A high-precision laser welding device for sputtering thin film cores

Abstract

The utility model relates to welding device technical field, concretely is a kind of sputtering thin film core high-precision laser welding device, including closed box, the inside of closed box is provided with laser welding head, electrostatic dust removal system, gas circulating device and residue collection device, the inside top surface of closed box is fixedly connected with mechanical arm. In the utility model, through the cooperation of gas circulating device, electrostatic dust removal system and residue collection device, the purpose that air in closed box is circulated and purified is realized, reduce dust, impurity and other pollutants in the air in closed box, significantly reduce thin film pollution risk, inert gas is filled into closed box by air inlet pipe, oxidation is avoided in inert gas environment, improve welding reliability, through temperature and humidity control system, the temperature and humidity environment in closed box can be controlled, avoid temperature and humidity fluctuation to influence welding consistency, ensure that welding is carried out in suitable temperature and humidity environment, improve welding quality.

Description

Technical Field

[0001] This utility model relates to the field of welding equipment technology, and in particular to a high-precision laser welding device for sputtered thin film cores. Background Technology

[0002] During the sputtered thin film core welding process, particulate contamination, oxidation, and temperature and humidity fluctuations must be avoided; otherwise, the film performance will deteriorate, and the internal weld seams will oxidize and blacken, resulting in insufficient flatness. Traditional laser welding equipment has the following problems: 1. Insufficient cleanliness of the welding chamber, allowing dust or metal spatter to easily adhere to the film surface; 2. Poor sealing, allowing outside air to enter and causing oxidation; 3. Lack of dynamic dust removal and temperature and humidity control, affecting welding consistency.

[0003] Therefore, there is an urgent need for a dedicated laser welding device that can achieve a highly clean and inert environment. Utility Model Content

[0004] The purpose of this invention is to solve the problems mentioned in the background art and to propose a high-precision laser welding device for sputtered thin film cores.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a high-precision laser welding device for sputtered thin film cores, comprising a sealed box, wherein a laser welding head, an electrostatic dust removal system, a gas circulation device, and a residue collection device are arranged inside the sealed box; a robotic arm is fixedly connected to the top surface inside the sealed box; the welding head is fixedly connected to the end of the robotic arm; a visual positioning system is provided on the surface of the laser welding head; the electrostatic dust removal system includes a shell, a cover, a primary filter plate, a high-efficiency filter plate, and an electrostatic dust removal module; the primary filter plate and the high-efficiency filter plate are arranged inside the cover; the electrostatic dust removal module is fixed inside the shell and located above the high-efficiency filter plate; the dust removal system is fixedly connected to the gas circulation device through a connecting pipe; an air inlet pipe is fixedly connected to the top of the sealed box; and a temperature and humidity control system is fixedly connected to the surface of the sealed box.

[0006] Preferably, the inner surface of the sealed enclosure is coated with an antistatic coating.

[0007] Preferably, the surface of the sealed enclosure is provided with a door, and the surface of the door is embedded with an observation window.

[0008] Preferably, the temperature and humidity control system employs a combination of semiconductor temperature control and condensation dehumidification.

[0009] Preferably, an exhaust pipe is fixedly connected to the bottom of the sealed box, and a solenoid valve is fixedly connected to the surface of the exhaust pipe.

[0010] Preferably, a welding clamp is provided inside the sealed box. The welding clamp includes a U-shaped frame, and a bidirectional lead screw is rotatably connected to the inner side of the U-shaped frame. A drive block is threadedly connected to the surface of the bidirectional lead screw, and a clamping plate is fixedly connected to the surface of the drive block. A handle is fixedly connected to one end of the bidirectional lead screw.

[0011] Preferably, a guide rod is fixedly connected to the inner side of the U-shaped frame, and a guide hole is opened on the surface of the drive block, with the guide rod inserted into the guide hole.

[0012] Preferably, a fixing seat is fixedly connected to the surface of the housing, a fixing block is fixedly connected to the surface of the housing cover, a screw is threadedly connected to the inside of the fixing block, the top end of the screw is threadedly connected to the inside of the fixing seat, and a knob is fixedly connected to the bottom end of the screw.

[0013] Preferably, a sealing ring is provided between the housing and the cover, and the sealing ring is made of elastic rubber.

[0014] Preferably, there are four sets of screws, and the four sets of screws are circumferentially distributed on the surface of the cover.

[0015] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0016] 1. In this utility model, the gas circulation device, electrostatic dust removal system, and residue collection device work together to achieve the purpose of circulating and purifying the air inside the sealed chamber, reducing dust, impurities, and other pollutants in the air inside the sealed chamber, significantly reducing the risk of membrane contamination. Inert gas is introduced into the sealed chamber through the air inlet pipe. The inert gas environment avoids oxidation and improves welding reliability. The temperature and humidity control system can control the temperature and humidity environment inside the sealed chamber, avoiding the impact of temperature and humidity fluctuations on welding consistency, ensuring that welding is carried out in a suitable temperature and humidity environment, and improving welding quality.

[0017] 2. In this utility model, by turning the knob, the knob drives the screw to rotate inside the fixed block and the top of the screw to disengage from the inside of the fixed seat, which facilitates the disassembly and installation of the shell cover of the electrostatic dust removal system. It also facilitates the regular inspection, cleaning or replacement of internal components such as the primary filter plate and high-efficiency filter plate, ensuring the normal and efficient operation of the dust removal system and maintaining a good dust removal effect. Attached Figure Description

[0018] Figure 1 This invention provides a schematic diagram of a high-precision laser welding device for sputtered thin film cores;

[0019] Figure 2 This invention provides an internal schematic diagram of a high-precision laser welding device for sputtered thin film cores;

[0020] Figure 3 This invention provides a partially exploded schematic diagram of a high-precision laser welding device for sputtered thin film cores.

[0021] Figure 4 A cross-sectional view of a high-precision laser welding device for sputtered thin film cores is provided for this utility model;

[0022] Figure 5 An exploded view of the welding clamp of a high-precision laser welding device for sputtered thin film cores proposed in this utility model.

[0023] Legend:

[0024] 1. Sealed enclosure; 2. Enclosure door; 3. Gas circulation device; 4. Electrostatic dust removal system; 401. Shell; 402. Shell cover; 403. High-efficiency filter plate; 404. Primary filter plate; 405. Electrostatic dust removal module; 5. Connecting pipe; 6. Residue collection device; 7. Welding clamp; 701. U-shaped frame; 702. Two-way lead screw; 703. Drive block; 704. Clamping plate; 705. Handle; 706. Guide rod; 707. Guide hole; 8. Laser welding head; 9. Vision positioning system; 10. Air inlet pipe; 11. Observation window; 12. Fixing block; 13. Fixing base; 14. Screw; 15. Knob; 16. Robotic arm; 17. Temperature and humidity control system; 18. Sealing ring; 19. Exhaust pipe; 20. Solenoid valve. Detailed Implementation

[0025] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0026] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0027] Example 1: As Figure 1 - Figure 5As shown, this utility model provides a technical solution: a high-precision laser welding device for sputtered thin film cores, including a sealed box 1. Inside the sealed box 1 are a laser welding head 8, an electrostatic dust removal system 4, a gas circulation device 3, and a residue collection device 6. A robotic arm 16 is fixedly connected to the top surface inside the sealed box 1. The welding head is fixedly connected to the end of the robotic arm 16. A vision positioning system 9 is provided on the surface of the laser welding head 8. The electrostatic dust removal system 4 includes a housing 401, a cover 402, a primary filter plate 404, a high-efficiency filter plate 403, and an electrostatic dust removal module 405. The primary filter plate 404 and the high-efficiency filter plate 403 are disposed inside the cover 402. The electrostatic dust removal module 405 is fixed inside the housing 401 and located above the high-efficiency filter plate 403. The dust removal system is fixedly connected to the gas circulation device 3 via a connecting pipe 5. An air inlet pipe 10 is fixedly connected to the top of the sealed box 1. A temperature and humidity control system 17 is fixedly connected to the surface of the sealed box 1. The inner surface of the sealed box 1 is coated with an antistatic coating. A door 2 is provided on the surface of the sealed box 1. An observation window 11 is embedded in the surface of the door 2. The temperature and humidity control system 17 adopts semiconductor temperature control and condensation dehumidification working in tandem. An exhaust pipe 19 is fixedly connected to the bottom of the sealed box 1. A solenoid valve 20 is fixedly connected to the surface of the exhaust pipe 19. A welding clamp 7 is provided inside the sealed box 1. The welding clamp 7 includes a U-shaped frame 701. A two-way lead screw 702 is rotatably connected to the inner side of the U-shaped frame 701. A drive block 703 is threadedly connected to the surface of the two-way lead screw 702. A clamp 704 is fixedly connected to the surface of the drive block 703. A handle 705 is fixedly connected to one end of the two-way lead screw 702. A guide rod 706 is fixedly connected to the inner side of the U-shaped frame 701. A guide hole 707 is opened on the surface of the drive block 703. The guide rod 706 is inserted into the guide hole 707.

[0028] In this embodiment, the gas circulation device 3, the electrostatic dust removal system 4, and the residue collection device 6 work together to circulate and purify the air inside the sealed chamber 1, reducing dust, impurities, and other pollutants in the air inside the sealed chamber 1, significantly reducing the risk of membrane contamination. Inert gas is introduced into the sealed chamber 1 through the air inlet pipe 10; the inert gas environment prevents oxidation and improves welding reliability. The temperature and humidity control system 17 controls the temperature and humidity environment inside the sealed chamber 1, preventing temperature and humidity fluctuations from affecting welding consistency and ensuring welding is carried out in a suitable temperature and humidity environment, thus improving welding quality. Applying an antistatic coating to the inner surface of the sealed chamber 1 prevents dust and other contaminants from being electrostatically adsorbed onto the inner wall of the chamber, further maintaining high cleanliness inside the chamber and reducing the adverse effects of impurities on the welding process and the post-weld membrane core, ensuring welding quality and membrane performance. An observation window 11 on the surface of the chamber door 2 allows operators to observe the welding process in real time without opening the door and disrupting the internal environment, facilitating timely monitoring of welding progress, detection of potential problems, and better control of the welding operation, thus improving welding quality. Success rate and quality; the temperature and humidity control system 17 adopts semiconductor temperature control and condensation dehumidification working together to accurately and effectively control the temperature and humidity inside the sealed chamber 1, avoiding the impact of temperature and humidity fluctuations on welding consistency, ensuring that welding is carried out in a suitable temperature and humidity environment, improving welding quality, and ensuring the stable performance of the film core after welding; the bottom of the sealed chamber 1 is equipped with an exhaust pipe 19 and a solenoid valve 20, which can discharge the gas inside the chamber in a timely manner according to actual needs, facilitating gas discharge operations and helping to maintain a good gas environment inside the chamber; the design of the welding clamp 7 can... The handle 705 can be rotated to drive the bidirectional lead screw 702 to rotate, thereby causing the drive block 703 to move along the lead screw. This causes the clamping plate 704 to firmly clamp sputtered film cores of different sizes, which facilitates fixing the core position during welding and ensures that the core does not shift during welding, thus guaranteeing welding accuracy and quality. The guide rod 706 cooperates with the guide hole 707 on the drive block 703 to provide accurate guidance for the movement of the drive block 703, so that the clamping plate 704 can move smoothly and linearly when clamping or releasing the core, avoiding instability such as offset or shaking.

[0029] Example 2: Figure 2 - Figure 3 As shown, a fixing seat 13 is fixedly connected to the surface of the housing 401, a fixing block 12 is fixedly connected to the surface of the cover 402, a screw 14 is threadedly connected to the inside of the fixing block 12, the top end of the screw 14 is threadedly connected to the inside of the fixing seat 13, and a knob 15 is fixedly connected to the bottom end of the screw 14. A sealing ring 18 is provided between the housing 401 and the cover. The sealing ring 18 is made of elastic rubber. There are four sets of screws 14, and the four sets of screws 14 are circumferentially distributed on the surface of the cover.

[0030] In this embodiment, by turning the knob 15, the screw 14 rotates inside the fixing block 12, causing the top end of the screw 14 to detach from the fixing seat 13. This facilitates the disassembly and installation of the cover 402 of the electrostatic dust removal system 4, and allows for regular inspection, cleaning, or replacement of internal components such as the primary filter plate 404 and the high-efficiency filter plate 403, ensuring the normal and efficient operation of the dust removal system and maintaining good dust removal performance. By setting an elastic rubber sealing ring 18 between the housing 401 and the cover, the sealing of the connection between the two is enhanced, preventing dust and other impurities from entering or leaking from gaps, and ensuring the internal sealing of the electrostatic dust removal system 4. The four sets of screws 14 are circumferentially distributed on the surface of the cover, making the connection between the cover 402 and the housing 401 more stable and evenly stressed, avoiding problems such as poor sealing and loosening caused by uneven local stress.

[0031] The working principle of this embodiment is as follows: In use, first open the chamber door 2 and place the sputtered film core to be welded on the platform at the top of the residue collection device 6. Then, rotate the handle 705 of the welding clamp 7, causing the bidirectional lead screw 702 to rotate. The drive block 703 on the bidirectional lead screw 702 will move along the lead screw under the action of the screw thread. Since the guide hole 707 on the drive block 703 cooperates with the guide rod 706, it ensures that the drive block 703 makes a smooth linear movement, thereby driving the clamping plate 704 to firmly clamp the sputtered film core. After fixing the core position, close the chamber door 2. High-purity inert gas (such as helium, argon, etc.) is introduced into the chamber through the air inlet pipe 10 at the top of the sealed chamber 1. The exhaust pipe 19... The solenoid valve 20 opens, and simultaneously, the oxygen content sensor (which can be preset in a suitable location inside the chamber; although not mentioned in the text, this monitoring should exist in principle) monitors the oxygen content in the gas to ensure it is at an extremely low level, preventing core oxidation during welding. When the oxygen concentration reaches the required level, the solenoid valve 20 closes, and then the gas circulation device 3 starts working, allowing the inert gas to circulate evenly within the chamber, creating a stable inert environment. At the same time, the temperature and humidity control system 17 is activated, using a combination of semiconductor temperature control and condensation dehumidification to monitor and adjust the temperature and humidity inside the chamber in real time, maintaining them within a suitable welding range to avoid adverse effects of temperature and humidity fluctuations on welding. The laser welding head 8, driven by the robotic arm 16, can... The robotic arm 16, capable of flexible movement in three-dimensional space, uses a visual positioning system 9 to acquire images of the pre-positioned sputtered thin film core. Through built-in image recognition and analysis algorithms, it precisely determines the welding position. Then, the robotic arm 16 accurately adjusts the position of the laser welding head 8 based on the positioning information, ensuring it is precisely aligned with the welding area, ready for welding. The laser welding head 8 emits a laser according to preset welding parameters (such as laser power, welding time, pulse frequency, etc.) to begin welding the sputtered thin film core. During the welding process, metal spatter and other residues are generated. The residue collection device 6 operates in real time, using methods such as negative pressure suction (a common collection method in principle, although not detailed in the text, it can be reasonably inferred). (Measurement) These residues are collected to prevent them from drifting inside the chamber and affecting welding quality and environmental cleanliness. At the same time, the electrostatic dust removal system 4 continues to operate. Driven by the circulating fan inside the gas circulation device 3, the air inside the chamber first passes through the primary filter plate 404 inside the shell cover 402 to intercept large dust particles, then passes through the high-efficiency filter plate 403 to filter out finer particles, and finally the electrostatic dust removal module 405 adsorbs submicron-sized particles. After being purified layer by layer, the air enters the gas circulation device 3 through the connecting pipe 5 and returns to the chamber, maintaining a high cleanliness environment inside the chamber and ensuring welding quality. After the welding operation is completed, the laser welding head 8 stops emitting laser, and the robotic arm 16 drives the welding head back to the initial position.The temperature and humidity control system 17 and the gas circulation device 3 continue to operate for a period of time to stabilize and clean the environment inside the chamber, ensuring that the temperature and humidity inside the chamber are suitable and that there are no residual impurities, hot air or other adverse factors. After the environment inside the chamber is stable, open the chamber door 2, turn the handle 705 of the welding clamp 7 in the opposite direction to release the clamp 704, and take out the finished sputtered film core. When it is necessary to open the shell cover 402, turn the knob 15 so that the knob 15 drives the screw 14 to rotate inside the fixing block 12 and the top of the screw 14 is disengaged from the inside of the fixing seat 13, which facilitates the disassembly and installation of the shell cover 402 of the electrostatic dust removal system 4, and facilitates the regular inspection, cleaning or replacement of internal components such as the primary filter plate 404 and the high-efficiency filter plate 403, ensuring the normal and efficient operation of the dust removal system and maintaining a good dust removal effect.

[0032] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A high-precision laser welding device for sputtered thin film cores, comprising a sealed enclosure (1), characterized in that: The sealed enclosure (1) is equipped with a laser welding head (8), an electrostatic dust removal system (4), a gas circulation device (3), and a residue collection device (6). A robotic arm (16) is fixedly connected to the top surface of the sealed enclosure (1). The welding head is fixedly connected to the end of the robotic arm (16). A vision positioning system (9) is provided on the surface of the laser welding head (8). The electrostatic dust removal system (4) includes a housing (401), a cover (402), a primary filter plate (404), and a high-efficiency filter plate (403). The system includes a primary filter plate (404) and a high-efficiency filter plate (403) located inside the cover (402). The electrostatic dust removal module (405) is fixed inside the housing (401) and located above the high-efficiency filter plate (403). The dust removal system is fixedly connected to the gas circulation device (3) via a connecting pipe (5). An air inlet pipe (10) is fixedly connected to the top of the sealed box (1). A temperature and humidity control system (17) is fixedly connected to the surface of the sealed box (1).

2. The high-precision laser welding apparatus for sputtered thin film cores according to claim 1, characterized in that: The inner surface of the sealed box (1) is coated with an antistatic coating.

3. The high-precision laser welding apparatus for sputtered thin film cores according to claim 1, characterized in that: The sealed box (1) is provided with a door (2) on its surface, and an observation window (11) is embedded in the surface of the door (2).

4. The high-precision laser welding apparatus for sputtered thin film cores according to claim 1, characterized in that: The temperature and humidity control system (17) adopts a combination of semiconductor temperature control and condensation dehumidification.

5. The high-precision laser welding apparatus for sputtered thin film cores according to claim 1, characterized in that: An exhaust pipe (19) is fixedly connected to the bottom of the sealed box (1), and a solenoid valve (20) is fixedly connected to the surface of the exhaust pipe (19).

6. The high-precision laser welding apparatus for sputtered thin film cores according to claim 1, characterized in that: The sealed box (1) is equipped with a welding clamp (7). The welding clamp (7) includes a U-shaped frame (701). A two-way lead screw (702) is rotatably connected to the inner side of the U-shaped frame (701). A drive block (703) is threadedly connected to the surface of the two-way lead screw (702). A clamp plate (704) is fixedly connected to the surface of the drive block (703). A handle (705) is fixedly connected to one end of the two-way lead screw (702).

7. The high-precision laser welding apparatus for sputtered thin film cores according to claim 6, characterized in that: A guide rod (706) is fixedly connected to the inner side of the U-shaped frame (701), and a guide hole (707) is opened on the surface of the drive block (703), and the guide rod (706) is inserted into the guide hole (707).

8. The high-precision laser welding apparatus for sputtered thin film cores according to claim 1, characterized in that: A fixing seat (13) is fixedly connected to the surface of the housing (401), a fixing block (12) is fixedly connected to the surface of the cover (402), a screw (14) is threadedly connected to the inside of the fixing block (12), the top end of the screw (14) is threadedly connected to the inside of the fixing seat (13), and a knob (15) is fixedly connected to the bottom end of the screw (14).

9. The high-precision laser welding apparatus for sputtered thin film cores according to claim 8, characterized in that: A sealing ring (18) is provided between the housing (401) and the cover, and the sealing ring (18) is made of elastic rubber.

10. The high-precision laser welding apparatus for sputtered thin film cores according to claim 8, characterized in that: There are four sets of screws (14), and the four sets of screws (14) are circumferentially distributed on the surface of the cover.

Images