A chemical volumizing system

Abstract

The embodiment of the present application discloses a chemical constant volume system. The system comprises a liquid supply unit, a constant volume unit and a mixing unit, wherein: the liquid supply unit comprises a plurality of parallel liquid inlet pipelines, a first liquid conveying pipeline and a second liquid conveying pipeline; at least one of the liquid inlet pipelines, the first liquid conveying pipeline and the second liquid conveying pipeline are sequentially communicated; the second liquid conveying pipeline is connected with a liquid inlet end of the constant volume device; the constant volume unit comprises a constant volume device and at least one liquid level detection component which is adjustably installed on the constant volume device; the at least one liquid level detection component is used for detecting whether the liquid level in the constant volume device reaches a corresponding position; the mixing unit is connected with a liquid outlet end of the constant volume device, and the mixing unit is used for receiving liquid from the constant volume device. Through the embodiment of the present application, the technical problem of how to adjust the concentration ratio of any chemical polishing liquid in the range of the constant volume device is solved.

Description

Technical Field

[0001] This application relates to the field of chemical grinding fluid proportioning equipment, and more particularly to a chemical volume adjustment system. Background Technology

[0002] As VLSI manufacturing processes rapidly become more complex and sophisticated, chemical mechanical polishing (CMP) has become an indispensable and crucial step in chip fabrication. As a core consumable in this process, the quality control of the polishing slurry directly impacts chip manufacturing yield, with precise concentration ratios being particularly important. At different polishing stages of chip fabrication, the concentration ratio of the polishing slurry needs to be dynamically adjusted according to process requirements to achieve a gradient polishing effect throughout the entire process, from rough grinding to fine polishing.

[0003] In current production processes, the volume control device, as the core component of polishing slurry formulation, primarily controls the quantitative distribution of various chemical raw materials through a preset volume. Its workflow involves independently measuring the volume of each chemical raw material at a fixed point. Once each component liquid reaches a preset volume threshold, it is then transported to the mixing area to complete the formulation. While this fixed-volume formulation method can achieve specific concentration ratios such as 1:1 and 2:1, it suffers from significant process limitations. These limitations stem from the non-adjustable volume settings of existing volume control devices, making them unsuitable for complex formulation requirements involving non-integer ratios (e.g., 1:1.3) or multi-component mixtures (e.g., 3:2:5). When process requirements exceed the preset volume range, the device struggles to precisely control the amount of trace components added and cannot flexibly adjust the ratios of different components. This rigid formulation method can no longer meet the diverse and high-precision requirements of advanced processes for polishing slurry concentrations, becoming one of the technological bottlenecks restricting the upgrading of semiconductor manufacturing processes. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a chemical volume adjustment system to solve the technical problem of how to prepare chemical grinding fluids of arbitrary concentration ratios within the same volume adjustment device.

[0005] This application provides a chemical volume control system, including a liquid supply unit, a volume control unit, and a mixing unit, wherein:

[0006] The liquid supply unit includes several parallel liquid inlet pipes, a first liquid delivery pipe, and a second liquid delivery pipe; at least one of the liquid inlet pipes, the first liquid delivery pipe, and the second liquid delivery pipe are connected in sequence; the second liquid delivery pipe is connected to the liquid inlet end of the volume-regulating device.

[0007] The volume-regulating unit includes a volume-regulating device and at least one liquid level detection component that is position-adjustably mounted on the volume-regulating device; the at least one liquid level detection component is used to detect whether the liquid level in the volume-regulating device has reached a corresponding position;

[0008] The mixing unit is connected to the liquid outlet of the volume-fixing device, and the mixing unit is used to receive liquid from the volume-fixing device.

[0009] In one embodiment of the above-described chemical volume adjustment system,

[0010] The liquid level detection component has at least two components, with one component positioned close to and below the other.

[0011] In one embodiment of the above-described chemical volume adjustment system,

[0012] The volume-regulating unit includes a support, and the at least one liquid level detection component is adjustablely mounted on the volume-regulating device via the support.

[0013] In one embodiment of the above-described chemical volume adjustment system,

[0014] The bracket is provided with a waist-shaped hole extending along the axial direction of the volume-regulating device, and at least one liquid level detection component is slidably installed in the waist-shaped hole to be adjusted to any position in the axial direction of the volume-regulating device.

[0015] In one embodiment of the above-described chemical volume adjustment system,

[0016] The volume-regulating device is provided with a top cover and a bottom cover at both ends, and the bracket is installed on the top cover and the bottom cover at both ends.

[0017] In one embodiment of the above-described chemical volume adjustment system,

[0018] The volume-regulating device has a graduated scale along its axial direction.

[0019] In one embodiment of the above-described chemical volume adjustment system,

[0020] The liquid supply unit further includes a third infusion line; the third infusion line is connected in parallel with the second infusion line, and the first end of the third infusion line is connected to the first infusion line, and the second end of the third infusion line is connected to the inlet end of the volume-regulating device.

[0021] The flow rate of the second infusion line is greater than that of the third infusion line.

[0022] In one embodiment of the above-described chemical volume adjustment system,

[0023] The system also includes a pressure supply unit configured to apply pressure to the volumetric device when the liquid level detection component detects that the liquid level in the volumetric device has reached a corresponding position, so as to deliver the liquid in the volumetric device to the mixing unit.

[0024] In one embodiment of the above-described chemical volume adjustment system,

[0025] The mixing unit includes a mixing tank, the outlet of which is located at its bottom, and the bottom of the mixing tank is funnel-shaped towards its outlet.

[0026] In one embodiment of the above-described chemical volume adjustment system,

[0027] The system also includes a cleaning unit and a waste discharge unit;

[0028] The cleaning unit is connected to the volume-fixing device, and the cleaning unit is configured to clean the inside of the volume-fixing device and the pipeline connected to the volume-fixing device, and discharge the waste liquid generated after cleaning to the waste discharge unit.

[0029] The above-described one or more embodiments of this application have at least one or more of the following beneficial effects:

[0030] In implementing the technical solution of this application, the volume-fixing system, by setting an adjustable liquid level detection component on the volume-fixing device, enables the volume-fixing unit to measure any volume. In specific implementation, simply adjusting the liquid level detection component to the corresponding volume position according to the mixing ratio requirements of the chemical raw materials allows for the mixing of chemical grinding slurries of any concentration ratio within the same volume-fixing device. This system has the following advantages: First, the volume-fixing unit supports flexible adjustment of different mixing ratios, especially enabling the precise addition of trace grinding slurry components, thereby significantly improving the quality of the grinding slurry; second, the volume-fixing system has a simple structural design, resulting in low manufacturing costs and convenient operation and maintenance, thus possessing high practical value.

[0031] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0032] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0033] Figure 1 This is a schematic diagram of the structure of a calibrating unit according to one embodiment of this application;

[0034] Figure 2 This is a schematic diagram of the structure of a chemical volume adjustment system according to one embodiment of this application.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1. Volume control unit; 11. Volume control device; 111. Top cover; 112. Bottom cover; 113. Liquid inlet of volume control device; 114. Liquid outlet of volume control device; 12. Liquid level detection component; 121. Liquid level detection component A; 122. Liquid level detection component B; 123. Liquid level detection component C; 124. Sliding mounting component; 13. Bracket; 131. Waist-shaped hole;

[0037] 2. Liquid supply unit; 21. Liquid inlet line; 22. First infusion line; 23. Second infusion line; 24. Third infusion line;

[0038] 3. Pressure supply unit; 31. Gas supply device; 32. Gas supply pipeline;

[0039] 4. Mixing unit; 41. Mixing tank; 411. Discharge end of mixing tank; 42. Stirring device; 43. Fourth infusion line; 44. Fifth infusion line;

[0040] 5. Cleaning unit; 51. Cleaning device; 52. Cleaning pipeline; 6. Waste discharge unit; 61. First waste discharge device; 62. Second waste discharge device; 63. First waste discharge pipeline; 64. Second waste discharge pipeline;

[0041] 211, 221, 231, 241, 321, 431, 521, 631, and 641 are all valves for the corresponding pipelines. Detailed Implementation

[0042] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0043] As described in the background section, existing volume control devices in conventional systems can only quantitatively control the volume of chemical raw materials at fixed rates, with preset volume thresholds typically being integers (e.g., 100 mL, 200 mL, etc.). This limits existing systems to preparing grinding slurries with specific integer concentration ratios (e.g., 1:1, 2:1, etc.). However, in actual production processes, grinding operations often require finer and more complex concentration ratios (e.g., non-integer ratios such as 1.5:1 or 3.2:1) to achieve optimized grinding results. To address this technical bottleneck, this application innovatively proposes a novel chemical volume control system designed to solve the key problem in existing technologies where arbitrary concentration ratios of chemical grinding slurries cannot be prepared within the same volume control device.

[0044] See appendix Figure 1 In one or more embodiments, a chemical volume-regulating system of this application includes a volume-regulating unit 1; the volume-regulating unit 1 includes a volume-regulating device 11 and at least one liquid level detection component 12 that is position-adjustably mounted on the volume-regulating device 11; the at least one liquid level detection component 12 is used to detect whether the liquid level in the volume-regulating device 11 has reached the corresponding position.

[0045] The volume control system of this application enables the volume control unit 1 to measure any volume by setting an adjustable liquid level detection component 12 on the volume control device 11. In specific implementation, the liquid level detection component 12 is adjusted to the corresponding volume position according to the mixing ratio requirements of the chemical raw materials, so that any concentration ratio of chemical grinding slurry can be mixed within the same volume control device 11. This system has the following advantages: First, the volume control unit 1 supports flexible adjustment of different mixing ratios, especially enabling the precise addition of trace grinding slurry components, thereby significantly improving the quality of the grinding slurry; Second, the volume control system has a simple structural design, is not only inexpensive to manufacture, but also convenient to operate and maintain, and has high practical value.

[0046] The volume control unit 1 is capable of measuring any volume because the liquid level detection component 12, installed on one side of the volume control device 11, can be adjusted to any position. The liquid level detection component 12 has the function of detecting the liquid level at its corresponding position. For example, if the liquid level detection component 12 is positioned at the 500mL position of the volume control device 11, when the liquid in the volume control device 11 reaches the 500mL position, the volume control system can obtain a signal from the liquid level detection component 12 that the liquid level in the volume control device 11 has reached 500mL. Based on this signal, the next step can be executed, such as ceasing further addition of liquid to the volume control device 11. In this application, because the position of the liquid level detection component 12 is adjustable, the liquid level at any position corresponding to any volume of the volume control device 11 can be measured, allowing the system to achieve more complex grinding slurry concentration ratios. For example, if a total of 250mL of grinding slurry needs to be prepared, its concentration ratio is required to be 1.5:1. First, adjust the liquid level detection component 12 to the position corresponding to a volume of 150mL in the volume-fixing device 11, and inject chemical solution A with a ratio of 1.5 into the volume-fixing device 11; after the liquid level detection component 12 detects that chemical solution A has reached 150mL, the system stops injecting liquid into the volume-fixing device 11 and outputs chemical solution A in the volume-fixing device 11 to the next process (such as a mixing tank, to wait for mixing); then adjust the liquid level detection component 12 to the position corresponding to a volume of 100mL in the volume-fixing device 11, and inject chemical solution B with a ratio of 1 into the volume-fixing device 11; after the liquid level detection component 12 detects that chemical solution B has reached 100mL, the system stops injecting liquid into the volume-fixing device 11 and outputs chemical solution B in the volume-fixing device 11 to the next process to mix with chemical solution A, thus completing the grinding slurry preparation.

[0047] In some embodiments, there may be one or more liquid level detection components 12. With multiple liquid level detection components 12, multiple volume positions corresponding to required ratios can be adjusted simultaneously on the volume-fixing device 11. For example, in a grinding slurry, the required concentration ratio of two chemical solutions is m:n; one liquid level detection component 12 can be adjusted to the volume position of the chemical solution corresponding to ratio m, and another liquid level detection component 12 can be adjusted to the volume position of the chemical solution corresponding to ratio n. Adjusting multiple volume positions corresponding to required ratios simultaneously with multiple liquid level detection components 12 saves adjustment time for the liquid level detection components 12, thereby effectively improving the efficiency of grinding slurry volume fixing.

[0048] In some possible implementations, with multiple liquid level detection components 12, more precise volume control can be achieved through multiple liquid level detection components 12. For example, see reference... Figure 1 The liquid level detection component A 121 is used to detect whether the chemical liquid has reached the corresponding liquid level. During the mixing process, the position of the liquid level detection component A 121 is adjusted according to the corresponding volume requirements of the chemical liquid. The liquid level detection component B 122 is set close to and lower than the liquid level detection component A 121. The liquid level detection component B 122 can detect whether the liquid level in the volume-fixing device 11 is close to the liquid level corresponding to the liquid level detection component A 121. This can help the system to reduce the injection flow rate and slowly inject liquid into the volume-fixing device 11 when it is close to the liquid level corresponding to the liquid level detection component A 121, thereby preventing over-injection and achieving more accurate volume fixation. Furthermore, in the case of multiple liquid level detection components 12, one of the liquid level detection components C 123 can also be set at the liquid inlet or bottom of the volume-fixing device 11 to detect whether liquid injection into the volume-fixing device 11 has started or whether there is still liquid left in the volume-fixing device 11.

[0049] The liquid level detection component 12 can be a liquid level sensor, preferably a non-contact liquid level sensor. By setting it at a corresponding position outside the volume-regulating device 11, it can realize the liquid level detection function at the corresponding position.

[0050] In some embodiments, reference Figure 1 The liquid level detection component 12 is mounted on the volume-regulating device 11 in an adjustable position via the bracket 13. Specifically, the bracket 13 extends along the axial direction of the volume-regulating device 11 and is disposed on one side of the volume-regulating device 11. The liquid level detection component 12 can be adjusted to any height position along the axial direction of the volume-regulating device 11 on the bracket 13, thereby achieving adjustment to any volume position within the volume-regulating device 11.

[0051] In some possible embodiments, the bracket 13 is provided with a waist-shaped hole 131 extending along the axial direction of the volume-regulating device 11. At least one liquid level detection component 12 is slidably mounted in the waist-shaped hole 131 to be adjusted to any position axially in the volume-regulating device 11. Specifically, the liquid level detection component 12 has a sliding mounting member 124, which can be engaged in the waist-shaped hole 131 and can slide and lock within the waist-shaped hole 131. The liquid level detection component 12 is slidably mounted in the waist-shaped hole 131 via the sliding mounting member 124 and can be positioned and locked at a designated position to prevent displacement. The sliding mounting member 124 can be a slider with grooves that mate with the two sides of the waist-shaped hole 131 to achieve sliding adjustment within the waist-shaped hole 131. The locking and positioning method of the sliding mounting member 124 can be any structure capable of locking the slider, such as locking by bolt positioning members on both sides, or positioning by adjusting the width of the groove to press the slider. It can be configured according to the specific structure, and this application does not impose specific limitations on this.

[0052] In some possible implementations, the volume-regulating device 11 has a top cover 111 and a bottom cover 112 at its two ends, and the bracket 13 is mounted on the top cover 111 and the bottom cover 112 at its two ends. Specifically, the bracket 13 is threadedly connected to the top cover 111 and the bottom cover 112. This installation method does not excessively increase the burden on the volume-regulating device 11, facilitates operation and alignment of the liquid level detection component 12 with the volume-regulating device 11, and has strong practicality. Furthermore, the bracket 13 is arranged parallel to the axis of the volume-regulating device 11 and perpendicular to the surfaces of the top cover 111 and the bottom cover 112, achieving precise alignment.

[0053] The body, top cover 111, and bottom cover 112 of the volume-regulating device 11 are all made of polytetrafluoroethylene.

[0054] In some possible implementations, the volume control device 11 is provided with a scale along its axial direction, which allows the liquid level detection component 12 to be flexibly adjusted to the corresponding position of the required volume.

[0055] See appendix Figure 2 In one or more embodiments, a chemical volume control system of this application includes the aforementioned volume control unit 1, liquid supply unit 2, pressure supply unit 3, and mixing unit 4.

[0056] The liquid supply unit 2 includes several parallel inlet pipes 21, a first inlet pipe 22, and parallel second inlet pipes 23 and third inlet pipes 24. The inlet pipes 21 are connected to the first end of the first inlet pipe 22. Each inlet pipe 21 is equipped with a valve 211, and the first inlet pipe 22 is equipped with a valve 221. The second end of the first inlet pipe 22 is connected to the first end of the second inlet pipe 23 and the third inlet pipe 24, respectively. The second ends of the second inlet pipe 23 and the third inlet pipe 24 are both connected to the inlet end 113 of the volumetric device. The second inlet pipe 23 is equipped with a valve 231, and the third inlet pipe 24 is equipped with a valve 241.

[0057] The pressure supply unit 3 includes a gas supply device 31 and a gas supply pipeline 32 connected together; the gas supply pipeline 32 is connected to the gas inlet end of the constant volume device 11; a valve 321 is provided on the gas supply pipeline 32.

[0058] The mixing unit 4 is used to receive liquid from the volume-fixing device 11. Specifically, the mixing unit 4 includes a mixing tank 41, a stirring device 42, a fourth infusion line 43, and a fifth infusion line 44. The mixing tank 41 is connected to the outlet end 114 of the volume-fixing device through the fourth infusion line 43. The stirring end of the stirring device 42 extends into the mixing tank 41 to stir the liquid inside the mixing tank 41. The fifth infusion line 44 is connected to the outlet end of the mixing tank 41 to output the prepared grinding slurry. A valve 431 is provided on the fourth infusion line 43.

[0059] Based on the above structural configuration, an optional working process of the chemical volume-fixing system of this application is as follows: the liquid level detection component 12 is adjusted to the scale position corresponding to the volume of the chemical liquid A required for preparing the grinding slurry; the chemical liquid A enters the volume-fixing device 11 through the liquid supply unit 2; after the liquid level detection component 12 detects that the liquid level has reached the corresponding position, the system controls the liquid supply unit 2 to stop supplying liquid to the volume-fixing device 11 and controls the pressure supply unit 3 to apply pressure to the volume-fixing device 11 to transport the liquid in the volume-fixing device 11 to the mixing unit 4; the above steps are repeated for other chemical liquids required for preparing the grinding slurry, and finally the grinding slurry is stirred and homogenized by the mixing unit 4 and then transported to the designated device.

[0060] Specifically, another optional operating procedure for a chemical volume adjustment system of this application is as follows:

[0061] Adjust the liquid level detection component 12 to the scale position corresponding to the volume of chemical solution A required for preparing the grinding slurry;

[0062] Open valves 211, 221 and 231 on the inlet pipe 21 corresponding to chemical liquid A, and chemical liquid A enters the volume-regulating device 11 through the inlet pipe 21, the first delivery pipe 22 and the second delivery pipe 23;

[0063] After the liquid level detection component 12 detects that the liquid level has reached the corresponding position, the system controls the closure of valves 211, 221 and 231 to stop the liquid supply to the volume control device 11.

[0064] Open valves 321 and 431, and the gas supply device 31 supplies gas to the volume-regulating device 11 through the gas supply pipeline 32 to create pressure and transport the liquid in the volume-regulating device 11 to the mixing tank 41 through the fourth liquid delivery pipeline 43 until the liquid in the volume-regulating device 11 has completely entered the mixing tank 41.

[0065] Repeat the above steps for other chemical solutions required for preparing the grinding slurry until all chemical solutions are brought to a final volume.

[0066] Turn on the stirring device 42 to stir the various chemicals in the mixing tank 41. After stirring evenly, the prepared solution can be delivered to the designated equipment through the fifth infusion line 44.

[0067] In one embodiment, the flow rate of the second infusion line 23 is set to be greater than that of the third infusion line 24, that is, the infusion flow rate of the second infusion line 23 is greater than that of the third infusion line 24. It can also be understood that the second infusion line 23 is a high-flow infusion line and the third infusion line 24 is a low-flow infusion line.

[0068] Based on the above embodiments, referring to Figure 1 and Figure 2 Another optional operating procedure for a chemical volume adjustment system of this application is as follows:

[0069] Adjust the liquid level detection component A 121 to the scale position corresponding to the volume of chemical liquid A required for preparing the grinding slurry, and adjust the liquid level detection component B 122 to be close to and lower than the liquid level detection component A 121;

[0070] Open valves 211, 221 and 231 on the inlet pipe 21 corresponding to chemical liquid A, and chemical liquid A enters the volume-regulating device 11 through the inlet pipe 21, the first delivery pipe 22 and the second delivery pipe 23;

[0071] When the liquid level detection component B 122 detects that the liquid level has reached its corresponding position, the system controls the closure of valve 231 and the opening of valve 241. At this time, chemical liquid A enters the volume-regulating device 11 through the third infusion pipeline 24.

[0072] When the liquid level detection component A 121 detects that the liquid level has reached its corresponding position, the system controls the closure of valves 211, 221 and 241 to stop the supply of liquid to the volume control device 11.

[0073] Open valves 321 and 431, and the gas supply device 31 supplies gas to the volume-regulating device 11 through the gas supply pipeline 32 to create pressure and transport the liquid in the volume-regulating device 11 to the mixing tank 41 through the fourth liquid delivery pipeline 43 until the liquid in the volume-regulating device 11 has completely entered the mixing tank 41.

[0074] Repeat the above steps for other chemical solutions required for preparing the grinding slurry until all chemical solutions are brought to a final volume.

[0075] Turn on the stirring device 42 to stir the various chemicals in the mixing tank 41. After stirring evenly, the prepared solution can be delivered to the designated equipment through the fifth infusion line 44.

[0076] By setting up multiple liquid level detection components 12 and cooperating with flow-differentiating infusion pipelines, the flow rate of the liquid supplied in the volume-regulating device 11 can be switched, thereby achieving more accurate volume regulation, avoiding excessive liquid entering the volume-regulating device 11, and improving the mixing accuracy of the grinding fluid.

[0077] The gas supply device 31 can be a nitrogen or other inert gas supply device.

[0078] The liquid outlet 411 of the mixing tank is located at its bottom, and the bottom of the mixing tank 41 is funnel-shaped towards the liquid outlet 411 to prevent liquid accumulation in the tank.

[0079] The stirring device 42 may include a driving component and a stirring component. The stirring component is disposed inside the mixing tank 41, and the driving component drives the stirring component to stir the grinding liquid in a rotating manner. Furthermore, the stirring component can be moved to any position within the mixing tank 41 via a connecting component to fully stir liquids at different levels. The connecting component may be a telescopic rod, etc., and can be specifically configured according to the structure of the mixing tank 41. This application does not impose specific limitations on the connecting component. The driving component may be a motor.

[0080] In one embodiment, a chemical volume adjustment system of this application further includes a cleaning unit 5 and a waste discharge unit 6;

[0081] The cleaning unit 5 includes a cleaning device 51 and a cleaning pipeline 52. The cleaning device 51 is connected to the air inlet of the volume control device 11 through the cleaning pipeline 52. The cleaning pipeline 52 and the air supply pipeline 32 have a common connection end. A valve 521 is provided on the cleaning pipeline 52.

[0082] Waste discharge unit 6 includes a first waste discharge device 61 and a second waste discharge device 62; the first waste discharge device 61 is connected to the fourth infusion pipeline 43 through a first waste discharge pipeline 63; the second waste discharge device 62 is connected to the first infusion pipeline 22 through a second waste discharge pipeline 64; a valve 631 is installed on the first waste discharge pipeline 63 and a valve 641 is installed on the second waste discharge pipeline 64.

[0083] Based on the above embodiments, referring to Figure 1 Another optional operating procedure for a chemical volume adjustment system of this application is as follows:

[0084] Adjust the liquid level detection component 12 to the scale position corresponding to the volume of chemical solution A required for preparing the grinding slurry;

[0085] Open valves 211, 221 and 231 on the inlet pipe 21 corresponding to chemical liquid A, and chemical liquid A enters the volume-regulating device 11 through the inlet pipe 21, the first delivery pipe 22 and the second delivery pipe 23;

[0086] After the liquid level detection component 12 detects that the liquid level has reached the corresponding position, the system controls the closure of valves 211, 221 and 231 to stop the liquid supply to the volume control device 11.

[0087] Open valves 321 and 431, and the gas supply device 31 supplies gas to the volume-regulating device 11 through the gas supply pipeline 32 to create pressure and transport the liquid in the volume-regulating device 11 to the mixing tank 41 through the fourth liquid delivery pipeline 43 until the liquid in the volume-regulating device 11 has completely entered the mixing tank 41.

[0088] Close valve 321, open valves 521, 631, 231, 221 and 641, and the cleaning device 51 injects cleaning fluid into the volume-regulating device 11 through the cleaning pipeline 52 to clean the inside of the volume-regulating device 11 and the pipelines connected to it. The waste liquid after cleaning is discharged to the first waste discharge device 61 and the second waste discharge device 62 through the first waste discharge pipeline 63 and the second waste discharge pipeline 64 respectively.

[0089] After cleaning, close valves 521, 631, 231, 221 and 641;

[0090] Repeat the above steps for other chemical solutions required for preparing the grinding slurry until all chemical solutions are brought to a final volume.

[0091] Turn on the stirring device 42 to stir the various chemicals in the mixing tank 41. After stirring evenly, the prepared solution can be delivered to the designated equipment through the fifth infusion line 44.

[0092] By setting up the cleaning unit 5 and the waste discharge unit 6, the purity of each chemical liquid is ensured when different chemical liquids are brought to a constant volume, preventing adulteration during the volume-setting process and affecting the accuracy of the mixing concentration, thus further ensuring the quality of the grinding slurry.

[0093] The cleaning device 51 can be any device that can inject cleaning fluid into the cleaning device through a pipeline; the waste discharge device is used to collect waste fluid and can be a waste fluid collection tank, etc. In actual operation, it can be configured according to needs, and this application does not limit the specific cleaning device 51 and waste discharge device.

[0094] It should be understood that the illustrations in this application are only for the convenience of showing the structure, principle and effect of this chemical volume control system, and are not intended to limit the number or specific model of each device. In actual use, the system can be set up according to the requirements. Other chemical volume control systems set up according to the principle and structure of this application should be within the scope of protection of this application.

[0095] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0096] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0097] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A chemical volume adjustment system, characterized in that, It includes a liquid supply unit (2), a volume control unit (1), and a mixing unit (4), wherein: The liquid supply unit (2) includes several parallel liquid inlet pipes (21), a first liquid delivery pipe (22), and a second liquid delivery pipe (23); at least one of the liquid inlet pipes (21), the first liquid delivery pipe (22), and the second liquid delivery pipe (23) are connected in sequence; the second liquid delivery pipe (23) is connected to the liquid inlet end (113) of the volume control device; The volume-regulating unit (1) includes a volume-regulating device (11) and at least one liquid level detection component (12) that is position-adjustably mounted on the volume-regulating device (11); the at least one liquid level detection component (12) is used to detect whether the liquid level in the volume-regulating device (11) has reached the corresponding position; The mixing unit (4) is connected to the liquid outlet (113) of the volume-regulating device, and the mixing unit (4) is used to receive liquid from the volume-regulating device (11).

2. The chemical volume adjustment system according to claim 1, characterized in that, The liquid level detection component (12) has at least two, with one liquid level detection component (12) positioned close to and below the other liquid level detection component (12).

3. The chemical volume adjustment system according to claim 1, characterized in that, The volume-regulating unit (1) includes a bracket (13), and the at least one liquid level detection component (12) is mounted on the volume-regulating device (11) in an adjustable position via the bracket (13).

4. The chemical volume adjustment system according to claim 3, characterized in that, The bracket (13) is provided with a waist-shaped hole (131) extending along the axial direction of the volume-regulating device (11), and at least one liquid level detection component (12) is slidably installed in the waist-shaped hole (131) to be adjusted to any position in the axial direction of the volume-regulating device (11).

5. The chemical volume adjustment system according to claim 3, characterized in that, The volume-regulating device (11) has a top cover (111) and a bottom cover (112) at both ends, and the bracket (13) is installed on the top cover (111) and the bottom cover (112) at both ends.

6. The chemical volume adjustment system according to claim 1, characterized in that, The volume-regulating device (11) has a scale ruler arranged along its axial direction.

7. The chemical volume adjustment system according to claim 1, characterized in that, The liquid supply unit (2) further includes a third infusion line (24); the third infusion line (24) is connected in parallel with the second infusion line (23), and the first end of the third infusion line (24) is connected to the first infusion line (22), and the second end of the third infusion line (24) is connected to the inlet end (113) of the volume-regulating device; The flow rate of the second infusion line (23) is greater than that of the third infusion line (24).

8. The chemical volume adjustment system according to claim 1, characterized in that, The mixing unit (4) includes a mixing tank (41), with the outlet end (411) of the mixing tank located at its bottom, and the bottom of the mixing tank (41) being funnel-shaped towards its outlet end.

9. The chemical volume adjustment system according to any one of claims 1-8, characterized in that, The system also includes a pressure supply unit (3), configured to apply pressure to the volume-regulating device (11) when the liquid level detection component (12) detects that the liquid level in the volume-regulating device (11) has reached the corresponding position, so as to deliver the liquid in the volume-regulating device (11) to the mixing unit (4).

10. The chemical volume adjustment system according to any one of claims 1-8, characterized in that, The system also includes a cleaning unit (5) and a waste discharge unit (6); The cleaning unit (5) is connected to the volume-fixing device (11). The cleaning unit (5) is configured to clean the inside of the volume-fixing device (11) and the pipeline connected to the volume-fixing device (11) and discharge the waste liquid generated after cleaning to the waste discharge unit (6).

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