A quartz tube all-around cleaning device

Abstract

The utility model discloses a quartz furnace tube all -round cleaning device relates to quartz furnace tube cleaning technical field, including box and servo motor no.

Description

Technical Field

[0001] This utility model relates to the field of quartz furnace tube cleaning technology, specifically a holistic cleaning device for quartz furnace tubes. Background Technology

[0002] In semiconductor manufacturing, optical fiber production, and other processes, quartz furnace tubes are critical equipment components. Due to prolonged use, various impurities, such as metal oxides, carbides, and residual reactants, accumulate on the inner and outer walls of the quartz furnace tube. These impurities not only affect the light transmittance and heat conduction performance of the furnace tube but may also adversely impact subsequent processes, leading to a decline in product quality. Therefore, it is necessary to clean the quartz furnace using a cleaning device.

[0003] For example, utility model application CN202122112775.6 discloses a quartz furnace tube cleaning device. This utility model, through a cleaning mechanism, places the quartz furnace tube body inside a movable shell. Pressing down on an iron block causes the iron block to retract a telescopic rod, placing a sponge block inside the quartz furnace tube body. At this point, an electromagnet is activated, attracting the iron block. The iron block then extends the telescopic rod, bringing the sponge block into contact with the inner wall of the quartz furnace tube body. While the quartz furnace tube body remains stationary, the movable shell moves, causing the electromagnet to move as well. The electromagnet exerts a certain attraction on the iron block, moving it and causing the sponge block to move within the quartz furnace tube body, thus cleaning the inner cavity of the quartz furnace tube body. This prevents the inability to clean the interior of long quartz furnace tube bodies. However, the cleaning method is limited and can only achieve cleaning of one side or part of the surface, which is difficult to meet the needs of high-precision processes for all-round cleaning of quartz furnace tubes.

[0004] Therefore, in view of this, we have studied and improved the existing structure and its shortcomings, and proposed a holistic cleaning device for quartz furnace tubes. Utility Model Content

[0005] The purpose of this invention is to provide an all-around cleaning device for quartz furnace tubes to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a quartz furnace tube omnidirectional cleaning device, comprising a housing and a servo motor. Support legs are provided on both sides of the bottom of the housing, and a water outlet pipe is connected to the lower left side of the housing. A valve is installed on the water outlet pipe. The servo motor is located in the middle of the left side of the housing, and a drive rod is connected to the output end of the servo motor. A fixed base is provided at the right end of the drive rod, and an electric push rod is installed on the right side of the fixed base. A movable base is provided at the output end of the electric push rod, and support arms are hinged to both ends of the movable base via pins. Support arms are hinged to both ends of the fixed base via pins, and the other end of support arms is connected via pins. A fixed plate is hinged to the outside of the fixed plate. A cleaning head is mounted on the outside of the fixed plate. A timing pulley is fitted on the left side of the drive rod. A timing pulley is connected to the outside of the timing pulley via a timing belt. A drive shaft passes through the middle of the timing pulley. A gear is fitted on the right side of the drive shaft. A gear ring is connected to the outside of the gear. A transmission cylinder is fixed in the middle of the gear ring. An electric push rod is mounted on the transmission cylinder. The output end of the electric push rod is connected to the fixed plate. A cleaning head is mounted on the outside of the fixed plate. A water spray pipe is fixed through the left side of the box. A partition is fixed inside the box. A bearing is installed at the opening in the middle of the partition.

[0007] Furthermore, the housing and the drive shaft are rotatably connected, and the drive rod and the drive shaft are parallel to each other.

[0008] Furthermore, the transmission cylinder is disposed within the bearing, and the drive rod and the transmission cylinder are coaxially arranged.

[0009] Furthermore, a conveying assembly is provided on the right side of the housing, and the conveying assembly includes a support base, a second servo motor, and a drive shaft. The second servo motor is installed on the right side of the support base, and the output end of the second servo motor is connected to the drive shaft.

[0010] Furthermore, the conveying assembly also includes a second gear and a second gear ring, and the second gear is sleeved on the outside of the drive shaft, and the second gear ring is connected to the outside of the second gear.

[0011] Furthermore, the conveying assembly includes a third gear, a second drive shaft, and a gear frame, and the third gear is also connected to the inner side of the second gear ring. The second drive shaft passes through the middle of the third gear, and the gear frames are connected to the outer sides of both the second and third gears.

[0012] Furthermore, the conveying assembly also includes a bracket, a servo motor, and a conveying roller. The bracket is fixed at one end of the toothed frame near the center of the toothed ring. The servo motor is mounted on the outside of the bracket, and the output shaft of the servo motor is connected to the conveying roller.

[0013] Furthermore, the toothed frame passes through the sliding groove at the middle of the outer side of the support base, and four toothed frames are provided. The second toothed ring and the drive rod are coaxially arranged.

[0014] This utility model provides a comprehensive cleaning device for quartz furnace tubes, which has the following beneficial effects:

[0015] 1. This utility model uses a servo motor to drive a drive rod and a synchronous pulley to rotate. The synchronous belt meshes with the synchronous pulleys and drives the transmission shaft and gear to rotate. At the same time, the gear meshes with the gear ring to drive the transmission cylinder to rotate. This enables the cleaning head 1, used for cleaning the inner wall, and the cleaning head 2, used for cleaning the outer wall, to rotate coaxially, thus ensuring that there are no dead corners in the cleaning of the inner and outer walls of the quartz furnace tube. This improves efficiency compared to the traditional single cleaning method.

[0016] 2. This utility model uses a servo motor to drive the drive shaft and gear two to rotate. Gear two meshes with gear ring two, driving the three gears three on the inner side to rotate. Gear two and gear three mesh with the gear frame respectively, causing the gear frame to move synchronously towards the center along the slide groove of the support seat. At the same time, the positions of cleaning head one and cleaning head two are adjusted by the axial extension and retraction of electric push rod one and electric push rod two, which can adapt to quartz furnace tubes of different diameters and improve the versatility of the device. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the cross-sectional structure of the box body of the quartz furnace tube all-round cleaning device of this utility model;

[0018] Figure 2 This is a side view sectional view of the support base of the quartz furnace tube omnidirectional cleaning device of this utility model.

[0019] Figure 3 This utility model relates to an all-around cleaning device for quartz furnace tubes. Figure 1 Enlarged structural diagram at point A in the middle;

[0020] Figure 4 This is a three-dimensional structural diagram of the transmission cylinder and partition plate of the quartz furnace tube omnidirectional cleaning device of this utility model.

[0021] In the diagram: 1. Housing; 2. Support leg; 3. Water outlet pipe; 4. Valve; 5. Servo motor 1; 6. Drive rod; 7. Fixed base; 8. Electric push rod 1; 9. Moving base; 10. Support arm 1; 11. Support arm 2; 12. Fixed plate 1; 13. Cleaning head 1; 14. Synchronous pulley 1; 15. Synchronous belt; 16. Synchronous pulley 2; 17. Drive shaft 1; 18. Gear 1; 19. Gear ring 1; 20. Transmission cylinder; 21. Electric... 21. Push rod 2; 22. Fixing plate 2; 23. Cleaning head 2; 24. Water spray pipe; 25. Bearing; 26. Partition plate; 27. Conveying assembly; 2701. Support base; 2702. Servo motor 2; 2703. Drive shaft; 2704. Gear 2; 2705. Gear ring 2; 2706. Gear 3; 2707. Transmission shaft 2; 2708. Gear frame; 2709. Bracket; 2710. Servo motor 3; 2711. Conveying roller. Detailed Implementation

[0022] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0023] like Figure 1 , Figure 3 and Figure 4As shown, a quartz furnace tube omnidirectional cleaning device includes a housing 1 and a servo motor 5. Support legs 2 are provided on both sides of the bottom of the housing 1, and a water outlet pipe 3 is connected to the lower left side of the housing 1. A valve 4 is installed on the water outlet pipe 3. The servo motor 5 is located in the middle of the left side of the housing 1, and a drive rod 6 is connected to the output end of the servo motor 5. A fixed base 7 is provided at the right end of the drive rod 6, and an electric push rod 8 is installed on the right side of the fixed base 7. A movable base 9 is provided at the output end of the electric push rod 8, and support arms 10 are hinged to both ends of the movable base 9 via pins. Support arms 11 are hinged to both ends of the fixed base 7 via pins, and a fixed plate 12 is hinged to the other end of the support arm 11 via a pin. A cleaning head 13 is installed on the outside of the fixed plate 12. A synchronous pulley 14 is sleeved on the left side of the drive rod 6, and the synchronous pulley 14... A timing pulley 16 is connected to the outside of a timing pulley 14 via a timing belt 15. A drive shaft 17 passes through the middle of the timing pulley 16, and a gear 18 is fitted on the right side of the drive shaft 17. A gear ring 19 is connected to the outside of the gear 18, and a drive cylinder 20 is fixed in the middle of the gear ring 19. An electric push rod 21 is installed on the drive cylinder 20, and a fixing plate 22 is connected to the output end of the electric push rod 21. A cleaning head 23 is installed on the outside of the fixing plate 22. A water spray pipe 24 is fixed through the left side of the housing 1, and a partition 26 is fixed inside the housing 1. A bearing 25 is provided at the opening in the middle of the partition 26. The housing 1 and the drive shaft 17 are rotatably connected, and the drive rod 6 and the drive shaft 17 are parallel to each other. The drive cylinder 20 is located inside the bearing 25, and the drive rod 6 and the drive cylinder 20 are coaxial.

[0024] The specific operation is as follows: the servo motor 5 drives the drive rod 6 and the synchronous pulley 14 to rotate. The synchronous belt 15 meshes with the synchronous pulley 14 and the synchronous pulley 16 to transmit power, causing the transmission shaft 17 and the gear 18 to rotate. At the same time, the gear 18 meshes with the gear ring 19 to drive the transmission cylinder 20 to rotate, so that the cleaning head 13 used to clean the inner wall and the cleaning head 23 used to clean the outer wall rotate coaxially, thereby ensuring that there are no dead corners in the cleaning of the inner and outer walls of the quartz furnace tube, which improves efficiency compared with the traditional single cleaning method.

[0025] like Figure 2As shown, a conveying assembly 27 is provided on the right side of the housing 1. The conveying assembly 27 includes a support base 2701, a second servo motor 2702, and a drive shaft 2703. The second servo motor 2702 is mounted on the right side of the support base 2701, and the output end of the second servo motor 2702 is connected to the drive shaft 2703. The conveying assembly 27 also includes a second gear 2704 and a second gear ring 2705. The second gear 2704 is sleeved on the outside of the drive shaft 2703, and the second gear ring 2705 is connected to the outside of the second gear 2704. The conveying assembly 27 includes a third gear 2706, a second transmission shaft 2707, and a gear frame 2708. The third gear 2706 is also connected to the inner side of the second gear ring 2705. 6. A transmission shaft 2707 passes through the middle of gear 2706, and gear 2704 and gear 2706 are both connected to gear frame 2708. The conveying assembly 27 also includes a bracket 2709, a servo motor 2710 and a conveying roller 2711. The bracket 2709 is fixed at one end of gear frame 2708 near the center of gear ring 2705. Servo motor 2710 is installed on the outside of bracket 2709, and the output shaft of servo motor 2710 is connected to conveying roller 2711. Gear frame 2708 passes through the groove at the middle of the outer side of support base 2701, and four gear frames 2708 are provided. Gear ring 2705 and drive rod 6 are coaxially arranged.

[0026] The specific operation is as follows: the servo motor 2702 drives the drive shaft 2703 and gear 2704 to rotate. Gear 2704 meshes with gear ring 2705, driving the three gears 3 2706 on the inner side to rotate. Gear 2704 and gear 3 2706 mesh with gear frame 2708 respectively, causing gear frame 2708 to move synchronously towards the center along the slide groove of support seat 2701. At the same time, the positions of cleaning head 13 and cleaning head 23 are adjusted by the axial extension and retraction of electric push rod 18 and electric push rod 21, which can adapt to quartz furnace tubes of different diameters and improve the versatility of the device.

[0027] In summary, when using this omnidirectional cleaning device for quartz furnace tubes, first connect the water spray pipe 24 to an external water source, then place the quartz furnace tube in the support base 2701. The servo motor 2702 drives the drive shaft 2703 and gear 2704 to rotate. Gear 2704 meshes with gear ring 2705, driving gear 3 2706 to rotate. Since the ratio of gear 2704, gear 3 2706 to gear frame 2708 is 1:3:4, the gear 2704 and gear 3 2706 mesh with gear frame 2708 respectively, causing gear frame 2708 to move towards each other along the slide groove of support base 2701. This can drive the bracket 2709 and conveyor roller 2711 to approach the quartz furnace tube until the conveyor roller 2711 is in contact with the quartz furnace tube.

[0028] Then, the servo motor 32710, electric push rod 18 and electric push rod 21 are started in sequence. The servo motor 32710 drives the conveying roller 2711 to rotate forward. The friction between the conveying roller 2711 and the quartz furnace tube is used to smoothly convey the quartz furnace tube from the right side into the box 1. The electric push rod 18 retracts and drives the support arm 10 on the moving seat 9 to rotate around the pin shaft. At the same time, the support arms 211 at both ends of the fixed seat 7 move synchronously, so that the cleaning head 13 on the fixed plate 12 contacts the inner wall of the quartz furnace tube. The electric push rod 221 extends and drives the fixed plate 22 to move, so that the cleaning head 23 contacts the outer wall of the quartz furnace tube.

[0029] Next, the cleaning solution is sprayed from the nozzle of cleaning head 23 to initially rinse the inner and outer walls of the quartz furnace tube. Then, servo motor 5 is started, which drives drive rod 6, synchronous pulley 14 and fixed seat 7 to rotate. Synchronous pulley 14 meshes with synchronous belt 15 to transmit power to synchronous pulley 16, drive shaft 17 and gear 18 to rotate. At the same time, gear 18 meshes with gear ring 19 to drive drive cylinder 20 to rotate around bearing 25, so that cleaning head 13 and cleaning head 23 make circular motion, thereby circumferentially brushing the inner and outer walls of the quartz furnace tube through cleaning head 13 and cleaning head 23 to ensure that there are no dead corners in the cleaning of the inner and outer walls. Since the box body 1 has a certain tilt angle, the waste liquid and impurities generated during the cleaning process can be concentrated on the bottom left side of the box body 1 and discharged through water outlet pipe 3.

[0030] After cleaning, turn off servo motor 15, control electric push rod 18 to extend and electric push rod 21 to retract, start servo motor 3 2710, drive conveyor roller 2711 to reverse and send the cleaned quartz furnace tube out from the right side of box 1 through servo motor 3 2710. Start servo motor 2702 to reverse and make conveyor roller 2711 move away from each other, making it easier to remove the quartz furnace tube.

[0031] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A quartz furnace tube omnidirectional cleaning device, comprising a housing (1) and a servo motor (5), characterized in that, The bottom of the box (1) is provided with support feet (2) on both sides, and a water outlet pipe (3) is connected to the lower left side of the box (1). A valve (4) is installed on the water outlet pipe (3). The servo motor (5) is located in the middle of the left side of the box (1), and the output end of the servo motor (5) is connected to a drive rod (6). A fixed seat (7) is provided at the right end of the drive rod (6), and an electric push rod (8) is installed on the right side of the fixed seat (7). A movable seat (9) is provided at the output end of the electric push rod (8), and a support arm (10) is hinged to both ends of the movable seat (9) by a pin. A support arm (11) is hinged to both ends of the fixed seat (7) by a pin, and a fixed plate (12) is hinged to the other end of the support arm (11) by a pin. A cleaning head (13) is installed on the outside of the fixed plate (12). The drive rod (6) A timing pulley 1 (14) is fitted on the outer left side of the box, and a timing pulley 2 (16) is connected to the outer side of the timing pulley 1 (14) via a timing belt (15). A transmission shaft 1 (17) is inserted through the middle of the timing pulley 2 (16), and a gear 1 (18) is fitted on the outer right side of the transmission shaft 1 (17). A gear ring 1 (19) is connected to the outer side of the gear 1 (18), and a transmission cylinder (20) is fixed in the middle of the gear ring 1 (19). An electric push rod 2 (21) is installed on the transmission cylinder (20), and a fixing plate 2 (22) is connected to the output end of the electric push rod 2 (21). A cleaning head 2 (23) is installed on the outer side of the fixing plate 2 (22). A water spray pipe (24) is fixed through the left side of the box (1), and a partition plate (26) is fixed inside the box (1). A bearing (25) is provided at the opening in the middle of the partition plate (26).

2. The omnidirectional cleaning device for quartz furnace tubes according to claim 1, characterized in that, The housing (1) and the drive shaft (17) are rotatably connected, and the drive rod (6) and the drive shaft (17) are parallel to each other.

3. The omnidirectional cleaning device for quartz furnace tubes according to claim 1, characterized in that, The transmission cylinder (20) is disposed inside the bearing (25), and the drive rod (6) and the transmission cylinder (20) are coaxially arranged.

4. The omnidirectional cleaning device for quartz furnace tubes according to claim 1, characterized in that, A conveying assembly (27) is provided on the right side of the housing (1), and the conveying assembly (27) includes a support base (2701), a second servo motor (2702) and a drive shaft (2703). The second servo motor (2702) is installed on the right side of the support base (2701), and the output end of the second servo motor (2702) is connected to the drive shaft (2703).

5. The omnidirectional cleaning device for quartz furnace tubes according to claim 4, characterized in that, The conveying assembly (27) further includes a second gear (2704) and a second gear ring (2705), and the second gear (2704) is sleeved on the outside of the drive shaft (2703), and the second gear ring (2705) is connected to the outside of the second gear (2704).

6. The omnidirectional cleaning device for quartz furnace tubes according to claim 5, characterized in that, The conveying assembly (27) includes a third gear (2706), a second drive shaft (2707), and a gear frame (2708). The inner side of the second gear ring (2705) is also connected to the third gear (2706). The second drive shaft (2707) passes through the middle of the third gear (2706), and the gear frame (2708) is connected to the outer side of both the second gear (2704) and the third gear (2706).

7. The omnidirectional cleaning device for quartz furnace tubes according to claim 6, characterized in that, The conveying assembly (27) also includes a bracket (2709), a servo motor (2710), and a conveying roller (2711). The bracket (2709) is fixed at one end of the gear frame (2708) near the center of the gear ring (2705). The servo motor (2710) is mounted on the outside of the bracket (2709), and the output shaft of the servo motor (2710) is connected to the conveying roller (2711).

8. The omnidirectional cleaning device for quartz furnace tubes according to claim 7, characterized in that, The toothed frame (2708) passes through the sliding groove at the middle of the outer side of the support base (2701), and four toothed frames (2708) are provided. The second toothed ring (2705) and the drive rod (6) are coaxially arranged.

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