water level threshold and the second water level threshold.

[0057] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A nozzle cleaning system for cleaning nozzles (4) of a developing equipment, characterized in that, include: A cleaning tank (1) is suitable for holding a cleaning solution; A cleaning structure (2) is provided in the cleaning tank (1), and the cleaning structure (2) is adapted to drive the cleaning fluid cleaning nozzle (4). A drying structure (3) is provided at the opening of the cleaning tank (1) and forms a drying zone above the opening of the cleaning tank (1) to facilitate drying the nozzle (4). The controller, the cleaning structure (2) and the drying structure (3) are both communicatively connected to the controller, the nozzle (4) can slide along the vertical direction of the cleaning tank (1) so that the nozzle (4) has a first position inside the cleaning tank (1) and a second position outside the cleaning tank (1), and the drying area is located between the first position and the second position; The controller is adapted to control the activation of the cleaning structure (2) so that the nozzle (4) is in a cleaning state at the first position, or the controller is adapted to control the activation of the drying structure (3) so that the nozzle (4) is in a drying state in the drying zone.

2. The nozzle cleaning system according to claim 1, characterized in that, The cleaning structure (2) is an ultrasonic cleaning structure (2), which includes an ultrasonic transducer (21). Multiple ultrasonic transducers (21) are provided and are evenly distributed on the inner wall of the cleaning tank (1).

3. The nozzle cleaning system according to claim 2, characterized in that, The outer periphery of the ultrasonic transducer (21) is provided with a waterproof coating.

4. The nozzle cleaning system according to claim 1, characterized in that, The drying structure (3) is a hot air blowing structure. The drying structure (3) has multiple structures that are evenly spaced along the outer edge of the opening of the cleaning tank (1).

5. The nozzle cleaning system according to claim 4, characterized in that, The drying port of the drying structure (3) is arranged facing the inside of the cleaning tank (1), and its axial direction is set at an angle of 10° to 30° with the vertical direction.

6. The nozzle cleaning system according to claim 2, characterized in that, It also includes a water level monitoring element (6) installed in the cleaning tank (1), the controller and the water level monitoring element (6) are communicatively connected, the side wall of the cleaning tank (1) is provided with a water inlet (11), the bottom of the cleaning tank (1) is provided with a water outlet (12), the water level monitoring element (6) is adapted to monitor the water level height parameter of the cleaning liquid in the cleaning tank (1) and feed it back to the controller, the controller receives the water level height parameter to control the opening and closing of the water inlet (11) and the water outlet (12).

7. The nozzle cleaning system according to claim 6, characterized in that, The controller is provided with a first water level threshold, a second water level threshold and a third water level threshold, wherein the first water level threshold is lower than the second water level threshold; When the nozzle (4) is in the cleaning state, the controller is adapted to control the opening and closing of the inlet (11) and the outlet (12) so that the cleaning tank (1) has a replenishment state, a stop state and a discharge state; when the water level parameter is lower than the first water level threshold, the controller is adapted to control the inlet (11) to open and the outlet (12) to close so that the cleaning tank (1) is in the replenishment state; when the water level parameter is higher than the second water level threshold, the controller is adapted to control both the inlet (11) and the outlet (12) to close so that the cleaning tank (1) is in the stop state.

8. The nozzle cleaning system according to claim 7, characterized in that, The controller is provided with a third water level threshold, the second water level threshold is lower than the third water level threshold, and the third water level threshold is lower than the installation height of the drying structure (3); When the nozzle (4) is in the cleaning state, the water level is higher than the third water level threshold, or the nozzle (4) is in the drying state, the controller controls the inlet (11) to close and the outlet (12) to open, so that the cleaning tank (1) is in the draining state.

9. The nozzle cleaning system according to claim 8, characterized in that, The bottom position of the ultrasonic transducer (21) is lower than the first water level threshold, and its top position is between the first water level threshold and the second water level threshold.

10. The nozzle cleaning system according to claim 1, characterized in that, It also includes a position sensor (5) that is communicatively connected to the controller. The position sensor (5) is located at the second position and is adapted to monitor the position information of the nozzle (4) and feed it back to the controller. The controller controls the closing of the drying structure (3) based on the position information.

Images