Flatbed coating apparatus

Abstract

The utility model belongs to the field of semiconductor processing technology discloses flat plate type coating equipment, including lower cavity subassembly and the upper cover plate subassembly of the movable connection in lower cavity subassembly, the upper cover plate subassembly and lower cavity subassembly combine and form the reaction cavity, the upper cover plate subassembly is provided with the spray mechanism, flat plate type coating equipment still includes the exhaust component, and the exhaust component surrounds the side of spray mechanism and is located the edge of reaction cavity, and the exhaust component has the exhaust passage in it, and the exhaust component is provided with the gas inlet opening that communicates with the reaction cavity, and the gas outlet opening of exhaust component is used for communicating outside exhaust equipment, and the gas inlet opening and gas outlet opening all communicate in the exhaust passage. The utility model discloses flat plate type coating equipment through setting the exhaust component of reaction cavity edge avoids the disorderly flow of the excess reaction gas in the reaction cavity edge area, improves the service life and process reliability of flat plate type coating equipment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a flat-plate coating equipment. Background Technology

[0002] Plate-type chemical vapor deposition (CVD) equipment is mainly used to perform single-sided deposition of an amorphous intrinsic silicon layer (I layer), a P-doped microcrystalline silicon layer (N layer), and a B-doped microcrystalline silicon layer (P layer) on texturized and cleaned silicon wafers. The silicon wafer to be coated is placed on a carrier plate within the process chamber, and process gases are introduced into the chamber and deposited onto the wafer surface. During the coating process, the process gases diffuse randomly to the edges of the process chamber. Due to the relatively low temperature in the edge areas, the process gases react to produce yellow powder, contaminating the silicon wafer and causing process failure. Furthermore, the randomly diffused process gases at the edges can form coatings on the carrier plate frame, the inner wall of the chamber, and other surfaces, causing equipment malfunctions such as short circuits on the carrier plate and slippage of the rollers. They can also corrode components made of materials such as polytetrafluoroethylene (PTFE) and fluororubber within the process chamber, reducing their lifespan. The prior art provides a cleaning method that cleans the deposited film by introducing a cleaning gas into the process chamber. However, the cleaning gas is usually NF3 gas ionized by RPS, which can cause corrosion to stainless steel components such as rollers, bellows, and magnetorheological fluids in the process chamber. Utility Model Content

[0003] The purpose of this invention is to provide a flat-plate coating equipment that can solve problems such as production pollution powder, component corrosion, carrier plate short circuit, and roller slippage caused by the disorderly diffusion of process gas to the edge of the process chamber, as well as the corrosion of stainless steel components caused by the cleaning process.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A flat-plate coating apparatus is provided, including a lower cavity assembly and an upper cover assembly movably connected to the lower cavity assembly. The upper cover assembly and the lower cavity assembly together form a reaction chamber. The upper cover assembly is provided with a spraying mechanism. The flat-plate coating apparatus also includes an exhaust assembly, which is disposed around the spraying mechanism and located at the edge of the reaction chamber. The exhaust assembly has an exhaust channel and an air inlet communicating with the reaction chamber. The exhaust assembly has an air outlet communicating with an external exhaust device. Both the air inlet and the air outlet are connected to the exhaust channel.

[0006] In one embodiment, the exhaust assembly includes a first exhaust pipe connected to the lower cavity assembly, the exhaust channel is disposed inside the first exhaust pipe, the spray mechanism is surrounded by an insulating frame extending toward the lower cavity assembly, the insulating frame and the lower cavity assembly have a communication gap, the first exhaust pipe at least partially blocks the communication gap along the height direction of the first exhaust pipe, and the air inlet is opened on the pipe wall of the first exhaust pipe.

[0007] In one embodiment, the air intake opening includes a plurality of air intake holes, which are spaced apart along the length of the first exhaust pipe.

[0008] In one embodiment, the first exhaust pipe has a rectangular cross-section, and the first exhaust pipe has an air inlet on the sidewall facing the communication gap and the adjacent sidewall.

[0009] In one embodiment, a plurality of air inlets are provided on the sidewall facing the communication gap and on the adjacent sidewall, and the plurality of air inlets on two adjacent sidewalls are staggered along the length direction of the first exhaust pipe.

[0010] In one embodiment, the first exhaust pipe forms an annular pipe around the outer periphery of the insulating frame; and / or,

[0011] The exhaust assembly further includes a support tube disposed in the lower cavity assembly and extending toward the upper cover assembly. The support tube is used to support the first exhaust pipe and has a through first connecting pipe. One end of the first connecting pipe is used to connect to the air outlet and the other end is used to connect to the external exhaust device.

[0012] In one embodiment, the exhaust assembly includes a second exhaust pipe connected to the upper cover assembly, an exhaust channel disposed within the second exhaust pipe, an air inlet opening formed in the pipe wall of the second exhaust pipe, an insulating frame surrounding the spray mechanism, the second exhaust pipe disposed outside the insulating frame, the insulating frame having a through-hole extending along the wall thickness direction, the inlet end of the through-hole facing the spray mechanism, and the outlet end of the through-hole communicating with the air inlet opening.

[0013] In one embodiment, the insulating frame is provided with four through ports, which are located at the four corners of the insulating frame respectively. The length of the second exhaust pipe extends circumferentially along the insulating frame and covers at least the four corners of the insulating frame. The second exhaust pipe has four air inlet openings, and the four air outlet openings and the four through ports are connected in a one-to-one correspondence.

[0014] In one embodiment, the exhaust assembly includes two second exhaust pipes, which are symmetrically arranged on both sides of the insulating frame and are U-shaped to cover the two corners of the insulating frame. Each second exhaust pipe is provided with an exhaust opening.

[0015] In one embodiment, the exhaust assembly further includes a connecting pipe disposed in the lower cavity assembly and extending toward the upper cover assembly. The connecting pipe has a through second connecting pipe, one end of which is connected to the external exhaust device. When the upper cover assembly is placed over the lower cavity assembly, the second exhaust pipe abuts against the connecting pipe to seal the air outlet opening in connection with the second connecting pipe.

[0016] The beneficial effects of this utility model are:

[0017] The flat-plate coating equipment provided by this utility model includes an extraction assembly surrounding the spraying mechanism and located at the edge of the reaction chamber. The extraction assembly has an exhaust channel and an inlet connected to the reaction chamber. An outlet connected to an external extraction device is also provided. During the process, the spraying mechanism injects reactive gas into the reaction chamber. Some of the reactive gas flows to the edge of the reaction chamber, where the external extraction device provides suction. The reactive gas at the edge of the reaction chamber enters the exhaust channel through the inlet and is ultimately discharged through the outlet. This prevents excess reactive gas from flowing disorderly at the edge of the reaction chamber, thus preventing the formation of a polluting yellow powder due to the relatively low temperature at the edge, which could affect the process. It also prevents the reactive gas from spreading disorderly to the edge and forming a coating on the edges and inner walls of the upper cover assembly and lower cavity assembly, thus avoiding short circuits, slippage of moving structures, and other equipment malfunctions. Furthermore, the extraction assembly's location at the edge of the reaction chamber ensures it does not interfere with the normal process within the reaction chamber. Because the extraction and exhaust components effectively extract the reaction gas from the area surrounding the spray mechanism, there is no need to use cleaning gas, thereby avoiding corrosion of the stainless steel parts in the reaction chamber caused by the cleaning process, and improving the service life and process reliability of the flat-plate coating equipment. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the flat-plate coating equipment provided in Embodiment 1 of this utility model;

[0019] Figure 2 This is a structural schematic diagram of the upper cover plate assembly provided in Embodiment 1 of this utility model;

[0020] Figure 3This is a partial enlarged cross-sectional view of the flat-plate coating equipment provided in Embodiment 1 of this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the extraction assembly installed in the lower cavity assembly according to Embodiment 1 of this utility model;

[0022] Figure 5 yes Figure 4 A magnified view of part A in the middle;

[0023] Figure 6 This is a schematic diagram of the structure of the second exhaust pipe installed on the upper cover plate assembly according to Embodiment 2 of this utility model;

[0024] Figure 7 yes Figure 6 A magnified view of part B in the middle section;

[0025] Figure 8 This is a schematic diagram of the structure of the connecting pipe installed in the lower cavity assembly according to Embodiment 2 of this utility model;

[0026] Figure 9 yes Figure 8 A magnified view of part C in the middle.

[0027] In the picture:

[0028] 1. Lower cavity assembly; 2. Upper cover assembly; 21. Spray mechanism; 22. Insulating frame; 221. Through port; 23. Connecting gap; 3. Exhaust assembly; 30. Air outlet; 31. First exhaust pipe; 311. Air inlet; 312. Side wall; 32. Support pipe; 33. Second exhaust pipe; 34. Connecting pipe; 341. Second connecting pipe. Detailed Implementation

[0029] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0030] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0033] Example 1

[0034] like Figures 1 to 5 As shown, this embodiment first provides a flat-plate coating apparatus. The flat-plate coating apparatus includes a lower cavity assembly 1 and an upper cover plate assembly 2 movably connected to the lower cavity assembly 1. The upper cover plate assembly 2 and the lower cavity assembly 1 together form a reaction chamber, which is used to accommodate the workpiece to be coated. The upper cover plate assembly 2 is provided with a spray mechanism 21, which is used to inject reaction gas into the reaction chamber.

[0035] The flat-plate coating equipment also includes an exhaust assembly 3, which surrounds the spray mechanism 21 and is located at the edge of the reaction chamber. The exhaust assembly 3 has an exhaust channel and an air inlet communicating with the reaction chamber. The exhaust assembly 3 has an air outlet 30 (see reference). Figure 6 It is used to connect to an external exhaust device (not shown in the figure), and both the air inlet and the air outlet 30 are connected to the exhaust channel.

[0036] During the process, the spraying mechanism 21 injects reactive gas into the reaction chamber. Some of the reactive gas flows to the edge of the reaction chamber, where an external extraction device provides suction. The reactive gas at the edge of the reaction chamber enters the exhaust channel through the inlet and is finally discharged from the reaction chamber through the outlet 30. This prevents excess reactive gas from flowing disorderly at the edge of the reaction chamber, thus preventing the reactive gas from reacting at the relatively low temperature of the edge area to generate a polluting yellow powder that could affect the process. It also prevents the reactive gas from spreading disorderly to the edge and forming a coating on the edges and inner walls of the upper cover assembly 2 and the lower cavity assembly 1, which could cause short circuits, slippage of moving structures, and other equipment malfunctions. Furthermore, the extraction assembly 3 is located at the edge of the reaction chamber and does not affect the normal process within the reaction chamber. Because the extraction assembly 3 effectively extracts the reactive gas from the area surrounding the spraying mechanism 21, there is no need to use cleaning gas, thus avoiding corrosion of the stainless steel components inside the reaction chamber caused by the cleaning process, and improving the service life and process reliability of the flat-plate coating equipment.

[0037] It should be noted that in actual use, the suction force of the external extraction device is controlled so that the extraction component 3 only discharges the excess reaction gas in the edge area of ​​the reaction chamber, and will not affect the central area below the spray mechanism 21.

[0038] Specifically, in this embodiment, the exhaust assembly 3 includes a first exhaust pipe 31 connected to the lower cavity assembly 1, and an exhaust channel is disposed within the first exhaust pipe 31. An insulating frame 22 is provided around the periphery of the spray mechanism 21, extending towards the lower cavity assembly 1. A communication gap 23 exists between the insulating frame 22 and the lower cavity assembly 1, allowing the reactive gas to diffuse towards the periphery of the spray mechanism 21 through the communication gap 23. Therefore, along the height direction of the first exhaust pipe 31, the first exhaust pipe 31 at least partially blocks the communication gap 23, and an air inlet is opened on the pipe wall of the first exhaust pipe 31, making the air inlet as close as possible to the communication gap 23, facilitating the entry of the reactive gas into the exhaust channel through the air inlet.

[0039] The air intake opening includes multiple air intake holes 311, which are spaced apart along the length of the first exhaust pipe 31. On the one hand, the arrangement of multiple air intake holes 311 can increase the area of ​​the air intake opening and increase the exhaust capacity; on the other hand, it makes the air intake more uniform.

[0040] The first exhaust pipe 31 has a rectangular cross-section. Air inlets 311 are provided on the sidewall 312 facing the connecting gap 23 and on adjacent sidewalls 312. Along the vertical direction, the adjacent sidewall 312 can be either the top wall or the bottom wall, as long as it is the side closer to the connecting gap 23; this embodiment does not impose specific limitations. In this embodiment, the adjacent sidewall 312 is the bottom wall of the first exhaust pipe 31.

[0041] Multiple air inlets 311 are provided on the side wall 312 facing the connecting gap 23 and on the adjacent side wall 312. The multiple air inlets 311 on the two adjacent side walls 312 are staggered along the length of the first exhaust pipe 31, which further improves the uniformity of air intake through the air inlets 311.

[0042] Since the connecting gap 23 between the insulating frame 22 and the lower cavity assembly 1 surrounds the spray mechanism 21, and the first exhaust pipe 31 forms an annular pipe around the outer periphery of the insulating frame 22, effective suction and exhaust can be performed around the spray mechanism 21, reducing the risk of reaction gas diffusing to the edge area of ​​the reaction chamber through the connecting gap 23.

[0043] To support the annular first exhaust pipe 31, the extraction assembly 3 also includes a support pipe 32. The support pipe 32 is disposed in the lower cavity assembly 1 and extends toward the upper cover assembly 2. The support pipe 32 is used to support the first exhaust pipe 31 and has a through first connecting pipe. One end of the first connecting pipe is used to connect to the exhaust opening 30, and the other end is used to connect to an external extraction device. In this embodiment, to provide sufficient support strength, the extraction assembly 3 is provided with two support pipes 32. The two support pipes 32 are respectively located on both sides of the reaction chamber to support the first exhaust pipe 31 at different positions, lifting the first exhaust pipe 31 to near the height of the connecting gap 23.

[0044] Example 2

[0045] This second embodiment provides a flat-plate coating equipment, which is the same as the flat-plate coating equipment in the first embodiment. The flat-plate coating equipment discharges the disorderly diffused reaction gas to the edge through the exhaust assembly 3 surrounding the spray mechanism 21 and located at the edge of the reaction chamber. This avoids equipment malfunctions such as short circuits and slippage of moving structures caused by the reaction gas forming a coating on the edges and inner walls of the upper cover assembly 2 and the lower cavity assembly 1. There is no need to use cleaning gas after the coating process, thereby avoiding the problem of corrosion of stainless steel parts in the reaction chamber caused by the cleaning process.

[0046] The difference in this embodiment is that, Figures 6 to 9As shown, the exhaust assembly 3 includes a second exhaust pipe 33 connected to the upper cover assembly 2. An exhaust channel is located within the second exhaust pipe 33, which can rise and fall with the upper cover assembly 2. An air inlet is formed on the wall of the second exhaust pipe 33. An insulating frame 22 surrounds the spray mechanism 21, and the second exhaust pipe 33 is located outside the insulating frame 22. The insulating frame 22 has a through-hole 221 extending along its wall thickness. The inlet end of the through-hole 221 faces the spray mechanism 21, and the outlet end connects to the air inlet. Because the through-hole 221 is located on the insulating frame 22 surrounding the spray mechanism 21, excess reaction gas sprayed by the spray mechanism 21 enters the second exhaust pipe 33 through the through-hole 221 and is discharged, reducing the risk of reaction gas diffusing to the edge area of ​​the reaction chamber.

[0047] To improve exhaust speed, the insulating frame 22 is provided with four through ports 221, which are located at the four corners of the insulating frame 22. The length of the second exhaust pipe 33 extends along the circumference of the insulating frame 22 and covers at least the four corners of the insulating frame 22. The second exhaust pipe 33 has four air inlet openings, and the four air outlet openings 30 and the four through ports 221 are connected in a one-to-one correspondence.

[0048] Specifically, the exhaust assembly 3 is equipped with two second exhaust pipes 33, which are symmetrically arranged on both sides of the insulating frame 22. The second exhaust pipes 33 are U-shaped to cover the two corners of the insulating frame 22, and each second exhaust pipe 33 is provided with an air outlet 30. This ensures that the exhaust assembly 3 covers the four guide ports 221, while reducing the length of the second exhaust pipes 33, which is beneficial for the lightweight design of the upper cover assembly 2 and avoids affecting the lifting and lowering operation of the upper cover assembly 2.

[0049] To create a negative pressure suction force within the second exhaust pipe 33, the extraction assembly 3 also includes a connecting pipe 34. The connecting pipe 34 is located in the lower cavity assembly 1 and extends towards the upper cover assembly 2. The connecting pipe 34 has a through-hole second connecting pipe 341, one end of which connects to an external extraction device. When the upper cover assembly 2 is placed over the lower cavity assembly 1, the second exhaust pipe 33 abuts against the connecting pipe 34, sealing the exhaust opening 30 to the second connecting pipe 341. This eliminates the need for the external extraction device to move with the upper cover assembly 2; it provides suction force through the second connecting pipe 341 in the lower cavity assembly 1. When the upper cover assembly 2 forms a sealed reaction chamber over the lower cavity assembly 1, the exhaust opening 30 on the second exhaust pipe 33 corresponds to the opening of the connecting pipe 34. Specifically, a sealing ring can be installed at the opening of the connecting pipe 34. The upper cover assembly 2, with its greater weight, can provide a larger downward pressure to seal the exhaust opening 30 of the second exhaust pipe 33 to the second connecting pipe 341.

[0050] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A flat-plate coating apparatus, comprising a lower cavity assembly (1) and an upper cover assembly (2) movably connected to the lower cavity assembly (1), wherein the upper cover assembly (2) and the lower cavity assembly (1) together form a reaction chamber, and the upper cover assembly (2) is provided with a spraying mechanism (21), characterized in that, The flat-plate coating equipment also includes an exhaust assembly (3), which surrounds the spray mechanism (21) and is located at the edge of the reaction chamber. The exhaust assembly (3) has an exhaust channel and an air inlet connected to the reaction chamber. The exhaust assembly (3) has an air outlet (30) for connecting to an external exhaust device. Both the air inlet and the air outlet (30) are connected to the exhaust channel.

2. The flat-plate coating equipment according to claim 1, characterized in that, The exhaust assembly (3) includes a first exhaust pipe (31) connected to the lower cavity assembly (1), the exhaust channel is disposed in the first exhaust pipe (31), the spray mechanism (21) is surrounded by an insulating frame (22), the insulating frame (22) extends toward the lower cavity assembly (1), there is a communication gap (23) between the insulating frame (22) and the lower cavity assembly (1), the first exhaust pipe (31) at least partially blocks the communication gap (23) along the height direction of the first exhaust pipe (31), and the air inlet is opened on the pipe wall of the first exhaust pipe (31).

3. The flat-plate coating equipment according to claim 2, characterized in that, The air intake opening includes a plurality of air intake holes (311), which are spaced apart along the length of the first exhaust pipe (31).

4. The flat-plate coating equipment according to claim 3, characterized in that, The first exhaust pipe (31) has a rectangular cross-section, and the first exhaust pipe (31) has an air inlet (311) on the side wall (312) facing the communication gap (23) and the adjacent side wall (312).

5. The flat-plate coating equipment according to claim 4, characterized in that, Multiple air inlets (311) are provided on the sidewall (312) facing the communication gap (23) and on the adjacent sidewall (312), and the multiple air inlets (311) on two adjacent sidewalls (312) are staggered along the length direction of the first exhaust pipe (31).

6. The flat-plate coating equipment according to claim 2, characterized in that, The first exhaust pipe (31) forms an annular pipe around the outer periphery of the insulating frame (22); and / or, The exhaust assembly (3) further includes a support tube (32), which is disposed in the lower cavity assembly (1) and extends toward the upper cover assembly (2). The support tube (32) is used to support the first exhaust pipe (31). The support tube (32) has a through first connecting pipe, one end of which is used to connect to the air outlet (30), and the other end is used to connect to the external exhaust device.

7. The flat-plate coating equipment according to claim 1, characterized in that, The exhaust assembly (3) includes a second exhaust pipe (33) connected to the upper cover assembly (2). The exhaust channel is located inside the second exhaust pipe (33). The air inlet is opened on the pipe wall of the second exhaust pipe (33). An insulating frame (22) is provided around the spray mechanism (21). The second exhaust pipe (33) is located outside the insulating frame (22). The insulating frame (22) has a through-hole (221) that extends along the wall thickness direction. The inlet end of the through-hole (221) faces the spray mechanism (21), and the outlet end of the through-hole (221) is connected to the air inlet.

8. The flat-plate coating equipment according to claim 7, characterized in that, The insulating frame (22) is provided with four through ports (221), which are located at the four corners of the insulating frame (22). The length of the second exhaust pipe (33) extends along the circumference of the insulating frame (22) and covers at least the four corners of the insulating frame (22). The second exhaust pipe (33) has four air inlets, and the four air outlets (30) and the four through ports (221) are connected in a one-to-one correspondence.

9. The flat-plate coating equipment according to claim 8, characterized in that, The exhaust assembly (3) includes two second exhaust pipes (33), which are symmetrically arranged on both sides of the insulating frame (22). The second exhaust pipes (33) are U-shaped to cover the two corners of the insulating frame (22), and each second exhaust pipe (33) is provided with an exhaust opening (30).

10. The flat-plate coating equipment according to claim 7, characterized in that, The exhaust assembly (3) further includes a connecting pipe (34), which is disposed in the lower cavity assembly (1) and extends toward the upper cover assembly (2). The connecting pipe (34) has a through second connecting pipe (341), one end of which is connected to the external exhaust device. When the upper cover assembly (2) covers the lower cavity assembly (1), the second exhaust pipe (33) abuts against the connecting pipe (34) so ​​that the exhaust opening (30) seals and connects to the second connecting pipe (341).

Images