Graphite fixture plate cleaning device

Abstract

The utility model discloses a kind of graphite fixture plate cleaning devices, it includes sequentially arranged first cleaning mechanism and secondary cleaning mechanism. The secondary cleaning mechanism includes cleaning assembly and width adjusting assembly, the cleaning assembly includes first cleaning support, cleaning bottom plate, cleaning brush and cleaning drive source, the first cleaning support is L type, two first installation holes are opened in thickness direction along the first cleaning support, two first installation holes are arranged upside down, the output shaft of the cleaning drive source is driven connection with the cleaning brush through cleaning rotation shaft, the fixed end of the cleaning drive source is fixedly connected with the side of the cleaning support by fixed link, the output shaft of the cleaning drive source is arranged with the first installation hole homocentric axis. The graphite fixture plate cleaning device provided in the utility model solves the technical problem that manual cleaning effect is poor, efficiency is low and harmful to human health in the technical field of graphite fixture plate cleaning.

Description

Technical Field

[0001] This utility model relates to the field of graphite jig plate cleaning technology, specifically to a graphite jig plate cleaning device. Background Technology

[0002] In high-end manufacturing industries such as semiconductor manufacturing and photovoltaics, graphite jigs, with their excellent high-temperature resistance and corrosion resistance, have become core tooling equipment for supporting precision workpieces such as wafers and silicon wafers. The cleanliness of their surface and microporous structure directly affects product yield, making regular deep cleaning crucial. However, the industry currently widely uses manual cleaning methods for graphite jigs, which have significant technical bottlenecks.

[0003] Manual cleaning relies on workers using handheld brushes, spray guns, and other tools to scrub or blow away the surface and pores of the fixture plate. Because the surface of the graphite fixture plate is covered with micron-sized pores and complex channel structures, manual operation makes it difficult to reach stubborn impurities deep in the crevices. Moreover, the cleaning intensity and time are entirely controlled by experience, resulting in inconsistent cleaning results. In addition, manual cleaning is extremely inefficient and cannot meet the needs of modern production lines for the rapid turnover of fixture plates. Utility Model Content

[0004] The purpose of this utility model is to overcome the above-mentioned technical deficiencies and provide a graphite jig plate cleaning device to solve the technical problems of poor manual cleaning effect, low efficiency and harm to human health in the field of graphite jig plate cleaning technology.

[0005] To achieve the above technical objectives, the present invention provides a graphite fixture plate cleaning device, comprising a primary cleaning mechanism and a secondary cleaning mechanism arranged sequentially; the secondary cleaning mechanism includes a cleaning component and a width adjustment component; the cleaning component includes a first cleaning bracket, a cleaning base plate, a cleaning brush, and a cleaning drive source; the first cleaning bracket is L-shaped; the first cleaning bracket has two first mounting holes along its thickness direction; the two first mounting holes are arranged vertically; the output shaft of the cleaning drive source is driven and connected to the cleaning brush via a cleaning rotation shaft; the fixed end of the cleaning drive source is fixedly connected to one side of the cleaning bracket via a fixing rod; the output shaft of the cleaning drive source is arranged coaxially with the first mounting holes.

[0006] Compared with the prior art, the beneficial effects of this utility model include:

[0007] 1. High cleaning efficiency: The graphite fixture plate cleaning device provided by this utility model adopts fully automatic cleaning, which does not require manual operation and greatly improves cleaning efficiency.

[0008] 2. Excellent cleaning effect: The graphite jig plate cleaning device provided by this utility model first uses a primary cleaning mechanism to remove static electricity and clean contaminants from the graphite jig plate, and then uses a secondary cleaning mechanism to clean the graphite jig plate again, which greatly improves the cleaning effect.

[0009] 3. High safety: The graphite jig plate cleaning device provided by this utility model effectively solves the health hazards caused by manual cleaning of graphite jig plates through automated cleaning and industrial-grade dust collection. Attached Figure Description

[0010] Figure 1 This is a three-dimensional structural diagram of the graphite jig plate cleaning device provided by this utility model;

[0011] Figure 2 This is a three-dimensional structural diagram of the width adjustment component provided by this utility model;

[0012] Figure 3 This is a schematic diagram of the two-stage cleaning mechanism provided by this utility model;

[0013] Figure 4 This is a front view structural diagram of the graphite jig plate cleaning device provided by this utility model;

[0014] Figure 5 This is an exploded view of the assembly structure of the cleaning drive source and cleaning brush provided by this utility model. Figure 1 ;

[0015] Figure 6 This is an exploded view of the assembly structure of the cleaning drive source and cleaning brush provided by this utility model. Figure 2 . Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0017] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0019] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 This embodiment provides a graphite fixture plate cleaning device, including a primary cleaning mechanism 1 and a secondary cleaning mechanism 2.

[0020] Furthermore, the secondary cleaning mechanism 2 includes a cleaning component 21 and a width adjustment component 22. The cleaning component 21 includes a first cleaning bracket 211, a cleaning base plate 212, a cleaning brush 213, and a cleaning drive source 214.

[0021] Furthermore, the first cleaning bracket 211 is L-shaped, and the first cleaning bracket 211 has two first mounting holes 211a along the thickness direction. The two first mounting holes 211a are arranged vertically. The output shaft of the cleaning drive source 214 is driven to the cleaning brush 213 through the cleaning rotation shaft 215. The fixed end of the cleaning drive source 214 is fixedly connected to one side of the cleaning bracket 211 through the fixing rod 216. The output shaft of the cleaning drive source 214 is arranged on the same central axis as the first mounting holes 211a.

[0022] Furthermore, each of the cleaning drive sources 214 is fixedly connected to four fixing rods 216 at its fixed end, with the four fixing rods 216 respectively distributed at the four corners of the fixed end of the cleaning drive source 214.

[0023] Furthermore, a bearing 217 is installed in the first mounting hole 211a. The inner ring of the bearing 217 is interference-fitted with a first connecting shaft 218. One end of the first connecting shaft 218 near the cleaning drive source 214 is driven to the output shaft of the cleaning drive source 214 via a coupling 219. A second mounting hole 218a is provided along the length of the first connecting shaft 218 at one end near the cleaning brush 213. A tightening hole 218b is provided on the outer wall of the second mounting hole 218a. One end of the cleaning rotating shaft 215 is inserted into the second mounting hole 218a and tightened by a tightening screw through the tightening hole 218b.

[0024] Furthermore, in this embodiment, both the coupling 219 and the bearing 217 are existing technologies.

[0025] Furthermore, the gap between the outer rings of the two cleaning brushes 213 arranged vertically is less than the thickness of the graphite fixture plate 3, and both ends of the secondary cleaning mechanism 2 are provided with conveyor belt mechanisms 4, with the conveyor belt of the conveyor belt mechanism 4 located between the two cleaning brushes 213 arranged vertically.

[0026] Furthermore, there are two cleaning drive sources 214. When the two cleaning drive sources 214 are working, they drive the two cleaning brushes 213 to rotate and clean the graphite fixture plate 3 transported by the conveyor belt mechanism 4.

[0027] Furthermore, the cleaning drive source 214 is a servo motor, which has the following advantages in this embodiment: 1. Fast response: It has a small moment of inertia, enabling it to start, stop, and change speed quickly, with a response time down to the millisecond level. In cleaning processes that require frequent start-stop and speed changes, it can significantly improve cleaning efficiency; 2. Stable torque: It can output stable torque at different speeds, and even if the load changes, it can maintain a constant speed, ensuring the stability and consistency of the cleaning process; 3. Programmable control: It supports connection with control systems such as PLCs and industrial PCs, and can implement complex motion control logic through programming, making it easy to integrate into automated cleaning production lines and realize intelligent cleaning processes.

[0028] Furthermore, the width adjustment mechanism 22 includes a second cleaning bracket 221 and a width adjustment base plate 222. A guide slider 223 is fixedly connected to the bottom end of the second cleaning bracket 221, and a linear guide rail 224 is fixedly connected to the upper end surface of the width adjustment base plate 222. The guide slider 223 is slidably connected to the linear guide rail 224.

[0029] Furthermore, a support plate 225 is fixedly connected to the upper end face of the width adjustment base plate 222. The support plate 225 has a bearing mounting hole along the thickness direction for mounting bearings. A width adjustment slider 226 is fixedly connected to the upper end face of the base plate of the second cleaning bracket 221. A width adjustment rotating shaft 227 is rotatably connected to the bearing mounting hole through a bearing.

[0030] Furthermore, the outer wall of the width adjusting rotating shaft 227 and the inner wall of the width adjusting slider 226 are provided with threads that engage and slide together. One end of the width adjusting rotating shaft 227 is fixedly connected to the side plate of the second cleaning bracket 221, and the other end of the width adjusting rotating shaft 227 is fixedly connected to a rocker wheel 228.

[0031] Furthermore, the side plate of the second cleaning bracket 221 has two third mounting holes 221a. The first mounting hole 211a, the second mounting hole 218a and the third mounting hole 221a are arranged on the same central axis. The second connecting shaft 229 is installed in the third mounting hole 221a through a bearing.

[0032] Furthermore, when the operator manually cranks the rocker wheel 228, the rocker wheel 228 drives the width adjustment rotating shaft 227 to rotate. Since the width adjustment slider 226 is threadedly slidably connected to the width adjustment rotating shaft 227, the width adjustment slider 226 moves back and forth along the length direction of the width adjustment rotating shaft 227, thereby driving the second cleaning bracket 221 to move, realizing the adjustment of the distance between the first cleaning bracket 211 and the second cleaning bracket 221.

[0033] Furthermore, since the graphite jig plate 3 has various specifications, that is, the width of the graphite jig plate 3 is different, when cleaning different batches of graphite jig plates 3 with different widths, it is necessary to adjust the distance between the first cleaning bracket 211 and the second cleaning bracket 221 to prevent motion interference during the transportation and cleaning of the graphite jig plate 3, and at the same time improve the versatility and compatibility of the graphite jig plate cleaning device.

[0034] Furthermore, the primary cleaning mechanism 1 includes a primary cleaning housing 11, a high-pressure cyclone head, and an ion bar. The high-pressure cyclone head and the ion bar are built into the primary cleaning housing 11, and the air inlet of the high-pressure cyclone head is connected to a high-pressure pump.

[0035] Furthermore, the high-pressure cyclone head generates pulsating and highly turbulent airflow to attack and remove contaminants. To achieve optimal cleaning efficiency, all rotating nozzles are designed with speed stabilization functionality.

[0036] Furthermore, the main function of the ion bar is to remove static electricity. Since many pollutants are adsorbed onto the surface of materials due to static electricity, the pollutants cannot be completely removed without removing static electricity.

[0037] Preferably, the primary cleaning mechanism 1 is an HRS-TFC series dust collector manufactured by Shenzhen Harrison Industrial Technology Co., Ltd.

[0038] Furthermore, the first cleaning bracket 211 and the width adjustment base plate 222 are both fixedly connected to the upper end face of the cleaning base plate 212. The cleaning base plate 212 has a dust removal hole 212a, which is located directly below the cleaning brush 213 and the primary cleaning mechanism 1. The dust removal hole 212a is connected to the industrial dust collector through the hopper 5 and the dust removal pipe.

[0039] Furthermore, the industrial-grade dust collector is mainly used to collect pollutants from the primary cleaning mechanism 1 and the secondary cleaning mechanism 2, preventing pollutants from drifting and harming human health.

[0040] Working Principle: This utility model provides a primary cleaning mechanism 1 and a secondary cleaning mechanism 2. The secondary cleaning mechanism 2 includes a cleaning component 21 and a width adjustment component 22. The cleaning component 21 includes a first cleaning bracket 211, a cleaning base plate 212, a cleaning brush 213, and a cleaning drive source 214. The first cleaning bracket 211 is L-shaped and has two first mounting holes 211a along its thickness direction, arranged vertically. The output shaft of the cleaning drive source 214 is connected to the cleaning brush 213 via a cleaning rotation shaft 215. The fixed end of the cleaning drive source 214 is fixedly connected to one side of the cleaning bracket 211 via a fixing rod 216. The output shaft of the cleaning drive source 214 is arranged coaxially with the first mounting holes 211a.

[0041] Specifically, the graphite fixture plate 3, transported by the conveyor belt mechanism 4, first undergoes static electricity removal and cleaning by the primary cleaning mechanism, and then undergoes secondary cleaning by the secondary cleaning mechanism, which greatly improves the cleaning effect and efficiency. Through automated cleaning and the collection of pollutants by an industrial-grade dust collector, the health hazards caused by manual cleaning of the graphite fixture plate are effectively solved.

[0042] The specific embodiments of this utility model described above do not constitute a limitation on the scope of protection of this utility model. Any other corresponding changes and modifications made based on the technical concept of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. A graphite fixture plate cleaning device, characterized by, It includes a primary cleaning mechanism and a secondary cleaning mechanism arranged sequentially; the secondary cleaning mechanism includes a cleaning component and a width adjustment component; the cleaning component includes a first cleaning bracket, a cleaning base plate, a cleaning brush, and a cleaning drive source; the first cleaning bracket is L-shaped; the first cleaning bracket has two first mounting holes along its thickness direction; the two first mounting holes are arranged vertically; the output shaft of the cleaning drive source is driven and connected to the cleaning brush through a cleaning rotation shaft; the fixed end of the cleaning drive source is fixedly connected to one side of the cleaning bracket through a fixing rod; the output shaft of the cleaning drive source is arranged coaxially with the first mounting holes.

2. The graphite jumbo plate cleaning device according to claim 1, characterized in that, A bearing is installed in the first mounting hole, and the inner ring of the bearing is interference-fitted with a first connecting shaft; the end of the first connecting shaft near the cleaning drive source is driven to the output shaft of the cleaning drive source through a coupling; a second mounting hole is formed along the length of the first connecting shaft at the end of the first connecting shaft near the cleaning brush; a tightening hole is formed on the outer wall of the second mounting hole; one end of the cleaning rotating shaft is inserted into the second mounting hole and tightened and fixed by screwing in a tightening screw through the tightening hole.

3. The graphite jumbo plate cleaning device according to claim 2, characterized in that, The gap between the outer rings of the two cleaning brushes arranged vertically is less than the thickness of the graphite fixture plate; both ends of the secondary cleaning mechanism are equipped with conveyor belt mechanisms; the conveyor belt of the conveyor belt mechanism is located between the two cleaning brushes arranged vertically.

4. The graphite jumbo plate cleaning device according to claim 3, characterized in that, The width adjustment assembly includes a second cleaning bracket and a width adjustment base plate; a guide slider is fixedly connected to the bottom end of the second cleaning bracket; a linear guide rail is fixedly connected to the upper end surface of the width adjustment base plate; the guide slider is slidably connected to the linear guide rail.

5. The graphite jumbo plate cleaning device according to claim 4, characterized in that, A support plate is fixedly connected to the upper end face of the width adjustment base plate; the support plate has bearing mounting holes along the thickness direction for mounting bearings; a width adjustment slider is fixedly connected to the upper end face of the base plate of the second cleaning bracket; a width adjustment rotating shaft is rotatably connected to the bearing mounting hole through a bearing.

6. The graphite jumbo plate cleaning device according to claim 5, characterized in that, The outer wall of the width-adjusting rotating shaft and the inner wall of the width-adjusting slider are provided with threads that engage and slide together; one end of the width-adjusting rotating shaft is fixedly connected to the side plate of the second cleaning bracket; and the other end of the width-adjusting rotating shaft is fixedly connected to a rocker wheel.

7. The graphite jumbo plate cleaning device according to claim 6, characterized in that, The side plate of the second cleaning bracket has two third mounting holes; the first mounting hole, the second mounting hole, and the third mounting hole are arranged on the same central axis; a second connecting shaft is installed in the third mounting hole through a bearing.

8. The graphite jumbo plate cleaning device according to claim 7, characterized in that, The primary cleaning mechanism includes a primary cleaning housing, a high-pressure cyclone head, and an ion bar; the high-pressure cyclone head and the ion bar are built into the primary cleaning housing; the air inlet of the high-pressure cyclone head is connected to a high-pressure pump.

9. The graphite jumbo plate cleaning device according to claim 8, characterized in that, The first cleaning bracket and the width adjustment base plate are both fixedly connected to the upper surface of the cleaning base plate; the cleaning base plate has a dust removal hole; the dust removal hole is located directly below the cleaning brush and the primary cleaning mechanism; the dust removal hole is connected to the industrial-grade dust collector through a hopper and a dust removal pipe.

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