A heating disc adjusting device

Abstract

The utility model discloses a kind of heating disc adjusting device, adjusting device includes base backplate, heating disc, drive assembly and linkage assembly, heating disc has at least two, drive assembly is fixed on base backplate, linkage assembly connects drive assembly and at least two heating discs;Wherein, drive assembly can be synchronously driven at least two heating discs lifting by linkage assembly.When drive assembly starts, its power is evenly distributed to the heating disc of two sides by the transmission structure of linkage assembly, and the heating disc is driven along preset path synchronous vertical lifting.The utility model drives multiple heating discs by single drive assembly, reduces the number of motor and supporting components, significantly reduces cost and space occupancy;The complexity and maintenance difficulty of multi-motor system are eliminated by the symmetrical design of linkage assembly, and through centralized power output and synchronous transmission mechanism, the problem of low precision of traditional manual adjustment, poor repeatability is solved, and the stability of system is improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, and specifically relates to a heating plate adjustment device. Background Technology

[0002] In existing technologies, the lifting drive of heating devices typically employs a structure where a single motor independently controls a single heating plate. For example, in semiconductor manufacturing or vacuum coating equipment, each heating plate requires an independent motor and a matching lifting mechanism. This design has the following significant drawbacks: each heating plate needs to be equipped with its own motor, transmission components, and control system, leading to a substantial increase in equipment manufacturing costs; the multi-motor layout occupies a large amount of space below the cavity, limiting the miniaturization and modular design of the equipment; and the multi-motor system has a high failure rate, requiring individual debugging during maintenance, making the operation cumbersome. Utility Model Content

[0003] In view of this, the present invention provides a heating plate adjustment device to solve the technical problems of high cost and large space occupation of existing heating plate driving devices.

[0004] To address the aforementioned problems, according to one aspect of this application, an embodiment of the present invention provides a heating plate adjustment device, the heating plate adjustment device comprising a base back plate, a heating plate, a drive assembly, and a linkage assembly, wherein there are at least two heating plates, the drive assembly is fixed to the base back plate, and the linkage assembly connects the drive assembly and at least two heating plates; wherein the drive assembly is capable of synchronously driving at least two heating plates to rise and fall through the linkage assembly.

[0005] In some embodiments, the linkage component includes a slide base, guide rails, sliders, an adjustment base, and adjustment bolts. The number of slide bases is the same as the number of heating plates, and each slide base is connected to one heating plate. The number of guide rails is the same as the number of slide bases and corresponds one-to-one. Each guide rail has two sliders, and each slider is connected to the corresponding slide base. The adjustment base is connected to the slide base via adjustment bolts.

[0006] In some embodiments, the linkage assembly further includes an elastic backlash elimination unit disposed between the adjusting bolt and the adjusting base for compensating for threaded fit clearance.

[0007] In some embodiments, the elastic backlash elimination unit is a compression spring sleeved on the adjusting bolt, with both ends of the compression spring abutting against the slide base and the adjusting base, respectively.

[0008] In some embodiments, the heating plate adjustment device further includes a horizontal adjustment component, which includes a first displacement sensor, a controller, and a first drive unit. The first displacement sensor is disposed above the heating plate and is used to detect the vertical distance from the heating plate to the part above it. The controller receives the signal from the first displacement sensor and generates a vertical adjustment command. The first drive unit drives the corresponding adjustment bolt to rotate according to the adjustment command.

[0009] In some embodiments, the heating plate adjustment device further includes a centering adjustment component, which includes a second displacement sensor and a second drive unit. The second displacement sensor is disposed on the side of the heating plate and is used to detect the horizontal distance from the heating plate to the inner wall of the cavity. The controller receives the signal from the second displacement sensor and generates a horizontal adjustment command. The second drive unit drives the corresponding adjustment bolt to rotate according to the adjustment command.

[0010] In some embodiments, both the first drive unit and the second drive unit are motors, and the motors are connected to the adjusting bolts via couplings.

[0011] In some embodiments, the adjusting bolts include horizontal bolts and vertical bolts. At least three horizontal bolts are provided and are locked from below the slide base. The first displacement sensor and the first drive unit correspond one-to-one with the horizontal bolts. At least three vertical bolts are provided and are locked from the side of the slide base. The second displacement sensor and the second drive unit correspond one-to-one with the vertical bolts.

[0012] In some embodiments, the contact surface between the adjustment base and the slide base is a spherical structure.

[0013] In some embodiments, the end of the adjusting bolt engages with the adjusting base via a spherical contact.

[0014] Compared with the prior art, the heating plate adjustment device of this utility model has at least the following beneficial effects:

[0015] The heating plate adjustment device provided by this utility model includes a base back plate, a heating plate, a drive component, and a linkage component. There are at least two heating plates. The drive component is fixed on the base back plate, and the linkage component connects the drive component and at least two heating plates. The drive component can synchronously drive at least two heating plates to rise and fall through the linkage component.

[0016] When the drive assembly is activated, its power is evenly distributed to the heating plates on both sides through the transmission structure of the linkage assembly, driving the heating plates to rise and fall synchronously and vertically along a preset path. The rigid design of the base back plate prevents deformation, and the symmetrical layout of the linkage assembly ensures balanced force, thereby avoiding deviation or tilting during the lifting process. This embodiment drives multiple heating plates with a single drive assembly, reducing the number of motors and supporting components, significantly reducing cost and space occupation. The symmetrical design of the linkage assembly eliminates the complexity and maintenance difficulty of multi-motor systems. At the same time, through centralized power output and synchronous transmission mechanism, it solves the problems of low precision and poor repeatability of traditional manual adjustment, improving the stability of the system.

[0017] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a front view of a heating plate adjustment device provided in an embodiment of this utility model;

[0020] Figure 2 This is a schematic diagram of the structure of a heating plate adjustment device provided in an embodiment of this utility model;

[0021] Figure 3 This is a diagram showing the fit between the adjusting bolt and the elastic gap-eliminating unit in a heating plate adjusting device according to an embodiment of this utility model;

[0022] Figure 4 This is a diagram showing the fit between the guide rail and the slider in a heating plate adjustment device provided by an embodiment of this utility model;

[0023] Figure 5 This is a top view of the horizontal adjustment component and the centering adjustment component in a heating plate adjustment device provided in an embodiment of this utility model;

[0024] Figure 6 This is a schematic diagram of the horizontal adjustment component in a heating plate adjustment device provided by an embodiment of the present invention;

[0025] Figure 7 This is a schematic diagram of the centering adjustment component in a heating plate adjustment device provided by an embodiment of this utility model.

[0026] in:

[0027] 1. Base back plate; 2. Heating plate; 3. Drive assembly; 4. Linkage assembly; 41. Slide table base; 42. Guide rail; 43. Slider; 44. Adjustment base; 45. Adjustment bolt; 46. Elastic backlash elimination unit; 451. Horizontal bolt; 452. Vertical bolt; 5. Horizontal adjustment assembly; 51. First displacement sensor; 52. Controller; 53. First drive unit; 6. Centering adjustment assembly; 61. Second displacement sensor; 62. Second drive unit. Detailed Implementation

[0028] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0029] In the description of this utility model, it should be clarified that the terms "first," "second," etc., in the specification, claims, and drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence; the terms "vertical," "lateral," "longitudinal," "front," "back," "left," "right," "up," "down," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model, and do not mean that the device or element referred to must have a specific orientation or position, and therefore should not be construed as a limitation of this utility model.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] This embodiment provides a heating plate adjustment device, such as... Figures 1-7As shown, the heating plate adjustment device includes a base back plate 1, a heating plate 2, a drive component 3, and a linkage component 4. There are at least two heating plates 2. The drive component 3 is fixed on the base back plate 1. The linkage component 4 connects the drive component 3 and at least two heating plates 2. The drive component 3 can synchronously drive at least two heating plates 2 to rise and fall through the linkage component 4.

[0032] To better illustrate this, let's assume that there are two heating plates 2.

[0033] The base back plate 1, serving as the supporting structure for the entire device, is fixed below the equipment cavity. Its surface has interfaces for mounting the drive assembly 3 and the linkage assembly 4. The drive assembly 3 is vertically fixed to the center of the base back plate 1 with bolts. The linkage assembly 4 is symmetrically distributed on both sides of the base back plate 1 and connected to the output end of the drive assembly 3 via transmission components. Two heating plates 2 are fixed to the top of the linkage assembly 4, maintaining vertical alignment with the drive assembly 3 to ensure the straightness of the lifting path. The main function of the base back plate 1 is to provide rigid support and ensure the positional accuracy of each component. The drive assembly 3 outputs power through a single power source, replacing the traditional multi-motor design. The linkage assembly 4 synchronously transmits the power of the drive assembly 3 to the two heating plates 2, achieving synchronous lifting. The heating plates 2 directly bear the process load and complete the heating function during the lifting process.

[0034] When the drive component 3 is activated, its power is evenly distributed to the heating plates 2 on both sides through the transmission structure of the linkage component 4, driving the heating plates 2 to rise and fall synchronously and vertically along a preset path. The rigid design of the base back plate 1 prevents deformation, and the symmetrical layout of the linkage component 4 ensures balanced force, thereby avoiding deviation or tilting during the lifting process. In this embodiment, multiple heating plates 2 are driven by a single drive component 3, reducing the number of motors and supporting components, significantly reducing cost and space occupation. The symmetrical design of the linkage component 4 eliminates the complexity and maintenance difficulty of multi-motor systems. At the same time, through centralized power output and synchronous transmission mechanism, it solves the problems of low precision and poor repeatability of traditional manual adjustment, improving the stability of the system.

[0035] In a specific embodiment, the linkage component 4 includes a slide base 41, a guide rail 42, a slider 43, an adjustment base 44, and an adjustment bolt 45. The number of slide bases 41 is the same as the number of heating plates 2. The heating plates 2 are connected to the adjustment base 44 by standard screws. The number of guide rails 42 is the same as the number of slide bases 41 and they correspond one-to-one. Each guide rail 42 has two sliders 43. The sliders 43 are connected to the corresponding slide base 41. The adjustment base 44 is connected to the slide base 41 by the adjustment bolt 45.

[0036] The slide base 41 is connected to the adjustment base 44 via adjusting bolts 45. The adjustment base 44 is fixedly connected to the heating plate 2 via bolts. The guide rails 42 are vertically fixed on the base back plate 1, and the number of guide rails is the same as that of the slide base 41. Two sliders 43 are installed on the surface of each guide rail 42. The sliders 43 are connected to the bottom of the slide base 41 via bolts, so that the slide base 41 can slide up and down along the guide rails 42. The slide base 41 is fixed on the base back plate 1 and is arranged parallel to the adjustment base 44. The two are connected by adjusting bolts 45. The adjusting bolts 45 pass through the through holes of the slide base 41 and engage with the corresponding threaded holes of the adjustment base 44. The relative positions of the slide base 41 and the adjustment base 44 can be adjusted by rotating the adjusting bolts 45.

[0037] The slide base 41 supports the heating plate 2 and transmits lifting power. The guide rail 42 provides the slide base 41 with a vertical movement trajectory and rigid support. The slider 43 reduces the friction between the slide base 41 and the guide rail 42 and ensures smooth movement. The slide base 41 serves as a reference fixed point. The initial position of the adjustment base 44 can be changed by screwing in or out the adjusting bolt 45 to eliminate assembly gaps or compensate for thermal deformation errors. The adjusting bolt 45 achieves fine adjustment through threaded engagement, and at the same time, it maintains the stability of the slide base 41 after being locked.

[0038] When the drive assembly 3 drives the linkage assembly 4 to work, the adjusting base 44 moves vertically up and down along the guide rail 42, causing the heating plate 2 to move synchronously; the slider 43 slides on the guide rail 42 to ensure the straightness of the lifting trajectory; the slide base 41 and the adjusting bolt 45 provide a reference positioning in the static state. When it is necessary to adjust the horizontal or centering position of the heating plate 2, the distance between the slide base 41 and the adjusting base 44 is changed by rotating the adjusting bolt 45, thereby fine-tuning the vertical or horizontal offset of the heating plate 2; the rigid cooperation of the guide rail 42 and the slider 43 suppresses the vibration or offset caused by external loads, and finally realizes stable and precise position control of the heating plate 2 during the lifting process.

[0039] The contact surface between the adjustment base 44 and the slide base 41 is a spherical structure.

[0040] The contact surfaces of the adjusting base 44 and the slide base 41 adopt a spherical structure design, enabling them to adaptively offset small angles during contact through the multi-degree-of-freedom characteristics of the sphere. This design significantly reduces stress concentration problems on the contact surface caused by assembly errors or thermal expansion, while allowing the slide base 41 to maintain uniform contact with the adjusting base 44 even when it tilts slightly during vertical lifting, avoiding localized wear or jamming. The spherical contact also enhances the system's adaptability to changes in vacuum force or temperature. When the heating plate 2 deforms under external load, the spherical structure automatically adjusts the contact angle to compensate for the offset, thereby maintaining a stable fit between the slide base 41 and the adjusting base 44, improving the overall structure's anti-interference capability and long-term operational reliability.

[0041] The end of the adjusting bolt 45 is engaged with the adjusting base 44 through a spherical contact.

[0042] The end of the adjusting bolt 45 engages with the adjusting base 44 via a spherical contact, allowing the adjusting bolt 45 to adapt to changes in the relative angle between the adjusting base 44 and the slide base 41 during tightening or adjustment. This spherical contact reduces the impact of thread clearance on adjustment accuracy, eliminating the rigid constraints of traditional planar fits through flexible contact between the end spherical surface and the adjusting base 44. Furthermore, when the adjusting bolt 45 is rotated, the spherical contact allows the end of the adjusting bolt 45 to slide freely on the surface of the adjusting base 44, thus converting rotational motion into smooth displacement of the slide base 41 and preventing adjustment jamming or localized stress concentration caused by thread engagement deviation. This design is particularly suitable for fine-tuning operations in vacuum or high-temperature environments, effectively suppressing bolt locking failure caused by thermal deformation and ensuring long-term stability of the adjusted position.

[0043] In a specific embodiment, the linkage component 4 further includes an elastic backlash elimination unit 46, which is disposed between the adjusting bolt 45 and the adjusting base 44 to compensate for threaded clearance. The elastic backlash elimination unit 46 is a compression spring sleeved on the adjusting bolt 45, with its two ends abutting against the slide base 41 and the adjusting base 44, respectively.

[0044] A compression spring is fitted onto the threaded rod of the adjusting bolt 45, located in the contact area between the adjusting base 44 and the slide base 41. Its two ends abut against the threaded end face of the adjusting base 44 and the inner wall of the adjusting hole in the slide base 41, respectively. When the adjusting bolt 45 is screwed into the adjusting base 44, the compression spring is axially compressed, continuously applying a counterforce through elastic deformation. This forces the threaded surface of the adjusting bolt 45 to tightly fit with the threaded surface of the adjusting base 44, thereby eliminating any clearance between them. This design effectively suppresses positional drift of the adjusting base 44 caused by thread clearance. Especially in vacuum or high-temperature environments, minute displacements caused by thermal expansion or vibration can be dynamically compensated by the compression spring to maintain contact surface stability, preventing positional failure due to loosening after adjustment. Simultaneously, the flexibility of the compression spring allows the adjusting bolt 45 to adapt to minute angular deviations during tightening, reducing assembly stress concentration and improving the smoothness of adjustment operations and long-term reliability.

[0045] In a specific embodiment, the heating plate adjustment device further includes a horizontal adjustment component 5, which includes a first displacement sensor 51, a controller 52, and a first drive unit 53. The first displacement sensor 51 is disposed above the heating plate 2 and is used to detect the vertical distance from the heating plate 2 to the part above it. The controller 52 receives the signal from the first displacement sensor 51 and generates a vertical adjustment command. The first drive unit 53 drives the corresponding adjustment bolt 45 to rotate according to the adjustment command.

[0046] The levelness of the heating plate 2 is directly related to the stability of process quality and the reliability of equipment operation. For example, in semiconductor manufacturing or vacuum coating, the parallelism deviation between the heating plate and the wafer or substrate above it will lead to uneven temperature distribution, which in turn will cause differences in film thickness, material stress concentration and even device failure. In severe cases, it may cause the entire batch of products to be scrapped. In addition, the tilted heating plate may mechanically interfere with other components during the lifting and lowering process, which will accelerate wear or cause failure. Therefore, precise leveling is the key to ensuring process consistency and equipment life.

[0047] The first displacement sensor 51 monitors the vertical distance between the heating plate 2 and the upper part (such as the cavity cover or substrate support) in real time through non-contact measurement, and converts the distance signal into an electrical signal output. After receiving the sensor signal, the controller 52 calculates the horizontal offset of the heating plate 2 through a preset algorithm and generates adjustment parameters corresponding to the offset (such as the rotation direction and number of turns of the adjusting bolt 45). The first drive unit 53 (such as a stepper motor or servo motor) drives the adjusting bolt 45 to rotate according to the instructions of the controller 52, and changes the relative height between the slide base 41 and the adjusting base 44 through thread transmission, thereby correcting the tilt angle of the heating plate 2.

[0048] When the heating plate 2 shifts horizontally due to assembly errors or thermal deformation, the first displacement sensor 51 detects the abnormal vertical distance and sends a signal to the controller 52. After analyzing the signal, the controller 52 determines the position and adjustment amount of the adjusting bolt 45 that needs to be adjusted, and sends a pulse command to the corresponding first drive unit 53. The first drive unit 53 drives the adjusting bolt 45 to rotate, and the adjusting base 44 is partially raised or lowered by the threaded advancement or retraction. The elastic backlash elimination unit 46 synchronously compensates for the threaded backlash to ensure adjustment accuracy.

[0049] In a specific embodiment, the heating plate adjustment device further includes a centering adjustment component 6, which includes a second displacement sensor 61 and a second drive unit 62. The second displacement sensor 61 is disposed on the side of the heating plate 2 and is used to detect the horizontal distance from the heating plate 2 to the inner wall of the cavity. The controller 52 receives the signal from the second displacement sensor 61 and generates a horizontal adjustment command. The second drive unit 62 drives the corresponding adjustment bolt 45 to rotate according to the adjustment command.

[0050] The alignment of the heating plate is a core requirement for ensuring process uniformity and safe equipment operation. In vacuum deposition or semiconductor processing, if the heating plate deviates from the center of the cavity, it will lead to asymmetrical heat field distribution and uneven heating of the substrate, which in turn will cause quality problems such as film thickness deviation and material crystallization defects. At the same time, an eccentric heating plate may rub or collide with the inner wall of the cavity during high-speed lifting and lowering, causing equipment damage or process interruption. Therefore, precise alignment adjustment is a necessary condition for maintaining process consistency and avoiding mechanical failure.

[0051] The second displacement sensor 61 acquires the horizontal distance data between the heating plate 2 and the inner wall of the cavity in real time through non-contact measurement, and accurately identifies the horizontal offset direction and magnitude of the heating plate; the second drive unit 62 (such as a servo motor or stepper motor) drives the corresponding adjusting bolt 45 to rotate according to the instructions of the controller 52, and changes the horizontal position of the adjusting base 44 through thread transmission, thereby pushing the heating plate 2 to move laterally to correct the center offset.

[0052] When the second displacement sensor 61 detects that the horizontal distance between the heating plate 2 and the inner wall of the cavity exceeds the preset range, it transmits the offset signal to the controller 52. The controller 52 analyzes the offset according to the algorithm and generates an adjustment command, specifying the adjustment bolt 45 to be adjusted and its rotation parameters. After receiving the command, the second drive unit 62 drives the corresponding adjustment bolt 45 to rotate. Through the threaded advancement or retraction, the adjustment base 44 drives the heating plate 2 to move laterally. The elastic backlash elimination unit 46 simultaneously eliminates the influence of thread backlash on the adjustment accuracy. The coordinated action of multiple adjustment bolts 45 gradually corrects the horizontal offset of the heating plate 2 until its center coincides with the cavity axis.

[0053] In a specific embodiment, both the first drive unit 53 and the second drive unit 62 are motors, and the motors are connected to the adjusting bolts via couplings.

[0054] In a specific embodiment, the adjusting bolt 45 includes a horizontal bolt 451 and a vertical bolt 452. At least three horizontal bolts 451 are provided, which are locked from below the slide base 41. The first displacement sensor 51 and the first drive unit 53 correspond one-to-one with the horizontal bolts 451. At least three vertical bolts 452 are provided, which are locked from the side of the slide base 41. The second displacement sensor 61 and the second drive unit 62 correspond one-to-one with the vertical bolts 452.

[0055] Horizontal bolt 451 is locked from below the slide base 41. Rotation adjusts the horizontal displacement of the base 44, thereby correcting the vertical distance between the heating plate 2 and the upper component. Vertical bolt 452 is locked from the side of the slide base 41. Rotation changes the vertical height of the base 44, adjusting the center position deviation between the heating plate 2 and the inner wall of the cavity, ensuring the heating plate is level and aligned. Horizontal bolt 451 and vertical bolt 452 independently control the horizontal and vertical positions of the base 44, respectively. Their combined action achieves precise positioning of the heating plate 2 in three-dimensional space.

[0056] At least three horizontal bolts 451 and three vertical bolts 452 are provided to meet the stability requirements of planar positioning. The three bolts form a triangular support structure, which can eliminate the problem of redundant degrees of freedom or unstable support that may be caused by single-point or double-point adjustment by using the geometric principle of three points to determine a plane. For example, the three horizontal bolts 451 can accurately adjust the tilt angle of the adjustment base 44 by different rotation amounts, while the three vertical bolts 452 can compensate for the local height deviation of the heating plate 2 by synchronous or asynchronous lifting, thereby achieving uniform force and balanced adjustment in both horizontal and vertical directions, avoiding the decrease in adjustment accuracy or structural deformation caused by insufficient bolt quantity.

[0057] Horizontal adjustment is achieved through horizontal bolts 451: the first displacement sensor 51 detects the vertical distance deviation between the heating plate 2 and the upper part; the controller 52 calculates the adjustment amount of each horizontal bolt 451 based on the deviation signal; the first drive unit 53 drives the corresponding horizontal bolt 451 to rotate; by adjusting the height of different positions of the adjustment base 44, the heating plate 2 is restored to horizontality. Centering adjustment is achieved through vertical bolts 452: the second displacement sensor 61 detects the horizontal distance deviation between the heating plate 2 and the inner wall of the cavity; the controller 52 analyzes the signal and sends a command to the second drive unit 62, driving the vertical bolt 452 to rotate and push the adjustment base 44 to move laterally, correcting the center position of the heating plate 2. The coordinated action of the three horizontal bolts 451 and the three vertical bolts 452 forms a closed-loop control from the horizontal and vertical directions respectively, ultimately achieving high-precision centering and horizontal adjustment of the heating plate 2 in all directions.

[0058] The heating plate adjustment device provided in this embodiment, when the heating plate adjustment device includes a horizontal adjustment component 5 and a centering adjustment component 6, its adjustment method is as follows: the driving component 3 synchronously drives at least two heating plates 2 to rise and fall to a set position through the linkage component 4; the heating plates 2 are adjusted by the horizontal adjustment component 5 and the centering adjustment component 6.

[0059] Specifically, the heating plate adjustment method includes the following steps: First, the drive assembly 3, through the cooperation of the slide base 41 and guide rail 42 of the linkage assembly 4, synchronously drives at least two heating plates 2 to rise and fall vertically to the target height required by the process. During this process, the slider 43 ensures the straightness of the lifting trajectory, and the spherical contact structure between the adjustment base 44 and the slide base 41 adaptively offsets small angles. Subsequently, the first displacement sensor 51 of the horizontal adjustment assembly 5 detects the vertical distance between the heating plate 2 and the upper part in real time, and the controller 52 calculates the adjustment of each horizontal bolt 451 based on the detection signal. In the adjustment process, the first drive unit 53 drives the horizontal bolt 451 to rotate, thereby changing the height difference between different positions of the adjustment base 44 to eliminate the tilt deviation of the heating plate 2. At the same time, the second displacement sensor 61 of the centering adjustment component 6 monitors the horizontal distance between the heating plate 2 and the inner wall of the cavity. After the controller 52 analyzes the offset data, it sends a command to the second drive unit 62 to drive the vertical bolt 452 to rotate and push the adjustment base 44 to move laterally until the center of the heating plate 2 coincides with the axis of the cavity. During the adjustment process, the elastic backlash elimination unit 46 dynamically compensates for the thread gap to ensure the stability of the position after adjustment.

[0060] In a specific embodiment, when the horizontal adjustment component 5 includes a first displacement sensor 51, a controller 52, and a first drive unit 53, and the adjustment bolt 45 includes horizontal bolts 451 and vertical bolts 452, with at least three horizontal bolts 451, the first drive unit 53 corresponding one-to-one with each horizontal bolt 451, at least three vertical bolts 452, and the second drive unit 62 corresponding one-to-one with each vertical bolt 452, the horizontal adjustment component 5 adjusts the levelness of the heating plate 2, specifically as follows:

[0061] The vertical distance h between at least three positions of the heating plate 2 and the parts above it is detected, wherein at least three positions correspond one-to-one with the positions of at least three horizontal bolts 451, and the at least three vertical distances are compared with the preset first standard distance spec1 respectively:

[0062] When the error between at least three vertical distances exceeds 0.05mm, if h < spec1, then the horizontal bolt 451 corresponding to that position is loosened to adjust the height of the heating plate 2. The adjusted height Δd satisfies: Δd = spec1 + (spec1 - h), until the error between at least three vertical distances does not exceed 0.05mm; if h > spec1, then the horizontal bolt 451 corresponding to that position is tightened to adjust the height of the heating plate 2. The adjusted height Δd satisfies: Δd = spec1 + (spec1 - h), until the error between at least three vertical distances does not exceed 0.05mm.

[0063] The centering adjustment component 6 is used to adjust the heating plate 2. Specifically, the horizontal distance H between at least three positions on the heating plate 2 and the inner wall of the cavity is detected. These at least three positions correspond one-to-one with the positions of the at least three vertical bolts, and the at least three positions on the heating plate 2 are located on the same circumference. The at least three horizontal distances are compared with the preset second standard distance spec2.

[0064] When the error between at least three horizontal distances exceeds 0.05 mm, if H < spec2, the vertical bolt 452 corresponding to that position is loosened to adjust the heating plate 2 by adjusting the amount Δd = spec2 + (spec2 - H) until the error between at least three horizontal distances does not exceed 0.05 mm; conversely, if H > spec2, the vertical bolt 452 corresponding to that position is tightened to adjust the heating plate 2 by adjusting the height Δd = spec2 + (spec2 - H) until the error between at least three horizontal distances does not exceed 0.05 mm.

[0065] The method for adjusting the level of the heating plate 2 using the horizontal adjustment component 5 is as follows: Three positions on the heating plate 2 corresponding to the three horizontal bolts 451 are selected. The vertical distance h from each position to the upper part is detected by the first displacement sensor 51 and compared with the preset standard distance spec1. If h < spec1 for a certain position, the corresponding horizontal bolt 451 is loosened and the height Δd = spec1 + (spec1 - h) is adjusted to raise that point to compensate for the deviation. If h > spec1, the bolt is tightened and Δd = spec1 + (spec1 - h) is adjusted to lower the height until the vertical distance error of the three positions is ≤0.05mm. This method ensures the levelness of the heating plate 2 through three-point coordinated leveling, eliminating uneven temperature distribution or mechanical interference caused by tilting. After adjustment, the parallelism error between the heating plate and the upper part is controlled within the micrometer level, significantly improving process stability and equipment reliability.

[0066] The centering adjustment component 6 adjusts the centering of the heating plate 2 as follows: Three positions corresponding to the three vertical bolts 452 are selected on the same circumference of the heating plate 2. The horizontal distance H from each position to the inner wall of the cavity is detected by the second displacement sensor 61 and compared with the preset standard distance spec2. If H < spec2 at a certain position, the corresponding vertical bolt 452 is loosened and Δd = spec2 + (spec2 - H) is adjusted to move the heating plate 2 away from the cavity wall. If H > spec2, the bolt is tightened and Δd = spec2 + (spec2 - H) is adjusted to shorten the distance until the horizontal distance error of the three points is ≤0.05mm. This method corrects the center offset at three points simultaneously, ensuring that the axis of the heating plate 2 coincides with the axis of the cavity, avoiding the risk of thermal asymmetry or frictional collision caused by eccentricity. After adjustment, the center deviation is controlled at the sub-millimeter level, ensuring process uniformity and equipment operation safety.

[0067] In summary, it is readily understood by those skilled in the art that, without conflict, the aforementioned advantageous technical features can be freely combined and superimposed.

[0068] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model in any way. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A heating plate adjustment device, characterized in that, The heating plate adjustment device includes a base back plate, a heating plate, a drive assembly, and a linkage assembly. There are at least two heating plates. The drive assembly is fixed on the base back plate, and the linkage assembly connects the drive assembly and at least two heating plates. The drive assembly can synchronously drive at least two heating plates to rise and fall through the linkage assembly.

2. The heating plate adjustment device according to claim 1, characterized in that, The linkage assembly includes a slide base, guide rails, sliders, an adjustment base, and adjustment bolts. The number of slide bases is the same as the number of heating plates. The heating plates are connected to the adjustment bases. The number of guide rails is the same as the number of slide bases and corresponds one-to-one. Each guide rail has two sliders, and each slider is connected to the corresponding slide base. The adjustment base is connected to the slide base via adjustment bolts.

3. The heating plate adjustment device according to claim 2, characterized in that, The linkage assembly also includes an elastic clearance elimination unit, which is disposed between the adjusting bolt and the adjusting base to compensate for threaded clearance.

4. The heating plate adjustment device according to claim 3, characterized in that, The elastic gap-eliminating unit is a compression spring sleeved on the adjusting bolt, with both ends of the compression spring abutting against the slide base and the adjusting base, respectively.

5. The heating plate adjustment device according to claim 2, characterized in that, The heating plate adjustment device further includes a horizontal adjustment component, which includes a first displacement sensor, a controller, and a first drive unit. The first displacement sensor is disposed above the heating plate and is used to detect the vertical distance from the heating plate to the part above it. The controller receives the signal from the first displacement sensor and generates a vertical adjustment command. The first drive unit drives the corresponding adjustment bolt to rotate according to the adjustment command.

6. The heating plate adjustment device according to claim 5, characterized in that, The heating plate adjustment device further includes a centering adjustment component, which includes a second displacement sensor and a second drive unit. The second displacement sensor is disposed on the side of the heating plate and is used to detect the horizontal distance from the heating plate to the inner wall of the cavity. The controller receives the signal from the second displacement sensor and generates a horizontal adjustment command. The second drive unit drives the corresponding adjustment bolt to rotate according to the adjustment command.

7. The heating plate adjustment device according to claim 6, characterized in that, Both the first drive unit and the second drive unit are motors, and the motors are connected to the adjusting bolts via couplings.

8. The heating plate adjustment device according to claim 6, characterized in that, The adjusting bolts include horizontal bolts and vertical bolts. At least three horizontal bolts are provided, which are locked from below the slide base. The first displacement sensor and the first drive unit correspond one-to-one with the horizontal bolts. At least three vertical bolts are provided, which are locked from the side of the slide base. The second displacement sensor and the second drive unit correspond one-to-one with the vertical bolts.

9. The heating plate adjustment device according to claim 2, characterized in that, The contact surface between the adjustment base and the slide base is a spherical structure.

10. The heating plate adjustment device according to claim 2 or 9, characterized in that, The end of the adjusting bolt is engaged with the adjusting base via a spherical contact.

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