A fine pattern trimming device for ceramic metal thin film resistors

Abstract

The utility model provides a kind of micro pattern repair resistance device of ceramic metal film resistor, belong to micro-nano manufacturing technology field, including numerical control machine tool, support plate fixedly installed on the outer surface of numerical control machine tool, and ultraviolet laser is arranged to the outside of support plate;Self-locking mechanism, including the fixed frame fixedly connected to the outer surface of support plate, the connecting shaft fixedly installed in the inner surface of the fixed frame by bearing sleeve, the gear fixedly set in the outer end surface of the connecting shaft, the toothed plate engaged with the outer surface of the gear.The utility model can not only use the automatic gravity of ultraviolet laser to quickly install it by the cooperation between each component in self-locking mechanism, but also can automatically lock it after ultraviolet laser installation by locking assembly, so that ultraviolet laser can complete installation in a short time, and ensure that the laser after each replacement can be firmly locked.

Description

Technical Field

[0001] This utility model belongs to the field of micro-nano manufacturing technology, specifically relating to a micro-patterned resistance repair device for ceramic metal thin film resistors. Background Technology

[0002] The micropatterning device plays a crucial role in the manufacturing process of ceramic metal thin film resistors. It not only determines the electrical performance of the resistor but also affects its reliability and consistency. The micropatterning device can precisely control the thickness and shape of the metal thin film, ensuring that the resistance value of the resistor meets the design requirements. Through high-precision laser, photolithography or electron beam exposure technology, it ensures that the thickness of the metal thin film is uniform across the entire substrate, avoiding resistance fluctuations caused by uneven thickness.

[0003] In the existing technology, some micro-patterning devices for ceramic-metal thin film resistors typically install lasers by bolting. Although this installation method is simple and low-cost, it requires manually tightening or loosening multiple bolts each time the laser is replaced. This is not only time-consuming and labor-intensive, but also prone to introducing human error, affecting the alignment accuracy of the laser. In cases where laser replacement is required frequently, it may also significantly extend the production cycle, thereby reducing overall production efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a micro-patterning device for ceramic metal thin film resistors, which aims to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A micropatterning device for ceramic metal thin film resistors includes a repair mechanism, comprising a CNC machine tool, a support plate fixedly mounted on the outer surface of the CNC machine tool, and an ultraviolet laser disposed on the outer side of the support plate.

[0007] The self-locking mechanism includes a fixed frame fixedly connected to the outer surface of the support plate, a connecting shaft fixedly installed on the inner surface of the fixed frame via a bearing sleeve, a gear fixedly sleeved on the outer end face of the connecting shaft, a toothed plate meshing with the outer surface of the gear, a chassis fixedly connected to the bottom of the toothed plate and used in conjunction with the ultraviolet laser, a rack meshing with the gear on both sides away from the toothed plate, and a clamping arm fixedly connected to the outer end face of the rack.

[0008] As a preferred embodiment of this utility model, the self-locking mechanism further includes a lens hole formed on the outer surface of the chassis and used in conjunction with the ultraviolet laser, a positioning block fixedly connected to the outer surface of the fixing frame and used in conjunction with the toothed plate, and a first spring fixedly installed on the top of the positioning block.

[0009] As a preferred embodiment of this utility model, the self-locking mechanism further includes limiting posts that are fixedly connected to both sides of the support plate and used in conjunction with the rack, and a locking component that can prevent the ultraviolet laser from shifting due to vibration during processing.

[0010] In a preferred embodiment of this utility model, the inner surface of the toothed plate is in sliding contact with the outer surface of the positioning block, and the inner surface of the toothed rack is in sliding contact with the outer surface of the limiting post.

[0011] As a preferred embodiment of this utility model, the locking assembly includes a rotating column fixedly connected to the outer surface of the fixing frame, a pawl rotatably sleeved on the outer surface of the rotating column, and a ratchet fixedly sleeved on the end of the connecting shaft away from the gear and used in conjunction with the pawl.

[0012] As a preferred embodiment of the present invention, the locking assembly further includes a fixing block fixedly connected to the outer surface of the fixing frame, and a second spring fixedly installed at the bottom of the fixing block and used in conjunction with the pawl.

[0013] In a preferred embodiment of this invention, the pawl engages with the ratchet, and the outer end face of the second spring is fixedly connected to the top of the ratchet.

[0014] Compared with the prior art, the beneficial effects of this utility model are: through the cooperation between the components in the self-locking mechanism, not only can the ultraviolet laser be installed quickly by utilizing its automatic gravity, but it can also be automatically locked by the locking component after the ultraviolet laser is installed. This allows the ultraviolet laser to be installed in a short time while ensuring that the laser can be firmly locked after each replacement, thereby significantly shortening the time for replacing the ultraviolet laser and improving the overall efficiency of the equipment. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This utility model Figure 1 Enlarged schematic diagram of the local structure at point A;

[0018] Figure 3 This is a schematic diagram of the overall structure of the self-locking mechanism in this utility model;

[0019] Figure 4 This is a schematic diagram of the overall structure of the self-locking mechanism in this utility model from another perspective;

[0020] Figure 5 This utility model Figure 4 A magnified view of the local structure at point B.

[0021] In the diagram: 100, resistance adjustment mechanism; 102, CNC machine tool; 102, support plate; 103, ultraviolet laser; 200, self-locking mechanism; 201, fixed frame; 202, connecting shaft; 203, gear; 204, gear plate; 205, chassis; 206, rack; 207, clamping arm; 208, lens hole; 209, positioning block; 210, first spring; 211, limiting post; 212, locking assembly; 212a, rotating post; 212b, pawl; 212c, ratchet; 212d, fixed block; 212e, second spring. Detailed Implementation

[0022] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0023] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0024] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0025] Example

[0026] Reference Figures 1-5 This embodiment of the present invention provides a micro-patterned resistor repair device for ceramic metal thin film resistors, which can realize the rapid installation of the ultraviolet laser 103 by automatic gravity, and can also automatically lock the ultraviolet laser 103 after installation.

[0027] The resistance repair mechanism 100 includes a CNC machine tool 101, a support plate 102 fixedly installed on the outer surface of the CNC machine tool 101, and an ultraviolet laser 103 disposed on the outside of the support plate 102.

[0028] It should be noted that the CNC machine tool 101 is responsible for precisely controlling the position and movement of the support plate 102 and the ultraviolet laser 103. It has multi-axis motion capability and can achieve multi-dimensional precision positioning. The CNC machine tool 101 can be programmed to move the support plate 102 and the ultraviolet laser 103 according to the preset path and speed to ensure the accuracy of laser obstruction correction. The support plate 102 is used to support and fix the ultraviolet laser 103.

[0029] The self-locking mechanism 200 includes a fixed frame 201 fixedly connected to the outer surface of the support plate 102, a connecting shaft 202 fixedly installed on the inner surface of the fixed frame 201 via a bearing sleeve, a gear 203 fixedly sleeved on the outer end face of the connecting shaft 202, a toothed plate 204 meshing with the outer surface of the gear 203, a chassis 205 fixedly connected to the bottom of the toothed plate 204 and used in conjunction with the ultraviolet laser 103, a rack 206 meshing with the gear 203 on both sides away from the toothed plate 204, and a clamping arm 207 fixedly connected to the outer end face of the rack 206.

[0030] It should be noted that when the ultraviolet laser 103 is placed above the chassis 205, the chassis 205 and the gear plate 204 move vertically towards each other due to the gravity of the ultraviolet laser 103. This causes the gear plate 204 to drive the gear 203 and the connecting shaft 202 to rotate. Then, the gear 203 drives the two racks 206 and the clamping arms 207 to move towards each other, thereby clamping and fixing the ultraviolet laser 103 with the two clamping arms 207.

[0031] Specifically, the self-locking mechanism 200 also includes a lens hole 208 opened on the outer surface of the chassis 205 and used in conjunction with the ultraviolet laser 103, a positioning block 209 fixedly connected to the outer surface of the mounting bracket 201 and used in conjunction with the toothed plate 204, and a first spring 210 fixedly installed on the top of the positioning block 209.

[0032] Furthermore, the self-locking mechanism 200 also includes limiting posts 211 that are fixedly connected to both sides of the support plate 102 and used in conjunction with the rack 206, and a locking component 212 that can prevent the ultraviolet laser 103 from shifting due to vibration during processing.

[0033] Preferably, the inner surface of the toothed plate 204 slides in contact with the outer surface of the positioning block 209, and the inner surface of the rack 206 slides in contact with the outer surface of the limiting post 211.

[0034] It should be noted that the locking assembly 212 includes a swivel post 212a fixedly connected to the outer surface of the fixing frame 201, a pawl 212b rotatably sleeved on the outer surface of the swivel post 212a, and a ratchet 212c fixedly sleeved on the end of the connecting shaft 202 away from the gear 203 and used in conjunction with the pawl 212b.

[0035] It should also be noted that the swivel pin 212a is used to support the pawl 212b, the pawl 212b is used to limit the ratchet 212c, and when the connecting shaft 202 rotates, it can also drive the ratchet 212c to rotate synchronously.

[0036] Furthermore, the locking assembly 212 also includes a fixing block 212d fixedly connected to the outer surface of the fixing frame 201, and a second spring 212e fixedly installed at the bottom of the fixing block 212d and used in conjunction with the pawl 212b.

[0037] Specifically, the pawl 212b engages with the ratchet 212c, and the outer end face of the second spring 212e is fixedly connected to the top of the ratchet 212c.

[0038] In use, after aligning the ultraviolet laser 103 with the lens hole 208, and then placing the ultraviolet laser 103 on top of the chassis 205, the weight of the ultraviolet laser 103 causes the chassis 205 and the toothed plate 204 to move vertically towards each other, and applies pressure to the first spring 210, causing the toothed plate 204 to drive the gear 203, the connecting shaft 202 and the ratchet 212c to rotate. The gear 203 drives the two racks 206 and the clamping arms 207 to move towards each other, so that the two clamping arms 207 clamp and fix the ultraviolet laser 103. Then, the ratchet 212c squeezes the pawl 212b, and the reaction force of the second spring 212e resets the pawl 212b, so that the pawl 212b is always engaged with the ratchet 212c, thereby limiting the support plate 102 and ensuring the stability of the ultraviolet laser 103 after installation.

[0039] When the ultraviolet laser 103 needs to be replaced: move the pawl 212b to the position where it is disengaged from the ratchet 212c, lift the chassis 205 vertically upward, and drive the gear 203 to rotate through the cooperation between the chassis 205 and the toothed plate 204. Then, the gear 203 drives the two racks 206 and the clamping arms 207 to move towards each other, so that the two clamping arms 207 move to the position where they are disengaged from the ultraviolet laser 103, thereby releasing the restriction on the ultraviolet laser 103.

[0040] In summary, through the cooperation between the components of the self-locking mechanism 200, not only can the ultraviolet laser 103 be installed quickly using its automatic gravity, but the locking component 212 can also automatically lock the ultraviolet laser 103 after installation. This ensures that the ultraviolet laser 103 can be installed in a short time while ensuring that the laser 103 can be firmly locked after each replacement, thereby significantly shortening the replacement time of the ultraviolet laser 103 and improving the overall efficiency of the equipment.

[0041] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0042] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0043] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0044] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A micropatterning device for ceramic-metal thin-film resistors, characterized in that: include, The resistance repair mechanism (100) includes a CNC machine tool (101), a support plate (102) fixedly installed on the outer surface of the CNC machine tool (101), and an ultraviolet laser (103) disposed on the outside of the support plate (102). The self-locking mechanism (200) includes a fixed frame (201) fixedly connected to the outer surface of the support plate (102), a connecting shaft (202) fixedly installed on the inner surface of the fixed frame (201) by a bearing sleeve, a gear (203) fixedly sleeved on the outer end face of the connecting shaft (202), a toothed plate (204) meshing with the outer surface of the gear (203), a chassis (205) fixedly connected to the bottom of the toothed plate (204) and used in conjunction with the ultraviolet laser (103), a rack (206) meshing with the two sides of the gear (203) away from the toothed plate (204), and a clamping arm (207) fixedly connected to the outer end face of the rack (206).

2. The micropatterning device for ceramic-metal thin-film resistors according to claim 1, characterized in that: The self-locking mechanism (200) further includes a lens hole (208) opened on the outer surface of the chassis (205) and used in conjunction with the ultraviolet laser (103), a positioning block (209) fixedly connected to the outer surface of the mounting bracket (201) and used in conjunction with the toothed plate (204), and a first spring (210) fixedly installed on the top of the positioning block (209).

3. The micropatterning device for ceramic-metal thin-film resistors according to claim 2, characterized in that: The self-locking mechanism (200) also includes a limiting post (211) that is fixedly connected to both sides of the support plate (102) and used in conjunction with the rack (206), and a locking component (212) that can prevent the ultraviolet laser (103) from shifting due to vibration during processing.

4. The micropatterning device for ceramic-metal thin-film resistors according to claim 3, characterized in that: The inner surface of the toothed plate (204) slides in contact with the outer surface of the positioning block (209), and the inner surface of the rack (206) slides in contact with the outer surface of the limiting post (211).

5. The micropatterning device for ceramic-metal thin-film resistors according to claim 4, characterized in that: The locking assembly (212) includes a swivel (212a) fixedly connected to the outer surface of the fixing frame (201), a pawl (212b) rotatably sleeved on the outer surface of the swivel (212a), and a ratchet (212c) fixedly sleeved on the end of the connecting shaft (202) away from the gear (203) and used in conjunction with the pawl (212b).

6. The micropatterning device for ceramic-metal thin-film resistors according to claim 5, characterized in that: The locking assembly (212) further includes a fixing block (212d) fixedly connected to the outer surface of the fixing frame (201), and a second spring (212e) fixedly installed at the bottom of the fixing block (212d) and used in conjunction with the pawl (212b).

7. The micropatterning device for ceramic-metal thin-film resistors according to claim 6, characterized in that: The pawl (212b) engages with the ratchet (212c), and the outer end face of the second spring (212e) is fixedly connected to the top of the ratchet (212c).

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