Anti-sagging vacuum adsorption supporting table for large-size substrate

Abstract

The utility model provides a kind of for large size substrate's anti-sag vacuum suction bearing table, vacuum bearing table technical field, including bearing table, the upper surface central of bearing table is equipped with vacuum groove, the periphery of vacuum groove is fixedly provided with supporting frame, the bottom central of vacuum groove is provided with vacuum extraction pipe through;By being provided with vacuum groove, supporting frame and anti-sag board, when the central sagging condition of substrate occurs, by being placed into vacuum groove, by supporting frame cooperation vacuum extraction pipe and anti-sag board are supported to substrate, and by vacuum extraction pipe to vacuum groove is extracted vacuum, it can guarantee that substrate is attached to the upper surface of supporting frame cooperation vacuum extraction pipe and anti-sag board, guarantee the parallel state of substrate, guarantee that vacuum groove is normally adsorbed to substrate, and by vacuum extraction pipe and anti-sag board are supported to substrate, prevent the central sagging condition when vacuum groove is adsorbed to substrate, guarantee normal processing of substrate.

Description

Technical Field

[0001] This utility model relates to the field of vacuum support platform technology, and in particular to an anti-sagging vacuum adsorption support platform for large-size substrates. Background Technology

[0002] Anti-sagging vacuum adsorption support stage is an advanced device specifically designed for supporting and fixing large-size substrates (such as glass substrates, silicon wafers, ceramic substrates, etc.). It is widely used in high-tech fields such as semiconductor manufacturing, flat panel displays, and photovoltaics.

[0003] Large-size substrates (such as LCD panels of generation 8 or above or silicon wafers of 300mm or more) are prone to sagging and deformation in the middle area due to their own weight or temperature changes, which can lead to a decrease in processing accuracy or damage. In precision processes such as photolithography, etching, and thin film deposition, the silicon substrate needs to remain absolutely stable. Therefore, an adsorption support platform is needed to adsorb the substrate.

[0004] In existing technologies, adsorption support platforms typically have multiple adsorption holes spaced at equal intervals on the platform. A vacuum device is used to extract the adsorption support platform, and the adsorption holes adsorb the substrate. However, when the substrate sags at its center, this design cannot guarantee normal contact between the substrate and the platform, affecting the proper adsorption of the substrate by the adsorption holes. Therefore, an anti-sagging vacuum adsorption support platform for large-size substrates is designed to meet this requirement. Utility Model Content

[0005] The purpose of this invention is to solve the problems existing in the background art mentioned above, and to propose an anti-sagging vacuum adsorption support stage for large-size substrates.

[0006] The technical problem to be solved by this utility model is to provide an anti-sagging vacuum adsorption support stage for large-size substrates to solve the problems of existing anti-sagging vacuum adsorption support stages for large-size substrates.

[0007] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0008] A vacuum adsorption support platform for large-size substrates includes a support platform, a vacuum extraction tube, and anti-sagging plates. A vacuum groove is formed in the center of the upper surface of the support platform. A support frame is fixedly arranged around the vacuum groove. A vacuum extraction tube is inserted through the center of the bottom of the vacuum groove. A one-way air extraction valve is fixedly installed at the bottom of the vacuum extraction tube. Multiple air extraction holes are inserted through the side of the vacuum extraction tube. Anti-sagging plates are fixedly arranged between the side of the vacuum extraction tube and the four inner corners of the support frame.

[0009] Preferably, the side length of the vacuum groove matches the side length of the substrate to be processed.

[0010] Preferably, the vacuum extraction tube is a pipe structure with a top-sealed end, and the horizontal height of the upper surface of the vacuum extraction tube is equal to the horizontal height of the upper surface of the support frame, and the horizontal height of the upper surface of the anti-sagging plate is equal to the horizontal height of the upper surfaces of the vacuum extraction tube and the support frame.

[0011] Preferably, the bottom surface of the anti-sagging plate is welded to the bottom surface of the vacuum tank, and the four anti-sagging plates divide the vacuum tank into four vacuum zones of the same size.

[0012] Preferably, the vacuum vent has four vents, and the four vents face the anti-sagging plate to divide the vacuum tank into four vacuum zones.

[0013] Preferably, multiple support plates are fixedly installed between two adjacent anti-sagging plates.

[0014] Preferably, the upper surface of the support plate is at the same horizontal height as the upper surface of the anti-sagging plate, and the bottom surface of the support plate is at a higher horizontal height than the bottom of the vacuum tank.

[0015] Preferably, the anti-sagging plate is a hollow box structure, and the end of the anti-sagging plate facing the vacuum extraction tube extends through the vacuum extraction tube.

[0016] Preferably, the upper surface of the anti-sagging plate has multiple adsorption holes at equal intervals.

[0017] Preferably, a vacuum pump is installed at the bottom of the one-way suction valve.

[0018] Compared with the prior art, this utility model has at least the following beneficial effects:

[0019] In the above solution, by setting up a vacuum tank, a support frame, and an anti-sagging plate, when the substrate sags in the center, the substrate is placed in the vacuum tank. The support frame, together with the vacuum extraction tube and the anti-sagging plate, supports the substrate. The vacuum extraction tube evacuates the vacuum tank, ensuring that the substrate adheres to the upper surface of the support frame, the vacuum extraction tube, and the anti-sagging plate, maintaining the parallel state of the substrate and ensuring normal adsorption of the substrate by the vacuum tank. Furthermore, the support of the substrate by the vacuum extraction tube and the anti-sagging plate prevents central sagging when the vacuum tank adsorbs the substrate, ensuring normal processing of the substrate.

[0020] In the above scheme, by setting up anti-sagging plates, four anti-sagging plates divide the vacuum tank into four vacuum zones of the same size. The vacuum extraction tube has four extraction holes to extract vacuum from different vacuum zones respectively, so as to achieve the effect of regional vacuum extraction of the vacuum tank. When the substrate sags and causes leakage in a certain vacuum zone, the other three vacuum zones can still adsorb the substrate normally, ensuring the stability of substrate adsorption.

[0021] In the above solution, by setting up a support plate, multiple anti-sagging support plates are set between two adjacent anti-sagging plates. The support plate can work with the support frame, vacuum extraction tube and anti-sagging plate to support the bottom surface of the substrate, further preventing the substrate from sagging in the center when the vacuum tank adsorbs the substrate.

[0022] In the above solution, by setting an adsorption hole and making the anti-sagging plate a hollow box structure, and the anti-sagging plate penetrating through the vacuum extraction tube, the inner side of the anti-sagging plate can be vacuumed when the vacuum extraction tube performs vacuum extraction. This facilitates the adsorption hole to adsorb the substrate on the anti-sagging plate, further ensuring the stability of the substrate. Attached Figure Description

[0023] The accompanying drawings, which are incorporated herein and form part of the specification, illustrate embodiments of the present disclosure and, together with the specification, further serve to explain the principles of the present disclosure and enable those skilled in the art to implement and use the present disclosure.

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2 This is a schematic diagram showing the overall structure of this utility model disassembled;

[0026] Figure 3 This is a top view of a partial structure in this utility model;

[0027] Figure 4 In this utility model Figure 3 Enlarged structural diagram at point A.

[0028] [Figure Labels]

[0029] 1. Support platform; 101. Vacuum tank; 102. Support frame; 2. Vacuum extraction pipe; 201. One-way air extraction valve; 202. Air extraction hole; 3. Anti-sagging plate; 301. Adsorption hole; 4. Support plate.

[0030] As shown in the figure, specific structures and devices are marked in the figure to clearly illustrate the structure of the embodiment of this utility model. However, this is only for illustrative purposes and is not intended to limit this utility model to this specific structure, device and environment. Those skilled in the art can adjust or modify these devices and environments according to specific needs. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0033] like Figure 1 and Figure 2 As shown, an embodiment of this utility model provides an anti-sagging vacuum adsorption support platform for large-size substrates, including a support platform 1, a vacuum extraction tube 2, and an anti-sagging plate 3. A vacuum groove 101 is provided in the center of the upper surface of the support platform 1. A support frame 102 is fixedly provided around the vacuum groove 101. A vacuum extraction tube 2 is provided through the center of the bottom of the vacuum groove 101. A one-way air extraction valve 201 is fixedly installed at the bottom of the vacuum extraction tube 2. Multiple air extraction holes 202 are provided through the side of the vacuum extraction tube 2. Anti-sagging plates 3 are fixedly provided between the side of the vacuum extraction tube 2 and the four inner corners of the support frame 102.

[0034] In this embodiment, the side length of the vacuum groove 101 matches the side length of the substrate to be processed, which makes it convenient for the substrate to be processed to be embedded in the vacuum groove 101 and supported by the support frame 102.

[0035] In this embodiment, the vacuum extraction tube 2 is a pipe structure with a top-sealed opening, and the horizontal height of the upper surface of the vacuum extraction tube 2 is equal to the horizontal height of the upper surface of the support frame 102. The horizontal height of the upper surface of the anti-sagging plate 3 is equal to the horizontal height of the upper surfaces of the vacuum extraction tube 2 and the support frame 102, which facilitates the vacuum extraction tube 2 and the anti-sagging plate 3 to support the substrate and prevent the substrate from sagging when it is vacuum-adsorbed in the vacuum tank.

[0036] By incorporating a vacuum tank 101, a support frame 102, and an anti-sagging plate 3, when the substrate experiences central sagging, the substrate is placed in the vacuum tank 101. The support frame 102, along with the vacuum extraction tube 2 and the anti-sagging plate 3, supports the substrate. The vacuum extraction tube 2 evacuates the vacuum tank 101, ensuring that the substrate adheres to the upper surface of the support frame 102, the vacuum extraction tube 2, and the anti-sagging plate 3. This maintains the parallelism of the substrate and ensures proper adsorption of the substrate by the vacuum tank 101. Furthermore, the support of the substrate by the vacuum extraction tube 2 and the anti-sagging plate 3 prevents central sagging during adsorption by the vacuum tank 101, thus ensuring normal substrate processing.

[0037] like Figure 1 and Figure 3 Shown:

[0038] In this embodiment, the bottom surface of the anti-sagging plate 3 is welded to the bottom surface of the vacuum tank 101, and the four anti-sagging plates 3 divide the vacuum tank 101 into four vacuum zones of the same size.

[0039] In this embodiment, there are 4 air extraction holes 202, and the 4 air extraction holes 202 are respectively facing the anti-sagging plate 3 to divide the vacuum tank 101 into 4 vacuum zones.

[0040] By setting anti-sagging plates 3 and 4 anti-sagging plates 3, the vacuum tank 101 is divided into 4 vacuum zones of the same size. The vacuum extraction tube 2 has 4 air extraction holes 202 to extract air from different vacuum zones respectively, so as to achieve the effect of regional vacuum extraction of the vacuum tank 101. When the substrate sags and causes air leakage in a certain vacuum zone, the other 3 vacuum zones can still adsorb the substrate normally, ensuring the stability of substrate adsorption.

[0041] like Figure 2 Figure 3 Shown:

[0042] In this embodiment, multiple support plates 4 are fixedly installed between two adjacent anti-sagging plates 3.

[0043] In this embodiment, the horizontal height of the upper surface of the support plate 4 is equal to the horizontal height of the upper surface of the anti-sagging plate 3, and the horizontal height of the bottom surface of the support plate 4 is higher than the horizontal height of the bottom of the vacuum tank 101.

[0044] By providing a support plate 4, multiple anti-sagging support plates 4 are set between two adjacent anti-sagging plates 3. The support plate 4 can work with the support frame 102, vacuum extraction tube 2 and anti-sagging plate 3 to support the bottom surface of the substrate, further preventing the substrate from sagging in the center when the vacuum groove 101 adsorbs the substrate.

[0045] like Figure 4 Shown:

[0046] In this embodiment, the anti-sagging plate 3 is a hollow box structure, and the end of the anti-sagging plate 3 facing the vacuum extraction tube 2 passes through the vacuum extraction tube 2.

[0047] In this embodiment, the upper surface of the anti-sagging plate 3 has multiple adsorption holes 301 at equal intervals.

[0048] By providing adsorption holes 301 and by setting the anti-sagging plate 3 as a hollow box structure, and by having the anti-sagging plate 3 penetrate through the vacuum extraction tube 2, the inner side of the anti-sagging plate 3 can be vacuumed when the vacuum extraction tube 2 performs vacuum extraction. This facilitates the adsorption holes 301 to adsorb the substrate on the anti-sagging plate 3, further ensuring the stability of the substrate.

[0049] In this embodiment, a vacuum pump is installed at the bottom of the one-way air extraction valve 201. The vacuum pump performs vacuum extraction on the one-way air extraction valve 201, thereby achieving the effect of vacuuming the vacuum tank 101 through the vacuum extraction pipe 2.

[0050] This utility model encompasses any substitutions, modifications, equivalent methods, and solutions made within the spirit and scope of this utility model. To provide the public with a thorough understanding of this utility model, specific details are described in detail in the following preferred embodiments; however, those skilled in the art will fully understand this utility model even without these detailed descriptions. Furthermore, to avoid unnecessary confusion regarding the essence of this utility model, well-known methods, processes, procedures, components, and circuits are not described in detail.

[0051] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A vacuum adsorption support platform for large-size substrates to prevent sagging, characterized in that, The device includes a support platform (1), a vacuum extraction tube (2), and an anti-sagging plate (3). A vacuum groove (101) is provided in the center of the upper surface of the support platform (1). A support frame (102) is fixedly provided around the vacuum groove (101). A vacuum extraction tube (2) is provided through the center of the bottom of the vacuum groove (101). A one-way air extraction valve (201) is fixedly installed at the bottom of the vacuum extraction tube (2). Multiple air extraction holes (202) are provided through the side of the vacuum extraction tube (2). Anti-sagging plates (3) are fixedly provided between the side of the vacuum extraction tube (2) and the four inner corners of the support frame (102).

2. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 1, characterized in that: The side length of the vacuum groove (101) is matched with the side length of the substrate to be processed.

3. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 2, characterized in that: The vacuum extraction tube (2) is a pipe structure with a top-sealed opening, and the horizontal height of the upper surface of the vacuum extraction tube (2) is equal to the horizontal height of the upper surface of the support frame (102), and the horizontal height of the upper surface of the anti-sagging plate (3) is equal to the horizontal height of the upper surfaces of the vacuum extraction tube (2) and the support frame (102).

4. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 3, characterized in that: The bottom surface of the anti-sagging plate (3) is welded to the bottom surface of the vacuum tank (101), and the four anti-sagging plates (3) divide the vacuum tank (101) into four vacuum zones of the same size.

5. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 4, characterized in that: The vacuum vent (202) is provided with 4 vents, and the 4 vents (202) face the anti-sagging plate (3) to divide the vacuum tank (101) into 4 vacuum zones.

6. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 1, characterized in that: Multiple support plates (4) are fixedly installed between two adjacent anti-sagging plates (3).

7. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 6, characterized in that: The upper surface of the support plate (4) is at the same level as the upper surface of the anti-sagging plate (3), and the bottom surface of the support plate (4) is at a higher level than the bottom of the vacuum tank (101).

8. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 1, characterized in that: The anti-sagging plate (3) is a hollow box structure, and the end of the anti-sagging plate (3) facing the vacuum extraction tube (2) passes through the vacuum extraction tube (2).

9. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 8, characterized in that: The upper surface of the anti-sagging plate (3) has multiple adsorption holes (301) at equal intervals.

10. The anti-sagging vacuum adsorption support stage for large-size substrates according to claim 1, characterized in that: A vacuum pump is installed at the bottom of the one-way suction valve (201).

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