Multifunctional leak detection device
By integrating helium mass spectrometry and liquid leak detection into a single multifunctional leak detection device, the problem of insufficient adaptability of existing equipment has been solved, enabling leak detection capabilities in multiple environments and complex objects, and improving the integration and purging effect of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- BEIJING GERCHIN SCI & TECH LTD
- Filing Date
- 2025-04-11
- Publication Date
- 2026-05-29
Smart Images

Figure CN224303220U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of leak detection equipment, and more particularly to a multifunctional leak detection device. Background Technology
[0002] Leak detection is a device that uses physical / chemical principles to detect gas or liquid leaks in a workpiece. Existing leak detection equipment typically comes in two types: one involves filling the workpiece with high-pressure gas and then immersing it in a specific leak-detecting liquid; the other involves filling the workpiece with nitrogen and then placing it in a dedicated leak-detecting chamber for the leak detection operation.
[0003] However, due to environmental differences and the complexity of the objects to be detected, devices with only a single leak detection function often cannot meet practical needs. Therefore, this application proposes a multifunctional leak detection device that can adapt to various testing environments. Utility Model Content
[0004] To adapt to various testing environments and detect leaks in complex objects, this application provides a multifunctional leak detection device.
[0005] The multifunctional leak detection device provided in this application adopts the following technical solution:
[0006] A multifunctional leak detection device includes a frame, a helium mass spectrometry leak detection component, and a liquid leak detection component, wherein both the helium mass spectrometry leak detection component and the liquid leak detection component are mounted on the frame.
[0007] By adopting the above technical solution, the helium mass spectrometry leak detection function and the liquid leak detection function are integrated into the same device, enabling the multi-functional leak detection device to perform a variety of different leak detection tasks, thereby adapting to various detection environments and detecting leaks in complex objects.
[0008] Optionally, the helium mass spectrometry leak detection assembly includes a helium pressurization tank, a system vacuum pump, a leak detection tank, and a leak detection vacuum pump; the helium pressurization tank is equipped with a helium gas pipe, which is connected to helium gas; the helium gas pipe is equipped with a helium gas pump, which is used to pressurize and deliver the helium gas to the helium pressurization tank; the system vacuum pump is connected to the inner cavity of the helium pressurization tank; and the leak detection vacuum pump is connected to the leak detection tank.
[0009] By employing the above technical solution, during helium mass spectrometry leak detection, the workpiece to be tested is first placed in the chamber of a pressurized helium container. After sealing the container, a vacuum pump is used to evacuate the chamber. Then, a helium pump is started, and high-pressure helium gas is introduced into the inner cavity of the pressurized helium container through a helium tube. If the workpiece has a leak, helium gas, under pressure, will seep into the workpiece through the leak. The workpiece is then removed, and nitrogen gas is used to purge any residual helium gas from its surface. Next, the workpiece is placed in a leak detection container, sealed, and pre-evacuated using a leak detection vacuum pump. Because the workpiece is under vacuum, helium gas inside the workpiece will precipitate through the leak. Finally, a helium mass spectrometer is used to detect leaks in the workpiece within the leak detection container.
[0010] Optionally, the liquid leak detection assembly includes a nitrogen pressurization tank, an oil storage tank, and a fluorinated oil leak detection tank; the nitrogen pressurization tank is equipped with a nitrogen pipe connected to external nitrogen gas; the nitrogen pipe is equipped with a nitrogen pump for pressurizing and delivering nitrogen gas into the nitrogen pressurization tank; the oil storage tank is used to store light fluorinated oil, and the oil storage tank is equipped with a fluorinated oil pipe, the end of which is connected to the nitrogen pressurization tank; the fluorinated oil pipe is equipped with a first valve for preventing fluorinated oil from entering the nitrogen pressurization tank; the fluorinated oil leak detection tank is used to store heavy fluorinated oil; and the fluorinated oil leak detection tank is equipped with a heating device.
[0011] By adopting the above technical solution, when performing liquid leak detection, the workpiece is first placed in the chamber of the nitrogen pressurization tank, then the nitrogen pressurization tank is evacuated, and then the first valve is opened to allow the light fluorinated oil in the oil storage tank to be drawn into the nitrogen pressurization tank, and then the first valve is closed; then, high-pressure nitrogen is introduced into the nitrogen pressurization tank through the nitrogen pipe using a nitrogen pump. If the workpiece under test has a leak, the light fluorinated oil will seep into the interior of the workpiece under the pressure of the nitrogen; then the workpiece is removed, and the surface of the workpiece is cleaned with nitrogen before being placed in the fluorinated oil leak detection tank. The medium fluorinated oil in the fluorinated oil leak detector is heated using a heating device. If the workpiece has a leak, the light fluorinated oil that has seeped into the workpiece will vaporize under heat and precipitate out through the leak under pressure, forming uniform and continuous bubbles in the heavy fluorinated oil.
[0012] Optionally, the system vacuum pump is connected to a first connecting pipe and a second connecting pipe, the system vacuum pump being connected to the helium pressurized tank through the first connecting pipe; the system vacuum pump being connected to the nitrogen pressurized tank through the second connecting pipe.
[0013] By adopting the above technical solution, the helium mass spectrometry leak detection component and the liquid leak detection component share the same system vacuum pump, thereby achieving vacuuming of the pressurized helium tank and pressurized nitrogen tank and improving the integration of the workpiece to be leaked.
[0014] Optionally, a cleaning assembly is also included, which is mounted on the frame and is used to purge the workpiece under inspection with nitrogen gas.
[0015] Optionally, the cleaning assembly includes a purge canister, a placement plate, and a drive unit; the purge canister is mounted on the frame, and the purge canister is provided with a purge pipe, one end of which is connected to the inner cavity of the purge canister, and the other end is connected to nitrogen gas; a purge pump is provided around the purge pipe, and the purge pump is used to pressurize and deliver the nitrogen gas to the purge pipe; the placement plate is installed in the purge canister, and the drive unit is used to drive the placement plate to move spirally up and down relative to the purge canister.
[0016] By adopting the above technical solution, after the workpiece to be inspected is removed from the pressurized helium or nitrogen container, it is placed on a placement plate, and simultaneously the purge pump is started to introduce nitrogen gas into the purge container. Then, a drive mechanism rotates the placement plate clockwise while moving it downwards. After moving it to a certain position, the drive mechanism again rotates the workpiece clockwise while moving it upwards. Throughout this process, because the placement plate is constantly rotating, the nitrogen gas can effectively purge all angles of the workpiece, ensuring a thorough purging effect.
[0017] Optionally, the driving component is a motor; a guide screw is fixedly connected to the bottom surface of the placement plate; a guide plate is provided between the driving component and the placement plate, the guide plate having a through guide screw hole, the guide screw hole being threadedly engaged with the guide screw; a guide rod is fixedly connected to the output end of the driving component, the guide rod extending along the height direction of the purge tank; a guide groove is provided on the side wall of the guide screw, the guide groove penetrating the end face of the guide screw away from the placement plate, the guide groove being used for insertion of the guide rod.
[0018] By adopting the above technical solution, when purging the workpiece to be inspected, the workpiece is first placed on the placement plate, then the drive unit is started, and the purge pump is started simultaneously. The drive unit drives the forward guide screw to rotate through the guide rod. During the rotation of the guide screw, it moves towards the drive unit under the action of the guide screw hole, thereby causing the placement plate to rotate and descend. After the placement plate reaches the guide plate, the drive unit drives the guide screw to rotate in the reverse direction. During the rotation, the guide screw moves upward simultaneously, sending the workpiece to be inspected out of the purge tank. Throughout the above process, the purge pump continuously introduces nitrogen gas into the purge tank to purge the helium or light fluorinated oil from the surface of the workpiece.
[0019] Optionally, multiple guide rods are provided, and the multiple guide rods are arranged at equal intervals around the central axis of the guide screw.
[0020] By adopting the above technical solution, the connection stability between the driving component and the guide screw, as well as the stress stability of the guide screw, are ensured.
[0021] In summary, this application includes at least one of the following beneficial technical effects:
[0022] 1. By integrating helium mass spectrometry leak detection and liquid leak detection functions into the same device, the multi-functional leak detection device can perform a variety of different leak detection tasks, thereby adapting to various detection environments and detecting leaks in complex objects;
[0023] 2. By sharing the same system vacuum pump between the helium mass spectrometry leak detection component and the liquid leak detection component, the integration of the multifunctional leak detection workpiece can be further improved;
[0024] 3. By installing a drive unit in the purge tank that can move the placement plate spiral up and down, the purging effect on the inspected workpiece is ensured. Attached Figure Description
[0025] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of this application.
[0026] Figure 2 This is a schematic diagram of the structure of Embodiment 2 of this application.
[0027] Figure 3 yes Figure 1 Enlarged diagram of part A.
[0028] Explanation of reference numerals in the attached diagram: 1. Frame; 2. Helium mass spectrometer leak detection assembly; 21. Helium pressurization tank; 211. Helium pipe; 212. Helium pump; 22. System vacuum pump; 221. First connecting pipe; 222. Second connecting pipe; 23. Leak detection tank; 24. Leak detection vacuum pump; 25. Helium mass spectrometer leak detector; 3. Liquid leak detection assembly; 31. Nitrogen pressurization tank; 311. Nitrogen pipe; 312. Nitrogen pump; 32. Oil storage tank; 321. Fluorine oil pipe; 322. First valve; 33. Fluorine oil leak detection tank; 4. Industrial control computer display screen; 5. Cleaning assembly; 51. Purge tank; 511. Purge pipe; 512. Purge pump; 52. Placement plate; 521. Guide screw; 522. Guide groove; 53. Drive component; 531. Guide rod; 532. Ball bearing; 54. Guide plate; 541. Guide screw hole. Detailed Implementation
[0029] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.
[0030] This application discloses a multifunctional leak detection device.
[0031] Example 1
[0032] Reference Figure 1A multifunctional leak detection device includes a frame 1, a helium mass spectrometry leak detection component 2, a liquid leak detection component 3, and an industrial control computer display screen 4. Both the helium mass spectrometry leak detection component 2 and the liquid leak detection component 3 are mounted on the frame 1. This integrates helium mass spectrometry leak detection and liquid leak detection functions into a single device, enabling it to perform various leak detection tasks, adapt to diverse testing environments, and detect leaks in complex objects.
[0033] Specifically, the helium mass spectrometry leak detection assembly 2 includes a helium pressurized tank 21, a system vacuum pump 22, a leak detection tank 23, a leak detection vacuum pump 24, and a helium mass spectrometer leak detector 25. The helium pressurized tank 21 is equipped with a helium gas pipe 211, which is connected to external helium gas. The helium gas pipe 211 is equipped with a helium pump 212, which is used to pressurize and deliver helium gas to the helium pressurized tank 21. The system vacuum pump 22 is connected to the inner cavity of the helium pressurized tank 21. The leak detection vacuum pump 24 is connected to the leak detection tank 23.
[0034] During helium mass spectrometry leak detection, the workpiece to be tested is first placed in the chamber of the pressurized helium tank 21. After sealing the pressurized helium tank 21, the chamber of the pressurized helium tank 21 is evacuated by the system vacuum pump 22. Then, the helium pump 212 is started, and high-pressure helium gas is introduced into the inner cavity of the pressurized helium tank 21 through the helium gas pipe 211. If there is a leak in the workpiece, the helium gas will seep into the interior of the workpiece under pressure through the leak. After that, the workpiece is removed, and the residual helium gas on the surface of the workpiece is blown away with nitrogen gas. Then, the workpiece to be tested is placed in the leak detection tank 23, sealed, and the leak detection vacuum pump 24 is used to pre-evacuate the leak detection tank 23. Since the workpiece is in a vacuum state, the helium gas inside the workpiece will precipitate out through the leak in the workpiece. Then, the helium mass spectrometer leak detector 25 is used to detect the leak in the workpiece in the leak detection tank 23.
[0035] The liquid leak detection assembly 3 includes a nitrogen pressurization tank 31, an oil storage tank 32, and a fluorinated oil leak detection tank 33. The nitrogen pressurization tank 31 is equipped with a nitrogen pipe 311, which is connected to external nitrogen gas. The nitrogen pipe 311 is equipped with a nitrogen pump 312, which pressurizes nitrogen and delivers it into the nitrogen pressurization tank 31. The oil storage tank 32 stores light fluorinated oil and is equipped with a fluorinated oil pipe 321, the end of which is connected to the nitrogen pressurization tank 31. The fluorinated oil pipe 321 is equipped with a first valve 322, which prevents fluorinated oil from entering the nitrogen pressurization tank 31. The fluorinated oil leak detection tank 33 stores heavy fluorinated oil. The fluorinated oil leak detection tank 33 is equipped with a heating device.
[0036] When performing liquid leak detection, the workpiece is first placed in the chamber of the nitrogen pressurization tank 31, and then the nitrogen pressurization tank 31 is evacuated. Then, the first valve 322 is opened to allow the light fluorinated oil in the oil storage tank 32 to be drawn into the nitrogen pressurization tank 31, and then the first valve 322 is closed. Then, high-pressure nitrogen is introduced into the nitrogen pressurization tank 31 through the nitrogen pipe 311 using the nitrogen pump 312. If there is a leak in the workpiece, the light fluorinated oil will seep into the interior of the workpiece under the pressure of the nitrogen. After that, the workpiece is taken out, and the light fluorinated oil on the surface of the workpiece is blown away with nitrogen before being placed in the fluorinated oil leak detection tank 33. The medium fluorinated oil in the fluorinated oil leak detector is heated using a heating device. If there is a leak in the workpiece, the light fluorinated oil that has seeped into the workpiece will vaporize under heat and precipitate out through the leak in the workpiece under pressure, forming uniform and continuous bubbles in the heavy fluorinated oil.
[0037] In this embodiment, the system vacuum pump 22 is connected to a first connecting pipe 221 and a second connecting pipe 222. The system vacuum pump 22 is connected to the helium pressurized tank 21 through the first connecting pipe 221. The system vacuum pump 22 is connected to the nitrogen pressurized tank 31 through the second connecting pipe 222. This allows the helium mass spectrometer leak detection component 2 and the liquid leak detection component 3 to share the same system vacuum pump 22, achieving vacuuming of the helium pressurized tank 21 and the nitrogen pressurized tank 31, thus improving the integration of the device.
[0038] The industrial control computer display screen 4 is installed on the rack 1. The testing personnel can view the testing data at any time on the industrial control computer display screen 4 so as to adjust the testing strategy or take corresponding repair measures in a timely manner.
[0039] The implementation principle of Example 1 is as follows: When performing helium mass spectrometry leak detection, the workpiece to be tested is first placed in the chamber of the pressurized helium tank 21. After sealing the pressurized helium tank 21, the chamber of the pressurized helium tank 21 is evacuated by the system vacuum pump 22. Then, the helium pump 212 is started, and high-pressure helium gas is introduced into the inner cavity of the pressurized helium tank 21 through the helium gas pipe 211. If there is a leak in the workpiece, the helium gas will seep into the interior of the workpiece under pressure through the leak. After that, the workpiece is taken out, and the residual helium gas on the surface of the workpiece is blown away with nitrogen gas. Then, the workpiece to be tested is placed in the leak detection tank 23, sealed, and the leak detection vacuum pump 24 is used to pre-evacuate the leak detection tank 23. Since the workpiece is in a vacuum state, the helium gas inside the workpiece is released through the leak in the workpiece. Then, the helium mass spectrometer leak detector 25 is used to detect the leak in the workpiece in the leak detection tank 23.
[0040] When performing liquid leak detection, the workpiece is first placed in the chamber of the nitrogen pressurization tank 31. Then, the system vacuum pump 22 is used to evacuate the nitrogen pressurization tank 31. After that, the first valve 322 is opened to allow the light fluorinated oil in the oil storage tank 32 to be drawn into the nitrogen pressurization tank 31. Then, the first valve 322 is closed. Then, high-pressure nitrogen is introduced into the nitrogen pressurization tank 31 through the nitrogen pipe 311 using the nitrogen pump 312. If there is a leak in the workpiece, the light fluorinated oil will seep into the interior of the workpiece under the pressure of the nitrogen. After that, the workpiece is taken out, and the light fluorinated oil on the surface of the workpiece is blown away with nitrogen before being placed in the fluorinated oil leak detection tank 33. The medium fluorinated oil in the fluorinated oil leak detector is heated using a heating device. If there is a leak in the workpiece, the light fluorinated oil that has seeped into the workpiece will vaporize under the heat and precipitate out through the leak in the workpiece under pressure, forming uniform and continuous bubbles in the heavy fluorinated oil.
[0041] Example 2
[0042] The difference between this embodiment and embodiment 1 is that it also includes a cleaning component 5, which is installed on the frame 1 and is used to purge the workpiece under inspection with nitrogen gas.
[0043] In this embodiment, the cleaning assembly 5 includes a purge canister 51, a placement plate 52, and a drive unit 53. The purge canister 51 is mounted on the frame 1 and is provided with a purge pipe 511. One end of the purge pipe 511 is connected to the inner cavity of the purge canister 51, and the other end is connected to nitrogen gas. A purge pump 512 is provided around the purge pipe 511, which is used to pressurize and deliver nitrogen gas to the purge pipe 511. The placement plate 52 is installed in the purge canister 51, and the drive unit 53 is used to drive the placement plate 52 to move spirally up and down relative to the purge canister 51.
[0044] Specifically, the driving component 53 is a motor. A guide screw 521 is fixedly connected to the bottom surface of the placement plate 52. A guide plate 54 is provided between the driving component 53 and the placement plate 52. The guide plate 54 has a through guide screw hole 541, which is threadedly engaged with the guide screw 521.
[0045] A guide rod 531 is fixedly connected to the output end of the drive unit 53, and the guide rod 531 extends along the height direction of the purge can 51. A guide groove 522 is provided on the side wall of the guide screw 521, and the guide groove 522 passes through the end face of the guide screw 521 away from the placement plate 52. The guide groove 522 is used for the guide rod 531 to be inserted to realize the sliding connection between the guide screw 521 and the guide rod 531.
[0046] The guide rod 531 is provided in multiple ways. The multiple guide rods 531 are arranged at equal intervals around the central axis of the guide screw 521 to improve the connection stability between the drive component 53 and the guide screw 521 and the stress stability of the guide screw 521.
[0047] The guide rod 531 is circumferentially connected with ball bearings 532, which are used to abut against the groove wall of the guide groove 522.
[0048] It is understood that in other embodiments, the drive unit 53 may also be an inverted rotary pressing cylinder, with the output end of the drive unit 53 connected to the lower surface of the placement plate 52.
[0049] The implementation principle of Example 2 is as follows: When purging the workpiece to be inspected, the workpiece is first placed on the placement plate 52, then the drive component 53 is started, and the purging pump 512 is started simultaneously. The drive component 53 drives the forward guide screw 521 to rotate through the guide rod 531. During the rotation of the guide screw 521, it moves towards the drive component 53 under the action of the guide screw hole 541, thereby driving the placement plate 52 to rotate and descend simultaneously. After the placement plate 52 reaches the guide plate 54, the drive component 53 drives the guide screw 521 to rotate in the opposite direction. During the rotation, the guide screw 521 moves upward simultaneously, sending the workpiece to be inspected out of the purging tank 51. In the above process, the purging pump 512 continuously introduces nitrogen gas into the purging tank 51 to purge the helium or light fluorinated oil from the surface of the workpiece.
[0050] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A multifunctional leak detection device, characterized in that: The system includes a frame (1), a helium mass spectrometer leak detection assembly (2), and a liquid leak detection assembly (3), both of which are mounted on the frame (1). The helium mass spectrometer leak detection assembly (2) includes a helium pressurization tank (21), a system vacuum pump (22), a leak detection tank (23), and a leak detection vacuum pump (24). The helium pressurization tank (21) is equipped with a helium pipe (211) connected to helium gas. The helium pipe (211) is equipped with a helium pump (212) used to pressurize and deliver the helium gas to the helium pressurization tank (21). The system vacuum pump (22) is connected to the inner cavity of the helium pressurization tank (21). The leak detection vacuum pump (24) is connected to the leak detection tank (23). The liquid leak detection assembly (3) includes a nitrogen pressurization tank (31). The tank includes an oil storage tank (32) and a fluorinated oil leak detection tank (33). The nitrogen pressurization tank (31) is equipped with a nitrogen pipe (311), which is connected to nitrogen gas. The nitrogen pipe (311) is equipped with a nitrogen pump (312), which is used to pressurize the nitrogen gas and send it into the nitrogen pressurization tank (31). The oil storage tank (32) is used to store light fluorinated oil. The oil storage tank (32) is equipped with a fluorinated oil pipe (321), and one end of the fluorinated oil pipe (321) away from the oil storage tank (32) is connected to the nitrogen pressurization tank (31). The fluorinated oil pipe (321) is equipped with a first valve (322), which is used to prevent the fluorinated oil from entering the nitrogen pressurization tank (31). The fluorinated oil leak detection tank (33) is used to store heavy fluorinated oil. The fluorinated oil leak detection tank (33) is equipped with a heating device.
2. The multifunctional leak detection device according to claim 1, characterized in that: The system vacuum pump (22) is connected to a first connecting pipe (221) and a second connecting pipe (222). The system vacuum pump (22) is connected to the pressurized helium tank (21) through the first connecting pipe (221); the system vacuum pump (22) is connected to the pressurized nitrogen tank (31) through the second connecting pipe (222).
3. A multifunctional leak detection device according to claim 1 or 2, characterized in that: It also includes a cleaning assembly (5), which is mounted on the frame (1) and is used to purge the workpiece under inspection with nitrogen gas.
4. The multifunctional leak detection device according to claim 3, characterized in that: The cleaning assembly (5) includes a purge canister (51), a placement plate (52), and a drive unit (53). The purge canister (51) is installed on the frame (1). The purge canister (51) is provided with a purge pipe (511). One end of the purge pipe (511) is connected to the inner cavity of the purge canister (51), and the other end is connected to nitrogen gas. A purge pump (512) is provided on the periphery of the purge pipe (511). The purge pump (512) is used to pressurize and deliver the nitrogen gas to the purge pipe (511). The placement plate (52) is installed in the purge canister (51), and the drive unit (53) is used to drive the placement plate (52) to move spirally up and down relative to the purge canister (51).
5. A multifunctional leak detection device according to claim 4, characterized in that: The driving component (53) is a motor; a guide screw (521) is fixedly connected to the bottom surface of the placement plate (52); a guide plate (54) is provided between the driving component (53) and the placement plate (52), and a guide screw hole (541) is provided through the guide plate (54), which is threadedly engaged with the guide screw (521); a guide rod (531) is fixedly connected to the output end of the driving component (53), and the guide rod (531) extends along the height direction of the purge tank (51); a guide groove (522) is provided on the side wall of the guide screw (521), and the guide groove (522) passes through the end face of the guide screw (521) away from the placement plate (52), and the guide groove (522) is used for the insertion of the guide rod (531).
6. The multifunctional leak detection device according to claim 5, characterized in that: The guide rod (531) is provided in multiple parts, and the multiple guide rods (531) are arranged at equal intervals around the central axis of the guide screw (521).