A coating chamber airflow homogenization coating uniformity device

Abstract

The utility model discloses a kind of plating chamber airflow homogenization plating layer uniform device, it is related to plating chamber plating layer uniform technical field.The utility model includes several air inlet pipes, each air inlet pipe is communicated with the communicating pipe, the communicating pipe upper and lower side is equipped with a plurality of first air outlet, the communicating pipe is installed with plug at one end away from the air inlet pipe, the communicating pipe periphery is installed with even division subassembly, and the even division subassembly includes shell.The utility model passes through upper and lower end buffer reaction gas, makes it in inner cavity of shell fast diffusion, kinetic energy is converted into pressure energy and forms preliminary uniform air pressure, gas flows out after being discharged from air outlet, impact shell inner wall again, dissipate kinetic energy and diffuse, finally discharge from symmetric second air outlet, pass through multistage buffer diffusion, so that gas is uniformly distributed in the inner cavity of shell, from the second air outlet at bottom and discharge into plating chamber, expand coverage area, make chamber reaction gas concentration balanced, and then increase the thickness uniformity of plating layer.

Description

Technical Field

[0001] This utility model belongs to the field of coating uniformity technology in coating chambers, and specifically relates to a coating chamber airflow homogenization device for coating uniformity. Background Technology

[0002] In modern industrial production, coating technology, as an important surface treatment method, is widely used in many fields such as electronics, optics, automobiles, and aerospace. It can form a thin film with specific properties on the surface of materials, thereby improving the corrosion resistance, wear resistance, optical properties, electrical properties, etc., and meeting the diverse needs of different industries for material surface properties.

[0003] In vacuum coating processes, uniform distribution of reactant gases is one of the key factors for obtaining high-quality, uniform coatings. Traditional gas inlet methods (such as single-point or simple multi-hole injection) can easily lead to uneven gas distribution in the chamber, forming areas with excessively high or low concentrations, which in turn affects the uniformity of coating thickness.

[0004] No effective solutions have yet been proposed to address the problems in the relevant technologies. Utility Model Content

[0005] In view of the problems in the related technologies, this utility model proposes a coating chamber airflow homogenization device to overcome the above-mentioned technical problems existing in the existing related technologies.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0007] This utility model is a coating chamber airflow homogenization coating uniformity device, including several air inlet pipes, each of the air inlet pipes is connected to a connecting pipe, and several first air outlet holes are opened at the top and bottom of the connecting pipes, and a plug is installed at the end of the connecting pipe away from the air inlet pipe.

[0008] A distribution component is installed around the periphery of the connecting pipe. The distribution component includes a shell, which is fixedly installed on the outer wall of the connecting pipe. A plurality of second vent holes are evenly and symmetrically opened at the bottom of the shell, and the plurality of second vent holes are linearly distributed. An inner shell is installed in the inner cavity of the shell. The connecting pipe passes through the back of the shell and the inner shell and extends to the front. A plurality of first vent holes are located in the inner cavity of the inner shell. Vents are opened at both the left and right ends of the inner shell.

[0009] Several of the aforementioned housings are equipped with mounting mechanisms on their periphery.

[0010] Furthermore, the two adjacent sets of outer shells are fixedly connected.

[0011] Furthermore, several of the first air outlets are distributed in a linear array along the connecting pipe.

[0012] Furthermore, the air outlet is elongated, and the length of the air outlet is greater than the total length formed by a plurality of linearly distributed second air outlets.

[0013] Furthermore, the mounting mechanism includes two connecting frames, which are respectively fixedly installed on the upper and lower parts of the plurality of housings, and two connecting rods are fixedly installed between the two connecting frames.

[0014] Furthermore, two mounting plates are fixedly installed on opposite sides of one of the two connecting frames, and each mounting plate is fitted with bolts.

[0015] This utility model has the following beneficial effects:

[0016] This invention utilizes the first vent hole of the connecting tube enclosed by the inner shell. The reacting gas is buffered at the upper and lower ends, allowing it to diffuse rapidly within the inner shell cavity. Kinetic energy is converted into pressure energy, forming a preliminary uniform gas pressure. After flowing out through the vent hole, the gas impacts the inner wall of the outer shell, dissipating kinetic energy and diffusing again. Finally, it is discharged from the symmetrical second vent hole. Through multi-stage buffering and diffusion, the gas is evenly distributed within the outer shell cavity and discharged into the coating chamber from the second vent hole at the bottom, expanding the coverage area and balancing the concentration of reacting gas within the chamber, thereby increasing the uniformity of the coating thickness.

[0017] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the utility model embodiments, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0020] Figure 2 This is a bottom view of the present invention;

[0021] Figure 3 This is a first partial schematic diagram of the present invention;

[0022] Figure 4 This is a top sectional view of the outer shell and inner shell of this utility model;

[0023] Figure 5 This is a schematic diagram of the second part of the present invention.

[0024] The attached diagram lists the components represented by each number as follows:

[0025] 1. Inlet pipe; 2. Connecting pipe; 201. First air outlet; 202. Plug; 3. Distribution assembly; 301. Outer shell; 302. Second air outlet; 303. Inner shell; 304. Air outlet; 4. Mounting mechanism; 401. Connecting bracket; 402. Connecting rod; 403. Mounting plate; 404. Bolt. Detailed Implementation

[0026] The technical solutions of the utility model embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the utility model, and not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the utility model.

[0027] In the description of this utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inner", etc., which indicate orientation or positional relationship, are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0028] Please see Figures 1-5 As shown, this utility model is a device for homogenizing the airflow in a coating chamber to achieve uniform coating. It includes several air inlet pipes 1, each of which is connected to a connecting pipe 2. Several first air outlets 201 are provided above and below each connecting pipe 2. A plug 202 is installed at the end of the connecting pipe 2 away from the air inlet pipe 1. A valve is connected to the air inlet end of the air inlet pipe 1 to control the entry and exit of the reaction gas. The reaction gas here is usually argon gas. After the coating chamber is evacuated, the valve is turned to allow the reaction gas to enter from the air inlet pipe 1, then into the connecting pipe 2, and then out from the several first air outlets 201. The plug 202 seals one end of the air inlet pipe 1, preventing the gas from flowing directly along the axial direction of the connecting pipe 2, and forcing the gas to exit from the first air outlets 201 on the side wall.

[0029] A distribution component 3 is installed around the periphery of the connecting pipe 2. The distribution component 3 includes a housing 301, which is fixedly installed to the outer wall of the connecting pipe 2. A plurality of second vent holes 302 are evenly and symmetrically distributed at the bottom of the housing 301. An inner shell 303 is installed inside the housing 301. The connecting pipe 2 penetrates the back of the housing 301 and the inner shell 303 and extends to the front. A plurality of first vent holes 201 are located inside the inner shell 303. Vents 304 are provided at both ends of the inner shell 303.

[0030] The inner shell 303 encloses several first vent holes 201 on several connecting pipes 2. The reactant gas, originally ejected at high speed from above and below the first vent holes 201, is buffered by the upper and lower ends of the inner shell 303, allowing it to diffuse more quickly throughout the entire cavity of the inner shell 303. This converts the gas's kinetic energy into pressure energy, causing the gas to diffuse rapidly within the inner shell 303, forming a preliminary uniform pressure space. The flowing gas exits through the flow paths of the two vent holes 304, then impacts the inner walls on the left and right sides of the outer shell 301, before diffusing again throughout the entire cavity of the outer shell 301, resulting in further kinetic energy dissipation. The flow rate is reduced and the diffusion effect is enhanced. Then, the gas is discharged from several symmetrical second vent holes 302. After multiple stages of buffering and diffusion, the gas can be evenly distributed into the inner cavity of the outer shell 301. Then, the gas is evenly discharged from several symmetrically distributed second vent holes 302 at the bottom of the outer shell 301 and enters the coating chamber. Thus, the gas is discharged from multiple second vent holes 302 at the same time, covering a wider area and filling the entire coating chamber faster and more evenly. In addition, this solution ensures a more balanced concentration distribution of the reaction gas in the chamber by evenly venting through several second vent holes 302, thereby increasing the uniformity of the coating thickness.

[0031] A mounting mechanism 4 is installed around the periphery of several of the outer shells 301. The mounting mechanism 4 is used to install several equally distributed components 3 onto the top of the inner wall of the coating chamber.

[0032] In one embodiment, for the aforementioned housing 301, the two adjacent sets of housings 301 are fixedly connected, and each housing 301 is connected by welding.

[0033] In one embodiment, for the aforementioned first vent 201, a plurality of the first vent 201 are arranged in a linear array along the connecting pipe 2.

[0034] The first vent 201, distributed in a linear array, acts as a primary gas distributor, capable of uniformly spraying the reaction gas onto the upper and lower ends of the inner wall of the inner shell 303, and rapidly and evenly distributing it throughout the entire inner cavity of the inner shell 303.

[0035] In one embodiment, the air outlet 304 is elongated, and its length is greater than the total length formed by a plurality of linearly distributed second air outlets 302.

[0036] This allows the gas flowing out of the inner shell 303 to first diffuse along the elongated opening before entering the outer shell 301. The length of the outlet 304 is greater than the total distribution length of the second outlet 302, which ensures that the gas fully expands before entering the outer shell 301, reducing the unevenness of the subsequent flow.

[0037] In one embodiment, the mounting mechanism 4 includes two connecting frames 401, which are respectively fixedly installed on the upper and lower sides of a plurality of housings 301, and two connecting rods 402 are fixedly installed between the two connecting frames 401.

[0038] Two mounting plates 403 are fixedly installed on opposite sides of one of the two connecting brackets 401, and each mounting plate 403 is equipped with bolts 404.

[0039] The connecting frame 401 is fixed to the top and bottom of all the housings 301 by welding. Two connecting rods 402 connect the two connecting frames 401. The mounting plate 403 is also fixed to the connecting frame 401 located above by welding. Then, multiple bolts 404 can be used to fix the mounting plate 403 to the top of the inner wall of the coating chamber, thereby fixing multiple evenly distributed components 3 to the top of the inner wall of the coating chamber.

[0040] Working principle: The reactant gas enters the connecting pipe 2 from the inlet pipe 1 and is discharged from several first outlet holes 201 distributed in a linear array. The reactant gas is evenly sprayed onto the upper and lower ends of the inner wall of the inner shell 303 and is quickly and evenly distributed into the inner cavity of the inner shell 303. The upper and lower ends of the inner shell 303 are used to buffer and diffuse the reactant gas sprayed at high speed from the first outlet holes 201, so that the kinetic energy of the gas is converted into pressure energy, forming a preliminary uniform pressure space.

[0041] Subsequently, the reactive gas flows out from the elongated outlets at both ends of the inner shell 303, which are longer than the total length of the second vent holes 302. This ensures that the reactive gas fully expands before entering the outer shell 301. The gas flowing out of the inner shell 303 impacts the inner walls on both sides of the outer shell 301, causing kinetic energy dissipation again, further reducing the flow rate and enhancing the diffusion effect. This allows the gas to be evenly distributed throughout the entire inner cavity of the outer shell 301, and finally evenly discharged from several symmetrically distributed second vent holes 302 at the bottom of the outer shell 301, entering the coating chamber. The simultaneous exhaust from multiple second vent holes 302 provides a wider coverage area, enabling faster and more even filling of the entire coating chamber, ensuring a more balanced concentration distribution of the reactive gas within the chamber.

[0042] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0043] The preferred embodiments of the utility model disclosed above are merely illustrative of the utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the utility model, thereby enabling those skilled in the art to better understand and utilize it. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A device for homogenizing airflow in a coating chamber to achieve uniform coating, comprising a plurality of air inlet pipes (1), characterized in that: Each of the air intake pipes (1) is connected to a connecting pipe (2), and several first air outlets (201) are opened above and below the connecting pipe (2). A plug (202) is installed at the end of the connecting pipe (2) away from the air intake pipe (1). The connecting pipe (2) is surrounded by a distribution component (3). The distribution component (3) includes a shell (301). The shell (301) is fixedly installed on the outer wall of the connecting pipe (2). The bottom of the shell (301) is evenly and symmetrically provided with a plurality of second air outlets (302). The plurality of second air outlets (302) are linearly distributed. The inner shell (303) is installed in the inner cavity of the shell (301). The connecting pipe (2) passes through the back of the shell (301) and the inner shell (303) and extends to the front. The plurality of first air outlets (201) are all located in the inner cavity of the inner shell (303). Air outlets (304) are provided at both the left and right ends of the inner shell (303). A mounting mechanism (4) is installed around the periphery of several of the said housings (301).

2. The device for homogenizing the airflow in a coating chamber to achieve uniform coating as described in claim 1, characterized in that, The two adjacent sets of outer shells (301) are fixedly connected.

3. The device for homogenizing the airflow in a coating chamber to achieve uniform coating as described in claim 1, characterized in that, Several of the first air outlets (201) are arranged in a linear array along the connecting pipe (2).

4. The device for homogenizing the airflow in a coating chamber to achieve uniform coating as described in claim 1, characterized in that, The air outlet (304) is elongated, and the length of the air outlet (304) is greater than the total length formed by a plurality of linearly distributed second air outlets (302).

5. The device for homogenizing the airflow in a coating chamber to achieve uniform coating as described in claim 1, characterized in that, The installation mechanism (4) includes two connecting frames (401), which are fixedly installed on the upper and lower sides of a plurality of housings (301), and two connecting rods (402) are fixedly installed between the two connecting frames (401).

6. The device for homogenizing the airflow in a coating chamber to achieve uniform coating as described in claim 5, characterized in that, Two mounting plates (403) are fixedly installed on opposite sides of one of the two connecting brackets (401), and each mounting plate (403) is equipped with bolts (404).

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