Wafer weighing and sorting device

Abstract

This utility model relates to a wafer weighing and sorting device applied in the field of semiconductor manufacturing technology. It involves stacking multiple storage boxes on a tray, then activating a first servo motor to drive an electric push rod to rotate the storage boxes on the tray. Once the wafer slot is rotated to the appropriate position, a second mechanical clamp removes the wafer from the corresponding position and places it on an electronic scale for weighing. If the weighing is satisfactory, the second servo motor drives a rotating shaft to rotate a scraper clockwise, moving the scraper to the side of the conveyor plate. Simultaneously, after the weighing is completed, an electric slide rail automatically activates to drive a connecting rod, moving an arc-shaped push plate to push the wafer on the electronic scale towards the conveyor plate, where it slides into an annular groove. The scraper is then driven to rotate counterclockwise, scraping the wafer in the annular groove to the corresponding discharge port for collection in the corresponding recycling bin. The same principle is used to directionally manipulate unqualified wafers.

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