A surface flatness monitoring device

Abstract

The utility model discloses a surface flatness monitoring devices, including the processing station, the processing station's top is provided with the device frame body, and the top of device frame body is installed laser flatness appearance, the bottom of device frame body is fixed with the upper shock insulation board, the lower portion of upper shock insulation board is provided with the lower shock insulation board, the bottom of upper shock insulation board installs the voice coil motor, the center position of upper shock insulation board bottom is fixed with the shock insulation seat, and the bottom of shock insulation seat is installed piezoelectric ceramic, the side of upper shock insulation board top is installed the controller, the side of processing station top is installed acceleration sensor. The utility model discloses through voice coil motor and piezoelectric ceramic combination design composite drive system, can block the vibration transmission of processing station to device frame body, reduces the interference of vibration to laser flatness appearance monitoring, and then has promoted the detection accuracy.

Description

Technical Field

[0001] This utility model relates to the field of surface flatness monitoring technology, specifically to a surface flatness monitoring device. Background Technology

[0002] Cluster ion beam polishing is an advanced surface processing technology that uses gas cluster ions to precisely treat the surface of a workpiece. Its working principle is based on the interaction between ions and atoms on the workpiece surface, removing surface material through a physical sputtering effect, thereby achieving polishing and modification of the workpiece surface.

[0003] When using cluster ion beam polishing equipment, it is necessary to monitor the surface flatness of the workpiece to determine the polishing effect. Laser flatness testing is a common non-contact method for monitoring flatness. Utilizing the principle of linear propagation and reflection of laser light, a laser emitter emits a laser beam towards the workpiece surface. After reflection, the beam is received by a laser receiver. By measuring parameters such as the propagation time and angle of the laser beam, the distance between various points on the workpiece surface and a reference surface is calculated, thus determining the surface flatness. However, the vibration generated during the operation of cluster ion beam polishing equipment can interfere with the laser flatness testing, affecting the accuracy of the monitoring. Therefore, improvements are urgently needed. Utility Model Content

[0004] The purpose of this invention is to provide a surface flatness monitoring device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a surface flatness monitoring device, comprising a processing table, a device frame above the processing table, a laser flatness meter mounted on the top of the device frame, an upper vibration isolation plate fixed at the bottom of the device frame, a lower vibration isolation plate below the upper vibration isolation plate, a voice coil motor mounted at the bottom of the upper vibration isolation plate, a vibration isolation seat fixed at the center of the bottom of the upper vibration isolation plate, a piezoelectric ceramic mounted at the bottom of the vibration isolation seat, a controller mounted on one side of the top of the upper vibration isolation plate, and an acceleration sensor mounted on one side of the top of the processing table, the acceleration sensor being connected to the controller via a wire.

[0006] Preferably, the bottom end of the voice coil motor is connected to the lower vibration isolation plate, and the bottom end of the piezoelectric ceramic is also connected to the lower vibration isolation plate.

[0007] Preferably, a vibration isolation pad is provided between the lower vibration isolation plate and the processing table. The vibration isolation pad is made of rubber, and its upper and lower surfaces are respectively adhered to the lower vibration isolation plate and the processing table.

[0008] Preferably, a storage box is fixed to the top of the device frame on one side of the laser flatness meter, and an opening slot is provided on one side of the bottom of the storage box.

[0009] Preferably, the bottom of the laser flatness meter is provided with a protective baffle. The protective baffle is in close contact with the laser flatness meter, and a rack is fixed on one side of the protective baffle. One end of the protective baffle and the rack passes through the opening slot and extends into the interior of the storage box. The protective baffle moves to the bottom of the laser flatness meter to shield the laser emitter and laser receiver of the laser flatness meter, reducing the possibility of collision damage, extending the service life, and reducing dust cover, thus reducing interference factors for subsequent monitoring.

[0010] Preferably, the protective baffle has a guide groove inside, and a guide rod is fixed inside the storage box at the position of the guide groove. One end of the guide rod extends into the inside of the guide groove. When the protective baffle moves, the guide groove is limited and guided by the guide rod, so that the protective baffle moves smoothly.

[0011] Preferably, a small motor is installed on one side inside the storage box, and a gear is installed at the output end of the small motor, with the gear meshing tightly with the rack.

[0012] Preferably, four voice coil motors and four piezoelectric ceramics are provided and distributed at the corner positions of the bottom of the upper vibration isolation plate and the vibration isolation seat. The voice coil motor is based on the Lorentz force principle. The energized coil is subjected to force in the magnetic field and generates linear motion to cancel the vibration. The piezoelectric ceramic will generate a small deformation when voltage is applied to cancel the vibration. The voice coil motor has a large stroke and fast dynamic response, while the piezoelectric ceramic has a high frequency response and large static thrust. The combination design of the voice coil motor and the piezoelectric ceramic is a composite drive system, which can better perform active vibration isolation.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] The laser flatness tester monitors the surface flatness of workpieces. Because an upper and lower vibration isolation plate are installed between the device frame and the processing table, the vibration generated when the cluster ion beam polishing equipment is working is transmitted to the processing table. An acceleration sensor detects the vibration signal of the processing table in real time and transmits it to the controller. The controller drives a voice coil motor and a piezoelectric ceramic to operate in opposite directions to counteract the vibration. The voice coil motor, based on the Lorentz force principle, generates linear motion in a magnetic field to counteract the vibration. The piezoelectric ceramic produces a small deformation when voltage is applied to counteract the vibration. The voice coil motor has a large stroke and fast dynamic response, while the piezoelectric ceramic has a high-frequency response and large static thrust. The combined design of the voice coil motor and piezoelectric ceramic creates a composite drive system that provides better active vibration isolation. Combined with the further vibration isolation effect of the vibration isolation pads, this effectively blocks the transmission of vibration from the processing table to the device frame, reducing interference from vibration on the laser flatness tester's monitoring and thus improving the detection accuracy. Attached Figure Description

[0015] Figure 1This is a schematic diagram of the main structure of this utility model;

[0016] Figure 2 This is a partially enlarged structural schematic diagram of the present invention;

[0017] Figure 3 This is a magnified top view of the upper vibration isolation plate of this utility model.

[0018] Figure 4 For the present utility model Figure 1 Enlarged structural diagram at point A in the middle;

[0019] Figure 5 This is a top view enlarged cross-sectional schematic diagram of the protective baffle of this utility model.

[0020] In the diagram: 1. Processing table; 2. Accelerometer; 3. Lower vibration isolation plate; 4. Upper vibration isolation plate; 5. Controller; 6. Device frame; 7. Storage box; 8. Laser flatness meter; 9. Voice coil motor; 10. Vibration isolation seat; 11. Piezoelectric ceramic; 12. Vibration isolation pad; 13. Opening slot; 14. Small motor; 15. Gear; 16. Rack; 17. Protective baffle; 18. Guide slot; 19. Guide rod. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Therefore, the following detailed description of the embodiments of this utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0023] Please see Figures 1-5An embodiment of this utility model provides a surface flatness monitoring device, including a processing table 1, a device frame 6 above the processing table 1, a laser flatness meter 8 installed on the top of the device frame 6, an upper vibration isolation plate 4 fixed at the bottom of the device frame 6, a lower vibration isolation plate 3 below the upper vibration isolation plate 4, a voice coil motor 9 installed at the bottom of the upper vibration isolation plate 4, a vibration isolation seat 10 fixed at the center of the bottom of the upper vibration isolation plate 4, and a piezoelectric ceramic 11 installed at the bottom of the vibration isolation seat 10.

[0024] Specifically, the cluster ion beam polishing equipment is installed on the processing table 1 to polish the workpiece. During the processing, the surface flatness of the workpiece is monitored by the laser flatness meter 8 on the top of the device frame 6.

[0025] Since the upper vibration isolation plate 4 and the lower vibration isolation plate 3 are provided between the device frame 6 and the processing table 1, when the cluster ion beam polishing equipment is working, the vibration generated is transmitted to the processing table 1. The acceleration sensor 2 detects the vibration signal of the processing table 1 in real time and transmits it to the controller 5. The controller 5 drives the voice coil motor 9 and the piezoelectric ceramic 11 to operate in opposite directions to cancel the vibration. The voice coil motor 9 is based on the Lorentz force principle. The current-carrying coil is subjected to force in the magnetic field and generates linear motion to cancel the vibration. The piezoelectric ceramic 11 will generate a small deformation when voltage is applied to cancel the vibration. The voice coil motor 9 has a large stroke and fast dynamic response. The piezoelectric ceramic 11 has a high frequency response and large static thrust. The combination design of the voice coil motor 9 and the piezoelectric ceramic 11 is a composite drive system, which can better perform active vibration isolation. With the further vibration isolation effect of the vibration isolation pad 12, the vibration transmission from the processing table 1 to the device frame 6 can be blocked, reducing the interference of vibration on the monitoring of the laser flatness meter 8, thereby improving the detection accuracy.

[0026] A controller 5 is installed on one side of the top of the upper vibration isolation plate 4, and an acceleration sensor 2 is installed on one side of the top of the processing table 1. The acceleration sensor 2 is connected to the controller 5 through a wire.

[0027] The bottom end of the voice coil motor 9 is connected to the lower vibration isolation plate 3, and the bottom end of the piezoelectric ceramic 11 is connected to the lower vibration isolation plate 3.

[0028] A vibration isolation pad 12 is provided between the lower vibration isolation plate 3 and the processing table 1. The vibration isolation pad 12 is made of rubber, and the upper and lower surfaces of the vibration isolation pad 12 are respectively adhered to the lower vibration isolation plate 3 and the processing table 1.

[0029] A storage box 7 is fixed to the top of the device frame 6 on one side of the laser flatness meter 8, and an opening slot 13 is provided on one side of the bottom of the storage box 7.

[0030] The bottom of the laser flatness meter 8 is provided with a protective baffle 17. The protective baffle 17 is tightly fitted to the laser flatness meter 8, and a rack 16 is fixed on one side of the protective baffle 17. One end of the protective baffle 17 and the rack 16 passes through the opening slot 13 and extends into the interior of the storage box 7.

[0031] The protective baffle 17 has a guide groove 18 inside, and a guide rod 19 is fixed inside the storage box 7 at the position of the guide groove 18. One end of the guide rod 19 extends into the inside of the guide groove 18. When the protective baffle 17 moves, the guide groove 18 is limited and guided by the guide rod 19, so that the protective baffle 17 moves smoothly.

[0032] A small motor 14 is installed on one side inside the storage box 7, and a gear 15 is installed at the output end of the small motor 14. The gear 15 meshes tightly with the rack 16.

[0033] Specifically, the small motor 14 is started to drive the gear 15 to rotate. The gear 15 drives the rack 16 to move the protective baffle 17 out of the storage box 7 through the opening slot 13. The protective baffle 17 moves to the bottom of the laser flatness meter 8 to shield the laser emitter and laser receiver of the laser flatness meter 8, reduce the possibility of collision damage, extend the service life, and reduce dust cover, thus reducing interference factors for subsequent monitoring.

[0034] Four voice coil motors 9 and four piezoelectric ceramics 11 are provided, and they are respectively distributed at the corner positions at the bottom of the upper vibration isolation plate 4 and the vibration isolation seat 10.

[0035] In this embodiment, the following steps are taken: First, the cluster ion beam polishing equipment is installed on the processing table 1 to polish the workpiece. During the processing, the surface flatness of the workpiece is monitored by the laser flatness meter 8 on the top of the device frame 6. Since the device frame 6 and the processing table 1 are equipped with an upper vibration isolation plate 4 and a lower vibration isolation plate 3, the vibration generated when the cluster ion beam polishing equipment is working is transmitted to the processing table 1. The acceleration sensor 2 detects the vibration signal of the processing table 1 in real time and transmits it to the controller 5. The controller 5 drives the voice coil motor 9 and the piezoelectric ceramic 11 to operate in opposite directions to cancel the vibration. The voice coil motor 9 is based on the Lorentz force principle, and the energized coil is subjected to force in the magnetic field to generate linear motion to cancel the vibration. The piezoelectric ceramic 11 will generate a small deformation when voltage is applied to cancel the vibration. The voice coil motor 9 has a large stroke and fast dynamic response. The piezoelectric ceramic 11 has a high-frequency response and large static thrust. The combined design of the voice coil motor 9 and the piezoelectric ceramic 11 creates a composite drive system that can better perform active vibration isolation. Combined with the further vibration isolation effect of the vibration isolation pad 12, it can block the vibration transmission from the processing table 1 to the device frame 6, reduce the interference of vibration on the monitoring of the laser flatness meter 8, and thus improve the detection accuracy. After the monitoring is completed, the small motor 14 is started to drive the gear 15 to rotate. The gear 15 drives the rack 16 to move the protective baffle 17 out of the storage box 7 through the opening slot 13. The protective baffle 17 moves to the bottom of the laser flatness meter 8 to shield the laser emitter and laser receiver of the laser flatness meter 8, reduce the possibility of collision damage, extend the service life, and reduce dust cover, thus reducing interference factors for subsequent monitoring.

[0036] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

Claims

1. A surface flatness monitoring device, comprising a processing table (1), a device frame (6) being disposed above the processing table (1), and a laser flatness meter (8) being mounted on the top of the device frame (6), characterized in that, The bottom of the device frame (6) is fixed with an upper vibration isolation plate (4), and a lower vibration isolation plate (3) is provided below the upper vibration isolation plate (4). A voice coil motor (9) is installed at the bottom of the upper vibration isolation plate (4). A vibration isolation seat (10) is fixed at the center of the bottom of the upper vibration isolation plate (4), and a piezoelectric ceramic (11) is installed at the bottom of the vibration isolation seat (10). A controller (5) is installed on one side of the top of the upper vibration isolation plate (4), and an acceleration sensor (2) is installed on one side of the top of the processing table (1). The acceleration sensor (2) is connected to the controller (5) through a wire.

2. The surface flatness monitoring device according to claim 1, characterized in that: The bottom end of the voice coil motor (9) is connected to the lower vibration isolation plate (3), and the bottom end of the piezoelectric ceramic (11) is connected to the lower vibration isolation plate (3).

3. The surface flatness monitoring device according to claim 1, characterized in that: A vibration isolation pad (12) is provided between the lower vibration isolation plate (3) and the processing table (1). The vibration isolation pad (12) is made of rubber, and the upper and lower surfaces of the vibration isolation pad (12) are respectively bonded to the lower vibration isolation plate (3) and the processing table (1).

4. The surface flatness monitoring device according to claim 1, characterized in that: A storage box (7) is fixed on the top of the device frame (6) on one side of the laser flatness meter (8), and an opening slot (13) is provided on one side of the bottom of the storage box (7).

5. The surface flatness monitoring device according to claim 1, characterized in that: The bottom of the laser flatness meter (8) is provided with a protective baffle (17). The protective baffle (17) is closely fitted with the laser flatness meter (8), and a rack (16) is fixed on one side of the protective baffle (17). One end of the protective baffle (17) and the rack (16) passes through the opening slot (13) and extends into the interior of the storage box (7).

6. The surface flatness monitoring device according to claim 5, characterized in that: The protective baffle (17) has a guide groove (18) inside, and a guide rod (19) is fixed inside the storage box (7) at the position of the guide groove (18), with one end of the guide rod (19) extending into the inside of the guide groove (18).

7. The surface flatness monitoring device according to claim 4, characterized in that: A small motor (14) is installed on one side inside the storage box (7), and a gear (15) is installed at the output end of the small motor (14), which meshes tightly with the rack (16).

8. The surface flatness monitoring device according to claim 1, characterized in that: The voice coil motor (9) and piezoelectric ceramic (11) are each provided in four units, which are respectively distributed at the corner positions at the bottom of the upper vibration isolation plate (4) and the vibration isolation seat (10).

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