Evaporation boat and vacuum evaporation device

Abstract

The utility model discloses an evaporating boat and vacuum evaporation device, include: boat body, its top surface is recessed to form evaporating groove, the groove bottom of evaporating groove has the adjacent distribution of coating area and non-coating area, and the drop point of material is located coating area, and is close to the junction of coating area and non-coating area, wet coating, coating in coating area, wherein, coating area has with first side of junction opposite, non-coating area has with second side of junction opposite, and second side compares first side and is closer to drop point distribution. The utility model adopts above -mentioned structure, can make the liquid material that drops to evaporating groove spread out fast, evenly, and can effectively avoid material splashing.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation technology, and in particular to an evaporation boat and a vacuum evaporation apparatus. Background Technology

[0002] A resistance-heated evaporation boat with wire feeding is a widely used evaporation source for vapor deposition. The evaporation apparatus typically has positive and negative electrodes connected to both ends of the evaporation boat to supply electricity and heat it. During vapor deposition, a wire feeding mechanism continuously feeds filamentous material above the evaporation tank of the evaporation boat. The evaporation boat heats the material, causing it to melt and drip into the evaporation tank. The liquid material in the evaporation tank is continuously heated and evaporates to form vapor for substrate deposition.

[0003] However, during the current-heated evaporation boat process, uneven temperature distribution makes it difficult for the liquid material dripping to the bottom of the evaporation tank to spread out, easily causing material splashing. Furthermore, the small and irregular spreading area of ​​the liquid material affects the amount of steam evaporated. When operators adjust the evaporation power, the surface temperature of the evaporation boat constantly changes, causing the edge of the molten material surface to continuously expand or shrink. This back-and-forth fluctuation of the spread liquid surface also leads to material splashing. Due to the presence of cooling water for the vapor deposition electrodes (to protect the electrodes from melting), a pressure head phenomenon occurs at both ends of the evaporation boat during the vapor deposition process. Liquid material rushes towards both ends, causing violent boiling and further splashing. In addition, the evaporation boat is usually made of BN. If the liquid material accumulates and does not evaporate in time, the BN component will react with the liquid material, causing the evaporation boat to be gradually corroded during the evaporation process. Irregular corrosion pits will appear in the evaporation tank. These corrosion pits will make the surface resistance of the evaporation boat uneven, which in turn will lead to uneven temperature, making the liquid surface in the evaporation tank unstable, causing material splashing, and greatly affecting the service life of the evaporation boat.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0005] The purpose of this invention is to provide an evaporation boat and a vacuum evaporation device that enable liquid materials dripping into the evaporation tank to spread out quickly and evenly, while effectively preventing material splashing.

[0006] The objective of this invention is achieved through the following technical solution: an evaporation boat, comprising:

[0007] The hull has an inwardly recessed top surface forming an evaporation tank. The bottom of the evaporation tank has adjacent coated and uncoated areas. The material dripping point is located in the coated area and close to the boundary between the coated and uncoated areas.

[0008] A wetting coating is applied to the coating area;

[0009] The coated area has a first side opposite to the boundary, and the uncoated area has a second side opposite to the boundary, the second side being closer to the droplet distribution than the first side.

[0010] Furthermore, the coated area and the uncoated area are separated by a boundary line parallel to the width direction of the hull, and the distance between the second side and the boundary line is smaller than the distance between the first side and the boundary line.

[0011] Furthermore, the area ratio of the uncoated area to the coated area is 1:5 to 1:7.

[0012] Furthermore, the thickness of the wetting coating is 12μm to 15μm.

[0013] Furthermore, the ratio of the distance from the droplet point to the boundary to the distance from the first side to the boundary is 1:2.5 to 1:3.

[0014] Furthermore, a thickened coating is applied to the wetting coating, the thickened coating corresponding to and covering the drop point.

[0015] Furthermore, the area of ​​the thickened coating is 0.6 cm². 2 ~1cm 2 .

[0016] Furthermore, the thickness ratio of the thickened coating to the wetting coating is 1.5:1 to 2:1.

[0017] Furthermore, the cross-sectional area of ​​the thickened coating gradually increases from top to bottom.

[0018] In addition, this utility model also provides a vacuum evaporation deposition apparatus, including the aforementioned evaporation boat.

[0019] Compared with the prior art, this utility model has the following beneficial effects: By setting a wetting coating at the bottom of the evaporation tank, which has good wetting properties, this utility model can reduce the surface tension of the liquid material, helping the liquid material to spread quickly and evenly. The liquid material spreads in a roughly elliptical shape, which helps to increase the spreading area, improve evaporation efficiency, effectively reduce the difficulty of manual operation, and the coating helps to prevent the liquid material from corroding the boat, extending the service life of the evaporation boat. The rapid and even spreading of the liquid material means that even when the surface temperature of the evaporation boat changes continuously during the operation and adjustment of the evaporation power, the fluctuation of the spread material surface is very small, avoiding splashing; furthermore, through… The bottom of the evaporation tank is divided into a coated area and an uncoated area. The coated area has a first side opposite to the junction of the two areas, and the uncoated area has a second side opposite to the junction. Since the second side is closer to the dripping point than the first side, the first side is less prone to impact, but the second side will be more prone to impact. By applying a wetting coating to the coated area, the surface energy is lower, making it easier for the liquid material to spread. The liquid material that accumulates at the dripping point will preferentially spread evenly along the coated area. The uncoated area has no coating, and its surface energy is higher, making it less prone to wetting the liquid material. It has an obstruction effect on the spread of the liquid material, which helps to prevent the liquid material from rushing out of the evaporation tank from the second side and avoid splashing. Attached Figure Description

[0020] Figure 1 This is a cross-sectional schematic diagram of the evaporation boat of this utility model.

[0021] Figure 2 This is a top view schematic diagram of the evaporation boat of this utility model.

[0022] 100. Hull; 110. Evaporation tank; 111. Coated area; 112. Uncoated area; 113. First side; 114. Second side; 115. Boundary line; 116. Third side; 200. Wetting coating; 210. Thickened coating; 220. First edge; 230. Second edge; 300. Metal wire. Detailed Implementation

[0023] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0024] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0025] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0026] Please see Figure 1 and Figure 2 As shown, an evaporation boat corresponding to a preferred embodiment of the present invention includes a boat body 100. An evaporation tank 110 is formed by an inwardly recessed section from the top surface of the boat body 100. A wire feeding mechanism is disposed on one side of the boat body 100 along its length and is adapted to transport material to the evaporation tank 110. The boat body 100 is electrically heated to heat the material, causing it to melt and drip into the evaporation tank 110. The liquid material in the evaporation tank 110 is continuously heated and evaporates to form a vapor-deposited substrate. In this embodiment, the evaporation boat is used for the preparation of a battery current collector. The material is specifically a metal wire 300, such as aluminum wire or copper wire, which is vapor-deposited onto a substrate to form a composite current collector.

[0027] However, with the existing evaporation boat, it is difficult for the dripping liquid material to spread quickly and evenly. In order to improve the spreading area and uniformity of the liquid material, the current operation is to continuously adjust the wire feeding position manually when the material melts so that the liquid material spreads evenly and achieves a larger spreading area. However, constantly adjusting the position will destroy the stability of the evaporation boat, thus causing splashing.

[0028] Preferably, in this embodiment, the bottom of the evaporation tank 110 has adjacent coated areas 111 and uncoated areas 112. The dripping point of the material is located in the coated area 111 and near the boundary between the coated area 111 and the uncoated area 112. The coated area 111 has a first side 113 opposite to the boundary, and the uncoated area 112 has a second side 114 opposite to the boundary. The second side 114 is closer to the dripping point than the first side 113. The coated area 111 is coated with a wetting coating 200, which has good wettability. The wetting coating 200 can be made of materials such as titanium boride or zirconium boride.

[0029] This invention provides a wetting coating 200 at the bottom of the evaporation tank 110. This coating has excellent wettability, reducing the surface tension of the liquid material and promoting rapid and uniform spreading. The liquid material spreads in a roughly elliptical shape, increasing the spreading area and improving evaporation efficiency. This effectively reduces the difficulty of manual operation. Furthermore, the coating helps prevent corrosion of the boat 100 by the liquid material, extending the service life of the evaporation boat. The rapid and uniform spreading of the liquid material ensures that even when the surface temperature of the evaporation boat changes during operation and adjustment of the evaporation power, the fluctuation of the liquid surface is minimal, preventing splashing. In addition, by dividing the bottom of the evaporation tank 110 into a coated area 111 and an uncoated area 112, the coated area 111... The 111 area has a first side 113 opposite to the junction of the two areas, and the uncoated area 112 has a second side 114 opposite to the junction. Since the second side 114 is closer to the drop point than the first side 113, the first side 113 is less likely to be impacted by the head, but this will cause severe impact on the head of the second side 114. By applying a wetting coating 200 to the coated area 111, its surface energy is lower, making it easier for the liquid material to spread. The liquid material gathered at the drop point will preferentially spread evenly along the coated area 111. The uncoated area 112 has no coating, its surface energy is higher, and the liquid material is not easily wetted. It has an obstructive effect on the spread of the liquid material, which helps to prevent the liquid material from rushing out of the evaporation tank 110 from the second side 114 and avoid splashing.

[0030] Furthermore, in order to fully utilize the evaporation boat and increase the evaporation rate of material per unit time, the evaporation tank 110 is typically an elongated structure adapted to the contour of the boat body 100, with its length direction parallel to the length direction of the boat body 100 and its width direction parallel to the width of the boat body 100. Preferably, in this embodiment, the coated area 111 and the uncoated area 112 are separated by a boundary line 115 parallel to the width direction of the boat body 100, that is, the coated area 111 and the uncoated area 112 are arranged along the length direction of the boat body 100, and the dimensions of the coated area 111 and the uncoated area 112 are the same in the width direction of the boat body 100. The first side 113 and the second side 114 are the two sides of the evaporation tank 110 in the length direction of the boat body 100, and the distance between the second side 114 and the boundary line 115 is smaller than the distance between the first side 113 and the boundary line 115, that is, in the length direction of the boat body 100, the size of the coated area 111 is larger than the size of the uncoated area 112. The wetting coating 200 extends along the length of the hull 100 from the boundary line 115 toward the first side 113.

[0031] By adopting the above structure, the utilization rate of the coating area 111 is maximized, the coating process is more convenient, and the barrier effect of the non-coating area 112 is excellent.

[0032] Furthermore, in one embodiment, the area ratio of the uncoated area 112 to the coated area 111 is 1:5 to 1:7. Within this range, the spreading area of ​​the liquid material can be effectively controlled, ensuring the uniformity of evaporation and improving evaporation efficiency, while preventing liquid metal from rushing out of the evaporation tank 110 and causing splashing. And / or, the ratio of the distance from the dripping point to the boundary to the distance from the first side 113 to the boundary is 1:2.5 to 1:3, which prevents liquid material from splashing while increasing the utilization rate of the coated area 111, and the transition area formed between the dripping point and the boundary can buffer the liquid material and effectively prevent liquid metal from entering the uncoated area 112.

[0033] Furthermore, the thickness of the wetting coating 200 is 12μm to 15μm. By limiting the thickness within this range, it is possible to prevent the liquid material from corroding the boat 100, prevent irregular corrosion pits from appearing on the boat 100 due to an excessively thin coating, ensure the uniformity of the surface resistance and temperature of the evaporation boat, ensure the stability of the liquid level in the evaporation tank 110, avoid splashing, and also prevent thermal stress cracking caused by an excessively thick coating, which would affect its use.

[0034] However, due to the dripping force of the liquid material, the evaporation tank 110 is directly subjected to significant impact and corrosion at the dripping point, and the instantaneous kinetic energy impact can easily cause the coating to crack at the dripping point. In one embodiment, a thickened coating 210 is coated on the wetting coating 200. The thickened coating 210 corresponds to and covers the dripping point, so that when the liquid material drips, it can drip onto the thickened coating 210, thereby protecting the wetting coating 200. The material of the thickened coating 210 can be the same as that of the wetting coating 200, so that the liquid material dripping onto the thickened coating 210 can spread quickly.

[0035] In one embodiment, the thickness ratio of the thickened coating 210 to the wetting coating 200 is 1.5:1 to 2:1. By limiting the above ratio, the kinetic energy impact of the liquid material dripping can be prevented, avoiding coating cracking. The thickened coating 210 can improve the impact resistance and also reduce the corrosion rate of the wetting coating 200, improving the corrosion condition of the boat hull 100 and extending the life of the evaporation boat.

[0036] In one embodiment, the area of ​​the thickened coating 210 is 0.6 cm². 2 ~1cm 2 Since liquid materials will form a certain diffusion range when they drip, the area of ​​the thickened coating 210 is set within this range. On the one hand, this can prevent corrosion diffusion caused by the area of ​​the thickened coating 210 being too small. On the other hand, it can prevent the interface stress caused by the difference in thermal expansion coefficients between the thickened coating 210 and the boat body 100 from increasing due to the area of ​​the thickened coating 210 being too large, thus avoiding the peeling off of the thickened coating 210.

[0037] Preferably, the cross-sectional area of ​​the thickened coating 210 gradually increases from top to bottom, that is, the thickened coating 210 has a gradient design. On the one hand, this makes the thickened coating 210 more resistant to impact and corrosion, and can build a thermal gradient to relieve stress concentration and prevent the thickened coating 210 from peeling off. On the other hand, when liquid material drips onto the upper surface of the thickened coating 210, the gradient design helps the liquid material to gain a certain potential energy and spread quickly.

[0038] Further, in one embodiment, the wetting coating 200 is applied to the entire coating area 111. However, since the coating area 111 is applied to the entire coating area 111, the side of the evaporation tank 110 coincides with the side of the coating area 111, making it easier for liquid material to spread quickly to the side of the evaporation tank 110, which is prone to splashing due to impact. As a preferred embodiment, the contour of the wetting coating 200 is the same as the contour of the coating area 111. The wetting coating 200 has a first edge 220 away from the boundary line 115 in the length direction of the boat body 100, and two opposing second edges 230 in the width direction of the boat body 100. The first edge 220 is parallel to the first side 113 and there is a certain distance between them. The second edge 230 is parallel to the third side 116 of the coating area 111 in the width direction of the boat body 100. The second edge 230 and the third side 116 are opposite each other and there is a certain distance between the second edge 230 and the corresponding third side 116. In this embodiment, the spacing is preferably 0.5mm to 1.5mm.

[0039] This design creates a ring of uncoated area between the wetting coating 200 and the side of the coating area 111, which serves to impede the liquid material and prevent it from splashing due to impact with the side of the coating area 111.

[0040] Further, as a more specific embodiment, in this embodiment, the boat body 100 has a length of 150 mm and a width of 38 mm. The evaporation tank 110 has a depth of 1.5 mm, a length of 120 mm, and a width of 32 mm. The coating area 111 has a dimension of 105 mm in the length direction of the boat body 100 and a dimension of 32 mm in the width direction of the boat body 100. The uncoated area 112 has a dimension of 15 mm in the length direction of the boat body 100 and a dimension of 32 mm in the width direction of the boat body 100. The wetting coating 200 has a dimension of 104 mm in the length direction of the boat body 100 and a dimension of 30 mm in the width direction of the boat body 100. The wetting coating 200 is spaced 1 mm from the first side 113 and 1 mm from the third side 116. A thickened coating 210 is applied to a 1cm*1cm area on the wetting coating 200. The thickened coating 210 is located in the middle of the evaporation tank 110 in the width direction of the boat 100, and the center of the thickened coating 210 and the boundary line 115 are spaced 40mm apart.

[0041] Furthermore, this utility model also provides a vapor deposition apparatus, including a vacuum chamber, a wire feeding mechanism disposed in the vacuum chamber, and an evaporation source system. The evaporation source system includes the aforementioned evaporation boats, and there are several evaporation boats arranged side by side along their width direction. The wire feeding mechanism corresponds to each evaporation boat to continuously feed the metal wire 300 to the top of the evaporation boat.

[0042] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. An evaporation boat, characterized in that, include: The hull (100) has an inwardly recessed top surface forming an evaporation tank (110). The bottom of the evaporation tank (110) has adjacent coated areas (111) and uncoated areas (112). The drip point of the material is located in the coated area (111) and close to the junction of the coated area (111) and the uncoated area (112). A wetting coating (200) is applied to the coating area (111); The coated area (111) has a first side (113) opposite to the boundary, and the uncoated area (112) has a second side (114) opposite to the boundary. The second side (114) is closer to the droplet distribution than the first side (113).

2. The evaporation boat as described in claim 1, characterized in that, The coated area (111) and the uncoated area (112) are separated by a boundary line (115) parallel to the width direction of the hull (100), and the distance between the second side (114) and the boundary line (115) is less than the distance between the first side (113) and the boundary line (115).

3. The evaporation boat as described in claim 2, characterized in that, The area ratio of the uncoated area (112) to the coated area (111) is 1:5 to 1:

7.

4. The evaporation boat as described in claim 1, characterized in that, The thickness of the wetting coating (200) is 12μm to 15μm.

5. The evaporation boat as described in claim 1, characterized in that, The ratio of the distance from the drop point to the boundary to the distance from the first side (113) to the boundary is 1:2.5 to 1:

3.

6. The evaporation boat as described in claim 1, characterized in that, The wetting coating (200) is coated with a thickened coating (210), which corresponds to and covers the drop point.

7. The evaporation boat as described in claim 6, characterized in that, The area of ​​the thickened coating (210) is 0.6 cm². 2 ~1cm 2 .

8. The evaporation boat as described in claim 6, characterized in that, The thickness ratio of the thickened coating (210) to the wetting coating (200) is 1.5:1 to 2:

1.

9. The evaporation boat as described in claim 6, characterized in that, The cross-sectional area of ​​the thickened coating (210) gradually increases from top to bottom.

10. A vacuum evaporation deposition apparatus, characterized in that, Includes the evaporation boat as described in any one of claims 1 to 9.

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