Polishing jig for target backing plate water channel opening sealing surface

Abstract

The utility model belongs to target material backboard water channel mouth processing technical field discloses a kind of for target material backboard water channel mouth sealing surface polishing jig, including jig body and driving part, jig body includes: center pivot, center pivot can be connected in the output end of driving part, driving part can drive center pivot rotation around its axis line;Polishing pressure piece, it is connected to the outer periphery of center pivot, and the central axis of polishing pressure piece is collinear with the central axis of center pivot, the rotation of center pivot can drive polishing pressure piece common rotation;Grinding head, it is sleeved in the outer periphery of center pivot, and the central axis of grinding head is collinear with the central axis of center pivot, along the length direction of center pivot, grinding head is connected to the surface of polishing pressure piece, which is away from driving part, grinding head can be abutted with the sealing surface of water channel mouth, to make grinding head friction sealing surface when rotating with polishing pressure piece jointly.The utility model can improve polishing uniformity, reduce scratch risk.

Description

Technical Field

[0001] This utility model relates to the field of target material backplate water channel processing technology, and in particular to a polishing fixture for the sealing surface of the target material backplate water channel. Background Technology

[0002] The sputtering target assembly consists of a target and a backplate made of a matching material. The backplate typically has cooling pipes to cool the target during sputtering. During target production, the water channel sealing surfaces of the backplate usually require polishing.

[0003] However, polishing the sealing surface of the water channel inlet is quite difficult in existing technologies, especially for LCD integrated target backplates. This often results in uneven texture or scratches on the sealing surface. These problems prevent the sealing ring from being installed tightly, leading to leaks, which in turn cause abnormal alarms on client devices and may even render the equipment unusable.

[0004] Therefore, there is an urgent need to propose a polishing fixture for the sealing surface of the water channel of the target backplate in order to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a polishing fixture for the sealing surface of the water channel of the target back plate, which can improve polishing uniformity and reduce the risk of scratches.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This utility model provides a polishing fixture for the sealing surface of the water channel opening of a target material backing plate, comprising a fixture body and a driving component, wherein the driving component is configured to drive the fixture body to rotate; the fixture body includes:

[0008] A central rotating shaft is connected to the output end of the driving component, and the driving component can drive the central rotating shaft to rotate around its own axis.

[0009] A polishing pressure component is sleeved and connected to the outer periphery of the central rotating shaft, and the central axis of the polishing pressure component is collinear with the central axis of the central rotating shaft. The rotation of the central rotating shaft can drive the polishing pressure component to rotate together.

[0010] A grinding head is sleeved on the outer periphery of the central rotating shaft, and the central axis of the grinding head is collinear with the central axis of the central rotating shaft. Along the length direction of the central rotating shaft, the grinding head is connected to the surface of the polishing pressure member that is opposite to the driving member. The grinding head can abut against the sealing surface of the water channel, so that the grinding head rubs against the sealing surface when it rotates together with the polishing pressure member.

[0011] In some embodiments, the fixture body further includes an insert block, one end of the central rotating shaft is configured to pass through the central hole of the insert block, the central rotating shaft is clearance-fitted with the central hole of the insert block and the central rotating shaft is rotatable relative to the central hole of the insert block, along the length direction of the central rotating shaft, the grinding head is disposed between the polishing pressure member and the insert block, the insert block is configured to be embedded in the groove of the water channel, when the insert block is embedded in the groove, the grinding head abuts against the sealing surface and the grinding head covers the sealing surface.

[0012] In some embodiments, the polishing pressure member includes a first sleeve and a second sleeve connected to each other, the central axis of the first sleeve and the central axis of the second sleeve are both collinear with the central axis of the central rotating shaft, the radial dimension of the second sleeve is larger than the radial dimension of the first sleeve; along the length direction of the central rotating shaft, the driving member can abut against the end face of the first sleeve away from the second sleeve, and the grinding head is connected to the end face of the second sleeve away from the first sleeve.

[0013] In some embodiments, both the first sleeve and the second sleeve are cylinders with inner holes, the projection shape of the grinding head along the length direction of the central axis is circular, and the diameter of the grinding head is not less than the diameter of the second sleeve.

[0014] In some embodiments, the first sleeve and the second sleeve are integrally formed.

[0015] In some embodiments, the dimension of the embedded block along the length direction of the central axis of rotation is equal to the groove depth.

[0016] In some embodiments, a rotating bearing is provided in the central hole of the embedded block, and one end of the central rotating shaft extending into the central hole of the embedded block is connected to the rotating bearing.

[0017] In some embodiments, the grinding head is configured as a scouring pad grinding head.

[0018] In some embodiments, the drive is configured as a pistol drill.

[0019] In some embodiments, the central rotating shaft, the polishing pressure member, and the embedded block are all made of metal.

[0020] The beneficial effects of this utility model are:

[0021] This utility model provides a polishing fixture for the sealing surface of a target material backplate water channel. By incorporating a polishing pressure component, it not only fixes the grinding head but also evenly transmits pressure to the grinding head during polishing, preventing uneven polishing textures on the sealing surface caused by uneven pressure. Furthermore, both the polishing pressure component and the grinding head share the same central axis with the central rotating shaft, ensuring a stable motion trajectory for the grinding head during rotation and reducing sway. This further improves polishing uniformity and reduces the risk of scratches on the sealing surface. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0023] Figure 1 This is a three-dimensional structural diagram of the fixture body (excluding the grinding head) provided in an embodiment of the present utility model;

[0024] Figure 2 This is a front view of the fixture body (excluding the grinding head) provided in this embodiment of the utility model;

[0025] Figure 3 This is a schematic diagram of the waterway opening provided in an embodiment of the present invention.

[0026] In the picture:

[0027] 1. Central pivot;

[0028] 2. Polishing pressure component; 21. First sleeve; 22. Second sleeve;

[0029] 3. Embedded block;

[0030] 100. Waterway opening; 110. Sealing surface; 120. Groove. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0035] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0036] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0037] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0038] like Figures 1-3 As shown, this embodiment provides a polishing fixture for the sealing surface of the water channel of a target backplate, including a fixture body and a drive member (not shown in the figure), the drive member being configured to drive the fixture body to rotate.

[0039] The fixture body includes a central rotating shaft 1, a polishing pressure component 2, and a grinding head (not shown in the figure).

[0040] The central shaft 1 can be connected to the output end of the drive component, which can drive the central shaft 1 to rotate around its own axis. The polishing pressure component 2 is sleeved and connected to the outer periphery of the central shaft 1, and the central axis of the polishing pressure component 2 is collinear with the central axis of the central shaft 1. The rotation of the central shaft 1 can drive the polishing pressure component 2 to rotate together. The grinding head is sleeved on the outer periphery of the central shaft 1, and the central axis of the grinding head is collinear with the central axis of the central shaft 1. Along the length direction of the central shaft 1, the grinding head is connected to the surface of the polishing pressure component 2 opposite to the drive component. The grinding head can abut against the sealing surface 110 of the water channel 100 so that the grinding head rubs against the sealing surface 110 when it rotates together with the polishing pressure component 2.

[0041] In practice, the assembled fixture body is connected to the drive unit, and the position of the fixture body is adjusted so that the grinding head abuts against the sealing surface 110 of the water inlet 100. Then the drive unit is started so that the fixture body begins to rotate, thereby polishing the sealing surface 110 by friction of the grinding head.

[0042] The polishing fixture for the sealing surface of the water channel opening of the target material backplate provided in this embodiment, by setting the polishing pressure component 2, can not only fix the grinding head, but also uniformly transmit pressure to the grinding head during the polishing process, avoiding the problem of uneven polishing texture on the sealing surface 110 due to uneven pressure. In addition, both the polishing pressure component 2 and the grinding head share the same central axis with the central rotating shaft 1, so that the grinding head can maintain a stable motion trajectory during rotation, reducing yaw phenomenon, thereby further improving the uniformity of polishing and reducing the risk of scratching the sealing surface 110.

[0043] like Figures 1-3As shown, in some embodiments, the fixture body further includes an insert block 3. One end of the central rotating shaft 1 is configured to pass through the central hole of the insert block 3. The central rotating shaft 1 and the central hole of the insert block 3 are in clearance fit, and the central rotating shaft 1 can rotate relative to the central hole of the insert block 3. Along the length direction of the central rotating shaft 1, the grinding head is disposed between the polishing pressure member 2 and the insert block 3. The insert block 3 is configured to be embedded in the groove 120 of the water channel 100. When the insert block 3 is embedded in the groove 120, the grinding head abuts against the sealing surface 110 and the grinding head covers the sealing surface 110.

[0044] With this setting, the insert block 3 can precisely limit the fixture body. That is, by inserting the insert block 3 into the groove 120 and extending the central rotating shaft 1 into the central hole of the insert block 3, the central rotating shaft 1 can be prevented from shifting radially, thereby preventing the grinding head from shifting radially during the polishing process. At the same time, it ensures that the grinding head always covers the sealing surface 110, which can effectively achieve uniform polishing of the sealing surface 110 and further improve the polishing quality.

[0045] like Figure 3 The diagram shown is a structural schematic of the waterway 100. The detailed structure, connection relationship and function of the waterway 100 are mature existing technologies in this field, and will not be described in detail in this application.

[0046] In some embodiments, a rotary bearing is provided in the central hole of the insert block 3, and one end of the central rotating shaft 1 extending into the central hole of the insert block 3 is connected to the rotary bearing. The rotary bearing facilitates smoother and more stable rotation of the central rotating shaft 1.

[0047] In some embodiments, the dimension of the embedded block 3 along the length direction of the central axis 1 is equal to the groove depth of the groove 120. That is, the exposed surface of the embedded block 3 after being embedded in the groove 120 can be flush with the sealing surface 110 around the groove 120. For example, after the embedded block 3 is embedded into the groove 120 from top to bottom, the upper surface of the embedded block 3 is flush with the sealing surface 110.

[0048] This configuration ensures that the embedded block 3 forms a stable reference surface with the sealing surface 110 during polishing, guaranteeing a uniform distribution of the force exerted by the grinding head on the sealing surface 110 and preventing uneven polishing or localized over-polishing due to height differences. Furthermore, the embedded block 3 also provides a dimensional reference during machining, facilitating precise control of machining dimensions.

[0049] like Figure 1 and Figure 2As shown, in some embodiments, the polishing pressure member 2 includes a first sleeve 21 and a second sleeve 22 connected to each other. The central axis of the first sleeve 21 and the central axis of the second sleeve 22 are both collinear with the central axis of the central rotating shaft 1. The radial dimension of the second sleeve 22 is larger than the radial dimension of the first sleeve 21. Along the length direction of the central rotating shaft 1, the driving member can abut against the end face of the first sleeve 21 away from the second sleeve 22, and the grinding head is connected to the end face of the second sleeve 22 away from the first sleeve 21.

[0050] With this configuration, the drive component abuts against the first sleeve 21, enabling stable transmission of the drive torque. Meanwhile, the larger radial dimension of the second sleeve 22 provides a larger support area, thereby reducing the radial sway of the fixture body during rotation and improving the stability of polishing.

[0051] Preferably, such as Figure 1 As shown, both the first sleeve 21 and the second sleeve 22 are cylinders with inner holes. The projection shape of the grinding head along the length of the central axis 1 is circular, and the diameter of the grinding head is not less than the diameter of the second sleeve 22. The cylindrical structure is relatively simple to process, which facilitates precise control of dimensions and coaxiality. At the same time, the diameter of the grinding head is not less than the diameter of the second sleeve 22, so that the grinding head can fully cover the sealing surface 110 during polishing.

[0052] In some embodiments, the first sleeve 21 and the second sleeve 22 are integrally formed. This integral forming facilitates the processing and manufacturing of the polishing pressure member 2.

[0053] In some embodiments, the grinding head is configured as a scouring pad grinding head. Compared to a rigid grinding head, the scouring pad material is flexible and has moderate abrasive power, which can remove small protrusions on the surface of the sealing surface 110 while avoiding deep scratches on the sealing surface 110, thereby improving the polishing quality.

[0054] In some embodiments, the drive element is a pistol drill. During use, the user can hold the pistol drill to perform polishing operations. This design makes the polishing process more flexible and convenient.

[0055] In some embodiments, the central rotating shaft 1, the polishing pressure member 2, and the insert block 3 are all made of metal. Metal materials have high rigidity and wear resistance, ensuring that the fixture body is not easily deformed or worn during long-term use. For example, the metal material can be stainless steel, aluminum alloy, copper alloy, etc.

[0056] Of course, in other embodiments, the central rotating shaft 1, the polishing pressure component 2, and the insert block 3 can all be made of non-metallic materials (such as plastics, ceramics, etc.) or composite materials (such as carbon fiber composites, glass fiber reinforced plastics, etc.). Non-metallic and composite materials are generally lighter than metallic materials, which helps to reduce the weight of the entire fixture body, making it easier to operate and move, especially when operated by hand, thus reducing operator fatigue.

[0057] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A polishing fixture for the sealing surface of the water channel opening of a target backing plate, characterized in that, The fixture includes a fixture body and a drive member, the drive member being configured to drive the fixture body to rotate; the fixture body includes: A central rotating shaft (1) is connected to the output end of the driving member, and the driving member is able to drive the central rotating shaft (1) to rotate around its own axis. A polishing pressure component (2) is sleeved and connected to the outer periphery of the central rotating shaft (1), and the central axis of the polishing pressure component (2) is collinear with the central axis of the central rotating shaft (1). The rotation of the central rotating shaft (1) can drive the polishing pressure component (2) to rotate together. The grinding head is sleeved on the outer periphery of the central rotating shaft (1), and the central axis of the grinding head is collinear with the central axis of the central rotating shaft (1). Along the length direction of the central rotating shaft (1), the grinding head is connected to the surface of the polishing pressure member (2) opposite to the driving member. The grinding head can abut against the sealing surface (110) of the water outlet (100) so that the grinding head rubs against the sealing surface (110) when it rotates together with the polishing pressure member (2).

2. The polishing fixture for the sealing surface of the water channel opening of the target backplate according to claim 1, characterized in that, The fixture body also includes an insert block (3). One end of the central rotating shaft (1) is configured to pass through the central hole of the insert block (3). The central rotating shaft (1) is clearance-fitted with the central hole of the insert block (3) and the central rotating shaft (1) is rotatable relative to the central hole of the insert block (3). Along the length direction of the central rotating shaft (1), the grinding head is disposed between the polishing pressure member (2) and the insert block (3). The insert block (3) is configured to be embedded in the groove (120) of the water channel (100). When the insert block (3) is embedded in the groove (120), the grinding head abuts against the sealing surface (110) and the grinding head covers the sealing surface (110).

3. The polishing fixture for the sealing surface of the water channel opening of the target backplate according to claim 2, characterized in that, The polishing pressure component (2) includes a first sleeve (21) and a second sleeve (22) connected to each other. The central axis of the first sleeve (21) and the central axis of the second sleeve (22) are both collinear with the central axis of the central rotating shaft (1). The radial dimension of the second sleeve (22) is greater than the radial dimension of the first sleeve (21). Along the length direction of the central rotating shaft (1), the driving component can abut against the end face of the first sleeve (21) away from the second sleeve (22). The grinding head is connected to the end face of the second sleeve (22) away from the first sleeve (21).

4. The polishing fixture for the sealing surface of the water channel opening of the target backplate according to claim 3, characterized in that, Both the first sleeve (21) and the second sleeve (22) are cylinders with inner holes. The projection shape of the grinding head along the length direction of the central rotating shaft (1) is circular, and the diameter of the grinding head is not less than the diameter of the second sleeve (22).

5. The polishing fixture for the sealing surface of the water channel opening of the target backplate according to claim 3, characterized in that, The first sleeve (21) and the second sleeve (22) are integrally formed.

6. The polishing fixture for the sealing surface of the water channel opening of the target backplate according to claim 2, characterized in that, The dimension of the embedded block (3) along the length direction of the central axis (1) is equal to the groove depth of the groove (120).

7. The polishing fixture for the sealing surface of the water channel opening of the target backplate according to claim 2, characterized in that, A rotating bearing is provided in the central hole of the embedded block (3), and one end of the central rotating shaft (1) extending into the central hole of the embedded block (3) is connected to the rotating bearing.

8. The polishing fixture for the sealing surface of the water channel opening of a target backing plate according to any one of claims 1 to 7, characterized in that, The grinding head is set as a scouring pad grinding head.

9. The polishing fixture for the sealing surface of the water channel opening of a target backing plate according to any one of claims 1 to 7, characterized in that, The driving component is configured as a pistol drill.

10. The polishing fixture for the sealing surface of the water channel opening of a target backing plate according to any one of claims 2 to 7, characterized in that, The central rotating shaft (1), the polishing pressure component (2), and the embedded block (3) are all made of metal.

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