A liquid pressure assisted sealing structure for a tee flow control device

Abstract

The utility model relates to the field of three -way flow control device, including a kind of for three -way flow control device liquid pressure auxiliary sealing structure, including shell, the top center and bottom center of shell are equipped with first liquid flow recess and second liquid flow recess respectively, the center of shell is equipped with main flow channel, and main flow channel two ends are respectively communicated with first liquid flow recess and second liquid flow recess, the side wall of shell is equipped with with main flow channel intercommunication fluid inlet, with first liquid flow recess intercommunication first fluid outlet and with second liquid flow recess intercommunication second fluid outlet, this sealing structure can accurately control the intercommunication state between main flow channel and first / second liquid flow recess by first sealing head and second sealing head on shaft body.This design ensures the quick switching and accurate control of liquid flow direction, meets the high-precision requirement of three-way flow control device for fluid distribution and switching.

Description

Technical Field

[0001] This utility model relates to the field of sealing technology for three-way flow control devices, specifically a liquid pressure-assisted sealing structure for three-way flow control devices. Background Technology

[0002] Three-way flow control devices are commonly used in semiconductor equipment to switch the direction of liquid flow. They are used with fluids such as pure water, acid, alkali, and organic liquids, which place high demands on corrosion resistance, pressure resistance, and sealing performance. Common chemical diaphragm valves have a large requirement for sealing force. The existing sealing structure of three-way flow control devices has only one shaft a and adopts a single-sided sealing structure. It relies solely on the pressure of the actuator for sealing force, which is relatively small. Sometimes leakage occurs, causing production accidents and resulting in resource waste.

[0003] Therefore, it is necessary to provide a liquid pressure auxiliary sealing structure for a three-way flow control device to solve the above-mentioned technical problems. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a liquid pressure auxiliary sealing structure for a three-way flow control device.

[0005] This utility model provides a liquid pressure auxiliary sealing structure for a three-way flow control device, including a housing. The top center and bottom center of the housing are respectively provided with a first liquid flow groove and a second liquid flow groove. The center of the housing is provided with a main flow channel, and the two ends of the main flow channel are respectively connected to the first liquid flow groove and the second liquid flow groove. The side wall of the housing is provided with a fluid inlet connected to the main flow channel, a first fluid outlet connected to the first liquid flow groove, and a second fluid outlet connected to the second liquid flow groove.

[0006] A shaft connected to a motion actuator is installed inside the main channel. Both ends of the shaft are located outside the housing. A first sealing head and a second sealing head are fixed on the shaft. Both ends of the main channel are provided with sealing surfaces, and the first and second sealing heads cooperate with the sealing surfaces. When the first sealing head contacts the sealing surface at one end of the main channel, the flow of the main channel and the first liquid through the groove are blocked. When the second sealing head contacts the sealing surface at the other end of the main channel, the flow of the main channel and the second liquid through the groove are blocked. A first diaphragm and a second mold are installed on the shaft. A first sealing ring and a second sealing ring are respectively installed at the edges of the first diaphragm and the second mold. Sealing grooves are provided at the top and bottom of the housing, and the first and second sealing rings are installed in the corresponding sealing grooves.

[0007] Preferably, the shaft body includes a first sealing shaft and a second sealing shaft. The first sealing shaft includes a first connecting shaft portion, and the second sealing shaft includes a second connecting shaft portion. One end of the first connecting shaft portion is provided with an external thread end, and one end of the second connecting shaft portion is provided with an internal thread groove that connects to the external thread end. The threaded connection facilitates assembly.

[0008] Preferably, the first connecting shaft and the first sealing head are integrally formed, and the second connecting shaft and the second sealing head are integrally formed, resulting in high strength.

[0009] Preferably, both the first sealing head and the second sealing head are rotating bodies, and the first liquid flow groove, the second liquid flow groove, and the main channel are all cylindrical, which facilitates smoother liquid flow during processing.

[0010] Preferably, the fluid inlet is positioned directly opposite the center of the main flow channel to ensure uniform fluid entry.

[0011] Sealing head operation:

[0012] First sealing head closure: When the shaft is driven upward by a motion actuator such as a solenoid valve or cylinder, the first sealing head contacts the top sealing surface, blocking the connection between the main flow channel and the top first liquid flow groove, forcing the fluid to flow from the fluid inlet to the bottom second liquid flow groove, and then out through the second fluid outlet.

[0013] Second sealing head closure: When the shaft moves down, the second sealing head closes the bottom sealing surface, and the fluid is diverted to the top. The first liquid flows through the groove and flows out through the first fluid outlet.

[0014] Compared with related technologies, the present invention provides the following beneficial effects:

[0015] This sealing structure uses an integrated shaft to form a linked sealing structure with the first diaphragm, the second diaphragm, and the shaft. Combined with the first and second sealing heads on the shaft, the fluid pressure increases the sealing force of the diaphragm and sealing heads, thereby precisely controlling the connection between the main flow channel and the first / second liquid flow groove. This design ensures rapid switching and precise control of the liquid flow direction, meeting the high-precision requirements of three-way flow control devices for fluid diversion and switching. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the sealing structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the first connecting shaft part of this utility model;

[0018] Figure 3 This is a schematic diagram of the second connecting shaft of the present invention;

[0019] Figure 4 This is a cross-sectional view of one of the shells of this utility model;

[0020] Figure 5 This is another cross-sectional view of the housing of this utility model;

[0021] Figure 6 This is a schematic diagram of one of the working states of this utility model;

[0022] Figure 7 This is a schematic diagram of another working state of the present invention;

[0023] Figure 8 A schematic diagram of the existing product structure presented in the background technology.

[0024] In the diagram, the following labels are used: a) Shaft body; 1) First sealing shaft; 11) First connecting shaft portion; 12) First diaphragm body; 13) First sealing ring; 14) First sealing head; 15) External thread end; 2) Second sealing shaft; 21) Second connecting shaft portion; 22) Second diaphragm body; 23) Second sealing ring; 24) Second sealing head; 25) Internal thread groove; 3) Housing; 31) First fluid outlet; 32) Fluid inlet; 33) Second fluid outlet; 34) Sealing groove; 35) Sealing surface; 36) First liquid flow groove; 37) Second liquid flow groove; 38) Main flow channel. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0026] Please refer to 1- Figure 8 A liquid pressure auxiliary sealing structure for a three-way flow control device

[0027] This sealing structure mainly includes a housing 3, with a first liquid flow groove 36 and a second liquid flow groove 37 respectively located at the top center and bottom center of the housing 3. A main flow channel 38 is provided at the center of the housing 3, with both ends of the main flow channel 38 connected to the first liquid flow groove 36 and the second liquid flow groove 37 respectively. On the side wall of the housing 3, a fluid inlet 32, a first fluid outlet 31, and a second fluid outlet 33 are provided, wherein the fluid inlet 32 ​​is connected to the main flow channel 38, the first fluid outlet 31 is connected to the first liquid flow groove 36, and the second fluid outlet 33 is connected to the second liquid flow groove 37.

[0028] Within the main flow channel 38, a shaft a is installed, connected to a motion actuator (such as a solenoid valve, cylinder, etc., not shown in the figure). Both ends of the shaft a extend to the outside of the housing 3 to facilitate connection and drive with external motion actuators. A first sealing head 14 and a second sealing head 24 are fixedly installed on the shaft a. Sealing surfaces 35 are provided at both ends of the main flow channel 38. When the first sealing head 14 is in close contact with the sealing surface 35 at one end of the main flow channel 38, the connection between the main flow channel 38 and the first liquid flow groove 36 is blocked; when the second sealing head 24 is in close contact with the sealing surface 35 at the other end of the main flow channel 38, the connection between the main flow channel 38 and the second liquid flow groove 37 is blocked.

[0029] In addition, a first diaphragm 12 and a second diaphragm 22 are also installed on the shaft a. A first sealing ring 13 and a second sealing ring 23 are respectively installed at the edges of the first diaphragm 12 and the second diaphragm 22. Sealing grooves 34 are provided at both the top and bottom of the housing 3. The first sealing ring 13 and the second sealing ring 23 are respectively installed in their corresponding sealing grooves 34 to ensure a sealing effect.

[0030] Detailed structure of shaft a

[0031] Shaft a includes a first sealing shaft 1 and a second sealing shaft 2. The first sealing shaft 1 includes a first connecting shaft portion 11, and the second sealing shaft 2 includes a second connecting shaft portion 21. An external threaded end 15 is provided at one end of the first connecting shaft portion 11; an internal threaded groove 25 matching the external threaded end 15 is provided at one end of the second connecting shaft portion 21. This threaded connection method allows for easy assembly of the first connecting shaft portion 11 and the second connecting shaft portion 21 together.

[0032] Connection relationship between sealing head and shaft a

[0033] The first connecting shaft portion 11 and the first sealing head 14 are manufactured as a single piece, which provides high strength. Similarly, the second connecting shaft portion 21 and the second sealing head 24 are also manufactured as a single piece. Both the first sealing head 14 and the second sealing head 24 are in the shape of a rotating body, which facilitates machining and provides good sealing performance. The first liquid flow groove 36, the second liquid flow groove 37, and the main flow channel 38 are all cylindrical, a design that allows for smoother liquid flow.

[0034] Position setting of fluid inlet 32

[0035] The fluid inlet 32 ​​is positioned directly opposite the center of the main flow channel 38. This arrangement ensures that the fluid is evenly distributed upon entering the main flow channel 38, thereby improving the stability and efficiency of the fluid flow.

[0036] Sealing head operation process

[0037] Closing process of the first sealing head 14

[0038] When shaft a is driven upward by a motion actuator (such as a solenoid valve, cylinder, etc.), the first sealing head 14 gradually approaches and eventually contacts the sealing surface 35 at the top of the main flow channel 38. With the tight contact between the first sealing head 14 and the sealing surface 35, the connection between the main flow channel 38 and the top first liquid flow groove 36 is completely blocked. At this time, the fluid cannot flow from the main flow channel 38 to the top first liquid flow groove 36, but is forced to flow from the fluid inlet 32 ​​to the bottom second liquid flow groove 37, and finally flows out through the second fluid outlet 33.

[0039] The closing process of the second sealing head 24

[0040] As shaft a moves downwards driven by the actuator, the second sealing head 24 gradually approaches and eventually contacts the sealing surface 35 at the bottom of the main flow channel 38. With the tight contact between the second sealing head 24 and the sealing surface 35, the connection between the main flow channel 38 and the bottom second liquid flow groove 37 is completely blocked. At this time, the fluid cannot flow from the main flow channel 38 to the bottom second liquid flow groove 37, but instead flows to the top first liquid flow groove 36 and finally exits through the first fluid outlet 31.

[0041] by Figure 6 Taking working state 1 as an example. During operation, the first diaphragm 12 is pressed against the sealing surface 35 by the external motion mechanism, and water flows in from the inlet 32 ​​and out from the outlet 31. Because the diaphragm is flexible, that is, the diaphragm's 12th and 22th sidewalls have... It is flexible, and the first sealing shaft 1 and the second sealing shaft 2 are connected by thread 15. Internal thread groove 25 generals First diaphragm 12. Second diaphragm 22 A rigid connection is established, treating the two diaphragms and shaft a as a single moving unit. When the internal flow channel has a certain water pressure, the static pressure of the water cancels out the pressure of the diaphragm in the vertical direction of the central flow channel. The side wall of the diaphragm 12 in the vertical direction is subjected to water pressure, which drives the diaphragm to be subjected to upward force, increasing the force on the sealing surface 35, thereby increasing the sealing specific pressure and improving the sealing performance of the first diaphragm 12.

[0042] For seals with a circumferential sealing surface, the relevant calculations for sealing performance are as follows:

[0043] The required sealing force F on the sealing surface MF =π×(D MN +b M )×b M ×q FM

[0044] The dielectric force F of a typical diaphragm MJ =π×( D MN +b M ) 2 ×p / 4

[0045] Where: p is the medium pressure, D MN It is the inner diameter of the sealing surface, b M It is the width of the sealing surface, q FM The sealing surface must be under pressure; specific values ​​can be found in tables based on the specific material. FM

[0046] Diaphragm sealing required minimum force F MZ =F MF +F MJ =π×(D MN +b M )×b M ×q FM +π×( D MN +b M ) 2 ×p / 4

[0047] In this design, the medium force F MJ =π×[D d 2 -( D MN +b M ) 2 ×p / 4

[0048] Among them, D d It is the equivalent inner diameter of the freely movable sidewall of the diaphragm.

[0049] The diaphragm seal required for this design minimum force F MZ =F MF +F MJ =π×(D MN +b M )×b M ×q FM -π×[D d 2 -( D MN +b M ) 2 ×p / 4

[0050] The diaphragm seal required for this design The minimum force has decreased.

[0051] Clearly, this design transforms the force exerted by the medium into an auxiliary sealing force, which reduces the required sealing force and improves sealing performance.

[0052] All parts in contact with liquids are made of high-purity fluorine resin, which has good corrosion resistance to various liquids and causes less contamination to the fluid.

[0053] Using liquid pressure to assist in sealing improves the sealing performance during operation.

[0054] By utilizing the force of the medium to transform it into the force of the auxiliary seal, the pressure requirement on the diaphragm motion actuator is reduced, which helps to extend the service life of the motion actuator.

[0055] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A liquid pressure assisted seal structure for a tee flow control device, comprising: The housing (3) includes a shell, a first liquid flow groove (36) and a second liquid flow groove (37) respectively provided at the top center and bottom center of the shell (3), a main flow channel (38) is provided at the center of the shell (3), and the two ends of the main flow channel (38) are respectively connected to the first liquid flow groove (36) and the second liquid flow groove (37). The side wall of the shell (3) is provided with a fluid inlet (32) connected to the main flow channel (38), a first fluid outlet (31) connected to the first liquid flow groove (36) and a second fluid outlet (33) connected to the second liquid flow groove (37). A shaft (a) connected to a motion actuator is installed inside the main channel (38). Both ends of the shaft (a) are located outside the housing (3). A first sealing head (14) and a second sealing head (24) are fixed on the shaft (a). Both ends of the main channel (38) are provided with sealing surfaces (35), and the first sealing head (14) and the second sealing head (24) cooperate with the sealing surfaces (35). When the first sealing head (14) contacts and cooperates with the sealing surface (35) at one end of the main channel (38), the main channel (38) is blocked from the first liquid flowing through the groove (36). When the second sealing head (24) contacts and engages with the sealing surface (35) at the other end of the main channel (38), the main channel (38) and the second liquid flow groove (37) are blocked. The shaft (a) is equipped with a first membrane (12) and a second mold (22). The edges of the first membrane (12) and the second mold (22) are respectively equipped with a first sealing ring (13) and a second sealing ring (23). The top and bottom of the housing (3) are provided with sealing grooves (34), and the first sealing ring (13) and the second sealing ring (23) are installed in the corresponding sealing grooves (34).

2. The liquid pressure assisted seal for a three-way flow control device of claim 1, wherein, The shaft (a) includes a first sealing shaft (1) and a second sealing shaft (2). The first sealing shaft (1) includes a first connecting shaft portion (11), and the second sealing shaft (2) includes a second connecting shaft portion (21). One end of the first connecting shaft portion (11) is provided with an external thread end (15), and one end of the second connecting shaft portion (21) is provided with an internal thread groove (25) that connects to the external thread end (15).

3. The liquid pressure assisted seal for a three-way flow control device of claim 2, wherein, The first connecting shaft (11) and the first sealing head (14) are integral structures, and the second connecting shaft (21) and the second sealing head (24) are integral structures.

4. The liquid pressure assisted seal for a three-way flow control device of claim 2, wherein, The first sealing head (14) and the second sealing head (24) are both rotating bodies, and the first liquid flow groove (36), the second liquid flow groove (37), and the main flow channel (38) are all cylindrical.

5. The liquid pressure assisted seal for a tee flow control device of claim 1, wherein, The fluid inlet (32) is located at the center of the main channel (38).

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