Support frame structure for a magazine of a sheet loading machine

Abstract

The utility model relates to the technical field of semiconductor packaging, especially a kind of support frame structure for chip mounter magazine, comprising: support pole, including horizontal support part and the installation part vertically connected with horizontal support part;Sliding plate sliding in the one side of horizontal support part, sliding plate can be moved horizontally along horizontal support part, and part of sliding plate is located outside horizontal support part;Distance sensor is located on sliding plate and located outside horizontal support part;Locking mechanism is slidably arranged at the bottom of horizontal support part and is correspondingly arranged with sliding plate, locking mechanism can lock sliding plate to limit the horizontal movement of sliding plate after the horizontal movement of sliding plate is good position;The object plate for placing magazine is connected on horizontal support part and is placed, and the upper surface of object plate is higher than the upper surface of distance sensor.The distance sensor of the utility model can be horizontally adjusted position, so that it can adapt to the detection of magazine of various sizes, and timely discover the shaking, displacement and other phenomena of magazine.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging technology, and specifically to a support frame structure for a die-loading machine cassette. Background Technology

[0002] In the semiconductor packaging process, the loading and unloading of die-loading equipment has gradually been changed from manual operation to automatic operation, thereby improving the transportation efficiency of the frames and reducing human contact with the frames, which can effectively improve the quality of semiconductor packaging.

[0003] Automatic loading and unloading of wafer loading machines is achieved by a vertically moving mechanism that carries the wafer cassette up and down. However, as the cassette moves up and down with the mechanism, it can wobble, causing the wafer frame to misalign within the cassette. Consequently, the wafer frame cannot be ejected from the cassette, hindering automatic loading and unloading. This jamming phenomenon can also affect the yield of products on the wafer frame. To prevent wafer cassette wobble and jamming during vertical movement, existing technologies include increasing the smoothness of the cassette surface to reduce friction between the cassette and the moving mechanism during descent. However, the risk of wafer cassette misalignment still exists. Utility Model Content

[0004] The purpose of this utility model is to overcome the defects of the prior art and provide a support frame structure for the material box of a loading machine, which solves the problems of the existing material box being prone to shaking, displacement and jamming during the up and down movement.

[0005] The technical solution to achieve the above objectives is:

[0006] This utility model provides a support frame structure for a wafer loading machine's material box, comprising:

[0007] The support rod includes a horizontal support portion and a mounting portion that is perpendicularly connected to the horizontal support portion;

[0008] A sliding plate is mounted on one side of the horizontal support, and the sliding plate can move horizontally along the horizontal support, with a portion of the sliding plate located outside the horizontal support;

[0009] A distance sensor is mounted on the skateboard and located outside the horizontal support portion;

[0010] A locking mechanism is provided at the bottom of the horizontal support and corresponding to the slide plate. The locking mechanism can lock the slide plate after the slide plate has been moved to a horizontal position to restrict the horizontal movement of the slide plate.

[0011] A shelf connected to the horizontal support and for placing a material box, the upper surface of the shelf being higher than the upper surface of the distance sensor.

[0012] A further improvement of the support frame structure for the material box of the film loading machine of this utility model is that a sliding groove is provided on one side of the horizontal support part;

[0013] One side of the slide plate is placed in the slide groove and can move horizontally along the slide groove.

[0014] A further improvement of the support frame structure for the material box of the film loading machine of this utility model is that the bottom of the horizontal support part is provided with a movable groove that communicates with the slide groove.

[0015] The bottom of the horizontal support is also provided with a pair of limiting strips corresponding to the moving groove;

[0016] The locking mechanism includes a locking nut disposed between a pair of limiting plates and a locking bolt screwed to the locking nut. The end of the locking bolt extends into the moving groove. The locking bolt and the locking nut can move horizontally to correspond to the position of the slide plate. By rotating the locking bolt, the end of the locking bolt can push against the slide plate, thereby locking the slide plate.

[0017] A further improvement of the support frame structure for the material box of the present invention is that the limiting strip includes a first strip vertically connected to the bottom of the horizontal support and a second strip vertically connected to the first strip, the end of the second strip extending horizontally downward toward the moving groove.

[0018] A further improvement of the support frame structure for the material box of the loading machine of this utility model is that a limiting groove communicating with the slide groove is also provided on the horizontal support part. The limiting groove is provided on the side of the slide plate, and the setting direction of the limiting groove is consistent with the setting direction of the slide groove.

[0019] The side of the slide plate is provided with a downwardly extending limiting part, which is located in the limiting groove.

[0020] A further improvement of the support frame structure for the material box of the present invention is that the horizontal support part is provided with a cover plate covering the slide groove, and the cover plate is sandwiched between the horizontal support part and the placement plate.

[0021] A further improvement of the support frame structure for the material box of the film loading machine is that the slide plate is provided with two slide plates, and each slide plate is provided with a distance sensor.

[0022] A further improvement of the support frame structure for the material box of the film loading machine is that two or more support rods are provided.

[0023] A further improvement of the support frame structure for the material box of the film loading machine is that bolt holes are provided on the mounting part.

[0024] A further improvement of the support frame structure for the material box of the present invention is that the mounting part is located at one end of the horizontal support part.

[0025] The beneficial effects of this utility model on the support frame structure for the material box of the film loading machine are as follows:

[0026] This utility model discloses a support frame structure for supporting a material box. The mounting part of the support rod connects to a vertically moving mechanism, allowing the material box, placed on a shelf, to move up and down with the mechanism. The sliding plate can be adjusted according to the position of the material box, positioning the distance sensor below the bottom of the box. This horizontal adjustment of the sliding plate and distance sensor allows it to accommodate material boxes of various sizes. Furthermore, the distance sensor can detect the distance between itself and the bottom of the material box in real time. If the material box shakes or shifts while moving up and down with the support frame structure, the distance detected by the sensor will change. The sensor can promptly issue an alarm when the detection result changes, notifying staff to check the material box and prevent material from getting stuck in the frame.

[0027] The support frame structure of this utility model supports the material box by setting two or more support rods. Each support rod is equipped with a distance sensor through a sliding plate to realize multi-position detection of the material box, which can improve the detection accuracy of phenomena such as shaking and displacement of the material box. Attached Figure Description

[0028] Figure 1 This is a three-dimensional structural diagram of the support frame structure for the material box of the film loading machine according to this utility model.

[0029] Figure 2 This is an exploded exploded view of the support frame structure for the substrate box of the present invention.

[0030] Figure 3 for Figure 1 Cross-sectional view of the middle slide plate.

[0031] Figure 4 This is a schematic diagram of a preferred embodiment of the support frame structure for a wafer loading machine material box according to the present invention.

[0032] Figure 5 This is a schematic diagram of the support frame structure for a film loading machine material box, which supports a certain type of material box.

[0033] Figure 6This is a schematic diagram of the support frame structure of the present invention for a film loading machine material box supporting another type of material box. Detailed Implementation

[0034] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0035] See Figure 1 This invention provides a support frame structure for a wafer loading machine's material box. The material box holds a frame with multiple semiconductor chips arrayed on it. The support frame structure also connects to a vertical movement mechanism, which drives the support frame structure to move up and down, thereby moving the material box along with it. The support frame structure features a horizontally movable slide plate on a support rod. This slide plate is equipped with a distance sensor. After the material box is placed on a shelf, the slide plate moves with the distance sensor to the bottom of the material box. The distance sensor continuously monitors the distance from the bottom of the material box. If the distance detected by the sensor changes during the vertical movement of the support frame structure with the material box, an alarm is triggered, indicating that the material box has shaken or shifted. This alerts staff to check the situation and prevent the frame from jamming. Thus, this invention achieves timely detection of material box shaking and shifting, providing timely alarms and allowing for timely manual intervention to reduce or even prevent the frame from jamming. The support frame structure for the substrate box of the present invention is described below with reference to the accompanying drawings.

[0036] See Figure 1 This image shows a three-dimensional structural diagram of the support frame structure for a wafer loading machine's material box, as described in this utility model. (See attached image.) Figure 2 The image shows an exploded exploded structural diagram of the support frame structure for a wafer loading machine material box according to this utility model. The following is a combined view... Figure 1 and Figure 2 The present invention describes the support frame structure for a substrate box in a film loading machine.

[0037] like Figure 1 and Figure 2As shown, the support frame structure for a wafer loading machine cassette of this utility model includes a support rod 21, a slide plate 22, a distance sensor 23, a locking mechanism, and a shelf 24. The support rod 21 includes a horizontal support portion 211 and a mounting portion 212 vertically connected to the horizontal support portion 211. The slide plate 22 is slidably disposed on one side of the horizontal support portion 211 and can move horizontally along the horizontal support portion 211. A portion of the slide plate 22 is located on the outside of the horizontal support portion 211. The distance sensor 23 is disposed on the slide plate 22 and located on the outside of the horizontal support portion 211. The locking mechanism is slidably disposed on the bottom of the horizontal support portion 211 and is correspondingly disposed on the slide plate 22. The locking mechanism can lock the slide plate 22 after it has moved to a horizontal position to restrict its horizontal movement. The shelf 24 is connected to the horizontal support portion 211 and is used to place the cassette. The upper surface of the shelf 24 is higher than the upper surface of the distance sensor 23.

[0038] The distance sensor 23 is used to detect its distance from the bottom of the material box. In use, the material box is placed on the shelf 24, and the support rod 21 is fixedly connected to a vertically moving mechanism via the mounting part 212. For example, a plate is connected to the top of a vertical electric cylinder or vertical pneumatic cylinder, forming a vertically moving mechanism. The extension and retraction adjustment of the vertical electric cylinder or vertical pneumatic cylinder drives the seat plate to move up and down. The mounting part 212 can then be fixedly connected to this seat plate, allowing the material box placed on the shelf 24 to move up and down. After placing the material box on the shelf 24, the horizontal position of the slide plate 22 can be adjusted according to the size (e.g., width) of the material box, placing the distance sensor 23 at the bottom of the material box. This distance sensor 23 can detect its distance from the bottom of the material box. During the vertical movement of the material box, the distance sensor 23 monitors this distance in real time. When the distance changes, it indicates that the material box has shaken or shifted, and the distance sensor 23 can promptly issue an alarm. Preferably, the distance sensor 23 is equipped with an alarm that will sound when the distance changes. Alternatively, in another preferred embodiment, the distance sensor 23 sends the detected distance information to a control module, which then determines whether the distance has changed. If a change occurs, an alarm is triggered. This control module can be integrated into a semiconductor-packaged control system.

[0039] In one specific embodiment of this utility model, such as Figures 1 to 3 As shown, a groove 2111 is provided on one side of the horizontal support 211; one side of the slide plate 22 is placed in the groove 2111 and can move horizontally along the groove 2111.

[0040] The slide groove 2111 is horizontally arranged, and the slide plate 22 is also horizontally arranged. One side of the slide plate 22 is inserted into the slide groove 2111, and the other side is located outside the support rod 21 (or horizontal support part 211) for mounting the distance sensor 23.

[0041] Furthermore, the bottom of the horizontal support 211 is provided with a movable groove 2112 that communicates with the slide groove 2111; the bottom of the horizontal support 211 is also provided with a pair of limiting plates 27 corresponding to the movable groove 2112; the locking mechanism includes a locking nut 251 disposed between the pair of limiting plates 27 and a locking bolt 252 screwed to the locking nut 251. The end of the locking bolt 252 extends into the movable groove 2112. The locking bolt 252 and the locking nut 251 can move horizontally and thus correspond to the position of the slide plate 22. By rotating the locking bolt 252, the end of the locking bolt 252 can push the slide plate 22, thereby locking the slide plate 22.

[0042] When it is necessary to adjust the slide plate 22 horizontally, the locking bolt 252 can be loosened to move it away from the slide plate 22. After adjusting the position of the slide plate 22, the position of the adjusting locking nut 251 and the locking bolt 252 can be moved horizontally to move along a pair of limit plates 27 to the position corresponding to the slide plate 22. Then, the locking bolt 252 can be tightened to push the slide plate 22 with the end of the locking thread 252, so that the slide plate 22 moves upward and fits tightly against the structure on the upper part of the slide groove 2111, thereby restricting the horizontal movement of the slide plate 22.

[0043] The setting direction of the limiting strip 27 and the setting direction of the moving groove 2112 are consistent with the setting direction of the sliding groove 2111.

[0044] Furthermore, the limiting strip 27 includes a first strip vertically connected to the bottom of the horizontal support 211 and a second strip vertically connected to the first strip. The end of the second strip extends horizontally downwards towards the moving groove 2112. Specifically, the limiting strip 27 is L-shaped, and a pair of limiting strips 27 are mirror-image positioned at the bottom of the horizontal support 211 and on both sides of the moving groove 2112. The opposing arrangement of the second strips of the pair of limiting strips 27, i.e., the ends of the two second strips approaching each other, allows the locking nut 252 to be limited between the pair of limiting strips 27 and to be adjustable along the setting direction of the limiting strips 27. End sealing plates can be provided at both ends of the pair of limiting strips 27 to prevent the locking nut 252 from coming out between the pair of limiting strips 27. The end sealing plates can be installed after the locking nut 252 is limited within the limiting strips 27.

[0045] Furthermore, such as Figure 3As shown, the horizontal support 211 is also provided with a limiting groove 2113 that communicates with the slide groove 2111. The limiting groove 2113 is provided on the side of the slide plate 22, and the setting direction of the limiting groove 2113 is consistent with the setting direction of the slide groove 2113. The side of the slide plate 22 is provided with a downwardly extending limiting part 221, which is located in the limiting groove 2113.

[0046] The limiting groove 2113 is recessed downward from the bottom of the slide groove 2111. The limiting groove 2113 is located near the side of the slide groove 2111. The limiting groove 2113 prevents the slide plate 22 from coming out of the slide groove 2111 along the width direction of the horizontal support 211.

[0047] Furthermore, the horizontal support 211 is provided with a cover plate 26 covering the sliding groove 2111, and the cover plate 26 is sandwiched between the horizontal support 211 and the shelf 24.

[0048] When installing the slide plate 22, first place one side of the slide plate 22 onto the slide groove 2111. The limiting part 221 on the slide plate 22 snaps into the limiting groove 2113. Then, cover the slide plate 26, which covers the slide groove 2111 and also blocks the slide plate 22. At this time, the cover plate 26 and the horizontal support part 211 can be fixedly connected by bolts. Alternatively, a shelf 24 can be installed on the cover plate 26, and then the shelf 24, the cover plate 26, and the horizontal support part 211 are fixedly connected by bolts.

[0049] In one specific embodiment of this utility model, such as Figure 4 As shown, there are two skateboards 22, and each skateboard 22 is equipped with a distance sensor 23.

[0050] Two slide plates 22 are installed on a support rod 21, so that when the material box is inspected, Figure 5 and Figure 6 As shown, based on the width of the material box 11 and the material box 12, the two slide plates 22 are adjusted to positions corresponding to the sides of the material box 11 and the material box 12, and the two distance sensors 23 are used to detect the shaking and displacement of the corresponding sides of the material box 11 and the material box 12.

[0051] Furthermore, there are two or more support rods 21.

[0052] exist Figures 4 to 6 In the illustrated embodiment, two support rods 21 are provided to support the material boxes 11 and 12. The slide plate 22 can be located on either side of the support rods 21. Figure 4 The middle slides 22 are all located on the right side of the support rod 21. The slides 22 can also be located on the left side of the support rod 21. Alternatively, one slide 22 can be located on the right side of one support rod, and the other slide 22 can be located on the left side of another support rod.

[0053] The number of support rods 21 can be determined according to the length of the material box. The support rods 21 are spaced out at the bottom of the material box to support it.

[0054] In one specific embodiment of this utility model, such as Figure 1 and Figure 2 As shown, bolt holes are provided on the mounting part 212. The mounting part 212 can be installed and fixed by means of bolt holes and bolts.

[0055] Furthermore, the mounting part 212 is located at one end of the horizontal support part 211, so that the support rod 21 is in the shape of a 7. The length of the horizontal support part 211 can be adapted to support various types of material boxes. The length of the horizontal support part 211 can be set according to the size of the material box with the largest width.

[0056] The present invention has been described in detail above with reference to the accompanying drawings and embodiments. Those skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention, and the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A support frame structure for a wafer cassette in a wafer loading machine, characterized in that, include: The support rod includes a horizontal support portion and a mounting portion that is perpendicularly connected to the horizontal support portion; A sliding plate is mounted on one side of the horizontal support, and the sliding plate can move horizontally along the horizontal support, with a portion of the sliding plate located outside the horizontal support; A distance sensor is mounted on the skateboard and located outside the horizontal support portion; A locking mechanism is provided at the bottom of the horizontal support and corresponding to the slide plate. The locking mechanism can lock the slide plate after the slide plate has been moved to a horizontal position to restrict the horizontal movement of the slide plate. A shelf connected to the horizontal support and for placing a material box, the upper surface of the shelf being higher than the upper surface of the distance sensor.

2. The support frame structure for a wafer loader cassette as described in claim 1, characterized in that, A groove is provided on one side of the horizontal support; One side of the slide plate is placed in the slide groove and can move horizontally along the slide groove.

3. The support frame structure for a wafer loader cassette as described in claim 2, characterized in that, The bottom of the horizontal support is provided with a movable groove that communicates with the sliding groove; The bottom of the horizontal support is also provided with a pair of limiting strips corresponding to the moving groove; The locking mechanism includes a locking nut disposed between a pair of limiting plates and a locking bolt screwed to the locking nut. The end of the locking bolt extends into the moving groove. The locking bolt and the locking nut can move horizontally to correspond to the position of the slide plate. By rotating the locking bolt, the end of the locking bolt can push against the slide plate, thereby locking the slide plate.

4. The support frame structure for a wafer loader cassette as described in claim 3, characterized in that, The limiting strip includes a first strip vertically connected to the bottom of the horizontal support and a second strip vertically connected to the first strip, with the end of the second strip extending horizontally downward toward the moving groove.

5. The support frame structure for a wafer loader cassette as described in claim 2, characterized in that, The horizontal support is also provided with a limiting groove that communicates with the slide groove. The limiting groove is provided on the side of the slide plate, and the setting direction of the limiting groove is consistent with the setting direction of the slide groove. The side of the slide plate is provided with a downwardly extending limiting part, which is located in the limiting groove.

6. The support frame structure for a wafer loader cassette as described in claim 2, characterized in that, The horizontal support is provided with a cover plate that covers the sliding groove, and the cover plate is sandwiched between the horizontal support and the shelf.

7. The support frame structure for a wafer loader cassette as described in claim 1, characterized in that, The skateboard is provided in two parts, and each skateboard is equipped with a distance sensor.

8. The support frame structure for a wafer loader cassette as described in claim 1, characterized in that, Two or more support rods are provided.

9. The support frame structure for a wafer loader cassette as described in claim 1, characterized in that, Bolt holes are provided on the mounting part.

10. The support frame structure for a wafer loader cassette as described in claim 1, characterized in that, The mounting part is located at one end of the horizontal support part.

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